FR3054803B1 - Tampon de polissage poromerique effile - Google Patents
Tampon de polissage poromerique effile Download PDFInfo
- Publication number
- FR3054803B1 FR3054803B1 FR1757488A FR1757488A FR3054803B1 FR 3054803 B1 FR3054803 B1 FR 3054803B1 FR 1757488 A FR1757488 A FR 1757488A FR 1757488 A FR1757488 A FR 1757488A FR 3054803 B1 FR3054803 B1 FR 3054803B1
- Authority
- FR
- France
- Prior art keywords
- large pores
- polishing pad
- tapered
- polishing surface
- degrees
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
- B24D3/32—Resins or natural or synthetic macromolecular compounds for porous or cellular structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
Abstract
Le tampon de polissage en polyuréthane poreux comprend une matrice de polyuréthane poreuse ayant de gros pores s'étendant vers le haut à partir d'une surface de base et ouverts vers une surface de polissage. Une série de structures en oreiller est formée à partir de la matrice poreuse comprenant les gros pores et les petits pores. Les structures en oreiller ont une surface descendante s'étendant depuis la surface de polissage supérieure pour former des parois latérales inclinées vers le bas selon un angle de 30 à 60 degrés depuis la surface de polissage. Les gros pores s'ouvrent vers les parois latérales inclinées vers le bas et sont moins verticaux que les gros pores. Les gros pores sont décalés de 10 à 60 degrés par rapport à la direction verticale dans une direction plus orthogonale par rapport aux les parois latérales inclinées.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/228,988 US9925637B2 (en) | 2016-08-04 | 2016-08-04 | Tapered poromeric polishing pad |
US15228988 | 2016-08-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3054803A1 FR3054803A1 (fr) | 2018-02-09 |
FR3054803B1 true FR3054803B1 (fr) | 2021-08-06 |
Family
ID=60996750
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1757488A Active FR3054803B1 (fr) | 2016-08-04 | 2017-08-03 | Tampon de polissage poromerique effile |
Country Status (7)
Country | Link |
---|---|
US (1) | US9925637B2 (fr) |
JP (1) | JP7011419B2 (fr) |
KR (1) | KR102376129B1 (fr) |
CN (1) | CN107685295B (fr) |
DE (1) | DE102017007338A1 (fr) |
FR (1) | FR3054803B1 (fr) |
TW (1) | TWI763693B (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11813712B2 (en) * | 2019-12-20 | 2023-11-14 | Applied Materials, Inc. | Polishing pads having selectively arranged porosity |
US20210323115A1 (en) * | 2020-04-18 | 2021-10-21 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Leveraged poromeric polishing pad |
US20210323116A1 (en) * | 2020-04-18 | 2021-10-21 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Offset pore poromeric polishing pad |
US11667061B2 (en) * | 2020-04-18 | 2023-06-06 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Method of forming leveraged poromeric polishing pad |
Family Cites Families (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ATE93437T1 (de) * | 1987-08-25 | 1993-09-15 | Rodel Inc | Material mit invertierter zellstruktur fuer schleif-, laepp-, form- und poliervorgaenge. |
US4841680A (en) * | 1987-08-25 | 1989-06-27 | Rodel, Inc. | Inverted cell pad material for grinding, lapping, shaping and polishing |
TW367551B (en) * | 1993-06-17 | 1999-08-21 | Freescale Semiconductor Inc | Polishing pad and a process for polishing |
US6284114B1 (en) * | 1997-09-29 | 2001-09-04 | Rodel Holdings Inc. | Method of fabricating a porous polymeric material by electrophoretic deposition |
US6422933B1 (en) * | 1997-11-04 | 2002-07-23 | Firma Carl Freudenberg | Flexible, open-pored cleaning body |
JPH11156699A (ja) | 1997-11-25 | 1999-06-15 | Speedfam Co Ltd | 平面研磨用パッド |
US6093651A (en) | 1997-12-23 | 2000-07-25 | Intel Corporation | Polish pad with non-uniform groove depth to improve wafer polish rate uniformity |
US6780095B1 (en) * | 1997-12-30 | 2004-08-24 | Micron Technology, Inc. | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates |
US6139402A (en) * | 1997-12-30 | 2000-10-31 | Micron Technology, Inc. | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates |
JP2001150332A (ja) | 1999-11-22 | 2001-06-05 | Nec Corp | 研磨パッドおよび研磨方法 |
US6241596B1 (en) | 2000-01-14 | 2001-06-05 | Applied Materials, Inc. | Method and apparatus for chemical mechanical polishing using a patterned pad |
US6840843B2 (en) * | 2001-03-01 | 2005-01-11 | Cabot Microelectronics Corporation | Method for manufacturing a polishing pad having a compressed translucent region |
US6523215B2 (en) * | 2001-04-04 | 2003-02-25 | Saint-Gobain Abrasives Technology Company | Polishing pad and system |
WO2003032379A1 (fr) * | 2001-10-09 | 2003-04-17 | Hitachi Chemical Co., Ltd. | Element de polissage pour procede cmp, procede de polissage de substrat comprenant l'utilisation de cet element, et procede de production d'un element de polissage pour cmp |
US6913517B2 (en) * | 2002-05-23 | 2005-07-05 | Cabot Microelectronics Corporation | Microporous polishing pads |
JP4659338B2 (ja) * | 2003-02-12 | 2011-03-30 | Hoya株式会社 | 情報記録媒体用ガラス基板の製造方法並びにそれに使用する研磨パッド |
US20050042976A1 (en) * | 2003-08-22 | 2005-02-24 | International Business Machines Corporation | Low friction planarizing/polishing pads and use thereof |
US6942549B2 (en) | 2003-10-29 | 2005-09-13 | International Business Machines Corporation | Two-sided chemical mechanical polishing pad for semiconductor processing |
US7186651B2 (en) | 2003-10-30 | 2007-03-06 | Texas Instruments Incorporated | Chemical mechanical polishing method and apparatus |
US7169029B2 (en) * | 2004-12-16 | 2007-01-30 | 3M Innovative Properties Company | Resilient structured sanding article |
TWI411495B (zh) * | 2007-08-16 | 2013-10-11 | Cabot Microelectronics Corp | 拋光墊 |
JP5297096B2 (ja) * | 2007-10-03 | 2013-09-25 | 富士紡ホールディングス株式会社 | 研磨布 |
JP5421635B2 (ja) * | 2009-03-30 | 2014-02-19 | 富士紡ホールディングス株式会社 | 研磨パッド |
US8425278B2 (en) * | 2009-08-26 | 2013-04-23 | 3M Innovative Properties Company | Structured abrasive article and method of using the same |
US8162728B2 (en) | 2009-09-28 | 2012-04-24 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Dual-pore structure polishing pad |
JP5753677B2 (ja) * | 2010-11-05 | 2015-07-22 | 富士紡ホールディングス株式会社 | 研磨パッドおよび研磨パッドの製造方法 |
US20130237136A1 (en) * | 2010-11-18 | 2013-09-12 | Cabot Microelectronics Corporation | Polishing pad comprising transmissive region |
WO2013011921A1 (fr) * | 2011-07-15 | 2013-01-24 | 東レ株式会社 | Tampon de polissage |
JP5821133B2 (ja) * | 2012-03-29 | 2015-11-24 | 富士紡ホールディングス株式会社 | 研磨パッド及び研磨パッドの製造方法 |
JP5917236B2 (ja) | 2012-03-30 | 2016-05-11 | 富士紡ホールディングス株式会社 | 研磨パッド用シート及びその製造方法、研磨パッド及びその製造方法、並びに研磨方法 |
US9956669B2 (en) | 2013-03-12 | 2018-05-01 | Kyushu University, National University Corporation | Polishing pad and polishing method |
JP6474191B2 (ja) * | 2013-11-21 | 2019-02-27 | 富士紡ホールディングス株式会社 | 研磨パッドの製造方法及び研磨パッド |
-
2016
- 2016-08-04 US US15/228,988 patent/US9925637B2/en active Active
-
2017
- 2017-07-31 TW TW106125775A patent/TWI763693B/zh active
- 2017-08-01 KR KR1020170097632A patent/KR102376129B1/ko active IP Right Grant
- 2017-08-01 CN CN201710645534.3A patent/CN107685295B/zh active Active
- 2017-08-01 JP JP2017148994A patent/JP7011419B2/ja active Active
- 2017-08-03 DE DE102017007338.4A patent/DE102017007338A1/de active Pending
- 2017-08-03 FR FR1757488A patent/FR3054803B1/fr active Active
Also Published As
Publication number | Publication date |
---|---|
US9925637B2 (en) | 2018-03-27 |
TWI763693B (zh) | 2022-05-11 |
CN107685295A (zh) | 2018-02-13 |
DE102017007338A1 (de) | 2018-02-08 |
TW201805112A (zh) | 2018-02-16 |
FR3054803A1 (fr) | 2018-02-09 |
US20180036862A1 (en) | 2018-02-08 |
JP2018039104A (ja) | 2018-03-15 |
JP7011419B2 (ja) | 2022-01-26 |
KR20180016287A (ko) | 2018-02-14 |
KR102376129B1 (ko) | 2022-03-18 |
CN107685295B (zh) | 2019-06-04 |
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PLSC | Publication of the preliminary search report |
Effective date: 20210101 |
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