FR3109147B1 - Procede de depot de couches minces - Google Patents
Procede de depot de couches minces Download PDFInfo
- Publication number
- FR3109147B1 FR3109147B1 FR2003544A FR2003544A FR3109147B1 FR 3109147 B1 FR3109147 B1 FR 3109147B1 FR 2003544 A FR2003544 A FR 2003544A FR 2003544 A FR2003544 A FR 2003544A FR 3109147 B1 FR3109147 B1 FR 3109147B1
- Authority
- FR
- France
- Prior art keywords
- substrate
- face
- thin layer
- deposit process
- stack
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title abstract 3
- 239000000758 substrate Substances 0.000 abstract 5
- 230000002745 absorbent Effects 0.000 abstract 2
- 239000002250 absorbent Substances 0.000 abstract 2
- 230000004888 barrier function Effects 0.000 abstract 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 230000001699 photocatalysis Effects 0.000 abstract 1
- 230000005855 radiation Effects 0.000 abstract 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3636—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing silicon, hydrogenated silicon or a silicide
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3649—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3655—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing at least one conducting layer
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3681—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used in glazing, e.g. windows or windscreens
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/32—After-treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Catalysts (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
L’invention concerne un procédé d’obtention d’un matériau comprenant un substrat revêtu d’un revêtement photocatalytique, ledit procédé comprenant : le dépôt sur une première face dudit substrat d’un empilement de couches minces comprenant successivement, à partir du substrat, une couche absorbante, une couche barrière en contact direct avec la couche absorbante, et une couche à base d’oxyde de titane en contact direct avec la couche barrière ; et le traitement thermique dudit substrat ainsi revêtu à l’aide d’un dispositif émettant un rayonnement possédant au moins une longueur d’onde de traitement entre 380 et 2500 nm, dans lequel chaque point de l’empilement est porté à une température d’au moins 300°C tout en maintenant une température inférieure ou égale à 150°C en tout point de la face dudit substrat opposée à ladite première face.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR2003544A FR3109147B1 (fr) | 2020-04-08 | 2020-04-08 | Procede de depot de couches minces |
PCT/FR2021/050613 WO2021205119A1 (fr) | 2020-04-08 | 2021-04-07 | Procede de depot de couches minces |
EP21722525.9A EP4132890A1 (fr) | 2020-04-08 | 2021-04-07 | Procede de depot de couches minces |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR2003544A FR3109147B1 (fr) | 2020-04-08 | 2020-04-08 | Procede de depot de couches minces |
FR2003544 | 2020-04-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3109147A1 FR3109147A1 (fr) | 2021-10-15 |
FR3109147B1 true FR3109147B1 (fr) | 2023-03-24 |
Family
ID=71094542
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR2003544A Active FR3109147B1 (fr) | 2020-04-08 | 2020-04-08 | Procede de depot de couches minces |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR3109147B1 (fr) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2845774B1 (fr) * | 2002-10-10 | 2005-01-07 | Glaverbel | Article reflechissant hydrophile |
FR2929938B1 (fr) | 2008-04-11 | 2010-05-07 | Saint Gobain | Procede de depot de couche mince. |
FR2948037B1 (fr) * | 2009-07-17 | 2012-12-28 | Saint Gobain | Materiau photocatalytique |
FR2950878B1 (fr) | 2009-10-01 | 2011-10-21 | Saint Gobain | Procede de depot de couche mince |
-
2020
- 2020-04-08 FR FR2003544A patent/FR3109147B1/fr active Active
Also Published As
Publication number | Publication date |
---|---|
FR3109147A1 (fr) | 2021-10-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1012635B1 (fr) | Procedes pour reduire la reflexion a partir de substrats optiques | |
US7772527B2 (en) | Heat reflector and substrate processing apparatus comprising the same | |
TWI520179B (zh) | 基於GaN材料之溫度控制 | |
TWI745717B (zh) | 用於半導體製程腔室的表面塗層的襯套組件 | |
WO2010012890A4 (fr) | Unite et procede de traitements de surface de verre plat avec conditionnement thermique du verre | |
TWI538079B (zh) | 光學終點偵測系統 | |
FR3109147B1 (fr) | Procede de depot de couches minces | |
FR3090622B1 (fr) | Vitrage de contrôle solaire comprenant deux couches à base de nitrure de titane | |
FR2732362A1 (fr) | Poste pour l'application de revetement sur des substrats courbes, notamment des lentilles optiques ou ophtalmiques | |
CN113355646B (zh) | 一种基于多源共蒸技术的薄膜监测制备装置及方法 | |
FR3113672B1 (fr) | Procede d’obtention d’un materiau revetu d’un revetement photocatalytique | |
EP0551737B1 (fr) | Procédé de dépÔt en phase vapeur pour le revêtement d'articles manufacturés | |
Edlou et al. | Optical and electrical properties of reactively sputtered TiN, ZrN, and HfN thin films | |
JPS63106703A (ja) | 光学素子 | |
JP2005500550A5 (fr) | ||
JP2692881B2 (ja) | 軟x線又は真空紫外線用多層膜の製造方法ならびに光学素子 | |
FR3098215B1 (fr) | Vitrage a double couche de tin pour controle solaire | |
US20240208858A1 (en) | Smooth Surface Diamond Composite Films | |
JPH10116793A (ja) | 半導体プロセスチャンバのリフレクタ | |
US11294102B2 (en) | Broadband and omnidirectional polymer antireflection coatings | |
Cué-Sampedro et al. | Research on UV attenuating nanocoatings on glass using PVD by sputtering | |
JP2001081548A (ja) | 成膜装置および成膜方法 | |
SMITH | Measurements of Optical Scatter Versus Annealing Temperature for Amorphous Ta2 O5 and TiO2: Ta2 O5 Thin Films | |
JP2024507912A (ja) | 移動する基板の温度測定のための基板処理装置、および移動する基板の温度を測定する方法 | |
Egland et al. | Kinetics and microstructure of laser chemical vapor deposition of titanium nitride |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 2 |
|
PLSC | Publication of the preliminary search report |
Effective date: 20211015 |
|
PLFP | Fee payment |
Year of fee payment: 3 |
|
PLFP | Fee payment |
Year of fee payment: 4 |
|
PLFP | Fee payment |
Year of fee payment: 5 |