FR3074358B1 - Procede de realisation d'une cavite etanche a couche mince - Google Patents
Procede de realisation d'une cavite etanche a couche mince Download PDFInfo
- Publication number
- FR3074358B1 FR3074358B1 FR1761274A FR1761274A FR3074358B1 FR 3074358 B1 FR3074358 B1 FR 3074358B1 FR 1761274 A FR1761274 A FR 1761274A FR 1761274 A FR1761274 A FR 1761274A FR 3074358 B1 FR3074358 B1 FR 3074358B1
- Authority
- FR
- France
- Prior art keywords
- producing
- layer cavity
- thin
- layer
- support layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 238000005538 encapsulation Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/00182—Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/05—Microfluidics
- B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/0191—Transfer of a layer from a carrier wafer to a device wafer
- B81C2201/0192—Transfer of a layer from a carrier wafer to a device wafer by cleaving the carrier wafer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/03—Bonding two components
- B81C2203/032—Gluing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/03—Bonding two components
- B81C2203/033—Thermal bonding
- B81C2203/036—Fusion bonding
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Analytical Chemistry (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
- Micromachines (AREA)
Abstract
Procédé de réalisation d'un système d'encapsulation comportant : - la fabrication d'un premier élément comprenant, à partir d'un premier substrat, les étapes de formation d'une zone fragilisée de sorte définir une couche mince et une couche support, - l'assemblage du premier élément avec un deuxième élément de sorte que la couche mince soit disposée entre le deuxième élément et la couche support, - le retrait de la couche support par séparation de la couche support et de la couche mince au niveau de la zone fragilisée.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1761274A FR3074358B1 (fr) | 2017-11-28 | 2017-11-28 | Procede de realisation d'une cavite etanche a couche mince |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1761274A FR3074358B1 (fr) | 2017-11-28 | 2017-11-28 | Procede de realisation d'une cavite etanche a couche mince |
FR1761274 | 2017-11-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3074358A1 FR3074358A1 (fr) | 2019-05-31 |
FR3074358B1 true FR3074358B1 (fr) | 2022-02-04 |
Family
ID=61913260
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1761274A Active FR3074358B1 (fr) | 2017-11-28 | 2017-11-28 | Procede de realisation d'une cavite etanche a couche mince |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR3074358B1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3108204B1 (fr) * | 2020-03-10 | 2023-10-27 | Commissariat Energie Atomique | Procédé de suspension d’une couche mince sur une cavité avec effet raidisseur obtenu par pressurisation de la cavité par des espèces implantées |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2715502B1 (fr) * | 1994-01-26 | 1996-04-05 | Commissariat Energie Atomique | Structure présentant des cavités et procédé de réalisation d'une telle structure. |
DE10350036B4 (de) * | 2003-10-27 | 2014-01-23 | Robert Bosch Gmbh | Verfahren zum Vereinzeln von Halbleiterchips und entsprechende Halbleiterchipanordnung |
DE102009002485A1 (de) * | 2009-04-20 | 2010-10-21 | Robert Bosch Gmbh | Verfahren zur Herstellung von verkappten MEMS-Bauelementen |
US9184094B1 (en) * | 2012-01-26 | 2015-11-10 | Skorpios Technologies, Inc. | Method and system for forming a membrane over a cavity |
US9511996B2 (en) * | 2012-07-31 | 2016-12-06 | Soitec | Methods of forming semiconductor structures including MEMS devices and integrated circuits on common sides of substrates, and related structures and devices |
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2017
- 2017-11-28 FR FR1761274A patent/FR3074358B1/fr active Active
Also Published As
Publication number | Publication date |
---|---|
FR3074358A1 (fr) | 2019-05-31 |
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PLSC | Publication of the preliminary search report |
Effective date: 20190531 |
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