FR3002873B1 - Feutre de polissage mecano-chimique multicouche - Google Patents

Feutre de polissage mecano-chimique multicouche

Info

Publication number
FR3002873B1
FR3002873B1 FR1451889A FR1451889A FR3002873B1 FR 3002873 B1 FR3002873 B1 FR 3002873B1 FR 1451889 A FR1451889 A FR 1451889A FR 1451889 A FR1451889 A FR 1451889A FR 3002873 B1 FR3002873 B1 FR 3002873B1
Authority
FR
France
Prior art keywords
chemical polishing
mechanical chemical
polishing felt
multilayer mechanical
multilayer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1451889A
Other languages
English (en)
Other versions
FR3002873A1 (fr
Inventor
Angus Repper
Marty Degroot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm and Haas Electronic Materials CMP Holdings Inc
Dow Global Technologies LLC
Original Assignee
Rohm and Haas Electronic Materials CMP Holdings Inc
Dow Global Technologies LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm and Haas Electronic Materials CMP Holdings Inc, Dow Global Technologies LLC filed Critical Rohm and Haas Electronic Materials CMP Holdings Inc
Publication of FR3002873A1 publication Critical patent/FR3002873A1/fr
Application granted granted Critical
Publication of FR3002873B1 publication Critical patent/FR3002873B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/12—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
    • B32B37/1284—Application of adhesive
FR1451889A 2013-03-07 2014-03-07 Feutre de polissage mecano-chimique multicouche Active FR3002873B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/788,594 US9108290B2 (en) 2013-03-07 2013-03-07 Multilayer chemical mechanical polishing pad

Publications (2)

Publication Number Publication Date
FR3002873A1 FR3002873A1 (fr) 2014-09-12
FR3002873B1 true FR3002873B1 (fr) 2017-05-12

Family

ID=51385643

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1451889A Active FR3002873B1 (fr) 2013-03-07 2014-03-07 Feutre de polissage mecano-chimique multicouche

Country Status (7)

Country Link
US (1) US9108290B2 (fr)
JP (1) JP2014172169A (fr)
KR (1) KR20140110785A (fr)
CN (1) CN104029114B (fr)
DE (1) DE102014002615A1 (fr)
FR (1) FR3002873B1 (fr)
TW (1) TWI610760B (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160354896A1 (en) * 2014-02-10 2016-12-08 President And Fellows Of Harvard College 3d-printed polishing pad for chemical-mechanical planarization (cmp)
US9216489B2 (en) * 2014-03-28 2015-12-22 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing pad with endpoint detection window
TW201627658A (zh) * 2015-01-30 2016-08-01 陶氏全球科技責任有限公司 拋光層分析器及方法
US9446498B1 (en) * 2015-03-13 2016-09-20 rohm and Hass Electronic Materials CMP Holdings, Inc. Chemical mechanical polishing pad with window
EP3272456B1 (fr) * 2016-07-21 2019-03-13 Delamare Sovra Procédé de fabrication en série d'outils de polissage de qualité optique
EP3272457B1 (fr) * 2016-07-21 2019-03-27 Delamare Sovra Procédé de fabrication en série d'outils à polir de qualité optique
EP3272458B1 (fr) * 2016-07-21 2019-03-27 Delamare Sovra Procédé de fabrication en série d'outils de polissage de qualité optique
KR101904322B1 (ko) * 2017-01-23 2018-10-04 에스케이씨 주식회사 연마패드 및 이의 제조방법
US10569383B2 (en) * 2017-09-15 2020-02-25 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Flanged optical endpoint detection windows and CMP polishing pads containing them
CN108818300A (zh) * 2018-08-03 2018-11-16 成都时代立夫科技有限公司 一种分体式窗口cmp抛光垫的制备方法及cmp抛光垫
KR20210094024A (ko) * 2018-11-27 2021-07-28 쓰리엠 이노베이티브 프로퍼티즈 컴파니 폴리싱 패드 및 시스템과 이의 제조 및 사용 방법
US11633830B2 (en) * 2020-06-24 2023-04-25 Rohm And Haas Electronic Materials Cmp Holdings, Inc. CMP polishing pad with uniform window
CN112757153B (zh) * 2021-03-09 2022-07-12 万华化学集团电子材料有限公司 一种多结构体化学机械抛光垫、制造方法及其应用

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5433651A (en) * 1993-12-22 1995-07-18 International Business Machines Corporation In-situ endpoint detection and process monitoring method and apparatus for chemical-mechanical polishing
US5893796A (en) 1995-03-28 1999-04-13 Applied Materials, Inc. Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus
KR100435246B1 (ko) * 1999-03-31 2004-06-11 가부시키가이샤 니콘 연마체, 연마장치, 연마장치의 조정방법, 연마막 두께또는 연마종점의 측정방법, 및 반도체 디바이스의 제조방법
US6524164B1 (en) 1999-09-14 2003-02-25 Applied Materials, Inc. Polishing pad with transparent window having reduced window leakage for a chemical mechanical polishing apparatus
JP2003133270A (ja) * 2001-10-26 2003-05-09 Jsr Corp 化学機械研磨用窓材及び研磨パッド
WO2004021426A1 (fr) * 2002-08-30 2004-03-11 Toray Industries, Inc. Coussin de polissage, couvercle perfore de plaque de polissage, appareil de polissage, procede de polissage et procede de fabrication d'un dispositif a semi-conducteur
KR100532440B1 (ko) * 2003-06-05 2005-11-30 삼성전자주식회사 윈도로의 유체의 침투를 막는 실링 장벽부를 가지는 화학기계적 연마 장비에 사용되는 연마 패드
KR100817233B1 (ko) * 2004-03-11 2008-03-27 도요 고무 고교 가부시키가이샤 연마 패드 및 반도체 디바이스의 제조 방법
US7204742B2 (en) * 2004-03-25 2007-04-17 Cabot Microelectronics Corporation Polishing pad comprising hydrophobic region and endpoint detection port
KR101172324B1 (ko) * 2004-12-10 2012-08-14 도요 고무 고교 가부시키가이샤 연마 패드 및 연마 패드의 제조 방법
US7764377B2 (en) 2005-08-22 2010-07-27 Applied Materials, Inc. Spectrum based endpointing for chemical mechanical polishing
US7210980B2 (en) 2005-08-26 2007-05-01 Applied Materials, Inc. Sealed polishing pad, system and methods
JP2007260827A (ja) * 2006-03-28 2007-10-11 Toyo Tire & Rubber Co Ltd 研磨パッドの製造方法
US8083570B2 (en) * 2008-10-17 2011-12-27 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing pad having sealed window
WO2011008499A2 (fr) 2009-06-30 2011-01-20 Applied Materials, Inc. Tampon étanche aux fuites pour détection de point de fin de planarisation par polissage chimico-mécanique
US9446497B2 (en) * 2013-03-07 2016-09-20 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Broad spectrum, endpoint detection monophase olefin copolymer window with specific composition in multilayer chemical mechanical polishing pad

Also Published As

Publication number Publication date
US9108290B2 (en) 2015-08-18
CN104029114B (zh) 2017-04-26
TWI610760B (zh) 2018-01-11
KR20140110785A (ko) 2014-09-17
JP2014172169A (ja) 2014-09-22
CN104029114A (zh) 2014-09-10
FR3002873A1 (fr) 2014-09-12
US20140256230A1 (en) 2014-09-11
DE102014002615A1 (de) 2014-09-11
TW201505771A (zh) 2015-02-16

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