FR3000416B1 - Procede et dispositif pour la formation d'une couche de surface dans une piece creuse et piece ainsi obtenue - Google Patents

Procede et dispositif pour la formation d'une couche de surface dans une piece creuse et piece ainsi obtenue Download PDF

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Publication number
FR3000416B1
FR3000416B1 FR1262941A FR1262941A FR3000416B1 FR 3000416 B1 FR3000416 B1 FR 3000416B1 FR 1262941 A FR1262941 A FR 1262941A FR 1262941 A FR1262941 A FR 1262941A FR 3000416 B1 FR3000416 B1 FR 3000416B1
Authority
FR
France
Prior art keywords
surface layer
forming
hollow part
hollow
over
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1262941A
Other languages
English (en)
Other versions
FR3000416A1 (fr
Inventor
Thomas Duguet
Constantin Vahlas
Yohann Ledru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mecano I D
Centre National de la Recherche Scientifique CNRS
Institut National Polytechnique de Toulouse INPT
Original Assignee
Mecano I D
Centre National de la Recherche Scientifique CNRS
Institut National Polytechnique de Toulouse INPT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mecano I D, Centre National de la Recherche Scientifique CNRS, Institut National Polytechnique de Toulouse INPT filed Critical Mecano I D
Priority to FR1262941A priority Critical patent/FR3000416B1/fr
Priority to PCT/EP2013/077672 priority patent/WO2014102188A1/fr
Publication of FR3000416A1 publication Critical patent/FR3000416A1/fr
Application granted granted Critical
Publication of FR3000416B1 publication Critical patent/FR3000416B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L58/00—Protection of pipes or pipe fittings against corrosion or incrustation
    • F16L58/02—Protection of pipes or pipe fittings against corrosion or incrustation by means of internal or external coatings
    • F16L58/04—Coatings characterised by the materials used
    • F16L58/08—Coatings characterised by the materials used by metal
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32394—Treating interior parts of workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32403—Treating multiple sides of workpieces, e.g. 3D workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating
    • H01J2237/3321—CVD [Chemical Vapor Deposition]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
    • H01P11/001—Manufacturing waveguides or transmission lines of the waveguide type
    • H01P11/002—Manufacturing hollow waveguides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

L'invention concerne un procédé de formation, sur la surface interne (101) d'une pièce creuse (10) ouverte à deux extrémités opposées (103, 104) et constituée d'un premier matériau, d'une couche de surface (70) d'un second matériau s'étendant de manière continue sur au moins une partie de la surface externe (102) de cette pièce, en particulier au moins sur la surface de ses tranches d'extrémité (107, 108). Cette couche de surface (70) est formée par dépôt chimique en phase vapeur, à partir d'un composé précurseur du second matériau.
FR1262941A 2012-12-28 2012-12-28 Procede et dispositif pour la formation d'une couche de surface dans une piece creuse et piece ainsi obtenue Active FR3000416B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1262941A FR3000416B1 (fr) 2012-12-28 2012-12-28 Procede et dispositif pour la formation d'une couche de surface dans une piece creuse et piece ainsi obtenue
PCT/EP2013/077672 WO2014102188A1 (fr) 2012-12-28 2013-12-20 Procede et dispositif pour la formation d'une couche continue sur les surfaces interne et externe d'une piece creuse et piece ainsi obtenue

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1262941A FR3000416B1 (fr) 2012-12-28 2012-12-28 Procede et dispositif pour la formation d'une couche de surface dans une piece creuse et piece ainsi obtenue

Publications (2)

Publication Number Publication Date
FR3000416A1 FR3000416A1 (fr) 2014-07-04
FR3000416B1 true FR3000416B1 (fr) 2021-04-30

Family

ID=48083286

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1262941A Active FR3000416B1 (fr) 2012-12-28 2012-12-28 Procede et dispositif pour la formation d'une couche de surface dans une piece creuse et piece ainsi obtenue

Country Status (2)

Country Link
FR (1) FR3000416B1 (fr)
WO (1) WO2014102188A1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19809675C1 (de) * 1998-03-06 1999-11-25 Fraunhofer Ges Forschung Vorrichtung und Verfahren zum Diamantbeschichten von rohrförmigen Hohlkörpern begrenzter Länge sowie danach hergestellte Hohlkörper und dessen Verwendung
US7241345B2 (en) * 2003-06-16 2007-07-10 Applied Materials, Inc. Cylinder for thermal processing chamber
JP2011521106A (ja) * 2008-05-13 2011-07-21 サブ−ワン・テクノロジー・インコーポレーテッド 太陽熱およびその他の応用例におけるパイプの内面および外面のコーティング方法

Also Published As

Publication number Publication date
WO2014102188A1 (fr) 2014-07-03
FR3000416A1 (fr) 2014-07-04

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