FR3073763B1 - Tete de soudage pour monter des composants et microsoudeuse de puce avec une telle tete de soudage - Google Patents

Tete de soudage pour monter des composants et microsoudeuse de puce avec une telle tete de soudage Download PDF

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Publication number
FR3073763B1
FR3073763B1 FR1860164A FR1860164A FR3073763B1 FR 3073763 B1 FR3073763 B1 FR 3073763B1 FR 1860164 A FR1860164 A FR 1860164A FR 1860164 A FR1860164 A FR 1860164A FR 3073763 B1 FR3073763 B1 FR 3073763B1
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FR
France
Prior art keywords
shaft
welding head
axis
mounting components
longitudinal direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1860164A
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English (en)
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FR3073763A1 (fr
Inventor
Rene Kroehnert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Besi Switzerland AG
Original Assignee
Besi Switzerland AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH01396/17A external-priority patent/CH714351A1/de
Application filed by Besi Switzerland AG filed Critical Besi Switzerland AG
Publication of FR3073763A1 publication Critical patent/FR3073763A1/fr
Application granted granted Critical
Publication of FR3073763B1 publication Critical patent/FR3073763B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75—Apparatus for connecting with bump connectors or layer connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/757—Means for aligning
    • H01L2224/75743—Suction holding means
    • H01L2224/75745—Suction holding means in the upper part of the bonding apparatus, e.g. in the bonding head
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/758—Means for moving parts
    • H01L2224/75821—Upper part of the bonding apparatus, i.e. bonding head
    • H01L2224/75822—Rotational mechanism
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/758—Means for moving parts
    • H01L2224/75821—Upper part of the bonding apparatus, i.e. bonding head
    • H01L2224/75824—Translational mechanism
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/758—Means for moving parts
    • H01L2224/75841—Means for moving parts of the bonding head
    • H01L2224/75842—Rotational mechanism
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/759—Means for monitoring the connection process
    • H01L2224/7592—Load or pressure adjusting means, e.g. sensors

Abstract

Une tête de soudage (1) pour monter des composants comprend un arbre (2) et une partie de boîtier (3) sur laquelle l'arbre (2) est supporté. Le palier de l'arbre (2) permet à la fois une rotation de l'arbre (2) autour d'un axe (6) et un déplacement de l'arbre (2) dans la direction longitudinale de l'axe (6) selon une course H prédéterminée. La tête de soudage (1) comprend en outre un moteur électrique avec un stator fixé sur la partie de boîtier (3) et un rotor fixé sur l'arbre (2), un encodeur pour mesurer la position de rotation de l'arbre (2) et un générateur de force pour appliquer une force sur l'arbre (2). Le stator comprend des bobines (7) auxquelles des courants peuvent être appliqués, le rotor comprend une pluralité d'aimants permanents (8). Une longueur des aimants permanents (8) mesurée dans la direction longitudinale de l'axe (6) est plus courte ou plus longue d'au moins la course H qu'une longueur effective des bobines (7) mesurée dans la direction longitudinale de l'axe (6).
FR1860164A 2017-11-17 2018-11-05 Tete de soudage pour monter des composants et microsoudeuse de puce avec une telle tete de soudage Active FR3073763B1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
CH0139617 2017-11-17
CH01396/17A CH714351A1 (de) 2017-11-17 2017-11-17 Bondkopf für die Montage von Bauelementen.
CH00957/18A CH714384A2 (de) 2017-11-17 2018-08-06 Bondkopf für die Montage von Bauelementen und Die Bonder mit einem solchen Bondkopf.
CH0095718 2018-08-06

Publications (2)

Publication Number Publication Date
FR3073763A1 FR3073763A1 (fr) 2019-05-24
FR3073763B1 true FR3073763B1 (fr) 2021-05-14

Family

ID=66336599

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1860164A Active FR3073763B1 (fr) 2017-11-17 2018-11-05 Tete de soudage pour monter des composants et microsoudeuse de puce avec une telle tete de soudage

Country Status (3)

Country Link
US (1) US20190157122A1 (fr)
DE (1) DE102018128615A1 (fr)
FR (1) FR3073763B1 (fr)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5093596A (en) * 1990-10-24 1992-03-03 Ibm Corporation Combined linear-rotary direct drive step motor
JP2979772B2 (ja) * 1991-09-13 1999-11-15 松下電器産業株式会社 ダイボンディング装置
US5952744A (en) * 1996-03-28 1999-09-14 Anoiad Corporation Rotary-linear actuator
WO2010036204A1 (fr) * 2008-09-24 2010-04-01 Chai Meng Goh Système de préhension et de positionnement à entraînement direct avec masse mobile réduite
CH707378A1 (de) * 2012-12-21 2014-06-30 Besi Switzerland Ag Thermokompressionsverfahren und Vorrichtung für die Montage von Halbleiterchips auf einem Substrat.
US9726204B2 (en) * 2013-12-09 2017-08-08 Samsung Electronics Co., Ltd. Fluid pressure actuator
JP6664986B2 (ja) * 2016-02-17 2020-03-13 株式会社ディスコ 加工装置

Also Published As

Publication number Publication date
FR3073763A1 (fr) 2019-05-24
DE102018128615A1 (de) 2019-05-23
US20190157122A1 (en) 2019-05-23

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