FR3108784B1 - Dispositif à couplage de charges - Google Patents

Dispositif à couplage de charges Download PDF

Info

Publication number
FR3108784B1
FR3108784B1 FR2003147A FR2003147A FR3108784B1 FR 3108784 B1 FR3108784 B1 FR 3108784B1 FR 2003147 A FR2003147 A FR 2003147A FR 2003147 A FR2003147 A FR 2003147A FR 3108784 B1 FR3108784 B1 FR 3108784B1
Authority
FR
France
Prior art keywords
electrodes
coupled device
longitudinal
walls
charge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2003147A
Other languages
English (en)
Other versions
FR3108784A1 (fr
Inventor
Francois Roy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics Crolles 2 SAS
Original Assignee
STMicroelectronics Crolles 2 SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics Crolles 2 SAS filed Critical STMicroelectronics Crolles 2 SAS
Priority to FR2003147A priority Critical patent/FR3108784B1/fr
Priority to US17/199,779 priority patent/US11527570B2/en
Publication of FR3108784A1 publication Critical patent/FR3108784A1/fr
Application granted granted Critical
Publication of FR3108784B1 publication Critical patent/FR3108784B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/148—Charge coupled imagers
    • H01L27/14806—Structural or functional details thereof
    • H01L27/14812—Special geometry or disposition of pixel-elements, address lines or gate-electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/1463—Pixel isolation structures
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
    • H04N25/711—Time delay and integration [TDI] registers; TDI shift registers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/1464—Back illuminated imager structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/148—Charge coupled imagers
    • H01L27/14831—Area CCD imagers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)

Abstract

Dispositif à couplage de charges La présente description concerne un dispositif (100) à couplage de charges comprenant : un réseau d'électrodes isolées (123) pénétrant verticalement dans un substrat semiconducteur (101), le réseau comprenant des rangées d'électrodes longitudinales (123) et transversales alternées, chaque extrémité d'une électrodes longitudinale (123) d'une rangée étant en regard et séparée d'une portion d'une électrode transversale adjacentes de ladite rangée ; et des murs (126) d'isolation électrique parallèles entre eux et aux électrodes longitudinales, les murs (126) pénétrant verticalement dans le substrat (101) plus profondément que les électrodes longitudinales (123) et au moins deux rangées adjacentes d'électrodes (123) étant disposées entre chaque deux murs (126) successifs. Figure pour l'abrégé : Fig. 7
FR2003147A 2020-03-30 2020-03-30 Dispositif à couplage de charges Active FR3108784B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR2003147A FR3108784B1 (fr) 2020-03-30 2020-03-30 Dispositif à couplage de charges
US17/199,779 US11527570B2 (en) 2020-03-30 2021-03-12 Charge-coupled device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2003147 2020-03-30
FR2003147A FR3108784B1 (fr) 2020-03-30 2020-03-30 Dispositif à couplage de charges

Publications (2)

Publication Number Publication Date
FR3108784A1 FR3108784A1 (fr) 2021-10-01
FR3108784B1 true FR3108784B1 (fr) 2022-04-01

Family

ID=71094520

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2003147A Active FR3108784B1 (fr) 2020-03-30 2020-03-30 Dispositif à couplage de charges

Country Status (2)

Country Link
US (1) US11527570B2 (fr)
FR (1) FR3108784B1 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8600786A (nl) * 1986-03-27 1987-10-16 Philips Nv Ladingsgekoppelde inrichting.
US5055900A (en) * 1989-10-11 1991-10-08 The Trustees Of Columbia University In The City Of New York Trench-defined charge-coupled device
US6586784B1 (en) * 2002-10-02 2003-07-01 Eastman Kodak Company Accumulation mode clocking of a charge-coupled device
FR2947382B1 (fr) 2009-06-24 2011-09-09 St Microelectronics Crolles 2 Capteur d'images a transfert de charges a deux phases.

Also Published As

Publication number Publication date
FR3108784A1 (fr) 2021-10-01
US11527570B2 (en) 2022-12-13
US20210305311A1 (en) 2021-09-30

Similar Documents

Publication Publication Date Title
US20210098515A1 (en) Solid-state image pickup device
JP3200436B2 (ja) Ｃｃｄ撮像器及びその駆動方法
US4760273A (en) Solid-state image sensor with groove-situated transfer elements
KR860002151A (ko) 인터라인형 전하 전송 촬상 소자 및 촬상장치
US5675158A (en) Linear solid state imaging device with trapizoid type photodiodes
KR970054279A (ko) 고체촬상장치
JPH0381351B2 (fr)
EP0543946A1 (fr) Porte de transfert entre une photodiode et un detecteur d'images a dispositif a couplage de charge
US4647977A (en) Charge-coupled-device parallel-to-serial converter
EP0455801A1 (fr) Capteur d'images
FR3108784B1 (fr) Dispositif à couplage de charges
KR100217388B1 (ko) 전하결합장치
US4667213A (en) Charge-coupled device channel structure
KR910002243A (ko) 고체촬상소자의 구동방법
WO1990016083A1 (fr) Dispositif d'imagerie couplee en charge a structure anti-flou a doubles portes
US5892251A (en) Apparatus for transferring electric charges
US8847285B2 (en) Depleted charge-multiplying CCD image sensor
US8564051B2 (en) Power semiconductor device with buried source electrode
KR970054293A (ko) Ccd형 고체촬영소자, 이를 제조하는 방법 및 이를 구동하는 방법
JPS6425570A (en) Charge coupling device
JPS61144874A (ja) 電荷転送装置
KR940003601B1 (ko) 전하결합 소자형 이미지 센서
US5406101A (en) Horizontal charge coupled device
JPH06314780A (ja) 埋込みチャンネル型電荷結合装置イメージセンサ
JP2886016B2 (ja) 固体撮像装置

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20211001

PLFP Fee payment

Year of fee payment: 3

PLFP Fee payment

Year of fee payment: 4

PLFP Fee payment

Year of fee payment: 5