FR2962223B1 - MICROMECHANICAL SENSOR DEVICE FOR MEASURING ACCELERATION OR PRESSURE - Google Patents

MICROMECHANICAL SENSOR DEVICE FOR MEASURING ACCELERATION OR PRESSURE Download PDF

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Publication number
FR2962223B1
FR2962223B1 FR1155944A FR1155944A FR2962223B1 FR 2962223 B1 FR2962223 B1 FR 2962223B1 FR 1155944 A FR1155944 A FR 1155944A FR 1155944 A FR1155944 A FR 1155944A FR 2962223 B1 FR2962223 B1 FR 2962223B1
Authority
FR
France
Prior art keywords
pressure
sensor device
measuring acceleration
micromechanical sensor
micromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1155944A
Other languages
French (fr)
Other versions
FR2962223A1 (en
Inventor
Reinhard Neul
Axel Franke
Alexander Buhmann
Manuel Engesser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2962223A1 publication Critical patent/FR2962223A1/en
Application granted granted Critical
Publication of FR2962223B1 publication Critical patent/FR2962223B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
FR1155944A 2010-07-02 2011-07-01 MICROMECHANICAL SENSOR DEVICE FOR MEASURING ACCELERATION OR PRESSURE Active FR2962223B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010030878.1 2010-07-02
DE102010030878.1A DE102010030878B4 (en) 2010-07-02 2010-07-02 Micromechanical sensor device for measuring an acceleration, a pressure and the like

Publications (2)

Publication Number Publication Date
FR2962223A1 FR2962223A1 (en) 2012-01-06
FR2962223B1 true FR2962223B1 (en) 2018-03-02

Family

ID=45346873

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1155944A Active FR2962223B1 (en) 2010-07-02 2011-07-01 MICROMECHANICAL SENSOR DEVICE FOR MEASURING ACCELERATION OR PRESSURE

Country Status (3)

Country Link
CN (1) CN102313819B (en)
DE (1) DE102010030878B4 (en)
FR (1) FR2962223B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014219342A1 (en) * 2014-09-24 2016-03-24 Continental Teves Ag & Co. Ohg Motion detection without localization system

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4901586A (en) * 1989-02-27 1990-02-20 Sundstrand Data Control, Inc. Electrostatically driven dual vibrating beam force transducer
JPH0627134A (en) 1992-07-08 1994-02-04 Murata Mfg Co Ltd Acceleration sensor
US5275055A (en) * 1992-08-31 1994-01-04 Honeywell Inc. Resonant gauge with microbeam driven in constant electric field
DE4426163A1 (en) 1994-07-22 1996-01-25 Bosch Gmbh Robert Acceleration sensor with spring-mass systems which includes transverse beam
US20040027033A1 (en) * 2002-08-08 2004-02-12 Schiller Peter J. Solid-state acceleration sensor device and method
JP2008209389A (en) * 2006-10-13 2008-09-11 Seiko Epson Corp Acceleration sensor
DE102008002606B4 (en) 2008-06-24 2020-03-12 Robert Bosch Gmbh Micromechanical acceleration sensor with open seismic mass
CN101327592B (en) * 2008-07-23 2010-06-16 哈尔滨工业大学 Four-arm type MEMS micro-gripper integrated with piezoresistive micro-force tester

Also Published As

Publication number Publication date
DE102010030878A1 (en) 2012-01-05
FR2962223A1 (en) 2012-01-06
DE102010030878B4 (en) 2023-08-17
CN102313819B (en) 2017-04-26
CN102313819A (en) 2012-01-11

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