CN102313819A - Be used to measure the sensor device of the micromechanics of acceleration, pressure and similar parameters - Google Patents
Be used to measure the sensor device of the micromechanics of acceleration, pressure and similar parameters Download PDFInfo
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- CN102313819A CN102313819A CN2011101832213A CN201110183221A CN102313819A CN 102313819 A CN102313819 A CN 102313819A CN 2011101832213 A CN2011101832213 A CN 2011101832213A CN 201110183221 A CN201110183221 A CN 201110183221A CN 102313819 A CN102313819 A CN 102313819A
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- 230000001133 acceleration Effects 0.000 title claims abstract description 42
- 230000000694 effects Effects 0.000 claims abstract description 25
- 238000006243 chemical reaction Methods 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 239000000725 suspension Substances 0.000 claims description 26
- 239000002070 nanowire Substances 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 10
- 230000002349 favourable effect Effects 0.000 description 10
- 230000035945 sensitivity Effects 0.000 description 4
- 230000000295 complement effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 206010039203 Road traffic accident Diseases 0.000 description 1
- 208000004350 Strabismus Diseases 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
- G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Abstract
The present invention relates to a kind of sensor device that is used to measure the micromechanics of acceleration, pressure and similar parameters.The sensor device of this micromechanics comprises substrate, preferably have with the mode of activity flexibly be arranged in said on-chip test block, be used for by means of the power that piezoelectric effect will act on said test block convert into preferred electric signal conversion equipment, be used for to the power that said test block loads extra power load device especially electrode, be used to control the control device that said power loads device; The wherein said control device so said power of control loads device; Thereby temporarily especially periodically load said extra power, and the present invention relates to a kind of corresponding method to said test block.
Description
Technical field
The present invention relates to a kind of sensor device of the micromechanics that is used for acceleration, pressure and similar parameters are measured.
Background technology
Need be used for diversified applicable cases such as the sensor device of the micromechanics of the form of acceleration transducer; Especially in motor vehicle, be used for the measurement of the acceleration that the stability program of electronics uses or also be used for judging whether the air bag that is installed in the motor vehicle should be owing to traffic accident triggers.The Another application field of acceleration transducer is the consumer field; Here such as the field that is mobile phone; Said acceleration transducer is used for coming the rotary display screen content by the location of mobile phone for said mobile phone, is used for like this can be under the situation of the position that does not rely on mobile phone showing to the user with upright readable form the content corresponding of display screen.
From DE 44 26 163 A1, disclose a kind of acceleration transducer, this acceleration transducer is made up of spring-quality system and its bent beam vibrates with given in advance resonance frequency.Said bent beam so is clamped between the holder at this, makes it form arch in the time spent of doing that lacks outside power.Said bump forms the instability of machinery, and the instability of this machinery can deforming as the time spent of power occur.
From DE 10 2,008 002 606 A1, disclose the acceleration transducer of the micromechanics with unlimited test block, the acceleration transducer of this micromechanics comprises substrate, suspension, test block and fixing capacitive electrode.Said test block is suspended on above the said substrate by means of said suspension and has mass cg at this.Said being suspended in has at least two point of fixity on the said substrate; Wherein said two point of fixity are arranged on the opposed side of said mass cg; Spacing between wherein said two point of fixity is less than the horizontal extension of said test block; Wherein said two point of fixity have been confirmed the axis; Wherein said test block has the space, and said space is arranged on the opposed side of said axis and on the side of said axis dorsad, opens wide towards the side, and wherein said fixing electrode is engaged in the space of said test block at least.
Acceleration is measured by means of changes in capacitance at this.But, based on the acceleration transducer of capacitance variations bigger aspect its size and therefore relatively more expensive.
Summary of the invention
The sensor device of the defined micromechanics that is used for acceleration, pressure and similar parameters are measured in claim 1; Comprise substrate, preferably have with the mode of activity flexibly be arranged in said on-chip test block, be used for by means of piezoelectric effect will act on conversion equipment that power on the said test block converts preferred electric signal into, be used for to the power that said test block loads extra power load device especially electrode, be used to control the control device that said power loads device; The wherein said control device so said power of control loads device, thereby temporarily especially periodically loads said extra power to said test block.
The defined method that acceleration, pressure or similar parameters are measured of being used in claim 11; Be particularly suitable for using by at least one described device among the claim 1-10 and implement; This method may further comprise the steps: external force is arranged in on-chip test block because outside acceleration acts on so that the mode of activity is especially resilient; The power that will act on said test block by means of piezoelectric effect converts preferred electric signal into; Temporarily especially periodically load extra power, said preferably electric signal is analyzed and according to the signal of being analyzed acceleration signal is provided to said test block.
In claim 1 sensor device of defined micromechanics and in claim 11 defined being used for the method that acceleration, pressure or similar parameters are measured is had such advantage; Promptly can reduce the size of the sensor device of said micromechanics; And especially not rising of 1/f noise when converting said power into signal under the situation of the effect of using pressure drag, and however especially under the situation of the effect of using piezoelectricity, also can measure constant in time acceleration extraly.
If outside force rate acts on said test block like the negative acceleration of the form of the braking through motor vehicle; That just loads device through the power such as the form of electrode extra power is applied on the said test block, make said test block since the power of static in the suspension of said conversion equipment, cause different stress indirectly about the non-linear of the spacing between electrode and the power loading device.This stress depends on the outside power on the said test block that acts on, and this power is in the base band of first frequency of the sensor device with said micromechanics.Said conversion equipment is that electric signal is such as voltage according to piezoelectric effect with stress transmission now.The modulation of power of static with base band or the second frequency on the effective bandwidth of the sensor device that is in said micromechanics causes the corresponding modulation of the stress in the suspension of said conversion equipment and also caused the corresponding modulation of said electric signal afterwards.Be included in the said electric signal about the power that acts on said test block in other words the information of acceleration be in now in the so-called carrier frequency band of the double width that has the centre frequency that is equivalent to second frequency and have said first frequency.By means of the correct modulation of phase place subsequently, will through the electric signal of ovennodulation such as by means of convolution (Faltung) again reverse conversion be base band.But, also produce the part on the said carrier frequency band of being in of said signal through said convolution.These parts can be removed by means of low-pass filter.Be provided for acting on the signal of the acceleration of said test block therefrom, the advantage of being mentioned above this signal has.
The sensor device of said micromechanics another advantage of corresponding method in other words is also can power be transferred on the said test block with different directions thus, thereby improve the dirigibility of method in other words of said device thus.
According to the favourable improvement project of another kind of the present invention, said power loads device and arranges near said test block, especially is substantially perpendicular to and/or the direction that is parallel to the skew of said test block is arranged.Advantage is in this case, if said test block perpendicular to and/or be parallel to the direction skew of said skew, then on the one hand can be as far as possible directly be delivered on the said test block having under the situation of greater loss power to be loaded device from power.Can adjust at said test block mechanical sensitivity to the sensor device of said micromechanics when flexiblely being arranged on the said substrate arranging that perpendicular to the direction of said skew said power loads under the situation of device on the other hand with the suspension of arranging perpendicular to the direction of said skew.Therefore such as can change said test block at the elastic constant of on-chip suspension or itself and the condition of given outside in advance are complementary, this has significantly improved the dirigibility of the sensor device of said micromechanics.If said power loads device and just arranges along the direction of said skew about the skew that skew basically closely is parallel to said test block; That just can be by this way directly to said test block loading force, and this has further improved the identification level of constant in time acceleration.
According to the favourable improvement project of another kind of the present invention, the said conversion equipment that is used for the power of changing by means of piezoelectric effect comprises the device that is used to carry out detection pressure drag and/or piezoelectricity.Advantage is in this case; Can correspondingly adjust by the use field of the sensor device of said micromechanics thus it; This has improved its dirigibility; Also can use together on the other hand and use said two kinds of piezoelectric effects just effect of piezoelectricity and the effect of pressure drag in other words, this further improved said micromechanics sensor device susceptibility and when conversion, significantly reduced possible 1/f noise simultaneously.
According to the favourable improvement project of another kind of the present invention, said conversion equipment comprises at least one especially suspension of the form of crossbeam, and this suspension is fixed on said test block on the said substrate with the mode of activity.Advantage is in this case; Can adjust by means of the corresponding structure of said crossbeam because the motion of the said test block that causes of acceleration in other words of outside power with simple mode; Can easily and with less cost said test block be fixed on the said substrate thus on the other hand, and needn't arrange the extra member that is used for said conversion equipment.
According to the favourable improvement project of another kind of the present invention, the said device arrangements that is used to carry out detection pressure drag and/or piezoelectricity is at said at least one suspension.Advantage is in this case, can act on the acceleration of said test block thus with direct mode by means of the piezoelectric effect measurement.Reduce the locus demand that is used for said conversion equipment and also is used for said sensor device simultaneously on the whole.
According to the favourable improvement project of another kind of the present invention, the said device that is used to carry out detection pressure drag and/or piezoelectricity comprises nano wire (Nanodraht), and said nano wire is especially arranged perpendicular to said suspension.Advantage is in this case; Said nano wire deforms when the motion of said test block, especially stretches or undergauge and like this such as measuring the power that acts on said test block from the outside and can measure acceleration thus through the resistance of the suitable arrangement on the said nano wire under the situation of the effect of utilizing pressure drag.In addition, can replace equally and be placed in the resistance on the said nano wire and uniform and/or structurized doped structure is set in said nano wire, said doped structure works as resistance and is configured to resistance in other words.In addition, if crossbeam is correspondingly constructed narrowlyer and be thinner, can be nano wire then with the suspension structure of the form of crossbeam.Said doped structure then correspondingly especially is configured to structure pressure drag and/or piezoelectricity.Can certainly arrange a plurality of suspensions, be used to improve the power that the acts on said test block precision measured of acceleration in other words with one or more nano wire.
According to the favourable improvement project of another kind of the present invention, the uniform and/or structurized zone that the said device that is used to carry out detection pressure drag and/or piezoelectricity has the form that is configured to resistance.Advantage is in this case, further improves the dirigibility of the sensor device of said micromechanics thus, correspondingly constitutes in other words because said zone can be respectively correspondingly be complementary with the demands of different of the sensor device of said micromechanics.Said zone can easily and with less cost be made simultaneously.
According to the favourable improvement project of another kind of the present invention, said conversion equipment is configured to differentially power surveyed.Advantage is in this case, can reduce so-called common mode interference thus such as temperature effect or the like because such as measuring because the difference between first suspension of power and undergauge and second suspension that stretches owing to same power.
According to the favourable improvement project of another kind of the present invention, arranged the device of the form that especially is configured to lever arm that is used to improve susceptibility.Advantage is in this case, especially improves the susceptibility of the sensor device of said micromechanics thus on the whole through the mode of layout lever arm between test block and conversion equipment with mode simple and with low cost.Said lever arm can squint said test block when appearance acts on the power of said test block from the outside more tempestuously.In this way, the sensor device that further improves said micromechanics be used in other words to measure acceleration method susceptibility and can further dwindle the structure space of the necessary sensor device that is used for said micromechanics thus.
According to the another kind of favourable improvement project of method of the present invention, this method comprises analyzes said this step of electric signal especially in time dispersedly or continuously.Advantage is in this case, has reduced the computing cost that is used for said analysis when analyzing dispersedly in time, when said electric signal is carried out continuous analysis, then realizes the higher efficiency of said method on the contrary.
According to the another kind of favourable improvement project of said method, come temporarily to load extra power to said test block by means of signal rectangle or sinusoidal or pseudo noise signal.Advantage is in this case, such as in the possible input probability that when said test block loads pseudo noise signal, can significantly reduce undesired signal.By means of the signal of rectangle during to said test block load, can use corresponding devices with simplify and mode with low cost produce signal.
The sensor device of said micromechanics has to be at this and preferably is lower than 100 microns size between 50 and 200 microns.Effective bandwidth is lower than 10kHz and preferably is lower than 5kHz and especially is lower than 1kHz and preferably especially is lower than 50Hz when the sensor device with said micromechanics is used in the motor vehicle.Modulating frequency greater than 1.5 times of said effective bandwidth especially 2 times and/or than the angular frequency of the machinery of the sensor device of said micromechanics or limiting frequency to when young said effective bandwidth.
Description of drawings
Embodiments of the invention are shown in the drawings and carry out illustrated in detail in the following description.Wherein:
Fig. 1 a is the sensor device by the micromechanics of first kind of embodiment of the present invention;
Fig. 1 b is the sensor device by the micromechanics of second kind of embodiment of the present invention;
Fig. 1 c is the sensor device by the micromechanics of the third embodiment of the present invention;
Fig. 2 is the employed frequency range that is used for temporarily loading to said test block the sinusoidal signal of extra power; And
Fig. 3 is the method by first kind of embodiment of the present invention.
In the accompanying drawings, identical Reference numeral is represented identical perhaps function components identical.
Embodiment
Fig. 1 a shows the sensor device V by the micromechanics of first kind of embodiment of the present invention.
Said electrode 3a, 3b are through lead L
1Having carried out conduction with control device 7 is connected.In addition, said contact 5a, 5b, 5c are connected with detuner 9 and are connected with said control device 7 on the other hand on the one hand.On the crossbeam 6c of centre, arranged the resistance W of the form that is configured to the structuring doped regions
SThese resistance W
SHaving carried out conduction with said contact 5c is connected.In addition, be configured to even doped regions W last layout of crossbeam 6a, the 6b of said outside
HThe resistance of form.Be used herein to the resistance W that is connected with said contact 5a, 5b
HElectric loop line such as especially being led back through another crossbeam or equally can be by means of can be at corresponding crossbeam 6a, 6b, the electric loop line of the last realization of 6c at the loop line that separates aspect the electric current without undergoing the crossbeam 6c of any mechanical stress.If resistance W
HThe crossbeam 6a, the 6b that are arranged in said outside are last, and so middle crossbeam can not have resistance W yet
SSituation under constitute.Then on the crossbeam 6c of said centre-as top the explanation-arranged said electric loop line.
The joint 8 of guiding to the outside through said detuner 9 provides the signal through handled, and this signal comprises the acceleration that acts on said test block 1.
Fig. 1 b shows the sensor device by the micromechanics of second kind of embodiment of the present invention.
In addition, said control device 7 is such as the rectangular voltage that is between 0V and the 3V can be provided.
Fig. 1 c shows the part by the sensor device of the micromechanics of the third embodiment of the present invention.
The part of the sensor device V of the micromechanics with test block 1 has been shown in Fig. 1 c, and said test block 1 flexiblely and with the mode of activity is arranged on the substrate S by means of point of fixity 5a through lever arm H.Said lever arm H does not comprise any piezoelectric device at this, just such as the device of piezoresistor or piezoelectricity.Basically in the middle of said lever arm H, under perpendicular to the situation of its elongation, between point of fixity 5 and test block 1, correspondingly arranged suspension 6a, 6b, said suspension 6a, 6b are provided with device W piezoelectricity and/or pressure drag
SIn order also further to improve the susceptibility of the sensor device V of said micromechanics, can said suspension 6a, 6b be arranged in the zone of the point of rotation of said test block 1, just be arranged in the zone of point of fixity 5 of said lever arm H.Said suspension 6a, 6b further are connected with contact 5a, 6b.The layout of said contact 5a, 5b and and detuner 9 between acting in conjunction, control device 7 and electrode 3a, 3b not shown in Fig. 1 c, but be equivalent to structure basically by the embodiment of Fig. 1 a and 1b.Said crossbeam 6a, 6b also can be configured to nano wire N at this; That is to say and correspondingly construct narrower thinlyyer in other words that this has further improved susceptibility and the further simultaneously structure space that reduces the necessary sensor device V that is used for said micromechanics of the sensor device V of said micromechanics.Can certainly in the embodiment of pressing Fig. 1 a, use nano wire N.These nano wires N then can be according to Fig. 1 c such as arranging perpendicular to one or more crossbeam 6a, 6b, 6c.The contact of these nano wires N is then carried out according to Fig. 1 c similarly.
Fig. 2 shows the employed frequency range that is used for temporarily loading to test block the sinusoidal signal of extra power.
As described above according to Fig. 1 a in other words 1b come periodically to connect and break off the voltage that is used for said electrode 3a by means of control device 7, thus such as using frequency f
2Come the mechanical sensitivity of the sensor device V of said micromechanics is modulated.This frequency f
2Must be higher than effective bandwidth f for the sensor device setting of said micromechanics
1, but must be lower than the angular frequency f of so-called machinery of the sensor device V of said micromechanics
5At this f
1<f
2<f
5The frequency f of the modulation of the mechanical sensitivity of the said sensor device that is used for micromechanics
2F must further satisfy condition
3<f
2<f
4, f wherein
3=f
2-f
1And f
4=f
2+ f
1Simultaneously equally must f
4<f
5Corresponding frequency f
1, f
2, f
3, f
4, f
5Its spacing to each other depends on the corresponding type and/or the ordering of the wave filter in the said detuner 9 in other words.
If load extra power temporarily for said test block 1 by means of pseudo noise signal, the frequency of so said pseudo noise signal will be higher than frequency f
4And especially be higher than frequency f
5In these cases, also further reduced the possible input probability of undesired signal.
Through top mention use frequency f
2The modulation of carrying out has higher frequency f
2Frequency band f
3, f
4The middle power that acts on said test block 1 of measuring.The power that device said pressure drag and/or piezoelectricity will act on said test block now owing to the acceleration of outside converts voltage into.Especially under the situation of the device that uses piezoelectricity, also can measure the constant in time acceleration of said test block 1 thus on the one hand now.Especially under the situation of the device that uses pressure drag, can obviously reduce 1/f noise thus simultaneously.
So the voltage of conversion converts into through the correct demodulation of the phase place in detuner 9 subsequently and has frequency f
1Base band.Also can carry out LPF subsequently, acceleration signal is provided thereby after possible LPF, be used at last to act on the output terminal 8 of acceleration of said test block 1.
Fig. 3 shows the method by first kind of embodiment of the present invention.
The method of pressing Fig. 3 is at first step S
1In the situation that outside masterpiece is used for preferably having with the mode of activity the test block 1 that flexibly is arranged on the substrate S has been shown, at another step S
2In the situation that the power that will act on said test block 1 by means of piezoelectric effect converts preferred electric signal into has been shown, at third step S
3In the situation that temporarily especially periodically loads extra power to said test block 1 has been shown, at the 4th step S
4In the situation that said preferred electric signal is analyzed has been shown, and at the 5th step S
5In the situation that acceleration signal is provided according to measured signal has been shown.
Invention has been described although the front is by means of preferred embodiment, and the present invention is not limited to this, but can change with diversified mode.
Claims (13)
1. be used to measure the sensor device (V) of the micromechanics of acceleration, pressure and similar parameters, comprise
Substrate (S),
Test block (1), this test block (1) preferably have with the mode of activity and flexibly are arranged on the said substrate (S),
Conversion equipment (E, 5c, 6c, 6a, 6b, W
S, W
H), said conversion equipment (E, 5c, 6c, 6a, 6b, W
S, W
H) be used for converting preferred electric signal into by means of the power that piezoelectric effect will act on said test block (1),
Power loads especially electrode of device (3a, 3b), is used for loading extra power to said test block (1),
Be used to control the control device (7) that said power loads device (3a, 3b), wherein said control device (7) is so controlled said power and is loaded device (3a, 3b), thereby temporarily especially periodically loads said extra power to said test block (1).
2. at least by the sensor device of the described micromechanics of claim 1, wherein said power loads device (3a, 3b) and arranges near said test block (1), especially is substantially perpendicular to and/or the direction that is parallel to the skew of said test block (1) is arranged.
3. press the sensor device of the described micromechanics of claim 1 at least, wherein said conversion equipment (E, 5c, 6c, 6a, 6b, the W that is used for the power of changing by means of piezoelectric effect
S, W
H) comprise the device (W of the detection that is used to carry out pressure drag
S, W
H, N) and/or be used to carry out the device (E) of the detection of piezoelectricity.
4. press the sensor device of the described micromechanics of claim 1 at least, wherein said conversion equipment (E, 5c, 6c, 6a, 6b, W
S, W
H) comprising that at least one especially is configured to the suspension of the form of crossbeam (6a, 6b, 6c), said suspension (6a, 6b, 6c) is fixed on said test block (1) on the said substrate (S) with the mode of activity.
5. at least by the sensor device of claim 3 and 4 described micromechanicss, the wherein said device (W that is used to carry out the detection of pressure drag and/or piezoelectricity
S, W
H, N, E) be arranged on said at least one suspension (6a, 6b, 6c).
6. at least by the sensor device of claim 3 or 4 described micromechanicss, the wherein said device (W that is used to carry out the detection of pressure drag and/or piezoelectricity
S, W
H, N, E) comprise nano wire (N), said nano wire (N) is especially arranged perpendicular to said suspension (6a, 6b, 6c).
7. at least by the sensor device of the described micromechanics of claim 1, the wherein said device (W that is used to carry out the detection of pressure drag and/or piezoelectricity
S, W
H, N, E) comprise the uniform and/or structurized resistance (W that is configured to
S, W
H) the zone of form.
8. press the sensor device of the described micromechanics of claim 1 at least, wherein said conversion equipment (E, 5c, 6c, 6a, 6, W
S, W
H) be configured to power is carried out differentiated detection.
9. at least by the sensor device of the described micromechanics of claim 1, wherein be provided with the device (H) that is used to improve susceptibility.
10. at least by the sensor device of the described micromechanics of claim 9, the wherein said device (H) that is used to improve susceptibility is arranged with the form of at least one lever arm (H).
11. be used to measure the method for acceleration, pressure or similar parameters, be particularly suitable in by claim 1-10, carrying out at least one described device, this method may further comprise the steps:
External force is owing to outside acceleration acts on (S
1) especially flexiblely be arranged in the test block (1) on the substrate (S) with the mode of activity,
To act on the power conversion (S of said test block (1) by means of piezoelectric effect
2) be preferred electric signal,
Temporarily especially periodically load (S to said test block (1)
3) extra power, and
Said preferred electric signal is analyzed (S
4) and according to the signal of being analyzed (S is provided
5) acceleration signal.
12. by the described method of claim 11, wherein
Especially in time analyze (S dispersedly or continuously
4) said electric signal.
13. at least by the described method of claim 11, wherein
Come temporarily to load (S by signal or pseudo noise signal rectangle or sinusoidal to said test block (1)
3) said extra power.
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| DE102010030878.1 | 2010-07-02 | ||
| DE102010030878.1A DE102010030878B4 (en) | 2010-07-02 | 2010-07-02 | Micromechanical sensor device for measuring an acceleration, a pressure and the like |
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|---|---|---|---|---|
| CN1054485A (en) * | 1989-02-27 | 1991-09-11 | 标准数据控制公司 | Electrostatically driven dual vibrating beam force transducer |
| US5275055A (en) * | 1992-08-31 | 1994-01-04 | Honeywell Inc. | Resonant gauge with microbeam driven in constant electric field |
| JPH0627134A (en) * | 1992-07-08 | 1994-02-04 | Murata Mfg Co Ltd | Acceleration sensor |
| US20040027033A1 (en) * | 2002-08-08 | 2004-02-12 | Schiller Peter J. | Solid-state acceleration sensor device and method |
| CN101162237A (en) * | 2006-10-13 | 2008-04-16 | 精工爱普生株式会社 | Acceleration sensor |
| CN101327592A (en) * | 2008-07-23 | 2008-12-24 | 哈尔滨工业大学 | Four-arm type MEMS micro-gripper integrated with piezoresistive micro-force tester |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4426163A1 (en) | 1994-07-22 | 1996-01-25 | Bosch Gmbh Robert | Acceleration sensor with spring-mass systems which includes transverse beam |
| DE102008002606B4 (en) | 2008-06-24 | 2020-03-12 | Robert Bosch Gmbh | Micromechanical acceleration sensor with open seismic mass |
-
2010
- 2010-07-02 DE DE102010030878.1A patent/DE102010030878B4/en active Active
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2011
- 2011-07-01 FR FR1155944A patent/FR2962223B1/en active Active
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1054485A (en) * | 1989-02-27 | 1991-09-11 | 标准数据控制公司 | Electrostatically driven dual vibrating beam force transducer |
| JPH0627134A (en) * | 1992-07-08 | 1994-02-04 | Murata Mfg Co Ltd | Acceleration sensor |
| US5275055A (en) * | 1992-08-31 | 1994-01-04 | Honeywell Inc. | Resonant gauge with microbeam driven in constant electric field |
| US20040027033A1 (en) * | 2002-08-08 | 2004-02-12 | Schiller Peter J. | Solid-state acceleration sensor device and method |
| CN101162237A (en) * | 2006-10-13 | 2008-04-16 | 精工爱普生株式会社 | Acceleration sensor |
| CN101327592A (en) * | 2008-07-23 | 2008-12-24 | 哈尔滨工业大学 | Four-arm type MEMS micro-gripper integrated with piezoresistive micro-force tester |
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| CN102313819B (en) | 2017-04-26 |
| DE102010030878B4 (en) | 2023-08-17 |
| DE102010030878A1 (en) | 2012-01-05 |
| FR2962223B1 (en) | 2018-03-02 |
| FR2962223A1 (en) | 2012-01-06 |
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