FR2985602B1 - Procede de gravure d'un motif complexe - Google Patents
Procede de gravure d'un motif complexeInfo
- Publication number
- FR2985602B1 FR2985602B1 FR1250098A FR1250098A FR2985602B1 FR 2985602 B1 FR2985602 B1 FR 2985602B1 FR 1250098 A FR1250098 A FR 1250098A FR 1250098 A FR1250098 A FR 1250098A FR 2985602 B1 FR2985602 B1 FR 2985602B1
- Authority
- FR
- France
- Prior art keywords
- etching
- complex pattern
- complex
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
- H01L21/3083—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00555—Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity
- B81C1/00619—Forming high aspect ratio structures having deep steep walls
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00103—Structures having a predefined profile, e.g. sloped or rounded grooves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00523—Etching material
- B81C1/00531—Dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00523—Etching material
- B81C1/00539—Wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0323—Grooves
- B81B2203/033—Trenches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0369—Static structures characterized by their profile
- B81B2203/0392—Static structures characterized by their profile profiles not provided for in B81B2203/0376 - B81B2203/0384
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0128—Processes for removing material
- B81C2201/013—Etching
- B81C2201/0132—Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0128—Processes for removing material
- B81C2201/013—Etching
- B81C2201/0133—Wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0128—Processes for removing material
- B81C2201/013—Etching
- B81C2201/0135—Controlling etch progression
- B81C2201/014—Controlling etch progression by depositing an etch stop layer, e.g. silicon nitride, silicon oxide, metal
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1250098A FR2985602B1 (fr) | 2012-01-05 | 2012-01-05 | Procede de gravure d'un motif complexe |
CN201380004918.7A CN104039687A (zh) | 2012-01-05 | 2013-01-03 | 用于蚀刻复杂图案的方法 |
PCT/EP2013/050040 WO2013102637A1 (fr) | 2012-01-05 | 2013-01-03 | Procede de gravure d'un motif complexe |
EP13700005.5A EP2800722A1 (fr) | 2012-01-05 | 2013-01-03 | Procede de gravure d'un motif complexe |
US14/370,529 US9187320B2 (en) | 2012-01-05 | 2013-01-03 | Method for etching a complex pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1250098A FR2985602B1 (fr) | 2012-01-05 | 2012-01-05 | Procede de gravure d'un motif complexe |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2985602A1 FR2985602A1 (fr) | 2013-07-12 |
FR2985602B1 true FR2985602B1 (fr) | 2014-03-07 |
Family
ID=47505023
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1250098A Expired - Fee Related FR2985602B1 (fr) | 2012-01-05 | 2012-01-05 | Procede de gravure d'un motif complexe |
Country Status (5)
Country | Link |
---|---|
US (1) | US9187320B2 (fr) |
EP (1) | EP2800722A1 (fr) |
CN (1) | CN104039687A (fr) |
FR (1) | FR2985602B1 (fr) |
WO (1) | WO2013102637A1 (fr) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2974895B1 (fr) | 2011-05-02 | 2013-06-28 | Commissariat Energie Atomique | Gyrometre a capacites parasites reduites |
US9385132B2 (en) | 2011-08-25 | 2016-07-05 | Micron Technology, Inc. | Arrays of recessed access devices, methods of forming recessed access gate constructions, and methods of forming isolation gate constructions in the fabrication of recessed access devices |
FR2985602B1 (fr) | 2012-01-05 | 2014-03-07 | Commissariat Energie Atomique | Procede de gravure d'un motif complexe |
US9005463B2 (en) * | 2013-05-29 | 2015-04-14 | Micron Technology, Inc. | Methods of forming a substrate opening |
FR3008965B1 (fr) | 2013-07-26 | 2017-03-03 | Commissariat Energie Atomique | Structure d'encapsulation comprenant un capot renforce mecaniquement et a effet getter |
FR3018916B1 (fr) | 2014-03-19 | 2017-08-25 | Commissariat Energie Atomique | Capteur de mesure de pression differentielle microelectromecanique et/ou nanoelectromecanique |
HK1199605A2 (en) * | 2014-04-23 | 2015-07-03 | Master Dynamic Ltd | A method of manufacture of micro components, and components formed by such a process |
FR3021814B1 (fr) | 2014-08-08 | 2018-06-15 | Commissariat Energie Atomique | Connecteur pour la connexion en matrice entre un boitier et un support, comportant un corps principal plie |
FR3030876B1 (fr) * | 2014-12-22 | 2017-12-15 | Commissariat Energie Atomique | Procede de realisation de motifs |
CN106477514B (zh) * | 2015-08-28 | 2018-03-30 | 中芯国际集成电路制造(上海)有限公司 | Mems器件及其形成方法 |
FR3061902B1 (fr) * | 2017-01-19 | 2019-04-19 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede de realisation d'une structure mems et/ou nems comportant au moins deux elements suspendus a un support a des distances differentes dudit support |
US11181668B2 (en) | 2018-07-13 | 2021-11-23 | University Of Notre Dame Du Lac | High contrast gradient index lens antennas |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH682528A5 (fr) * | 1990-03-16 | 1993-09-30 | Westonbridge Int Ltd | Procédé de réalisation par attaque chimique d'au moins une cavité dans un substrat et substrat obtenu par ce procédé. |
CN1060821C (zh) | 1997-08-06 | 2001-01-17 | 复旦大学 | 多层硅微机械结构的掩模-无掩模腐蚀技术 |
DE19926769A1 (de) * | 1999-06-13 | 2000-12-14 | Max Planck Gesellschaft | Verfahren zur Herstellung von dünnwandigen Strukturen in leitenden Materialien und nach dem Verfahren hergestellte Strukturen |
US6884732B2 (en) | 2001-10-15 | 2005-04-26 | The Regents Of The University Of Michigan | Method of fabricating a device having a desired non-planar surface or profile and device produced thereby |
TW521062B (en) | 2002-03-05 | 2003-02-21 | Walsin Lihwa Corp | Corner compensation method and structure constructed by the same |
US7229745B2 (en) * | 2004-06-14 | 2007-06-12 | Bae Systems Information And Electronic Systems Integration Inc. | Lithographic semiconductor manufacturing using a multi-layered process |
US7307025B1 (en) * | 2005-04-12 | 2007-12-11 | Lam Research Corporation | Lag control |
JP2009269120A (ja) | 2008-05-07 | 2009-11-19 | Seiko Epson Corp | シリコン構造体の製造方法 |
US8647945B2 (en) * | 2010-12-03 | 2014-02-11 | International Business Machines Corporation | Method of forming substrate contact for semiconductor on insulator (SOI) substrate |
FR2974895B1 (fr) | 2011-05-02 | 2013-06-28 | Commissariat Energie Atomique | Gyrometre a capacites parasites reduites |
FR2985602B1 (fr) | 2012-01-05 | 2014-03-07 | Commissariat Energie Atomique | Procede de gravure d'un motif complexe |
FR3008965B1 (fr) | 2013-07-26 | 2017-03-03 | Commissariat Energie Atomique | Structure d'encapsulation comprenant un capot renforce mecaniquement et a effet getter |
-
2012
- 2012-01-05 FR FR1250098A patent/FR2985602B1/fr not_active Expired - Fee Related
-
2013
- 2013-01-03 EP EP13700005.5A patent/EP2800722A1/fr not_active Withdrawn
- 2013-01-03 WO PCT/EP2013/050040 patent/WO2013102637A1/fr active Application Filing
- 2013-01-03 CN CN201380004918.7A patent/CN104039687A/zh active Pending
- 2013-01-03 US US14/370,529 patent/US9187320B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20140342557A1 (en) | 2014-11-20 |
FR2985602A1 (fr) | 2013-07-12 |
US9187320B2 (en) | 2015-11-17 |
EP2800722A1 (fr) | 2014-11-12 |
WO2013102637A1 (fr) | 2013-07-11 |
CN104039687A (zh) | 2014-09-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 5 |
|
PLFP | Fee payment |
Year of fee payment: 6 |
|
PLFP | Fee payment |
Year of fee payment: 7 |
|
ST | Notification of lapse |
Effective date: 20190906 |