FR3006220B1 - Empilement formant tampon de polissage chimique mecanique multicouche avec une couche de polissage souple et conditionnable - Google Patents

Empilement formant tampon de polissage chimique mecanique multicouche avec une couche de polissage souple et conditionnable

Info

Publication number
FR3006220B1
FR3006220B1 FR1454945A FR1454945A FR3006220B1 FR 3006220 B1 FR3006220 B1 FR 3006220B1 FR 1454945 A FR1454945 A FR 1454945A FR 1454945 A FR1454945 A FR 1454945A FR 3006220 B1 FR3006220 B1 FR 3006220B1
Authority
FR
France
Prior art keywords
layer
conditionable
soft
forming multi
stack forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1454945A
Other languages
English (en)
Other versions
FR3006220A1 (fr
Inventor
James Murnane
Bainian Qian
John G Nowland
Michelle K Jensen
Jeffrey James Hendron
Marty W Degroot
David B James
Fengji Yeh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm and Haas Electronic Materials CMP Holdings Inc
Dow Global Technologies LLC
Original Assignee
Rohm and Haas Electronic Materials CMP Holdings Inc
Dow Global Technologies LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm and Haas Electronic Materials CMP Holdings Inc, Dow Global Technologies LLC filed Critical Rohm and Haas Electronic Materials CMP Holdings Inc
Publication of FR3006220A1 publication Critical patent/FR3006220A1/fr
Application granted granted Critical
Publication of FR3006220B1 publication Critical patent/FR3006220B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B24B37/245—Pads with fixed abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/30—Low-molecular-weight compounds
    • C08G18/32—Polyhydroxy compounds; Polyamines; Hydroxyamines
    • C08G18/3271—Hydroxyamines
    • C08G18/3278—Hydroxyamines containing at least three hydroxy groups
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/65—Low-molecular-weight compounds having active hydrogen with high-molecular-weight compounds having active hydrogen
    • C08G18/66—Compounds of groups C08G18/42, C08G18/48, or C08G18/52
    • C08G18/6633—Compounds of group C08G18/42
    • C08G18/6637—Compounds of group C08G18/42 with compounds of group C08G18/32 or polyamines of C08G18/38
    • C08G18/664—Compounds of group C08G18/42 with compounds of group C08G18/32 or polyamines of C08G18/38 with compounds of group C08G18/3203
    • C08G18/6644—Compounds of group C08G18/42 with compounds of group C08G18/32 or polyamines of C08G18/38 with compounds of group C08G18/3203 having at least three hydroxy groups

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
FR1454945A 2013-05-31 2014-05-30 Empilement formant tampon de polissage chimique mecanique multicouche avec une couche de polissage souple et conditionnable Active FR3006220B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/906,825 US9238296B2 (en) 2013-05-31 2013-05-31 Multilayer chemical mechanical polishing pad stack with soft and conditionable polishing layer

Publications (2)

Publication Number Publication Date
FR3006220A1 FR3006220A1 (fr) 2014-12-05
FR3006220B1 true FR3006220B1 (fr) 2016-09-23

Family

ID=51168262

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1454945A Active FR3006220B1 (fr) 2013-05-31 2014-05-30 Empilement formant tampon de polissage chimique mecanique multicouche avec une couche de polissage souple et conditionnable

Country Status (7)

Country Link
US (1) US9238296B2 (fr)
JP (1) JP6367611B2 (fr)
KR (1) KR102208278B1 (fr)
CN (1) CN104209874B (fr)
DE (1) DE102014007002A1 (fr)
FR (1) FR3006220B1 (fr)
TW (1) TWI560070B (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI556910B (zh) * 2013-10-01 2016-11-11 三芳化學工業股份有限公司 複合硏磨墊及其製造方法
US9259820B2 (en) * 2014-03-28 2016-02-16 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing pad with polishing layer and window
US9216489B2 (en) * 2014-03-28 2015-12-22 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing pad with endpoint detection window
US9238294B2 (en) * 2014-06-18 2016-01-19 Nexplanar Corporation Polishing pad having porogens with liquid filler
USD785339S1 (en) * 2014-10-23 2017-05-02 Griot's Garage, Inc. Hand applicator buffing pad
US20160144477A1 (en) * 2014-11-21 2016-05-26 Diane Scott Coated compressive subpad for chemical mechanical polishing
US9481070B2 (en) * 2014-12-19 2016-11-01 Rohm And Haas Electronic Materials Cmp Holdings, Inc. High-stability polyurethane polishing pad
WO2017053685A1 (fr) * 2015-09-25 2017-03-30 Cabot Microelectronics Corporation Tampons de polissage chimique-mécanique en polyuréthane ayant un rapport de module élevé
US9484212B1 (en) * 2015-10-30 2016-11-01 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing method
US20180085888A1 (en) * 2016-09-29 2018-03-29 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing pads having a consistent pad surface microtexture
CN108453970A (zh) * 2018-03-27 2018-08-28 成都时代立夫科技有限公司 一种化学机械抛光垫的制造方法及其产品和模具
KR102526513B1 (ko) * 2021-05-26 2023-04-26 에스케이엔펄스 주식회사 연마패드 접착필름, 이를 포함하는 연마패드 적층체 및 웨이퍼의 연마방법
KR102572960B1 (ko) * 2021-06-10 2023-09-01 에프엔에스테크 주식회사 복수의 패턴 구조체를 포함하는 연마 패드

Family Cites Families (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5257478A (en) 1990-03-22 1993-11-02 Rodel, Inc. Apparatus for interlayer planarization of semiconductor material
US5212910A (en) 1991-07-09 1993-05-25 Intel Corporation Composite polishing pad for semiconductor process
US5287663A (en) 1992-01-21 1994-02-22 National Semiconductor Corporation Polishing pad and method for polishing semiconductor wafers
US5245790A (en) * 1992-02-14 1993-09-21 Lsi Logic Corporation Ultrasonic energy enhanced chemi-mechanical polishing of silicon wafers
MY114512A (en) 1992-08-19 2002-11-30 Rodel Inc Polymeric substrate with polymeric microelements
US6069080A (en) 1992-08-19 2000-05-30 Rodel Holdings, Inc. Fixed abrasive polishing system for the manufacture of semiconductor devices, memory disks and the like
US5489233A (en) 1994-04-08 1996-02-06 Rodel, Inc. Polishing pads and methods for their use
JPH08216033A (ja) * 1995-02-16 1996-08-27 Fuji Photo Film Co Ltd 研磨テープ
EP0779655A3 (fr) 1995-12-14 1997-07-16 International Business Machines Corporation Procédé pour le polissage chimique-mécanique d'un substrat d'un composant électronique
US5692950A (en) 1996-08-08 1997-12-02 Minnesota Mining And Manufacturing Company Abrasive construction for semiconductor wafer modification
IT1302496B1 (it) * 1998-09-14 2000-09-05 Sixton Holding Sa Schiuma poliuretanica rigida.
US6095902A (en) * 1998-09-23 2000-08-01 Rodel Holdings, Inc. Polyether-polyester polyurethane polishing pads and related methods
US6524164B1 (en) 1999-09-14 2003-02-25 Applied Materials, Inc. Polishing pad with transparent window having reduced window leakage for a chemical mechanical polishing apparatus
JP3925041B2 (ja) 2000-05-31 2007-06-06 Ｊｓｒ株式会社 研磨パッド用組成物及びこれを用いた研磨パッド
JP3826702B2 (ja) 2000-10-24 2006-09-27 Ｊｓｒ株式会社 研磨パッド用組成物及びこれを用いた研磨パッド
KR100877389B1 (ko) 2001-11-13 2009-01-07 도요 고무 고교 가부시키가이샤 연마 패드 및 그 제조 방법
JP4039214B2 (ja) 2002-11-05 2008-01-30 Ｊｓｒ株式会社 研磨パッド
US7704125B2 (en) 2003-03-24 2010-04-27 Nexplanar Corporation Customized polishing pads for CMP and methods of fabrication and use thereof
US20040192178A1 (en) 2003-03-28 2004-09-30 Barak Yardeni Diamond conditioning of soft chemical mechanical planarization/polishing (CMP) polishing pads
US20040224622A1 (en) 2003-04-15 2004-11-11 Jsr Corporation Polishing pad and production method thereof
US7101275B2 (en) 2003-09-26 2006-09-05 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Resilient polishing pad for chemical mechanical polishing
US8066552B2 (en) 2003-10-03 2011-11-29 Applied Materials, Inc. Multi-layer polishing pad for low-pressure polishing
US7074115B2 (en) 2003-10-09 2006-07-11 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Polishing pad
US20050171224A1 (en) * 2004-02-03 2005-08-04 Kulp Mary J. Polyurethane polishing pad
US7132033B2 (en) 2004-02-27 2006-11-07 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Method of forming a layered polishing pad
JP4475404B2 (ja) 2004-10-14 2010-06-09 Ｊｓｒ株式会社 研磨パッド
SG162797A1 (en) 2005-07-15 2010-07-29 Toyo Tire & Rubber Co Layered sheets and processes for producing the same
KR100709392B1 (ko) * 2005-07-20 2007-04-20 에스케이씨 주식회사 액상의 비닐계 모노머가 상호침투 가교된 형태를 갖는폴리우레탄 연마 패드
WO2008029538A1 (fr) 2006-09-08 2008-03-13 Toyo Tire & Rubber Co., Ltd. Tampon à polir
WO2008087797A1 (fr) 2007-01-15 2008-07-24 Toyo Tire & Rubber Co., Ltd. Tampon à polir et son procédé de production
US20090062414A1 (en) 2007-08-28 2009-03-05 David Picheng Huang System and method for producing damping polyurethane CMP pads
US8052507B2 (en) 2007-11-20 2011-11-08 Praxair Technology, Inc. Damping polyurethane CMP pads with microfillers
JP4593643B2 (ja) 2008-03-12 2010-12-08 東洋ゴム工業株式会社 研磨パッド
CN102015812B (zh) 2008-04-25 2013-03-20 东洋高分子股份有限公司 聚氨酯发泡体和抛光垫
JP5393434B2 (ja) 2008-12-26 2014-01-22 東洋ゴム工業株式会社 研磨パッド及びその製造方法
TWM367052U (en) * 2009-04-24 2009-10-21 Bestac Advanced Material Co Ltd Polishing pad and polishing device
US8157614B2 (en) 2009-04-30 2012-04-17 Applied Materials, Inc. Method of making and apparatus having windowless polishing pad and protected fiber
US8551201B2 (en) 2009-08-07 2013-10-08 Praxair S.T. Technology, Inc. Polyurethane composition for CMP pads and method of manufacturing same
US9156124B2 (en) * 2010-07-08 2015-10-13 Nexplanar Corporation Soft polishing pad for polishing a semiconductor substrate
JP5687118B2 (ja) * 2011-04-15 2015-03-18 富士紡ホールディングス株式会社 研磨パッド及びその製造方法
US8512427B2 (en) * 2011-09-29 2013-08-20 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Acrylate polyurethane chemical mechanical polishing layer
JP2013082035A (ja) * 2011-10-11 2013-05-09 Toyo Tire & Rubber Co Ltd 積層研磨パッド及びその製造方法
US9233451B2 (en) * 2013-05-31 2016-01-12 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Soft and conditionable chemical mechanical polishing pad stack

Also Published As

Publication number Publication date
DE102014007002A1 (de) 2014-12-04
FR3006220A1 (fr) 2014-12-05
US20140357163A1 (en) 2014-12-04
JP6367611B2 (ja) 2018-08-01
KR20140141492A (ko) 2014-12-10
TWI560070B (en) 2016-12-01
CN104209874A (zh) 2014-12-17
KR102208278B1 (ko) 2021-01-27
CN104209874B (zh) 2017-09-08
US9238296B2 (en) 2016-01-19
JP2014233835A (ja) 2014-12-15
TW201511964A (zh) 2015-04-01

Similar Documents

Publication Publication Date Title
FR3006220B1 (fr) Empilement formant tampon de polissage chimique mecanique multicouche avec une couche de polissage souple et conditionnable
IL255610A (en) An electronic device for vapor production that includes a heater structure with a hollow shell layer
HK1221927A1 (zh) 用片材製造柔性裝置
FR3006219B1 (fr) Tampon de polissage chimique mecanique a fenetre, souple et conditionnable
HK1226084A1 (zh) 用於治療糖尿病的gip和glp-1受體雙重激動劑
SG11201706975YA (en) Transparent electroconductive layer-equipped cover element provided with transparent pressure-sensitive adhesive layer
EP2967247A4 (fr) Ustensile de cuisson doté de couches collées de manière sélective
PL3063002T3 (pl) Element wykonany z przezroczystych warstw
EP2992562C0 (fr) Couche semi-conductrice de réduction des tensions
DK3546572T3 (da) CD19-specifik kimær antigenreceptor og anvendelser deraf
DK2730104T3 (da) Dm-rs-baserede fysiske downlink-lte-lag
GB201322494D0 (en) Catalyst layer
TWI560257B (en) Light-diffusing adhesive layer and light-diffusing adhesive film
EP2968023A4 (fr) Structure absorbante munie d'une couche de maintien au sec
PT2972413T (pt) Anemómetro duplo flutuante - mastro e ultrassonografia doppler
FR3002873B1 (fr) Feutre de polissage mecano-chimique multicouche
EP2877048A4 (fr) Gant tridimensionnel ayant une couche d'amélioration de performance stratifiée sur celui-ci
DK3453723T3 (da) Anti-ASIC1-antistoffer og anvendelser deraf
FR2975587B1 (fr) Couche lavable anti-fuite
FR2948321B1 (fr) Bandage pneumatique avec couche auto-obturante integree.
IL243283B (en) Decorative layer of hard hipims material
EP2980264A4 (fr) Composant décoratif rigide ayant une couche de ton gris
ZA201604121B (en) Dual layer carpet
BR112015020275A2 (pt) estrutura flutuante
FR3045637B1 (fr) Couche etanche composite

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 2

PLFP Fee payment

Year of fee payment: 3

PLFP Fee payment

Year of fee payment: 4

PLFP Fee payment

Year of fee payment: 5

PLFP Fee payment

Year of fee payment: 7

PLFP Fee payment

Year of fee payment: 8

PLFP Fee payment

Year of fee payment: 9

PLFP Fee payment

Year of fee payment: 10

PLFP Fee payment

Year of fee payment: 11