CN101327592B

CN101327592B - Four-arm type MEMS micro-gripper integrated with piezoresistive micro-force tester

Info

Publication number: CN101327592B
Application number: CN200810064983XA
Authority: CN
Inventors: 孙立宁; 陈涛; 陈立国; 荣伟彬; 李昕欣; 鲍海飞
Original assignee: Harbin Institute of Technology
Current assignee: Harbin Institute of Technology
Priority date: 2008-07-23
Filing date: 2008-07-23
Publication date: 2010-06-16
Anticipated expiration: 2028-07-23
Also published as: CN101327592A

Abstract

The present invention provides a four-arm MEMS micro-holder integrated with micro-force detection with piezoresistors, which comprises an electrostatic comb dent-driving structure, an end-holding structure, a supporting structure and a force detection structure. The electrostatic comb dent-driving structure is composed of static dents and dynamic dents; a voltage is loaded on the static dents and the dynamic dents; under the function of electrostatic force, the dynamic dents move toward the static dents. The end-holding structure is provided with four holding arms; wherein, the two middle holding arms are driven by the dynamic dents to approach the holding arms on both sides in order to fulfill holding; the holding arms on both sides are fixed and integrated with piezoresistors to detect holding force. The supporting structure suspends the dynamic dents and has a supporting function, and after the electrostatic force disappears, the supporting structure utilizes the owned elasticity to restore the dynamic dents back to the original positions. The force detection structure is the fixed arm of the holding end, both sides of the root of the fixed arm are integrated with sidewall piezoresistors in order to realize the detection on holding force, and wherein, the piezoresistors have the advantages of simple structure and technique and good integration. The whole structure of the four-arm MEMS micro-holder is processed on a piece of monocrystal line silicon and linked with the monocrystal line silicon by silica glass, thus realizing the supporting and insulation of a silicon structure.

Description

The four arm-type MEMS micro clamping devices that the little power of integrated piezoresistance detects

(1) technical field

The present invention relates to little mounting technology, be specifically related to the micro clamping device that the little power of a kind of integrated piezoresistance detects.

(2) background technology

The micro clip tongs technology is the important content of MEMS research, is applied to fields such as little assembling, plays an important role in the development of the research of MEMS and microminiaturized product.

Fields such as little assembly robot assembles at little part, MEMS (MEMS), precision optics have a wide range of applications.And micro-clamp directly determines the work effect of robot as the end effector of little assembly robot.The micro-clamp that research has little perceptional function is emphasis and the difficult point in little assembly robot research.

(3) summary of the invention

The object of the present invention is to provide a kind of pressure drag structure, technology characteristic of simple utilized, be integrated in the root of clamping limb by sidewall deep reaction etching, has sensitive little power measuring ability, and utilize static broach to drive and realize holding function, terminal four clamping limbs form three groups of clampers in conjunction with detecting beam, have increased four arm-type MEMS micro clamping devices of the little power detection of integrated piezoresistance of clamping range.

The objective of the invention is like this realizing: it comprises broach static drives structure, terminal clamp structure, supporting construction and power detection architecture, broach static drives structure is by deciding tooth and moving tooth is formed, deciding on-load voltage on tooth and the moving tooth, terminal clamp structure comprises four clamping limbs, the centre is pressed close to the arm of both sides under the driving of moving tooth in order to two arms finishing clamping, the arm of both sides is fixed, the power detection architecture is the fixed arm of terminal clamp structure, at the integrated sidewall pressure drag in its root both sides, connect into the Hui Sitong half-bridge structure that realization detects chucking power, it is unsettled that supporting construction will be moved tooth, utilizes self elasticity will move tooth after electrostatic force disappears and return to initial position.

The present invention also has some technical characterictics like this:

1, described four clamping limbs form three clampers, and wherein two have the power measuring ability;

2, described clamper utilizes MEMS body micromachining technology to process together on monocrystalline silicon piece, is of a size of 6.2mm * 3.5mm;

3, described moving tooth connects clamping limb by S type beam, and supporting construction comprises the beam with both ends fixed that connects moving tooth;

4, described sidewall pressure drag is integrated into the built-in beam root of terminal clamp structure by the mode of ion injection.

The present invention is to provide the four arm-type MEMS micro clamping devices that the little power of a kind of integrated piezoresistance detects.Appearance and size 6.2mm * 3.5mm, driving voltage 0-80V, clamping range 30 μ m-130 μ m, chucking power scope 3 μ N-500 μ N.It comprises broach static drives structure, terminal clamp structure, supporting construction and power detection architecture.Broach static drives structure is by deciding tooth and moving tooth is formed, and deciding on-load voltage on tooth and the moving tooth, under electrostatic force, moving teeth directional decide tooth and is moved.For increasing clamping range and integrated piezoresistance sensor, bare terminal end is designed four clamping limbs, and two middle arms are pressed close to the arm of both sides under the driving of moving tooth, finish clamping; The arm of both sides is fixed, above integrated pressure drag, be responsible for detecting the size of chucking power.It is unsettled that supporting construction will be moved tooth, and play a supporting role, and utilizes self elasticity will move tooth after electrostatic force disappears and return to initial position.The power detection architecture is the fixed arm of bare terminal end, and integrated sidewall pressure drag connects into the Hui Sitong half-bridge structure in its root both sides, finishes the detection to chucking power.

Characteristics of the present invention have:

1, the sidewall pressure drag realizes that chucking power detects.

2, four clamping limbs form three clampers, have increased clamping range, and wherein two have the power measuring ability.

3, utilize MEMS body micromachining technology, clamper and power transducing part are processed together on monocrystalline silicon piece, this invention size 6.2mm * 3.5mm, so the yield rate height on a slice 100mm monocrystalline silicon piece, high conformity.

(4) description of drawings

Fig. 1 is a MEMS micro clamping device overall schematic of the present invention;

Fig. 2 is terminal power detection architecture schematic diagram;

Fig. 3 is a MEMS micro clamping device process structure schematic diagram;

Fig. 4-Fig. 5 is the terminal microphotograph of MEMS micro clamping device;

Fig. 6-Fig. 9 is MEMS micro clamping device Electronic Speculum figure.

(5) specific embodiment

The present invention is further illustrated below in conjunction with accompanying drawing:

In conjunction with Fig. 1, present embodiment comprises broach static drives structure, terminal clamp structure, supporting construction and power detection architecture, broach static drives structure is by deciding tooth 3 and moving tooth 4 is formed, deciding on-load voltage on tooth 3 and the moving tooth 4, under electrostatic force, moving tooth 4 drives clamping limb 1 and finishes holding action to deciding tooth 3 motions.For increasing clamping range and integrated piezoresistance sensor, bare terminal end is designed four clamping limbs, and two middle arms are pressed close to the arm of both sides under the driving of moving tooth 4, finish clamping; The arm of both sides is fixed, above integrated pressure resistance sensor, be responsible for detecting the size of chucking power.It is unsettled that supporting construction will be moved tooth 4, and play a supporting role, and utilizes self elasticity will move tooth 4 after electrostatic force disappears and return to initial position.The power detection architecture is the fixed arm of bare terminal end, and integrated sidewall pressure drag connects into the Hui Sitong half-bridge structure in its root both sides, finishes the detection to chucking power, and wherein pressure drag structure, technology are simple, and integration is good.Overall structure processing by the silex glass bonding, realizes the support and the insulation of silicon structure on a slice monocrystalline silicon.

In conjunction with Fig. 1, the present invention utilizes the static drive principle, produces translation by the attraction between the comb electrodes.Moving tooth motion is ordered about in the concrete electrostatic force attraction of passing through to decide 3 pairs of moving teeth 4 of tooth, drives clamping limb 1 and swings, and finishes holding action.S type beam 2 is not only played a supporting role, and the rectilinear motion that will move tooth is converted into the swing of clamping limb, realizes clamping.Comb electrodes realizes meticulous geometry easily, and response speed is fast.Beam with both ends fixed 5 mainly plays a supportive role, and utilizes elasticity will move tooth 4 under the situation that electrostatic force disappears to return to initial position.Make full use of the movement characteristic of clamping limb, the movement arm of end and fixing power detection arm in conjunction with having formed three groups of clampers, have been increased the clamping range of clamper, and operation when can realize two objects.

In conjunction with Fig. 2, terminal chucking power detection architecture of the present invention, the mode that sidewall pressure drag 6 is injected by ion is integrated into the root that clamper power detects built-in beam 7.Control the degree of depth of injecting the back PN junction by control ion implantation dosage and energy, and guarantee lattice is not impacted.Because the action direction vertical sidewall of power, so the ion injection face forms is the thickness of pressure drag, and processes the sidewall pressure drag by deep reaction ion etching (DRIE), promptly etches the pressure drag width regions at side surface, thus the detection of realization side direction chucking power.

In conjunction with Fig. 3, the present invention utilizes MEMS body micromachining technology, by directly the single crystal silicon substrate material being processed, produces the clamper main body mechanism.Methods such as oxidation, photoetching, ion injection, burn into sputter, deep erosion have mainly been adopted in the technology.In order to form complete micro-structural, and good insulation performance, on the basis of processing, also to use bonding techniques.Realize silica-based support and insulation by silicon-Glass Bonding Technology.In conjunction with Fig. 3, silica-based 9 are bonded on the glass 10 by silicon-Glass Bonding Technology, and pad 8 is arranged on silica-based 9.

Claims

1. the four arm-type MEMS micro clamping devices that detect of the little power of an integrated piezoresistance, it is characterized in that: it comprises broach static drives structure, terminal clamp structure, supporting construction and power detection architecture, broach static drives structure is by deciding tooth and moving tooth is formed, deciding on-load voltage on tooth and the moving tooth, terminal clamp structure comprises four clamping limbs, the centre is pressed close to the arm of both sides under the driving of moving tooth in order to two arms finishing clamping, the arm of both sides is fixed, the power detection architecture is the fixed arm of terminal clamp structure, at the integrated sidewall pressure drag in its root both sides, connect into the Hui Sitong half-bridge structure that realization detects chucking power, it is unsettled that supporting construction will be moved tooth, utilizes self elasticity will move tooth after electrostatic force disappears and return to initial position.

2. the four arm-type MEMS micro clamping devices that the little power of integrated piezoresistance according to claim 1 detects is characterized in that: described four clamping limbs form three clampers, and wherein two have the power measuring ability.

3. the four arm-type MEMS micro clamping devices that the little power of integrated piezoresistance according to claim 2 detects, it is characterized in that: described clamper utilizes MEMS body micromachining technology to process together on monocrystalline silicon piece, is of a size of 6.2mm * 3.5mm.

4. the four arm-type MEMS micro clamping devices that the little power of integrated piezoresistance according to claim 3 detects is characterized in that: described moving tooth connects clamping limb by S type beam, and supporting construction comprises the beam with both ends fixed that connects moving tooth.

5. the four arm-type MEMS micro clamping devices that the little power of integrated piezoresistance according to claim 4 detects is characterized in that: the mode that described sidewall pressure drag injects by ion is integrated into the fixed arm root of terminal clamp structure.