FR3008543B1 - Procede de localisation de dispositifs - Google Patents

Procede de localisation de dispositifs

Info

Publication number
FR3008543B1
FR3008543B1 FR1301697A FR1301697A FR3008543B1 FR 3008543 B1 FR3008543 B1 FR 3008543B1 FR 1301697 A FR1301697 A FR 1301697A FR 1301697 A FR1301697 A FR 1301697A FR 3008543 B1 FR3008543 B1 FR 3008543B1
Authority
FR
France
Prior art keywords
locating devices
locating
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1301697A
Other languages
English (en)
Other versions
FR3008543A1 (fr
Inventor
Marcel Broekaart
Ionut Radu
Blanchard Chrystelle Lagahe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Soitec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1301697A priority Critical patent/FR3008543B1/fr
Application filed by Soitec SA filed Critical Soitec SA
Priority to DE112014003280.8T priority patent/DE112014003280T5/de
Priority to PCT/FR2014/051568 priority patent/WO2015007971A1/fr
Priority to JP2016526673A priority patent/JP6463751B2/ja
Priority to SG11201510638XA priority patent/SG11201510638XA/en
Priority to ATA9279/2014A priority patent/AT521083B1/de
Priority to KR1020167001033A priority patent/KR102218891B1/ko
Priority to US14/903,961 priority patent/US20160197006A1/en
Publication of FR3008543A1 publication Critical patent/FR3008543A1/fr
Application granted granted Critical
Publication of FR3008543B1 publication Critical patent/FR3008543B1/fr
Priority to US16/685,938 priority patent/US11088016B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14683Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
    • H01L27/14687Wafer level processing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76Making of isolation regions between components
    • H01L21/762Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76254Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/544Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544Marks applied to semiconductor devices or parts
    • H01L2223/54426Marks applied to semiconductor devices or parts for alignment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Die Bonding (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Micromachines (AREA)
FR1301697A 2013-07-15 2013-07-15 Procede de localisation de dispositifs Active FR3008543B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR1301697A FR3008543B1 (fr) 2013-07-15 2013-07-15 Procede de localisation de dispositifs
PCT/FR2014/051568 WO2015007971A1 (fr) 2013-07-15 2014-06-24 Procede de localisation de dispositifs
JP2016526673A JP6463751B2 (ja) 2013-07-15 2014-06-24 デバイスを位置決めするための方法
SG11201510638XA SG11201510638XA (en) 2013-07-15 2014-06-24 Process for locating devices
DE112014003280.8T DE112014003280T5 (de) 2013-07-15 2014-06-24 Verfahren zum Lokalisieren von Vorrichtungen
ATA9279/2014A AT521083B1 (de) 2013-07-15 2014-06-24 Verfahren zum Lokalisieren von Vorrichtungen
KR1020167001033A KR102218891B1 (ko) 2013-07-15 2014-06-24 디바이스를 위치시키는 방법
US14/903,961 US20160197006A1 (en) 2013-07-15 2014-06-24 Method for locating devices
US16/685,938 US11088016B2 (en) 2013-07-15 2019-11-15 Method for locating devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1301697A FR3008543B1 (fr) 2013-07-15 2013-07-15 Procede de localisation de dispositifs

Publications (2)

Publication Number Publication Date
FR3008543A1 FR3008543A1 (fr) 2015-01-16
FR3008543B1 true FR3008543B1 (fr) 2015-07-17

Family

ID=49546458

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1301697A Active FR3008543B1 (fr) 2013-07-15 2013-07-15 Procede de localisation de dispositifs

Country Status (8)

Country Link
US (2) US20160197006A1 (fr)
JP (1) JP6463751B2 (fr)
KR (1) KR102218891B1 (fr)
AT (1) AT521083B1 (fr)
DE (1) DE112014003280T5 (fr)
FR (1) FR3008543B1 (fr)
SG (1) SG11201510638XA (fr)
WO (1) WO2015007971A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3076292B1 (fr) * 2017-12-28 2020-01-03 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de transfert d'une couche utile sur un substrat support
FR3079659B1 (fr) * 2018-03-29 2020-03-13 Soitec Procede de fabrication d'un substrat donneur pour la realisation d'une structure integree en trois dimensions et procede de fabrication d'une telle structure integree

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2628555B2 (ja) 1988-03-22 1997-07-09 富士通株式会社 半導体装置の製造方法
KR0155835B1 (ko) * 1995-06-23 1998-12-01 김광호 반도체 장치의 얼라인 키 패턴 형성방법
KR100543393B1 (ko) * 2000-03-09 2006-01-20 후지쯔 가부시끼가이샤 반도체 장치 및 그 제조 방법
JP2005142252A (ja) * 2003-11-05 2005-06-02 Sony Corp アライメントマークの形成方法および半導体装置の製造方法および半導体装置
EP1571705A3 (fr) 2004-03-01 2006-01-04 S.O.I.Tec Silicon on Insulator Technologies Réalisation d'une entité en matériau semiconducteur sur substrat
KR101236211B1 (ko) * 2008-08-27 2013-02-25 소이텍 선택되거나 제어된 격자 파라미터들을 갖는 반도체 물질층들을 이용하여 반도체 구조물들 또는 소자들을 제조하는 방법
JP5196160B2 (ja) * 2008-10-17 2013-05-15 日亜化学工業株式会社 半導体発光素子
US8536629B2 (en) 2009-02-24 2013-09-17 Nec Corporation Semiconductor device and method for manufacturing the same
US8058137B1 (en) * 2009-04-14 2011-11-15 Monolithic 3D Inc. Method for fabrication of a semiconductor device and structure
WO2011132654A1 (fr) 2010-04-20 2011-10-27 住友電気工業株式会社 Procédé de production d'un substrat composite
JP5440442B2 (ja) * 2010-08-18 2014-03-12 株式会社リコー 光走査装置及び画像形成装置
WO2012042653A1 (fr) * 2010-09-30 2012-04-05 富士電機株式会社 Procédé de fabrication d'un dispositif semi-conducteur
US8502389B2 (en) * 2011-08-08 2013-08-06 Taiwan Semiconductor Manufacturing Company, Ltd. CMOS image sensor and method for forming the same
US8779539B2 (en) * 2011-09-21 2014-07-15 United Microelectronics Corporation Image sensor and method for fabricating the same
FR3005648B1 (fr) * 2013-05-15 2016-02-12 Commissariat Energie Atomique Procede d'encapsulation d'un dispositif microelectronique comprenant une injection de gaz noble a travers un materiau permeable a ce gaz noble

Also Published As

Publication number Publication date
US20200161172A1 (en) 2020-05-21
KR102218891B1 (ko) 2021-02-24
WO2015007971A1 (fr) 2015-01-22
KR20160031489A (ko) 2016-03-22
JP2016527717A (ja) 2016-09-08
JP6463751B2 (ja) 2019-02-06
AT521083B1 (de) 2020-04-15
US20160197006A1 (en) 2016-07-07
DE112014003280T5 (de) 2016-04-14
US11088016B2 (en) 2021-08-10
AT521083A2 (de) 2019-10-15
AT521083A3 (de) 2019-12-15
FR3008543A1 (fr) 2015-01-16
SG11201510638XA (en) 2016-01-28

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