CN107498575B - Flexible micro clamp with force sensor - Google Patents
Flexible micro clamp with force sensor Download PDFInfo
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- CN107498575B CN107498575B CN201710813884.6A CN201710813884A CN107498575B CN 107498575 B CN107498575 B CN 107498575B CN 201710813884 A CN201710813884 A CN 201710813884A CN 107498575 B CN107498575 B CN 107498575B
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- Prior art keywords
- flexible
- hinge
- micro
- force sensor
- gripper
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/02—Gripping heads and other end effectors servo-actuated
- B25J15/0206—Gripping heads and other end effectors servo-actuated comprising articulated grippers
- B25J15/022—Gripping heads and other end effectors servo-actuated comprising articulated grippers actuated by articulated links
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J13/00—Controls for manipulators
- B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
- B25J13/085—Force or torque sensors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/08—Gripping heads and other end effectors having finger members
Abstract
The invention discloses a flexible micro-clamp with force sensing, which comprises a micro-clamp body, a controller, an electrostatic driver and a capacitive force sensor, wherein the micro-clamp body comprises a pair of clamping arms, a flexible transmission mechanism, a flexible guide part and a base, and the pair of clamping arms are respectively connected with the electrostatic driver and the capacitive force sensor through the flexible transmission mechanism. The invention realizes the measurement of the clamping force and the environmental contact force in two mutually perpendicular directions, improves the clamping precision, has compact integral structure and reduces the manufacturing cost.
Description
Technical Field
The invention relates to the technical field of miniature automatic machinery, in particular to a flexible micro clamp with force sensing.
Background
The micro-clamp based on the flexible mechanism has the advantages of no friction, no abrasion, no need of lubrication, high motion precision, simple structure and the like. As a typical micro-actuator, a micro-gripper has wide application in the fields of micro-manipulation technology, micro-assembly systems, bioengineering, and the like. The design of the micro-clamp is various and is mainly determined by the structural form and the working characteristics of the clamp. The existing micro-gripper has a plurality of driving modes, such as electrostatic driving, electrothermal driving, piezoelectric driving, shape memory alloy driving and the like. Compared with other driving modes, the electrostatic driving has the advantages of fast response, no hysteresis nonlinearity, compatibility with an IC manufacturing process and the like.
Since the micro-gripper is generally used for gripping a micro object, in order to avoid damage to the gripped object, sensing and feedback of the gripping force (along the X-axis direction) of the micro-gripper are required. In addition, in order to avoid damage to the micro-gripper itself when the micro-gripper is in contact with the environment, sensing of the contact force (along the Y-axis direction) of the environment is also required.
The force sensors employed by the micro-gripper can take many forms, such as electro-thermal, piezoresistive, capacitive, piezoelectric, etc. Most of the existing micro-clamps with force sensing can only measure the clamping force, for example, chinese patents CN 101407060B, CN 2352945Y, CN 101327592B, etc., and can rarely measure the contact force to the environment. In order to simultaneously realize the measurement of the clamping force and the contact force, an electrothermal driving micro-clamp adopting two force sensors is proposed in the U.S. Pat. No. 5,8317245B 2, but the micro-clamp has the defects of complex structure, difficult processing and manufacturing, large size, high cost and the like. At present, the micro clamp based on the flexible mechanism can only realize one-dimensional clamping force sensing, and two-dimensional force sensing can be realized only by adopting two sensors. This results in a complex structure and high manufacturing costs for the micro-gripper. Disclosure of Invention
To address the problems of the prior art and overcome the shortcomings of prior art micro-clamps, the present invention provides a flexible micro-clamp with force sensing that is capable of sensing forces in both the clamping and contact directions.
The flexible micro-clamp with the force sensor comprises a micro-clamp body, a controller, an electrostatic driver and a capacitive force sensor, wherein the micro-clamp body comprises a pair of clamping arms, a flexible transmission mechanism, a flexible guide part and a base, and the pair of clamping arms are respectively connected with the electrostatic driver and the capacitive force sensor through the flexible transmission mechanism.
Preferably, a first clamping arm of the pair of clamping arms is connected with the electrostatic driver through a first connecting hinge of the flexible transmission mechanism, and a second clamping arm of the pair of clamping arms is connected with the capacitive force sensor through a second connecting hinge of the flexible transmission mechanism.
Preferably, the first clamping arm and the second clamping arm are respectively connected with the base through a first rotating hinge and a second rotating hinge in the flexible transmission mechanism.
Preferably, the flexible guide part comprises an actuator flexible guide beam and a sensor flexible guide beam, wherein the actuator flexible guide beam is connected with the electrostatic actuator and outputs the transverse displacement by applying the driving voltage, and the sensor flexible guide beam is connected with the capacitive force sensor to generate the vertical movement.
Preferably, the controller comprises a high voltage op-amp chip configured to generate and apply a voltage to the electrostatic actuator and a capacitance-to-voltage conversion chip configured to convert the capacitance change signal of the capacitive force sensor 8 into an output voltage signal.
Preferably, the high-voltage operational amplifier chip adopts a PA69 or OPA454 chip, and the capacitance-voltage conversion chip adopts an AD7746 or MS3110 chip.
Preferably, the capacitive force sensor is composed of a pair of vertical comb teeth and the electrostatic drive is composed of a pair of lateral comb teeth.
Preferably, the rigidity of the second clip arm, the second rotation hinge and the second connection hinge is respectively greater than the rigidity of the first clip arm, the second rotation hinge and the second connection hinge.
Preferably, the first rotation hinge and the first connection hinge are in the form of folding flexible hinges, and the second rotation hinge and the second connection hinge are in the form of a single flexible beam.
Preferably, the distance d1 between the first rotational hinge and the first attachment hinge is not equal to the distance d2 between the second rotational hinge and the second attachment hinge.
The flexible micro clamp realizes the measurement of clamping force and environmental contact force in two mutually perpendicular directions by combining a single force sensor with a transmission mechanism, and improves the clamping precision by the flexible hinge. In addition, the invention integrates the electrostatic driver and the capacitance type force sensor, so that the whole structure is compact, the invention is compatible with the IC manufacturing process, batch processing can be carried out on the silicon wafer, and the manufacturing cost is reduced.
Drawings
FIG. 1 is a schematic diagram of a flexible micro-clamp with force sensing according to the present invention.
Reference numerals:
1-a first clamping arm; 2-a second clamping arm; 3-a first rotating hinge; 4-a second swivel hinge; 5-a first connecting hinge; 6-a second connecting hinge; 7-an electrostatic drive; 8-capacitive force sensors; 9-the active end of the electrostatic actuator 7; 10-the active end of the capacitive force sensor 8; 11-actuator flexible guide beam; 12-a sensor flexible guide beam; 13-base.
FIG. 2 is a schematic diagram of the electrode division of a micro-gripper according to the present invention.
Reference numerals:
14. 15-positive and negative poles of electrostatic actuator; 16. 17-an electrode to ground; 18. 19, 20-electrodes at the output of the capacitive force sensor.
Detailed Description
The invention is described in further detail below with reference to the following figures and specific examples, which are not intended to limit the invention.
The present embodiment relates to a flexible micro-gripper with force sensing, as shown in fig. 1, which includes a micro-gripper body, a controller (not shown), an electrostatic actuator 7, and a capacitive force sensor 8. Wherein, the body of micro-gripper specifically includes first arm lock 1, second arm lock 2, flexible drive mechanism and base 13, and first arm lock 1 and second arm lock 2 are used for the centre gripping object, and flexible drive mechanism comprises flexible hinge, can avoid defects such as friction, clearance of traditional chain connection like this, has guaranteed the precision of centre gripping. The electrostatic actuator 7 and the capacitive force sensor 8 are integrated, and are compact and compatible with IC manufacturing processes, such as batch processing on silicon wafers. The controller is used for applying voltage and performing signal conversion to the electrostatic driver 7, wherein the controller comprises a high-voltage operational amplifier chip and a capacitance-voltage conversion chip, specifically, the high-voltage operational amplifier chip is used for generating voltage and applying the voltage to the electrostatic driver 7, the high-voltage operational amplifier chip can preferably adopt chips such as PA69 and OPA454, the generated voltage is generally 0 to 150 volts, the capacitance-voltage conversion chip is used for converting a capacitance change signal of the capacitive force sensor 8 into an output voltage signal, the chips such as AD7746 and MS3110 can be adopted, the electrostatic driver 7 and the capacitive force sensor 8 are arranged in the base 13, and the capacitive force sensor 8 is preferably composed of a vertical comb tooth pair; the electrostatic actuator 7 is operated by the voltage applied by the controller to drive the arms, and preferably the electrostatic actuator 7 is comprised of a pair of transverse comb teeth.
Further, in the flexible micro clamp according to the present invention, the first clamp arm 1 and the second clamp arm 2 are respectively connected to the electrostatic actuator 7 and the capacitive force sensor 8 through the flexible transmission mechanism, specifically, the first clamp arm 1 is connected to the movable end 9 of the electrostatic actuator 7 through the first connection hinge 5, the second clamp arm 2 is connected to the movable end 10 of the capacitive force sensor 8 through the second connection hinge 6, and the first clamp arm 1 and the second clamp arm 2 are respectively connected to the base 13 through the first rotation hinge 3 and the second rotation hinge 4, so as to better fix the positions of the two clamp arms.
Furthermore, in order to measure the clamping force and the environmental contact force more accurately, the flexible micro-gripper further includes a plurality of actuator flexible guide beams 11, which are connected to the movable end 9 of the electrostatic actuator 7, and output pure lateral displacement by applying driving voltage, in this embodiment, four flexible guide beams 11 are preferably used; the flexible micro-gripper further comprises a number of sensor flexible guide beams 12 connected to the free end 10 of the capacitive force sensor 8 for generating a pure vertical movement which causes a change in the differential capacitance of the capacitive force sensor 8, in this embodiment preferably four flexible guide beams 12 are used. Through the arrangement, the accurate measurement of the clamping force applied to the second clamping arm 2 along the X-axis direction and the environmental contact force along the Y-axis direction can be realized, so that the force measurement in two directions is realized through a single sensor.
In the clamping direction, the rigidity of the second clamping arm 2 and the second rotating hinge 4 and the second connecting hinge 6 connected with the second clamping arm is greater than that of the first clamping arm 1 and the first rotating hinge 3 and the first connecting hinge 5 connected with the first clamping arm, so that the second clamping arm 2 can generate smaller elastic deformation in the process of clamping an object.
Since the clamping operation is performed by mainly depending on the displacement of the first clamping arm 1 when clamping an object, considering that the elastic deformation generated by the first clamping arm 1 and the portion connected thereto is large, it is preferable that the first rotating hinge 3 and the first connecting hinge 5 may be in the form of a folding flexible hinge to reduce the stress applied to the material, and considering that the elastic deformation generated by the second clamping arm 2 and the portion connected thereto is small, it is preferable that the second rotating hinge 4 and the second connecting hinge 6 may be in the form of a single flexible beam.
In addition, the distance d1 between the first rotating hinge 3 and the first connecting hinge 5 of the flexible micro-gripper is not equal to the distance d2 between the second rotating hinge 4 and the second connecting hinge 6, wherein the distance d1 can be selected according to the displacement amplification factor for transmitting the displacement of the movable end 9 of the electrostatic actuator to the tail end of the clamping arm 1, and the distance d2 can be selected according to the sensitivity requirement for sensing in two directions, namely the rigidity in two directions.
In addition, the flexible micro clamp can adopt a silicon wafer on an insulator, and is processed and produced by an etching process, so that the maximum batch production can be realized, and the manufacturing cost is reduced.
When the flexible micro-gripper in the present embodiment is used to grip an object, the flexible micro-gripper may be moved to the vicinity of the object, so that the object is located between the first clamping arm 1 and the second clamping arm 2, and then the controller applies the driving voltage to drive the first clamping arm 1 to move and grip the object, so that the object is gripped by the first clamping arm 1 and the second clamping arm 2. At this moment, the clamping force along the X-axis direction is transmitted to the second clamping arm 2, and is transmitted to the movable end 10 of the capacitive force sensor 8 via the second connecting hinge 6, so that the clamping force along the X-axis direction is sensed, and meanwhile, the environmental contact force along the Y-axis direction of the second clamping arm 2 is also transmitted to the movable end 10 of the capacitive force sensor 8, so that the force measurement and sensing can be realized in two perpendicular directions by using a single capacitive force sensor 8.
As shown in fig. 2, the device layer of the micro-gripper is etched into seven major areas, each with an electrode attached. The electrodes 14-20 may be formed using a process of sputtering aluminum or gold to facilitate electrical connection to corresponding ports of a controller (not shown).
While there has been described what are believed to be the preferred embodiments of the present invention, it will be apparent to those skilled in the art that various changes and modifications can be made therein without departing from the principles of the invention, and it is intended to cover all such changes and modifications as fall within the true scope of the invention.
Claims (6)
1. A flexible micro-gripper with force sensing function comprises a micro-gripper body, a controller, an electrostatic driver (7) and a capacitive force sensor (8), wherein the micro-gripper body comprises a pair of clamping arms, a flexible transmission mechanism, a flexible guide part and a base (13), and the pair of clamping arms are respectively connected with the electrostatic driver (7) and the capacitive force sensor (8) through the flexible transmission mechanism;
a first clamping arm (1) in the pair of clamping arms is connected with the electrostatic driver (7) through a first connecting hinge (5) in the flexible transmission mechanism, and a second clamping arm (2) is connected with the capacitive force sensor (8) through a second connecting hinge (6) in the flexible transmission mechanism;
the flexible guide component comprises a driver flexible guide beam (11) and a sensor flexible guide beam (12), wherein the driver flexible guide beam (11) is connected with the electrostatic driver (7) and outputs transverse displacement by applying driving voltage, and the sensor flexible guide beam (12) is connected with the capacitive force sensor (8) to generate vertical motion;
the rigidity of the second clamping arm (2), the second rotating hinge (4) and the second connecting hinge (6) is correspondingly greater than that of the first clamping arm (1), the first rotating hinge (3) and the first connecting hinge (5); the first rotary hinge (3) and the first connecting hinge (5) take the form of a folding flexible hinge, and the second rotary hinge (4) and the second connecting hinge (6) take the form of a single flexible beam.
2. Flexible microclamp according to claim 1, characterized in that said first arm (1) and said second arm (2) are coupled with said base (13) by means of a first rotary hinge (3) and a second rotary hinge (4) respectively in said flexible transmission mechanism.
3. The flexible micro-gripper of claim 1, wherein the controller comprises a high voltage op-amp chip configured to generate and apply a voltage to the electrostatic actuator (7) and a capacitance-to-voltage conversion chip configured to convert a capacitance change signal of the capacitive force sensor (8) into an output voltage signal.
4. The flexible micro-gripper according to claim 3, wherein the high voltage operational amplifier chip is PA69 or OPA454 chip, and the capacitance-voltage conversion chip is AD7746 or MS3110 chip.
5. The flexible micro-gripper according to claim 4, characterized in that the capacitive force sensor (8) consists of a vertical comb-tooth pair and the electrostatic drive (7) consists of a transverse comb-tooth pair.
6. Flexible micro-gripper according to claim 1, characterized in that the distance d1 between the first rotation hinge (3) and the first connection hinge (5) is not equal to the distance d2 between the second rotation hinge (4) and the second connection hinge (6).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710813884.6A CN107498575B (en) | 2017-09-11 | 2017-09-11 | Flexible micro clamp with force sensor |
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| CN201710813884.6A CN107498575B (en) | 2017-09-11 | 2017-09-11 | Flexible micro clamp with force sensor |
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| CN107498575A CN107498575A (en) | 2017-12-22 |
| CN107498575B true CN107498575B (en) | 2020-11-17 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108656140A (en) * | 2018-06-26 | 2018-10-16 | 李欣悦 | A kind of piezoelectric fabric driving micro-clamp and application method |
| CN109231152B (en) * | 2018-09-30 | 2020-06-16 | 重庆大学 | Micro-clamp for measuring clamping force and clamping jaw displacement by using fiber Fabry-Perot interferometer |
| CN111494014B (en) * | 2020-05-06 | 2021-06-01 | 苏州康多机器人有限公司 | Master hand control clamp for surgical robot |
| CN113188701B (en) * | 2021-06-30 | 2021-09-21 | 江西农业大学 | Clamping force detection mechanism based on space micro-gripper and use method thereof |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH07195287A (en) * | 1993-12-29 | 1995-08-01 | Hitachi Constr Mach Co Ltd | Contact type position transducer of force control robot |
| CN101407060B (en) * | 2008-11-14 | 2010-11-17 | 南开大学 | Microgripper based on MEMS technology and control system |
| CN102079498B (en) * | 2010-11-18 | 2012-07-04 | 大连理工大学 | Flexible electrothermal drive micro-gripper and manufacturing process method |
| CN104647347B (en) * | 2014-09-26 | 2016-08-24 | 浙江大学 | The piezoelectric microgripper amplified based on flexible hinge |
| US9708135B2 (en) * | 2015-10-02 | 2017-07-18 | University Of Macau | Compliant gripper with integrated position and grasping/interaction force sensing for microassembly |
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