CN107498575A - A kind of flexible micro-clamp with force snesor - Google Patents
A kind of flexible micro-clamp with force snesor Download PDFInfo
- Publication number
- CN107498575A CN107498575A CN201710813884.6A CN201710813884A CN107498575A CN 107498575 A CN107498575 A CN 107498575A CN 201710813884 A CN201710813884 A CN 201710813884A CN 107498575 A CN107498575 A CN 107498575A
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- China
- Prior art keywords
- flexible
- micro
- jig arm
- clamp
- turning joint
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- 230000007246 mechanism Effects 0.000 claims abstract description 17
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 9
- 238000007514 turning Methods 0.000 claims description 26
- 238000006243 chemical reaction Methods 0.000 claims description 9
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 230000008859 change Effects 0.000 claims description 4
- 230000005611 electricity Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 238000005259 measurement Methods 0.000 abstract description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 230000005489 elastic deformation Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/02—Gripping heads and other end effectors servo-actuated
- B25J15/0206—Gripping heads and other end effectors servo-actuated comprising articulated grippers
- B25J15/022—Gripping heads and other end effectors servo-actuated comprising articulated grippers actuated by articulated links
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J13/00—Controls for manipulators
- B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
- B25J13/085—Force or torque sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/08—Gripping heads and other end effectors having finger members
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Human Computer Interaction (AREA)
- Manipulator (AREA)
- Micromachines (AREA)
Abstract
The present invention discloses a kind of flexible micro-clamp with power sensing, it includes micro-clamp body, controller, electrostatic actuator, capacitive force transducer, wherein, micro-clamp body includes a pair of jig arm, flexible drive mechanism, flexible guiding part and pedestal, and a pair of jig arm are connected with electrostatic actuator and capacitive force transducer respectively by flexible drive mechanism.The present invention realizes the measurement to chucking power and environment contact force in two orthogonal directions, improves the precision of clamping, and compact overall structure, reduces manufacturing cost.
Description
Technical field
The present invention relates to minimum automatic machine tool technical field, specifically a kind of flexible micro-clamp with power sensing.
Background technology
Micro-clamp based on compliant mechanism has without friction, without abrasion, without lubrication, kinematic accuracy height, simple structure etc.
Advantage.As typical microactrator, micro-clamp has wide in the fields such as microoperation technology, microassembly system, bioengineering
General application.The design form of micro-clamp is varied, is mainly determined by the structure type and work characteristics of clamp.It is existing micro-
Clamp has a variety of type of drive, such as electrostatic drive, electrothermal drive, Piezoelectric Driving, marmem driving mode.With it
He compares type of drive, electrostatic drive have the advantages that response it is fast, without Hysteresis Nonlinear, it is compatible with IC manufacturing process.
Because micro-clamp is generally used for the gripping to small items, in order to avoid to held object cause damage, it is necessary to
The chucking power of micro-clamp is sensed and fed back (along X-direction).It is in addition, micro- to avoid micro-clamp from being caused when being contacted with environment
The damage of clamp in itself, it is also necessary to sensed to the contact force of environment (along Y direction).
The force snesor that micro-clamp uses has diversified forms, such as electrothermal, pressure resistance type, condenser type, piezoelectric type.It is existing
The micro-clamp with power sensing can only mostly realize chucking power is measured, such as Chinese patent CN101407060 B,
CN2352945 Y, CN101327592 B etc., it is less able to realize the measurement to the contact force of environment.In order to realize to folder simultaneously
The measurement of holding force and contact force, United States Patent (USP) US8317245 B2 propose a kind of electrothermally actuated microengine using two force snesors
Clamp, but the micro-clamp have the shortcomings that it is complicated, be difficult to fabricate, size is big, cost is high.At present, based on flexibility
The micro-clamp of mechanism can only mostly realize one-dimensional chucking power sensing, it is necessary to which the power that could realize two dimension using two sensors passes
Sense.This has resulted in that micro-clamp is complicated, manufacturing cost is high.The content of the invention
For produced problem in the prior art, the shortcomings that overcoming existing micro-clamp, the present invention, which provides, a kind of there is power to pass
The flexible micro-clamp of sense, it can be sensed to the power for clamping and contacting in both direction.
Specifically, the present invention provide it is a kind of with power sensing flexible micro-clamp, it include micro-clamp body, controller,
Electrostatic actuator, capacitive force transducer, wherein, micro-clamp body includes a pair of jig arm, flexible drive mechanism, flexible guiding portion
Part and pedestal, a pair of jig arm are connected with electrostatic actuator and capacitive force transducer respectively by flexible drive mechanism.
Preferably, the first jig arm in a pair of jig arm is driven by the first connects hinge in flexible drive mechanism and electrostatic
Dynamic device is connected, and the second jig arm is connected by the second connects hinge in flexible drive mechanism with capacitive force transducer.
Preferably, the first jig arm and the second jig arm pass through the first turning joint and second in flexible drive mechanism respectively
Turning joint couples with pedestal.
Preferably, flexible guiding part includes driver flexible guiding beam and sensor guide beam, wherein, driver is soft
Property guide beam be connected with electrostatic actuator, by applying driving voltage, to export lateral displacement, sensor flexible guiding beam with
Capacitive force transducer is connected, to produce vertical motion.
Preferably, controller includes high pressure amplifier chip and capacitance-voltage conversion chip, high pressure amplifier chip configuration ground
For producing voltage and being applied to electrostatic actuator, capacitance-voltage conversion chip configuration ground is used for capacitive force transducer 8
Capacitance change signal is converted to output voltage signal.
Preferably, high pressure amplifier chip uses PA69 or OPA454 chips, capacitance-voltage conversion chip uses
AD7746 or MS3110 chips.
Preferably, capacitive force transducer by vertical broach to forming, electrostatic actuator is by horizontal broach to forming.
Preferably, the rigidity of the second jig arm, the second turning joint and the second connects hinge be correspondingly greater than the first jig arm,
The rigidity of second turning joint and the second connects hinge.
Preferably, the first turning joint and the first connects hinge use folding type flexible hinge format, the second rotating hinge
Chain and the second connects hinge use single flexible beam form.
Preferably, distance d1 is connected with the second turning joint and second between the first turning joint and the first connects hinge
The distance between hinge d2 is unequal.
Flexible micro-clamp of the present invention, realized by single force snesor combination transmission mechanism and hung down mutually at two
The upward measurement to chucking power and environment contact force of Nogata, and improve by flexible hinge the precision of clamping.In addition, this
Invention passes through integrated static driver and capacitive force transducer so that compact overall structure, IC manufacturing process is compatible with, can be
Batch machining is carried out on Silicon Wafer, reduces manufacturing cost.
Brief description of the drawings
Fig. 1 is the structural representation of the flexible micro-clamp of the present invention with power sensing.
Reference：
The jig arm of 1- first；The jig arm of 2- second；The turning joints of 3- first；The turning joints of 4- second；The connects hinges of 5- first；6-
Second connects hinge；7- electrostatic actuators；8- capacitive force transducers；The movable end of 9- electrostatic actuators 7；10- capacitive forces
The movable end of sensor 8；11- driver flexible guiding beams；12- sensor flexible guiding beams；13- pedestals.
Fig. 2 is the electrode division schematic diagram of micro-clamp of the present invention.
Reference：
14th, the positive and negative electrode of 15- electrostatic actuators；16th, the electrode of 17- earth terminals；18th, 19,20- capacitive force transducers
Output end electrode.
Embodiment
The present invention is described in further detail with specific implementation example below in conjunction with the accompanying drawings, but not as to the present invention's
Limit.
The present embodiment is related to a kind of flexible micro-clamp with power sensing, as shown in figure 1, it includes micro-clamp body, control
Device (not shown) processed, electrostatic actuator 7, capacitive force transducer 8.Wherein, micro-clamp body specifically includes the first jig arm
1st, the second jig arm 2, flexible drive mechanism and pedestal 13, the first jig arm 1 and the second jig arm 2 are used to clamp object, Flexible Transmission machine
Structure is made up of flexible hinge, the shortcomings of can so avoiding friction, the gap of traditional chain fitting, ensure that the precision of clamping.It is quiet
Electric drive 7 and capacitive force transducer 8 are installed using integrated form, compact-sized, are compatible with IC manufacturing process, such as can be
Batch machining is carried out on Silicon Wafer.Controller is used to apply voltage to electrostatic actuator 7 and carries out signal conversion, wherein, control
Device includes high pressure amplifier chip and capacitance-voltage conversion chip, and specifically, high pressure amplifier chip is used to produce voltage and be applied to
Electrostatic actuator 7, high pressure amplifier chip can preferably use chip, the caused voltages such as PA69, OPA454 to be generally 0 to 150
Volt, capacitance-voltage conversion chip are used to the capacitance change signal of capacitive force transducer 8 being converted to output voltage signal,
Chip, electrostatic actuator 7 and the capacitive force transducers 8 such as AD7746, MS3110 can be used to be arranged in pedestal 13, capacitive force
Sensor 8 is preferably by vertical broach to forming；The voltage driving jig arm that electrostatic actuator 7 is applied by controller is grasped
Make, as a preferred embodiment, electrostatic actuator 7 by horizontal broach to forming.
Further, in flexible micro-clamp of the present invention, the first jig arm 1 and the second jig arm 2 pass through Flexible Transmission
Mechanism is connected with electrostatic actuator 7 and capacitive force transducer 8 respectively, and specifically, the first jig arm 1 passes through the first connects hinge
5 are connected with the movable end 9 of electrostatic actuator 7, and the second jig arm 2 passes through the second connects hinge 6 and the work of capacitive force transducer 8
Moved end 10 is connected, and the first jig arm 1 and the second jig arm 2 pass through the first turning joint 3 and the second turning joint 4 and pedestal 13 respectively
Connection, so that preferably the position of two jig arm to be fixed.
Further, in order to carry out more accurate measurement to chucking power and environment contact force, flexible micro-clamp also wraps
Some driver flexible guiding beams 11 are included, it is connected with the movable end 9 of electrostatic actuator 7, by applying driving voltage, with
Purely lateral displacement is exported, in the present embodiment, it is preferred to use four flexible guiding beams 11；If in addition, flexible micro-clamp also includes
Dry root sensor flexible guiding beam 12, it is connected with the movable end 10 of capacitive force transducer 8, to produce pure vertical motion,
This vertical motion can cause the differential capacitance of capacitive force transducer 8 to change, in the present embodiment, it is preferred to use four flexibilities
Guide beam 12.It can be realized to the second jig arm 2 along chucking power suffered by X-direction and the ring along Y direction by this set
The accurate measurement of border contact force, so as to realize the measurement to the power in both direction by single sensor.
On clamping direction, the second jig arm 2 and its second turning joint 4 and the rigidity of the second connects hinge 6 that are connected
More than the first jig arm 1 and its first turning joint 3 being connected and the rigidity of the first connects hinge 5, the so mistake in clamping object
Cheng Zhong so that the second jig arm 2 can produce smaller elastic deformation.
Displacement progress clipping operation is carried out due to when clamping object, relying primarily on the first jig arm 1, it is contemplated that the first jig arm
1 and coupled part caused by elastic deformation it is larger, as a preferred embodiment, the first turning joint 3 and the first connects hinge 5
Folding type flexible hinge format can be used, to reduce the stress suffered by material, while in view of the second jig arm 2 and coupled
Elastic deformation is smaller caused by part, as a preferred embodiment, the second turning joint 4 and the second connects hinge 6 can use it is single soft
Property beam form.
In addition, distance d1 and the second turning joint between the first turning joint 3 of flexible micro-clamp and the first connects hinge 5
4 and second the distance between turning joint 6 d2 it is unequal, wherein, distance d1 size can be according to by the work of electrostatic actuator
The displacement of moved end 9 is delivered to the displacement equations multiple of the end of jig arm 1 to select, and distance d2 size can be according to both direction
The sensitivity requirement of sensing, i.e., rigidity size in both direction select.
In addition, flexible micro-clamp of the present invention can use the Silicon Wafer on insulator, processed using etch process
Production, so that maximum batch production can be realized, reduce manufacturing cost.
When the flexible micro-clamp in using the present embodiment grips object, it is attached flexible micro-clamp can be moved to object first
Closely, object is between the first jig arm 1 and the second jig arm 2, driving voltage is then applied by controller, to drive the first jig arm
1 moves clamping object so that object is clamped by the first jig arm 1 and the second jig arm 2.Now, along the chucking power quilt of X-direction
It is transferred at the second jig arm 2, and the movable end 10 of capacitive force transducer 8 is transferred to via the second connects hinge 6, so as to realizes
To the sensing along X-direction chucking power, while the second jig arm 2 is also delivered to condenser type along environment contact force suffered by Y direction
The movable end 10 of force snesor 8, so that can be realized using single capacitive force transducer 8 real in two perpendicular direction
The now measurement to power and sensing.
As shown in Fig. 2 the device layer of micro-clamp is processed as seven main regions using etch process, each region has one
Individual electrode.Electrode 14-20 can use sputtered aluminum or gold technique processing generation, in order to controller (not shown)
Corresponding ports are electrically connected.
Certainly, described above is the preferred embodiment of the present invention, it is noted that for the ordinary skill of the art
For personnel, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications
It is considered as protection scope of the present invention.
Claims (10)
1. a kind of flexible micro-clamp with power sensing, it includes micro-clamp body, controller, electrostatic actuator (7), condenser type
Force snesor (8), wherein, the micro-clamp body includes a pair of jig arm, flexible drive mechanism, flexible guiding part and pedestal
(13), a pair of jig arm are passed with the electrostatic actuator (7) and the capacitive force respectively by the flexible drive mechanism
Sensor (8) is connected.
2. flexible micro-clamp according to claim 1, it is characterised in that the first jig arm (1) in a pair of jig arm is logical
The first connects hinge (5) crossed in the flexible drive mechanism is connected with the electrostatic actuator (7), and the second jig arm (2) is logical
The second connects hinge (6) crossed in the flexible drive mechanism is connected with the capacitive force transducer (8).
3. flexible micro-clamp according to claim 2, it is characterised in that first jig arm (1) and second jig arm
(2) the first turning joint (3) in the flexible drive mechanism and the second turning joint (4) and the pedestal (13) are passed through respectively
Connection.
4. the flexible micro-clamp according to any one of claim 1-3, it is characterised in that the flexible guiding part includes
Driver flexible guiding beam (11) and sensor guide beam (12), wherein, the driver flexible guiding beam (11) with it is described quiet
Electric drive (7) is connected, by applying driving voltage, to export lateral displacement, the sensor flexible guiding beam (12) with
The capacitive force transducer (8) is connected, to produce vertical motion.
5. flexible micro-clamp according to claim 4, it is characterised in that the controller includes high pressure amplifier chip and electricity
Appearance-voltage conversion chip, the high pressure amplifier chip configuration ground are used to produce voltage and are applied to the electrostatic actuator (7),
The capacitance-voltage conversion chip configuration ground is used to the capacitance change signal of the capacitive force transducer 8 being converted to output
Voltage signal.
6. flexible micro-clamp according to claim 5, it is characterised in that the high pressure amplifier chip using PA69 or
OPA454 chips, the capacitance-voltage conversion chip use AD7746 or MS3110 chips.
7. flexible micro-clamp according to claim 6, it is characterised in that the capacitive force transducer (8) is by vertically combing
Tooth is to composition, and the electrostatic actuator (7) is by horizontal broach to forming.
8. flexible micro-clamp according to claim 2, it is characterised in that second jig arm (2), the second turning joint
(4) and the rigidity of the second connects hinge (6) is correspondingly greater than the first jig arm (1), the first turning joint (3) and the first connects hinge
(5) rigidity.
9. flexible micro-clamp according to claim 8, it is characterised in that first turning joint (3) and described first
Connects hinge (5) uses folding type flexible hinge format, and second turning joint (4) and second connects hinge (6) are adopted
With single flexible beam form.
10. flexible micro-clamp according to claim 9, it is characterised in that first turning joint (3) and described first
The distance between distance d1 and second turning joint (4) and second connects hinge (6) d2 is not between connects hinge (5)
It is equal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710813884.6A CN107498575B (en) | 2017-09-11 | 2017-09-11 | Flexible micro clamp with force sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710813884.6A CN107498575B (en) | 2017-09-11 | 2017-09-11 | Flexible micro clamp with force sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107498575A true CN107498575A (en) | 2017-12-22 |
| CN107498575B CN107498575B (en) | 2020-11-17 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710813884.6A Active CN107498575B (en) | 2017-09-11 | 2017-09-11 | Flexible micro clamp with force sensor |
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| Country | Link |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108656140A (en) * | 2018-06-26 | 2018-10-16 | 李欣悦 | A kind of piezoelectric fabric driving micro-clamp and application method |
| CN109231152A (en) * | 2018-09-30 | 2019-01-18 | 重庆大学 | The micro-clamp of chucking power and clamping jaw displacement is measured using Fiber-optical Fabry-Perot Interferometric Cavity |
| CN113188701A (en) * | 2021-06-30 | 2021-07-30 | 江西农业大学 | Clamping force detection mechanism based on space micro-gripper and use method thereof |
| WO2021223625A1 (en) * | 2020-05-06 | 2021-11-11 | 苏州康多机器人有限公司 | Master manipulator gripper for surgical robot |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07195287A (en) * | 1993-12-29 | 1995-08-01 | Hitachi Constr Mach Co Ltd | Contact type position transducer of force control robot |
| CN101407060A (en) * | 2008-11-14 | 2009-04-15 | 南开大学 | Microgripper based on MEMS technology and control system |
| CN102079498B (en) * | 2010-11-18 | 2012-07-04 | 大连理工大学 | Flexible electrothermal drive micro-gripper and manufacturing process method |
| CN104647347B (en) * | 2014-09-26 | 2016-08-24 | 浙江大学 | The piezoelectric microgripper amplified based on flexible hinge |
| US20170096305A1 (en) * | 2015-10-02 | 2017-04-06 | Universisty Of Macau | Compliant gripper with integrated position and grasping/interaction force sensing for microassembly |
-
2017
- 2017-09-11 CN CN201710813884.6A patent/CN107498575B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07195287A (en) * | 1993-12-29 | 1995-08-01 | Hitachi Constr Mach Co Ltd | Contact type position transducer of force control robot |
| CN101407060A (en) * | 2008-11-14 | 2009-04-15 | 南开大学 | Microgripper based on MEMS technology and control system |
| CN102079498B (en) * | 2010-11-18 | 2012-07-04 | 大连理工大学 | Flexible electrothermal drive micro-gripper and manufacturing process method |
| CN104647347B (en) * | 2014-09-26 | 2016-08-24 | 浙江大学 | The piezoelectric microgripper amplified based on flexible hinge |
| US20170096305A1 (en) * | 2015-10-02 | 2017-04-06 | Universisty Of Macau | Compliant gripper with integrated position and grasping/interaction force sensing for microassembly |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108656140A (en) * | 2018-06-26 | 2018-10-16 | 李欣悦 | A kind of piezoelectric fabric driving micro-clamp and application method |
| CN109231152A (en) * | 2018-09-30 | 2019-01-18 | 重庆大学 | The micro-clamp of chucking power and clamping jaw displacement is measured using Fiber-optical Fabry-Perot Interferometric Cavity |
| CN109231152B (en) * | 2018-09-30 | 2020-06-16 | 重庆大学 | Micro-clamp for measuring clamping force and clamping jaw displacement by using fiber Fabry-Perot interferometer |
| WO2021223625A1 (en) * | 2020-05-06 | 2021-11-11 | 苏州康多机器人有限公司 | Master manipulator gripper for surgical robot |
| CN113188701A (en) * | 2021-06-30 | 2021-07-30 | 江西农业大学 | Clamping force detection mechanism based on space micro-gripper and use method thereof |
| CN113188701B (en) * | 2021-06-30 | 2021-09-21 | 江西农业大学 | Clamping force detection mechanism based on space micro-gripper and use method thereof |
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| Publication number | Publication date |
|---|---|
| CN107498575B (en) | 2020-11-17 |
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