CN1290677C - Mini clamp with dual-chip - Google Patents

Mini clamp with dual-chip Download PDF

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Publication number
CN1290677C
CN1290677C CN 200410061347 CN200410061347A CN1290677C CN 1290677 C CN1290677 C CN 1290677C CN 200410061347 CN200410061347 CN 200410061347 CN 200410061347 A CN200410061347 A CN 200410061347A CN 1290677 C CN1290677 C CN 1290677C
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China
Prior art keywords
twin lamella
bridge circuit
micro
detecting unit
deformation
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Expired - Fee Related
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CN 200410061347
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CN1623740A (en
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黄心汉
王敏
吕遐东
蔡建华
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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Abstract

The present invention discloses a pair of micro clamping jaws for double wafers, which comprises two piezoelectric ceramic double wafers, a fixing piece, a driving direct current power supply, a deformation detecting unit, a supervisory computer, a full bridge circuit and a bridge circuit power supply, wherein one end of the two double wafers is fixed on the side surface of one end of the fixing piece, and the other end is hung up. The driving direct current power supply provides driving voltage for the double wafers. The double wafers generate bent deformation under the function of the driving voltage. The magnitude and the polarity of the output voltage are controlled by the supervisory computer. The full bridge circuit is composed of four strain foils which are respectively pasted on the inner surface and the outer surface of the double wafers. The output terminal of the full bridge circuit is connected with the input terminal of the deformation detecting unit. The deformation detecting unit feeds the detected bent deformation signal of the double wafers back to the supervisory computer. The present invention has the advantages of simple structure, small volume, light weight, convenient operation, and bent deformation detecting function of jaw clamps, and can be widely suitable for micro operating robot systems and micro electro-mechanical systems.

Description

The twin lamella micro-clamp
Technical field
The invention belongs to Robotics and field of micro electromechanical technology, specifically, it is a kind of end effector of micro-manipulating robot.
Background technology
In recent years, the micro-electronic mechanical skill development rapidly, and is increasing to micro OS and need for equipment.Micro-clamp not only can be used as the paw of microoperation manipulator as a kind of typical microactuator, and in the fields such as processing, assembling, bioengineering and optical engineering of micromechanical parts good application prospects is arranged all.Therefore, micro-clamp and relevant research thereof have become an advanced subject of domestic and international micro-manipulating robot and micro electronmechanical research field.
At present, the micro-clamp kind of studying is more both at home and abroad, different according to energy supply, type of drive with the making material, electrostatic, electromagnetic type, piezoelectric type, liquid (vacuum) absorption type, marmem and light capture type micro-clamp (light pincers) etc. are arranged substantially." the miniature end effector of binding type that is used for microoperation " as people such as the F.Arai research of Japanese Nagoya university, proposed a kind of novel method of putting of picking up that is used for microoperation, pressure that this method produces based on variations in temperature in the micro-hole changes. and the absorption affinity that makes the end effector surface changes and picks up and put down object." carrying the vacuum tool of miniature object by nanometer robot " of people such as the W.Zesch research of technical college of Swiss Confederation, studied a kind of vacuum chuck instrument of forming by glass pipette and computer-controlled vacuum source, and this instrument is integrated in the robot (Namo Robot) of technical research institute of Swiss Confederation and tests, it can grasp the diamond crystal that is of a size of 100 μ m, and it is placed into the optional position.Dynamics and operating principle and experimental technique between particulate objects have been analyzed in " the machinery assembling of particulate objects three-dimensional structure " of people such as the Hideki Miyazaki of Tokyo Univ Japan research.Domestic " being applicable to the vacuum pick and place device of submillimeter level small items operation " by developments such as Central China University of Science and Technology's gold zone Chinese has been successfully applied among little assembly robot system, this device is made of vacuum unit, control module and suction pipe, by regulating the positive and negative air-pressure of pipette tip, realize reliable absorption, release and carrying operation to submillimeter level small items and part.
The technical background of introducing from above, though both at home and abroad the research of micro-clamp has been obtained some progress, also there are the following problems: some method is feasible on principle, but response speed is slow, can not satisfy the requirement of real-time operation; Most of devices have certain requirement to the shape of operand, can not adapt to the operation of special-shaped part and object, its range of application is restricted or does not have versatility.
The document that the people proposed: the GregerThomell such as Greger Thomell of Sweden Uppsala university, Mats Bexell, Jan-Ake Schweitz and Stefan Johansson.TheDesign and Fabrication of a Gripping Tool for Micomanipulation.The8 ThInternational Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Stockholm, Sweden.June 25-29,1995, PP.388-391.Select the intensity height for use, in light weightly become micro-clamp, adopt piezoelectric ceramics block to drive, amplify, make opening and closed reliable gripping and the placement of satisfying miniature object and part of jaw by machinery (structure) with the aluminium V-Ti materials processing of corrosion-resistant and high-temperature resistant.This micro-clamp belongs to indirect type of drive, the structure more complicated, and volume and appearance and size are bigger, are difficult to be applied in the micro OS based on micro-vision; Very high to material and processing technology requirement, be difficult to apply.
Summary of the invention
The objective of the invention is to overcome above-mentioned the deficiencies in the prior art part, provide a kind of simple in structure, volume is little, in light weight, easy to operate, and direct drive-type twin lamella micro-clamp with the crooked deformation measuring ability of clamp, can the submillimeter level small items and the part of difformity and material reliably be grasped, discharge and carry, a kind of end effector device of effective practicality is provided for micro-manipulating robot system and MEMS.
For achieving the above object, the technical solution used in the present invention is that a kind of twin lamella micro-clamp is made up of first twin lamella, second twin lamella, fixture, driving power, deformation detecting unit, host computer, full-bridge circuit and bridge circuit power supply thereof; One end of first twin lamella and second twin lamella is fixed on the side of fixture one end, and the other end is unsettled; Driving power is a dc source, and for twin lamella provides driving voltage, twin lamella produces crooked deformation under the effect of driving voltage, and the size of its output voltage and polarity are by PC control; Full-bridge circuit is made of four foil gauges, first foil gauge and second foil gauge stick on the outer surface and the inner surface of first twin lamella respectively, the 3rd foil gauge and the 4th foil gauge stick on the outer surface and the inner surface of second twin lamella respectively, and the output of full-bridge circuit is connected with the input of deformation detecting unit; The deformation detecting unit is used for detecting the crooked deformation of twin lamella, more crooked deformation signal is fed back to host computer.
Described deformation detecting unit can be made up of signal amplifier, wave filter, A/D converter and single-chip microcomputer, and connects successively.
Described driving power is connected with first twin lamella, second twin lamella, and full-bridge circuit all can be by the binding post on the fixture with being connected of bridge circuit power supply and deformation detecting unit.
The invention has the advantages that:
(1) adopt piezoelectric ceramics twin lamella direct drive mode, simple in structure, be easy to realize;
(2) can select the twin lamella of different length and width according to the size of operand for use;
(3) have the crooked deformation measuring ability of twin lamella, can be micro OS provides clamp crooked deformation feedback signal;
(4) volume is little, in light weight, easy to operate, can be widely used in micro-manipulating robot system and MEMS.
Description of drawings
Fig. 1 is the structural representation of an embodiment of the present invention.
Fig. 2 is the right view of fixture and twin lamella among Fig. 1.
Fig. 3 is the wiring diagram of twin lamella and driving power among Fig. 1.
Fig. 4 is the connection layout of foil gauge full-bridge circuit among Fig. 1 and the circuit diagram of deformation detecting unit.
Fig. 5 is a twin lamella working state schematic representation among Fig. 1, and wherein Fig. 5 (a) represents original state, and Fig. 5 (b) expression adds barotropic state, and Fig. 5 (c) expression adds negative pressure state.
The specific embodiment
By Fig. 1～shown in Figure 4, the present invention is made up of first twin lamella 1, second twin lamella 2, fixture 3, driving power 4, deformation detecting unit 5, host computer 6, full-bridge circuit 7 and bridge circuit power supply 8.
First twin lamella 1 and second twin lamella 2 are piezoelectric ceramic wafer, and an end of first twin lamella 1, second twin lamella 2 is separately fixed at the side of fixture 3 one ends, preferably is centrosymmetric, and the other end is unsettled, be in free state, form finger-shaped, two twin lamellas are as the clamp of micro-clamp.The other end of fixture 3 is connected with the microoperation manipulator, and fixture 3 is processed by insulating materials, and its cross section is a rectangle.Certainly, also can be other shapes such as square, circle.
Driving power 4 is the DC driven power supply, can be connected with host computer 6 by the RS232 interface, host computer 6 can be PC or industrial computer, the size of driving power 4 output voltages and polarity are by host computer 6 controls, output voltage can be connected with second twin lamella 2 with first twin lamella 1 by the binding post on the fixture 3, for twin lamella 1 and 2 provides the driving voltage of suitable size and polarity, twin lamella can produce crooked deformation under the effect of driving voltage.
The connected mode of driving power 4 and first twin lamella 1 and second twin lamella 2 as shown in Figure 3, intermediate metal film 14 and the two slice piezoelectric ceramic wafer 16 of second twin lamella 2 of output voltage one end of driving power 4 by the binding post on the fixture 3 and first twin lamella 1 is connected with 18 outer surface, intermediate metal film 17 and the two slice piezoelectric ceramic wafer 13 of first twin lamella 1 of the output voltage other end of driving power 4 by the binding post on the fixture 3 and second twin lamella 2 is connected with 15 outer surface, change the size and the polarity of driving power 4 output voltages, respective change will take place in the degree and the direction of the crooked deformation of first twin lamella 1 and second twin lamella 2.
Full-bridge circuit 7 is by the first foil gauge R 1, the second foil gauge R 2, the 3rd foil gauge R 3With the 4th foil gauge R 4Constitute the first foil gauge R 1With the second foil gauge R 2Stick on the outer surface and the inner surface of first twin lamella 1 respectively, the 3rd foil gauge R 3With the 4th foil gauge R 4Stick on the outer surface and the inner surface of second twin lamella 2 respectively, the first foil gauge R 1With the 4th foil gauge R 4Tie point, the second foil gauge R 2With the 3rd foil gauge R 3Tie point be the power input of full-bridge circuit 7, the first foil gauge R 1With the second foil gauge R 2Tie point, the 3rd foil gauge R 3With the 4th foil gauge R 4Tie point be the detection signal output of full-bridge circuit 7.The power supply input of full-bridge circuit 7 can be connected with bridge circuit power supply 8 through the binding post on the fixture 3, and bridge circuit power supply 8 provides dc source for full-bridge circuit 7, and the output of full-bridge circuit 7 can be connected through the input of the binding post on the fixture 3 with deformation detecting unit 5.
Deformation detecting unit 5 is used for detecting the size of the crooked deformation of twin lamella, and its output can be connected with host computer 6 by USB interface, and the crooked deformation signal of twin lamella is fed back to host computer 6.
Deformation detecting unit 5 can be made up of signal amplifier 9, wave filter 10, A/D converter 11 and single-chip microcomputer 12, and connects successively.Two inputs of signal amplifier 9 connect two outputs of full-bridge circuit 7, and single-chip microcomputer 12 is connected with host computer 6 through USB interface.
When the driving voltage on being applied to twin lamella was 0V, twin lamella was in original state (normality), and deformation does not bend; When driving voltage is timing, two twin lamellas curve inwardly simultaneously, and degree of crook is by the decision of driving voltage size; When driving voltage when negative, two twin lamellas are simultaneously outwardly-bent, degree of crook is by the decision of driving voltage size.By the size and the polarity of control driving power 4 outputting drive voltages, can change the degree and the direction of twin lamella bending, promptly adjust the switching degree of micro-clamp, reach reliable extracting or discharge the small items of different size and the purpose of part.
When twin lamella is in the normal state when not bending deformation, full-bridge circuit 7 is output as 0.When twin lamella bends deformation, full-bridge circuit 7 is exported the relevant small-signal of size and Orientation with the crooked deformation of twin lamella, this signal amplifies through signal amplifier 9, carry out filtering by wave filter 10 then, carry out analog-digital conversion by A/D converter 11 again, carry out data acquisition through single-chip microcomputer 12 at last, give host computer 6 numerical signal of the crooked deformation of resulting twin lamella.
Below contrast Fig. 5 (a)～Fig. 5 (c) duty of twin lamella is described.
First twin lamella 1, second twin lamella 2 are two identical rectangle thin slices, its long 3000 μ m, wide 250 μ m (see figure 2)s that can be of can be, two twin lamellas constitute micro-clamp clamp (finger) up and down, one end of two twin lamellas 1 and 2 is installed in respectively in the side socket of fixture 3 one ends, the other end is in free state, socket gap (being the extended distance of twin lamella finger when normality) is 500 μ m, and the other end of fixture 3 is connected with the microoperation manipulator.Driving power 4 can be 3646A type dc source able to programme, and 0～70V is provided DC voltage.Piezoelectric ceramics twin lamella 1 and 2 (is generally 0～70V DC voltage) and can produces crooked deformation under the effect of suitable voltage.When supply voltage was 0V, micro-clamp was in the original state (normality) shown in Fig. 5 (a); When driving power voltage be+during 70V, micro-clamp is in the closure state shown in Fig. 5 (b); When driving power voltage be-during 70V, micro-clamp is in the full open configuration shown in Fig. 5 (c), the open-ended excursion of micro-clamp is 0～1000 μ m, can adapt to extracting, release and the carrying of submillimeter level small items and part.
If satisfy extracting, release and the carrying of millimeter level object, only need to adjust the output voltage range of driving power 4, the length that changes twin lamella or the gap of original state.

Claims (3)

1. a twin lamella micro-clamp is characterized in that: be made up of first twin lamella (1), second twin lamella (2), fixture (3), driving power (4), deformation detecting unit (5), host computer (6), full-bridge circuit (7) and bridge circuit power supply (8) thereof;
One end of first twin lamella (1) and second twin lamella (2) is fixed on the side of fixture (3) one ends, and the other end is unsettled;
Driving power (4) is a dc source, and for twin lamella provides driving voltage, twin lamella produces crooked deformation under the effect of driving voltage, and the size of its output voltage and polarity are controlled by host computer (6);
Full-bridge circuit (7) is made of four foil gauges, the first foil gauge (R 1) and the second foil gauge (R 2) stick on the outer surface and the inner surface of first twin lamella (1), the 3rd foil gauge (R respectively 3) and the 4th foil gauge (R 4) sticking on the outer surface and the inner surface of second twin lamella (2) respectively, the output of full-bridge circuit (7) is connected with the input of deformation detecting unit (5);
Deformation detecting unit (5) is used for detecting the crooked deformation of twin lamella, more crooked deformation signal is fed back to host computer (6).
2. twin lamella micro-clamp according to claim 1 is characterized in that: described deformation detecting unit (5) is made up of signal amplifier (9), wave filter (10), A/D converter (11) and single-chip microcomputer (12), and connects successively.
3. twin lamella micro-clamp according to claim 1 and 2, it is characterized in that: driving power (4) is connected with first twin lamella (1), second twin lamella (2), and full-bridge circuit (7) all is by the binding post on the fixture (3) with bridge circuit power supply (8) and being connected of deformation detecting unit (5).
CN 200410061347 2004-12-13 2004-12-13 Mini clamp with dual-chip Expired - Fee Related CN1290677C (en)

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CN103213904B (en) * 2012-01-20 2015-04-01 宝山钢铁股份有限公司 Apparatus for detecting dangerous section of object taking part of hoisting machine
CN103203737A (en) * 2013-03-15 2013-07-17 北京工业大学 Electromagnetic drive type micro-clamping device
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CN109764024B (en) * 2019-03-01 2020-05-29 浙江师范大学 Air cylinder
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