FR3109469B1 - Procédé de fabrication d’un dispositif émetteur de rayonnement - Google Patents
Procédé de fabrication d’un dispositif émetteur de rayonnement Download PDFInfo
- Publication number
- FR3109469B1 FR3109469B1 FR2003779A FR2003779A FR3109469B1 FR 3109469 B1 FR3109469 B1 FR 3109469B1 FR 2003779 A FR2003779 A FR 2003779A FR 2003779 A FR2003779 A FR 2003779A FR 3109469 B1 FR3109469 B1 FR 3109469B1
- Authority
- FR
- France
- Prior art keywords
- face
- manufacturing
- emitting device
- substrate
- radiation emitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0075—Processes for devices with an active region comprising only III-V compounds comprising nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0093—Wafer bonding; Removal of the growth substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/0004—Devices characterised by their operation
- H01L33/0008—Devices characterised by their operation having p-n or hi-lo junctions
- H01L33/0012—Devices characterised by their operation having p-n or hi-lo junctions p-i-n devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0091—Scattering means in or on the semiconductor body or semiconductor body package
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/08—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a plurality of light emitting regions, e.g. laterally discontinuous light emitting layer or photoluminescent region integrated within the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
Abstract
Procédé de fabrication d’un dispositif émetteur de rayonnement L’invention concerne un procédé de fabrication d’un dispositif émetteur (10) comportant des étapes de : - fourniture d’un substrat (70) réalisé en un matériau semi-conducteur présentant une première face (85) délimitant le substrat (70) selon une direction (N) normale à la première face (85), - implantation, à travers la première face (85), d’atomes aptes à former une portion fragilisée dans le substrat, le substrat (70) comportant en outre une portion de surface (92) et une portion interne (95), la portion fragilisée (90) séparant la portion de surface (92) de la portion interne (95) selon la direction normale (N), - formation, sur la première face (85), d’une diode électroluminescente (20), - fixation d’une face (150) de la diode (20) à une deuxième face (155) d’un support (15), et - rupture de la portion fragilisée (90) pour séparer la portion de surface (92) de la portion interne (95). Figure pour l'abrégé : 1
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR2003779A FR3109469B1 (fr) | 2020-04-15 | 2020-04-15 | Procédé de fabrication d’un dispositif émetteur de rayonnement |
EP21717112.3A EP4136681A1 (fr) | 2020-04-15 | 2021-04-13 | Procédé de fabrication d'un dispositif émetteur de rayonnement |
PCT/EP2021/059580 WO2021209460A1 (fr) | 2020-04-15 | 2021-04-13 | Procédé de fabrication d'un dispositif émetteur de rayonnement |
US17/996,240 US20230197885A1 (en) | 2020-04-15 | 2021-04-13 | Method for manufacturing a device for emitting radiation |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR2003779 | 2020-04-15 | ||
FR2003779A FR3109469B1 (fr) | 2020-04-15 | 2020-04-15 | Procédé de fabrication d’un dispositif émetteur de rayonnement |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3109469A1 FR3109469A1 (fr) | 2021-10-22 |
FR3109469B1 true FR3109469B1 (fr) | 2022-04-29 |
Family
ID=72178663
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR2003779A Active FR3109469B1 (fr) | 2020-04-15 | 2020-04-15 | Procédé de fabrication d’un dispositif émetteur de rayonnement |
Country Status (4)
Country | Link |
---|---|
US (1) | US20230197885A1 (fr) |
EP (1) | EP4136681A1 (fr) |
FR (1) | FR3109469B1 (fr) |
WO (1) | WO2021209460A1 (fr) |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI442456B (zh) * | 2004-08-31 | 2014-06-21 | Sophia School Corp | 發光元件 |
DE102004062290A1 (de) * | 2004-12-23 | 2006-07-06 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines Halbleiterchips |
DE102005052358A1 (de) * | 2005-09-01 | 2007-03-15 | Osram Opto Semiconductors Gmbh | Verfahren zum lateralen Zertrennen eines Halbleiterwafers und optoelektronisches Bauelement |
DE102005052357A1 (de) * | 2005-09-01 | 2007-03-15 | Osram Opto Semiconductors Gmbh | Verfahren zum lateralen Zertrennen eines Halbleiterwafers und optoelektronisches Bauelement |
US8163581B1 (en) * | 2010-10-13 | 2012-04-24 | Monolith IC 3D | Semiconductor and optoelectronic devices |
US8785294B2 (en) * | 2012-07-26 | 2014-07-22 | Gtat Corporation | Silicon carbide lamina |
CN110838463A (zh) * | 2018-08-17 | 2020-02-25 | 胡兵 | 一种半导体衬底、将衬底层与其上功能层分离的方法 |
CN107706086B (zh) * | 2017-07-31 | 2020-05-01 | 朱元勋 | 一种碳化硅衬底垂直结构簿膜电子器件及其制作方法 |
-
2020
- 2020-04-15 FR FR2003779A patent/FR3109469B1/fr active Active
-
2021
- 2021-04-13 WO PCT/EP2021/059580 patent/WO2021209460A1/fr unknown
- 2021-04-13 EP EP21717112.3A patent/EP4136681A1/fr active Pending
- 2021-04-13 US US17/996,240 patent/US20230197885A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
WO2021209460A1 (fr) | 2021-10-21 |
FR3109469A1 (fr) | 2021-10-22 |
US20230197885A1 (en) | 2023-06-22 |
EP4136681A1 (fr) | 2023-02-22 |
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Legal Events
Date | Code | Title | Description |
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PLFP | Fee payment |
Year of fee payment: 2 |
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PLSC | Publication of the preliminary search report |
Effective date: 20211022 |
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PLFP | Fee payment |
Year of fee payment: 3 |
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TQ | Partial transmission of property |
Owner name: UNIVERSITE GRENOBLE ALPES, FR Effective date: 20230227 Owner name: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERG, FR Effective date: 20230227 Owner name: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, FR Effective date: 20230227 |
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PLFP | Fee payment |
Year of fee payment: 4 |