FR3092409B1 - Procédé de réglage d’une station de mesure de la contamination moléculaire véhiculée par l’air et station de mesure - Google Patents

Procédé de réglage d’une station de mesure de la contamination moléculaire véhiculée par l’air et station de mesure Download PDF

Info

Publication number
FR3092409B1
FR3092409B1 FR1901091A FR1901091A FR3092409B1 FR 3092409 B1 FR3092409 B1 FR 3092409B1 FR 1901091 A FR1901091 A FR 1901091A FR 1901091 A FR1901091 A FR 1901091A FR 3092409 B1 FR3092409 B1 FR 3092409B1
Authority
FR
France
Prior art keywords
station
measuring
adjusting
molecular contamination
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1901091A
Other languages
English (en)
Other versions
FR3092409A1 (fr
Inventor
Julien Bounouar
Barillec Olivier Le
Nicolas Chapel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to FR1901091A priority Critical patent/FR3092409B1/fr
Priority to US17/425,061 priority patent/US11953484B2/en
Priority to PCT/EP2020/051539 priority patent/WO2020160910A1/fr
Priority to KR1020217024930A priority patent/KR20210124246A/ko
Priority to TW109103241A priority patent/TWI850327B/zh
Publication of FR3092409A1 publication Critical patent/FR3092409A1/fr
Application granted granted Critical
Publication of FR3092409B1 publication Critical patent/FR3092409B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0073—Control unit therefor
    • G01N33/0075—Control unit therefor for multiple spatially distributed sensors, e.g. for environmental monitoring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2226—Sampling from a closed space, e.g. food package, head space
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/24—Suction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/26—Devices for withdrawing samples in the gaseous state with provision for intake from several spaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0658—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged for the control of a single flow from a plurality of converging flows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/24—Suction devices
    • G01N2001/247—Syringes

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • Automation & Control Theory (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

Procédé de réglage d’une station de mesure de la contamination moléculaire véhiculée par l’air et station de mesure L’invention concerne un procédé de réglage (100) des conductances des restrictions contrôlables (C1-C16) d’une station de mesure (1) de la contamination moléculaire véhiculée par l’air. Le procédé de réglage (100) comporte : - une étape initiale d’identification (101), préalable à la réalisation d’une étape de mesure (103) de la contamination moléculaire véhiculée par l’air, au cours de laquelle on détermine la ligne de prélèvement (L1-L16) présentant la conductance la plus faible, et - une étape initiale de réglage de conductance (102) préalable à la réalisation de l’étape de mesure (103) et postérieure à l’étape initiale d’identification (101), au cours de laquelle on règle la conductance d’une restriction contrôlable pour qu’elle corresponde à la conductance la plus faible. La présente invention se rapporte également à une station de mesure (1). FIGURE : 1
FR1901091A 2019-02-05 2019-02-05 Procédé de réglage d’une station de mesure de la contamination moléculaire véhiculée par l’air et station de mesure Active FR3092409B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR1901091A FR3092409B1 (fr) 2019-02-05 2019-02-05 Procédé de réglage d’une station de mesure de la contamination moléculaire véhiculée par l’air et station de mesure
US17/425,061 US11953484B2 (en) 2019-02-05 2020-01-22 Method for setting an airborne molecular contamination measurement station, and measurement station
PCT/EP2020/051539 WO2020160910A1 (fr) 2019-02-05 2020-01-22 Procédé de réglage d'une station de mesure de la contamination moléculaire véhiculée par l'air et station de mesure
KR1020217024930A KR20210124246A (ko) 2019-02-05 2020-01-22 공기 중 분자 오염 측정 스테이션을 설정하기 위한 방법, 및 측정 스테이션
TW109103241A TWI850327B (zh) 2019-02-05 2020-02-03 用於設定空浮分子污染測量站之方法，及測量站

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1901091A FR3092409B1 (fr) 2019-02-05 2019-02-05 Procédé de réglage d’une station de mesure de la contamination moléculaire véhiculée par l’air et station de mesure
FR1901091 2019-02-05

Publications (2)

Publication Number Publication Date
FR3092409A1 FR3092409A1 (fr) 2020-08-07
FR3092409B1 true FR3092409B1 (fr) 2021-02-12

Family

ID=67107721

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1901091A Active FR3092409B1 (fr) 2019-02-05 2019-02-05 Procédé de réglage d’une station de mesure de la contamination moléculaire véhiculée par l’air et station de mesure

Country Status (4)

Country Link
US (1) US11953484B2 (fr)
KR (1) KR20210124246A (fr)
FR (1) FR3092409B1 (fr)
WO (1) WO2020160910A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3108981B1 (fr) * 2020-04-01 2022-04-01 Pfeiffer Vacuum Technology AG Station et procédé de mesure de la contamination moléculaire véhiculée par l’air
FR3141248A1 (fr) * 2022-10-24 2024-04-26 Pfeiffer Vacuum Station et procédé de mesure de la contamination moléculaire véhiculée par l’air

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10018991A1 (de) * 2000-04-17 2001-10-18 Linde Gas Ag Verfahren zur Meßgasanalyse
US7208123B2 (en) * 2002-06-24 2007-04-24 Particle Measuring Systems, Inc. Molecular contamination monitoring system and method
US7028563B2 (en) * 2004-04-05 2006-04-18 Systeme Analytique Inc. Fluid sampling system and method thereof
EP1856453B1 (fr) * 2005-03-10 2016-07-13 Aircuity Incorporated Regulation dynamique de ventilation a dilution dans des environnements critiques mono-passe
KR20140026811A (ko) * 2012-08-23 2014-03-06 대우조선해양 주식회사 밀폐구역내의 복합가스 멀티 측정시스템
GB201321932D0 (en) * 2013-12-11 2014-01-22 Wellstream Int Ltd Annulus Monitoring
US10948470B2 (en) * 2016-04-29 2021-03-16 TricornTech Taiwan System and method for in-line monitoring of airborne contamination and process health
US11460203B2 (en) * 2017-11-06 2022-10-04 Measured Air Performance, LLC Exhaust demand control system and methods

Also Published As

Publication number Publication date
US11953484B2 (en) 2024-04-09
WO2020160910A1 (fr) 2020-08-13
US20220099646A1 (en) 2022-03-31
TW202043726A (zh) 2020-12-01
KR20210124246A (ko) 2021-10-14
FR3092409A1 (fr) 2020-08-07

Similar Documents

Publication Publication Date Title
FR3092409B1 (fr) Procédé de réglage d’une station de mesure de la contamination moléculaire véhiculée par l’air et station de mesure
MY146877A (en) Laser processing method and laser processing apparatus
SG10201807224SA (en) Height detecting apparatur and laser processing apparatus
EP4243558A3 (fr) Procédé et dispositif de traitement de connexion entre un terminal et un réseau
ATE460247T1 (de) Laserbearbeitungsverfahren und -vorrichtung
ATE376290T1 (de) Verfahren und vorrichtung zur zeitabgleichung von mehreren basisstationen in einem cdma kommunikationssystem
EP1707298A4 (fr) Procede et dispositif de traitement laser
NO20021171L (no) Fremgangsmåte og innretning for fotoablasjon av cornea med en laserstråle
BR9507781A (pt) Aparelho de espectrometria raman capaz de medir e compensar variabilidade no aparelho e processo para obter o espectro raman padrao de uma amostra
KR102288196B1 (ko) 레이저 절단기의 자동초점 조절장치
EP3931826A4 (fr) Serveur prenant en charge la reconnaissance vocale d'un dispositif et procédé de fonctionnement du serveur
SE8105214L (sv) Sett och apparat for detektering av fokusleget for en laseranordning
EP3731134A4 (fr) Procédé et dispositif de reconnaissance d'empreinte digitale et dispositif de terminal
EP4273581A4 (fr) Procédé et système de mesure de distance par laser, procédé et système de mise au point, et dispositif d'analyse de mise au point automatique
EP3889797A4 (fr) Index de base de données et procédé, appareil et dispositif de traitement d'interrogation de base de données
SG10201802804WA (en) Condensing point position detecting method
DE60304727D1 (de) Chromatographie-verfahren und vorrichtung welche einen konzentrations-schritt integrieren
WO2020121239A3 (fr) Dispositif d'inspection optique de paraisons
MX2019001242A (es) Aparatos y métodos para alinear, inspeccionar y fabricar cuerpos de panal de cerámica.
EP4250807A4 (fr) Procédé et appareil de traitement de faisceau, et dispositif de communication
WO2004110711A3 (fr) Appareil de production de bouchons
FR1454880A (fr) Dispositif pour immobiliser une pièce sur une surface de travail
MX2022016010A (es) Metodo de asignacion aid para dispositivo multienlace y aparato relacionado.
CN104143495B (zh) 一种质谱仪核心部件的自动控制系统
ATE119094T1 (de) Ausbohrkopf.

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20200807

PLFP Fee payment

Year of fee payment: 3

PLFP Fee payment

Year of fee payment: 4

PLFP Fee payment

Year of fee payment: 5

PLFP Fee payment

Year of fee payment: 6