FR3100002B1 - Procédé pour décontaminer par laser pulsé une pièce métallique comprenant à sa surface une couche d’oxydes de métaux - Google Patents

Procédé pour décontaminer par laser pulsé une pièce métallique comprenant à sa surface une couche d’oxydes de métaux Download PDF

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Publication number
FR3100002B1
FR3100002B1 FR1909314A FR1909314A FR3100002B1 FR 3100002 B1 FR3100002 B1 FR 3100002B1 FR 1909314 A FR1909314 A FR 1909314A FR 1909314 A FR1909314 A FR 1909314A FR 3100002 B1 FR3100002 B1 FR 3100002B1
Authority
FR
France
Prior art keywords
decontaminating
layer
pulsed laser
metal oxides
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1909314A
Other languages
English (en)
Other versions
FR3100002A1 (fr
Inventor
Grégoire Auge
Gilles Segura
Julie Costagliola
Jean-Michel Chanussot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Onet Technologies CN SAS
Original Assignee
Onet Technologies CN SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Onet Technologies CN SAS filed Critical Onet Technologies CN SAS
Priority to FR1909314A priority Critical patent/FR3100002B1/fr
Publication of FR3100002A1 publication Critical patent/FR3100002A1/fr
Application granted granted Critical
Publication of FR3100002B1 publication Critical patent/FR3100002B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B23K26/048—Automatically focusing the laser beam by controlling the distance between laser head and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/16—Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21F—PROTECTION AGAINST X-RADIATION, GAMMA RADIATION, CORPUSCULAR RADIATION OR PARTICLE BOMBARDMENT; TREATING RADIOACTIVELY CONTAMINATED MATERIAL; DECONTAMINATION ARRANGEMENTS THEREFOR
    • G21F9/00—Treating radioactively contaminated material; Decontamination arrangements therefor
    • G21F9/001—Decontamination of contaminated objects, apparatus, clothes, food; Preventing contamination thereof
    • G21F9/005—Decontamination of the surface of objects by ablation

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Food Science & Technology (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Laser Beam Processing (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Laminated Bodies (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

Procédé pour décontaminer par laser pulsé une pièce métallique comprenant à sa surface une couche d’oxydes de métaux La présente demande est relative à un procédé pour décontaminer une pièce métallique comprenant à sa surface une couche d’oxydes de métaux, dans lequel on applique sur ladite surface, un faisceau de laser pulsé focalisé, de longueur d’ondes comprise entre 750 et 1600 nm, à une fréquence comprise entre 100 et 500 kHz, à une énergie par pulse comprise entre 0,4 et 1 mJ, avec une durée de pulse comprise entre 100 et 300 ns, et une fluence énergétique supérieure ou égale à 10 J/cm2. Elle concerne également un dispositif pour la mise en œuvre de ce procédé. Figure pour l’abrégé : Fig.1
FR1909314A 2019-08-21 2019-08-21 Procédé pour décontaminer par laser pulsé une pièce métallique comprenant à sa surface une couche d’oxydes de métaux Active FR3100002B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1909314A FR3100002B1 (fr) 2019-08-21 2019-08-21 Procédé pour décontaminer par laser pulsé une pièce métallique comprenant à sa surface une couche d’oxydes de métaux

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1909314A FR3100002B1 (fr) 2019-08-21 2019-08-21 Procédé pour décontaminer par laser pulsé une pièce métallique comprenant à sa surface une couche d’oxydes de métaux
FR1909314 2019-08-21

Publications (2)

Publication Number Publication Date
FR3100002A1 FR3100002A1 (fr) 2021-02-26
FR3100002B1 true FR3100002B1 (fr) 2021-11-19

Family

ID=69172884

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1909314A Active FR3100002B1 (fr) 2019-08-21 2019-08-21 Procédé pour décontaminer par laser pulsé une pièce métallique comprenant à sa surface une couche d’oxydes de métaux

Country Status (1)

Country Link
FR (1) FR3100002B1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022116782A1 (de) * 2022-07-05 2024-01-11 Glatt Gesellschaft Mit Beschränkter Haftung Reinigungslaseranordnung und Verfahren zur Entfernung einer asbesthaltige Materialien aufweisenden Deckschicht von metallischen Oberflächen
SI26408A (sl) * 2022-09-05 2024-03-29 ISKRA ISD d.o.o., Postopek za strukturiranje površine kovinskega obdelovanca in postopek za izdelavo hibridnega izdelka iz kovinskega obdelovanca in polimernega materiala

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1198482A (fr) 1982-04-14 1985-12-24 Thaddeus A. Wojcik Methode de decontamination au laser
FR2674983B1 (fr) 1991-04-05 1994-08-05 Framatome Sa Procede et equipement de travail au laser dans une zone contaminee d'une installation nucleaire.
FR2708877B1 (fr) * 1993-08-12 1995-11-03 Onet Procédé et dispositif de décontamination autocontrôlé de surfaces par laser.
JP3867103B2 (ja) * 2000-09-13 2007-01-10 浜松ホトニクス株式会社 半導体材料基板の切断方法
JP5500620B2 (ja) * 2009-04-28 2014-05-21 独立行政法人日本原子力研究開発機構 除染装置及び除染方法
WO2011056892A1 (fr) * 2009-11-03 2011-05-12 Applied Spectra, Inc. Procédé de diagnostic optique en temps réel d'une ablation laser et traitement par laser de matériaux stratifiés et structurés

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Publication number Publication date
FR3100002A1 (fr) 2021-02-26

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