FR3112172B1 - Pompe à vide sèche - Google Patents

Pompe à vide sèche Download PDF

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Publication number
FR3112172B1
FR3112172B1 FR2012398A FR2012398A FR3112172B1 FR 3112172 B1 FR3112172 B1 FR 3112172B1 FR 2012398 A FR2012398 A FR 2012398A FR 2012398 A FR2012398 A FR 2012398A FR 3112172 B1 FR3112172 B1 FR 3112172B1
Authority
FR
France
Prior art keywords
vacuum pump
dry vacuum
rotors
pumping stage
dry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2012398A
Other languages
English (en)
Other versions
FR3112172A1 (fr
Inventor
Thierry Neel
Lucas Rey
Laurent Bizet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to FR2012398A priority Critical patent/FR3112172B1/fr
Priority to TW110141842A priority patent/TW202225563A/zh
Priority to JP2023532464A priority patent/JP2023552328A/ja
Priority to PCT/EP2021/082644 priority patent/WO2022112229A1/fr
Priority to CZ2023-204A priority patent/CZ2023204A3/cs
Publication of FR3112172A1 publication Critical patent/FR3112172A1/fr
Application granted granted Critical
Publication of FR3112172B1 publication Critical patent/FR3112172B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02—Arrangements of bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F04C2240/54—Hydrostatic or hydrodynamic bearing assemblies specially adapted for rotary positive displacement pumps or compressors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Sliding-Contact Bearings (AREA)

Abstract

Pompe à vide (1) sèche comportant  au moins un étage de pompage (3a-3e), deux rotors (7) configurés pour tourner dans le au moins un étage de pompage (3a-3e), les rotors (7) étant configurés pour être entrainés en rotation par au moins un moteur (9) de la pompe à vide (1), caractérisée en ce que la pompe à vide (1) comporte également au moins une paire de double paliers (13a, 13b) comportant respectivement au moins un palier magnétique à aimants permanents (14a, 14b) et au moins un palier lisse (15a, 15b) pour supporter chacun des deux rotors (7). Figure d’abrégé : Figure 1
FR2012398A 2020-11-30 2020-11-30 Pompe à vide sèche Active FR3112172B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR2012398A FR3112172B1 (fr) 2020-11-30 2020-11-30 Pompe à vide sèche
TW110141842A TW202225563A (zh) 2020-11-30 2021-11-10 乾式真空泵
JP2023532464A JP2023552328A (ja) 2020-11-30 2021-11-23 ドライ真空ポンプ
PCT/EP2021/082644 WO2022112229A1 (fr) 2020-11-30 2021-11-23 Pompe à vide sèche
CZ2023-204A CZ2023204A3 (cs) 2020-11-30 2021-11-23 Suché vakuové čerpadlo

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2012398 2020-11-30
FR2012398A FR3112172B1 (fr) 2020-11-30 2020-11-30 Pompe à vide sèche

Publications (2)

Publication Number Publication Date
FR3112172A1 FR3112172A1 (fr) 2022-01-07
FR3112172B1 true FR3112172B1 (fr) 2023-03-17

Family

ID=74206056

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2012398A Active FR3112172B1 (fr) 2020-11-30 2020-11-30 Pompe à vide sèche

Country Status (5)

Country Link
JP (1) JP2023552328A (fr)
CZ (1) CZ2023204A3 (fr)
FR (1) FR3112172B1 (fr)
TW (1) TW202225563A (fr)
WO (1) WO2022112229A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3141219A1 (fr) * 2022-10-24 2024-04-26 Pfeiffer Vacuum Groupe de pompage

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3046533B2 (ja) * 1995-10-11 2000-05-29 株式会社荏原製作所 軸受ユニット
DE19820622A1 (de) * 1998-05-09 1999-11-11 Peter Frieden Demontierbare Vielzweckpumpe oder -kompressor für Chemie-, Verfahrens-, Lebensmittel- und Vakuumtechnik
US8104298B2 (en) * 2005-12-06 2012-01-31 Carrier Corporation Lubrication system for touchdown bearings of a magnetic bearing compressor
DE102008031994B4 (de) * 2008-04-29 2011-07-07 Siemens Aktiengesellschaft, 80333 Fluidenergiemaschine
DE102008035891A1 (de) * 2008-07-31 2010-02-04 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102009055888A1 (de) * 2009-11-26 2011-06-01 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
FR3112172A1 (fr) 2022-01-07
CZ2023204A3 (cs) 2023-06-21
TW202225563A (zh) 2022-07-01
WO2022112229A1 (fr) 2022-06-02
JP2023552328A (ja) 2023-12-15

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