FR2954524B1 - Reseau de diffraction reflechissant dielectrique optimise - Google Patents

Reseau de diffraction reflechissant dielectrique optimise

Info

Publication number
FR2954524B1
FR2954524B1 FR0959157A FR0959157A FR2954524B1 FR 2954524 B1 FR2954524 B1 FR 2954524B1 FR 0959157 A FR0959157 A FR 0959157A FR 0959157 A FR0959157 A FR 0959157A FR 2954524 B1 FR2954524 B1 FR 2954524B1
Authority
FR
France
Prior art keywords
dielectric reflecting
diffraction network
reflecting diffraction
optimized dielectric
optimized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0959157A
Other languages
English (en)
French (fr)
Other versions
FR2954524A1 (fr
Inventor
Nicolas Bonod
Jean Paul Chambaret
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ECOLE POLYTECH
Centre National de la Recherche Scientifique CNRS
Ecole Polytechnique
Original Assignee
ECOLE POLYTECH
Centre National de la Recherche Scientifique CNRS
Ecole Polytechnique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0959157A priority Critical patent/FR2954524B1/fr
Application filed by ECOLE POLYTECH, Centre National de la Recherche Scientifique CNRS, Ecole Polytechnique filed Critical ECOLE POLYTECH
Priority to JP2012543872A priority patent/JP6005522B2/ja
Priority to EP10807464A priority patent/EP2513688A1/fr
Priority to CN2010800623534A priority patent/CN102812388A/zh
Priority to PCT/FR2010/052684 priority patent/WO2011073554A1/fr
Priority to KR1020127018362A priority patent/KR101759213B1/ko
Priority to US13/516,906 priority patent/US20120300302A1/en
Publication of FR2954524A1 publication Critical patent/FR2954524A1/fr
Application granted granted Critical
Publication of FR2954524B1 publication Critical patent/FR2954524B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0808—Mirrors having a single reflecting layer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Surface Treatment Of Optical Elements (AREA)
FR0959157A 2009-12-17 2009-12-17 Reseau de diffraction reflechissant dielectrique optimise Active FR2954524B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR0959157A FR2954524B1 (fr) 2009-12-17 2009-12-17 Reseau de diffraction reflechissant dielectrique optimise
EP10807464A EP2513688A1 (fr) 2009-12-17 2010-12-13 Réseau de diffraction réfléchissant diélectrique optimisé
CN2010800623534A CN102812388A (zh) 2009-12-17 2010-12-13 优化的电介质反射式衍射光栅
PCT/FR2010/052684 WO2011073554A1 (fr) 2009-12-17 2010-12-13 Réseau de diffraction réfléchissant diélectrique optimisé
JP2012543872A JP6005522B2 (ja) 2009-12-17 2010-12-13 最適化された反射誘電体回折格子
KR1020127018362A KR101759213B1 (ko) 2009-12-17 2010-12-13 최적화된 유전체 반사 회절격자
US13/516,906 US20120300302A1 (en) 2009-12-17 2010-12-13 Optimized dielectric reflective diffraction grating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0959157A FR2954524B1 (fr) 2009-12-17 2009-12-17 Reseau de diffraction reflechissant dielectrique optimise

Publications (2)

Publication Number Publication Date
FR2954524A1 FR2954524A1 (fr) 2011-06-24
FR2954524B1 true FR2954524B1 (fr) 2012-09-28

Family

ID=42091521

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0959157A Active FR2954524B1 (fr) 2009-12-17 2009-12-17 Reseau de diffraction reflechissant dielectrique optimise

Country Status (7)

Country Link
US (1) US20120300302A1 (enrdf_load_stackoverflow)
EP (1) EP2513688A1 (enrdf_load_stackoverflow)
JP (1) JP6005522B2 (enrdf_load_stackoverflow)
KR (1) KR101759213B1 (enrdf_load_stackoverflow)
CN (1) CN102812388A (enrdf_load_stackoverflow)
FR (1) FR2954524B1 (enrdf_load_stackoverflow)
WO (1) WO2011073554A1 (enrdf_load_stackoverflow)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102314040B (zh) * 2011-09-05 2013-04-17 青岛大学 一种宽光谱金属介质膜光栅及其优化方法
CN102313920B (zh) * 2011-09-05 2013-06-05 青岛大学 一种基于非规整膜层结构的宽光谱金属介质膜光栅
CN103592714B (zh) * 2013-10-17 2015-07-08 同济大学 一种易于制备的反射式多通道滤光元件的设计方法
CN104777532B (zh) * 2015-04-03 2017-02-22 中国科学院上海光学精密机械研究所 基于级联光栅结构的超窄带te偏振光谱选择性吸收器
US11112618B2 (en) 2015-09-03 2021-09-07 Asml Netherlands B.V. Beam splitting apparatus
US10241244B2 (en) 2016-07-29 2019-03-26 Lumentum Operations Llc Thin film total internal reflection diffraction grating for single polarization or dual polarization
WO2018226539A1 (en) * 2017-06-08 2018-12-13 Lawrence Livermore National Security, Llc Metal-overcoated grating and method
WO2019086770A1 (en) * 2017-11-06 2019-05-09 Aalto University Foundation Sr A field-enhancing device
JP2019120500A (ja) * 2017-12-28 2019-07-22 株式会社ミツトヨ スケールおよびその製造方法
US11747528B2 (en) * 2018-08-31 2023-09-05 Samsung Electronics Co., Ltd. Diffraction grating device, method of manufacturing the same, and optical apparatus including the diffraction grating device
DE102018220629A1 (de) * 2018-11-29 2020-06-04 Carl Zeiss Smt Gmbh Spiegel für eine Beleuchtungsoptik einer Projektionsbelichtungsanlage mit einem Spektralfilter in Form einer Gitterstruktur und Verfahren zur Herstellung eines Spektralfilters in Form einer Gitterstruktur auf einem Spiegel
CN111366999B (zh) * 2020-03-26 2021-11-26 合肥工业大学 一种基于三氧化钼渐变光栅的宽带极化敏感吸收器
JP2023538847A (ja) * 2020-08-07 2023-09-12 ラム フォトニクス インダストリアル エルエルシー 高帯域幅浸漬格子のための方法およびシステム
CN114460676B (zh) * 2022-03-03 2024-01-09 福建睿创光电科技有限公司 一种1030nm正弦型介质光栅及其制作方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5907436A (en) * 1995-09-29 1999-05-25 The Regents Of The University Of California Multilayer dielectric diffraction gratings
AT410732B (de) * 1999-07-07 2003-07-25 Femtolasers Produktions Gmbh Dispersiver mehrschichtiger spiegel
US6400509B1 (en) * 2000-04-07 2002-06-04 Zolo Technologies, Inc. Apparatus and method for the reduction of polarization sensitivity in diffraction gratings used in fiber optic communications devices
JP2002098820A (ja) * 2000-09-21 2002-04-05 Nippon Sheet Glass Co Ltd 反射型回折格子
DE50312077D1 (de) * 2002-12-19 2009-12-10 Oerlikon Trading Ag Vorrichtung und Verfahren ZUR ERZEUGUNG ELEKTROMAGNETISCHER FELDVERTEILUNGEN
DK2214037T3 (da) * 2003-02-18 2013-02-11 Sumitomo Electric Industries Diffraktionsgitterelement samt fremgangsmåde til fremstilling af et diffraktionsgitterelement
CN100476476C (zh) * 2004-03-24 2009-04-08 Enablence有限公司 平面波导反射衍射光栅
JP5050594B2 (ja) * 2007-03-20 2012-10-17 旭硝子株式会社 分光装置
JP5311757B2 (ja) * 2007-03-29 2013-10-09 キヤノン株式会社 反射光学素子、露光装置およびデバイス製造方法
US8116002B2 (en) * 2007-08-27 2012-02-14 Lumella Inc. Grating device with adjusting layer

Also Published As

Publication number Publication date
US20120300302A1 (en) 2012-11-29
EP2513688A1 (fr) 2012-10-24
CN102812388A (zh) 2012-12-05
KR101759213B1 (ko) 2017-07-18
WO2011073554A1 (fr) 2011-06-23
KR20130008513A (ko) 2013-01-22
FR2954524A1 (fr) 2011-06-24
JP6005522B2 (ja) 2016-10-12
JP2013514542A (ja) 2013-04-25

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