FR3085756B1 - Systeme de mesure de l'absorption d'un rayonnement laser d'un echantillon - Google Patents

Systeme de mesure de l'absorption d'un rayonnement laser d'un echantillon Download PDF

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Publication number
FR3085756B1
FR3085756B1 FR1858000A FR1858000A FR3085756B1 FR 3085756 B1 FR3085756 B1 FR 3085756B1 FR 1858000 A FR1858000 A FR 1858000A FR 1858000 A FR1858000 A FR 1858000A FR 3085756 B1 FR3085756 B1 FR 3085756B1
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Prior art keywords
sample
frequency
absorption
laser radiation
afm probe
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FR1858000A
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English (en)
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FR3085756A1 (fr
Inventor
Alexandre Dazzi
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Centre National de la Recherche Scientifique CNRS
Universite Paris Saclay
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite Paris Sud Paris 11
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Universite Paris Sud Paris 11 filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR1858000A priority Critical patent/FR3085756B1/fr
Priority to PCT/EP2019/073600 priority patent/WO2020049053A1/fr
Priority to US17/273,814 priority patent/US11237105B2/en
Priority to CN201980070967.8A priority patent/CN113056677A/zh
Priority to KR1020217010109A priority patent/KR20210104651A/ko
Priority to EP19761886.1A priority patent/EP3847464A1/fr
Publication of FR3085756A1 publication Critical patent/FR3085756A1/fr
Priority to US16/940,996 priority patent/US11215637B2/en
Priority to KR1020237004608A priority patent/KR20230035401A/ko
Priority to PCT/US2021/042461 priority patent/WO2022026253A1/fr
Priority to CN202180065218.3A priority patent/CN116249907A/zh
Priority to JP2023505989A priority patent/JP7487404B2/ja
Priority to EP21850499.1A priority patent/EP4189405A4/fr
Priority to TW110126974A priority patent/TWI844787B/zh
Application granted granted Critical
Publication of FR3085756B1 publication Critical patent/FR3085756B1/fr
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G01Q60/34—Tapping mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/36—DC mode
    • G01Q60/363—Contact-mode AFM

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  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

Système de mesure de l'absorption d'un rayonnement laser d'un échantillon avec une résolution spatiale nanométrique ou sub-nanométrique (10) comprenant : (i) une source laser impulsionnelle (2), adaptée pour émettre des impulsions à une longueur d'onde accordable et à une fréquence de répétition f et agencée de manière à illuminer une portion de l'échantillon de manière à induire une expansion thermique d'une région de la surface de l'échantillon (3); (ii) une sonde AFM comprenant une poutre (6) portant une pointe AFM (5) orientée suivant une direction dite verticale et agencée de manière à pouvoir être mise en contact avec la région de la surface de l'échantillon (3) d'un côté et maintenue mécaniquement d'un autre côté, la sonde AFM présentant un mode de résonnance mécanique à une fréquence fm ; et (iii) un détecteur (8) configuré pour mesurer l'amplitude des oscillations de la sonde AFM résultant de l'absorption du rayonnement laser par la région de la surface de l'échantillon (3), caractérisé en ce qu'il comprend également un système de translation piézo-électrique (21) adapté pour déplacer l'échantillon dans ladite direction verticale, le déplacement étant modulé à une fréquence fp, et en ce que le détecteur est configuré pour mesurer l'amplitude d'une composante de fréquence fm des oscillations de la sonde AFM, la fréquence fp étant choisie de telle sorte que fm soit une combinaison linéaire de fp et fl.
FR1858000A 2018-09-06 2018-09-06 Systeme de mesure de l'absorption d'un rayonnement laser d'un echantillon Active FR3085756B1 (fr)

Priority Applications (13)

Application Number Priority Date Filing Date Title
FR1858000A FR3085756B1 (fr) 2018-09-06 2018-09-06 Systeme de mesure de l'absorption d'un rayonnement laser d'un echantillon
PCT/EP2019/073600 WO2020049053A1 (fr) 2018-09-06 2019-09-04 Système de mesure de l'absorption d'un rayonnement laser d'un échantillon
US17/273,814 US11237105B2 (en) 2018-09-06 2019-09-04 System for measuring the absorption of a laser emission by a sample
CN201980070967.8A CN113056677A (zh) 2018-09-06 2019-09-04 用于测量样品对激光发射的吸收的系统
KR1020217010109A KR20210104651A (ko) 2018-09-06 2019-09-04 샘플에 의한 레이저 방출 흡수 측정 시스템
EP19761886.1A EP3847464A1 (fr) 2018-09-06 2019-09-04 Système de mesure de l'absorption d'un rayonnement laser d'un échantillon
US16/940,996 US11215637B2 (en) 2018-09-06 2020-07-28 Method and apparatus of atomic force microscope based infrared spectroscopy with controlled probing depth
KR1020237004608A KR20230035401A (ko) 2018-09-06 2021-07-21 제어된 프로빙 깊이를 갖는 원자력 현미경 기반 적외선 분광법의 방법 및 장치
PCT/US2021/042461 WO2022026253A1 (fr) 2018-09-06 2021-07-21 Procédé et appareil de spectroscopie infrarouge basée sur un microscope à force atomique à profondeur de sondage contrôlée
CN202180065218.3A CN116249907A (zh) 2018-09-06 2021-07-21 基于原子力显微镜的可控探测深度红外光谱的方法及装置
JP2023505989A JP7487404B2 (ja) 2018-09-06 2021-07-21 制御されたプロービング深さを有する原子間力顕微鏡ベースの赤外線分光法の方法及び装置
EP21850499.1A EP4189405A4 (fr) 2018-09-06 2021-07-21 Procédé et appareil de spectroscopie infrarouge basée sur un microscope à force atomique à profondeur de sondage contrôlée
TW110126974A TWI844787B (zh) 2018-09-06 2021-07-22 具有控制的探測深度的基於原子力顯微鏡的紅外線光譜的方法及設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1858000A FR3085756B1 (fr) 2018-09-06 2018-09-06 Systeme de mesure de l'absorption d'un rayonnement laser d'un echantillon

Publications (2)

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FR3085756A1 FR3085756A1 (fr) 2020-03-13
FR3085756B1 true FR3085756B1 (fr) 2023-05-26

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FR1858000A Active FR3085756B1 (fr) 2018-09-06 2018-09-06 Systeme de mesure de l'absorption d'un rayonnement laser d'un echantillon

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111912813B (zh) * 2020-07-13 2023-07-18 中国科学院上海硅酸盐研究所 一种纳米热红外显微术装置
CN114155219B (zh) * 2021-11-30 2024-05-14 东北林业大学 基于afm敲击加工轨迹测压电剪切叠堆高频运动位移的方法
US20240125692A1 (en) * 2022-06-01 2024-04-18 The Penn State Research Foundation Super-resolution thermoreflectance thermal measurement system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8001830B2 (en) 2007-05-15 2011-08-23 Anasys Instruments, Inc. High frequency deflection measurement of IR absorption
US8680467B2 (en) 2007-05-15 2014-03-25 Anasys Instruments Corp. High frequency deflection measurement of IR absorption with a modulated IR source
US10845382B2 (en) * 2016-08-22 2020-11-24 Bruker Nano, Inc. Infrared characterization of a sample using oscillating mode

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