FR3109147B1 - Procede de depot de couches minces - Google Patents

Procede de depot de couches minces Download PDF

Info

Publication number
FR3109147B1
FR3109147B1 FR2003544A FR2003544A FR3109147B1 FR 3109147 B1 FR3109147 B1 FR 3109147B1 FR 2003544 A FR2003544 A FR 2003544A FR 2003544 A FR2003544 A FR 2003544A FR 3109147 B1 FR3109147 B1 FR 3109147B1
Authority
FR
France
Prior art keywords
substrate
face
thin layer
deposit process
stack
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2003544A
Other languages
English (en)
Other versions
FR3109147A1 (fr
Inventor
Bastien Bruneau
Gilles Bokobza
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Original Assignee
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Glass France SAS, Compagnie de Saint Gobain SA filed Critical Saint Gobain Glass France SAS
Priority to FR2003544A priority Critical patent/FR3109147B1/fr
Priority to PCT/FR2021/050613 priority patent/WO2021205119A1/fr
Priority to EP21722525.9A priority patent/EP4132890A1/fr
Publication of FR3109147A1 publication Critical patent/FR3109147A1/fr
Application granted granted Critical
Publication of FR3109147B1 publication Critical patent/FR3109147B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3636—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing silicon, hydrogenated silicon or a silicide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3649—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3655—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing at least one conducting layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3681—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used in glazing, e.g. windows or windscreens
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Catalysts (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

L’invention concerne un procédé d’obtention d’un matériau comprenant un substrat revêtu d’un revêtement photocatalytique, ledit procédé comprenant : le dépôt sur une première face dudit substrat d’un empilement de couches minces comprenant successivement, à partir du substrat, une couche absorbante, une couche barrière en contact direct avec la couche absorbante, et une couche à base d’oxyde de titane en contact direct avec la couche barrière ; et le traitement thermique dudit substrat ainsi revêtu à l’aide d’un dispositif émettant un rayonnement possédant au moins une longueur d’onde de traitement entre 380 et 2500 nm, dans lequel chaque point de l’empilement est porté à une température d’au moins 300°C tout en maintenant une température inférieure ou égale à 150°C en tout point de la face dudit substrat opposée à ladite première face.
FR2003544A 2020-04-08 2020-04-08 Procede de depot de couches minces Active FR3109147B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR2003544A FR3109147B1 (fr) 2020-04-08 2020-04-08 Procede de depot de couches minces
PCT/FR2021/050613 WO2021205119A1 (fr) 2020-04-08 2021-04-07 Procede de depot de couches minces
EP21722525.9A EP4132890A1 (fr) 2020-04-08 2021-04-07 Procede de depot de couches minces

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2003544A FR3109147B1 (fr) 2020-04-08 2020-04-08 Procede de depot de couches minces
FR2003544 2020-04-08

Publications (2)

Publication Number Publication Date
FR3109147A1 FR3109147A1 (fr) 2021-10-15
FR3109147B1 true FR3109147B1 (fr) 2023-03-24

Family

ID=71094542

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2003544A Active FR3109147B1 (fr) 2020-04-08 2020-04-08 Procede de depot de couches minces

Country Status (1)

Country Link
FR (1) FR3109147B1 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2845774B1 (fr) * 2002-10-10 2005-01-07 Glaverbel Article reflechissant hydrophile
FR2929938B1 (fr) 2008-04-11 2010-05-07 Saint Gobain Procede de depot de couche mince.
FR2948037B1 (fr) * 2009-07-17 2012-12-28 Saint Gobain Materiau photocatalytique
FR2950878B1 (fr) 2009-10-01 2011-10-21 Saint Gobain Procede de depot de couche mince

Also Published As

Publication number Publication date
FR3109147A1 (fr) 2021-10-15

Similar Documents

Publication Publication Date Title
EP1012635B1 (fr) Procedes pour reduire la reflexion a partir de substrats optiques
US7772527B2 (en) Heat reflector and substrate processing apparatus comprising the same
TWI520179B (zh) 基於ＧａＮ材料之溫度控制
TWI745717B (zh) 用於半導體製程腔室的表面塗層的襯套組件
WO2010012890A4 (fr) Unite et procede de traitements de surface de verre plat avec conditionnement thermique du verre
TWI538079B (zh) 光學終點偵測系統
FR3109147B1 (fr) Procede de depot de couches minces
FR2732362A1 (fr) Poste pour l'application de revetement sur des substrats courbes, notamment des lentilles optiques ou ophtalmiques
CN113355646B (zh) 一种基于多源共蒸技术的薄膜监测制备装置及方法
FR3113672B1 (fr) Procede d’obtention d’un materiau revetu d’un revetement photocatalytique
EP0551737B1 (fr) Procédé de dépÔt en phase vapeur pour le revêtement d'articles manufacturés
Edlou et al. Optical and electrical properties of reactively sputtered TiN, ZrN, and HfN thin films
JPS63106703A (ja) 光学素子
JP2005500550A5 (fr)
JPH0253001A (ja) 軟ｘ線又は真空紫外線用多層膜の製造方法ならびに光学素子
FR3098215B1 (fr) Vitrage a double couche de tin pour controle solaire
JPH03174307A (ja) 酸化物超電導体の製造方法
FR3098985B1 (fr) Procédé de collage hydrophile de substrats
US20240208858A1 (en) Smooth Surface Diamond Composite Films
TWI822168B (zh) 多晶金屬薄膜光熱處理系統及其運作方法
JPH10116793A (ja) 半導体プロセスチャンバのリフレクタ
US10725209B2 (en) Broadband and omnidirectional polymer antireflection coatings
Cué-Sampedro et al. Research on UV attenuating nanocoatings on glass using PVD by sputtering
JP2024507912A (ja) 移動する基板の温度測定のための基板処理装置、および移動する基板の温度を測定する方法
CN118272784A (zh) 薄膜沉积装置及其气体喷淋头组件

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20211015

PLFP Fee payment

Year of fee payment: 3

PLFP Fee payment

Year of fee payment: 4

PLFP Fee payment

Year of fee payment: 5