FR2952427B1 - Resonateur comportant une couche de passivation, capteur vibrant comportant un tel resonateur et procede de fabrication - Google Patents

Resonateur comportant une couche de passivation, capteur vibrant comportant un tel resonateur et procede de fabrication

Info

Publication number
FR2952427B1
FR2952427B1 FR0905426A FR0905426A FR2952427B1 FR 2952427 B1 FR2952427 B1 FR 2952427B1 FR 0905426 A FR0905426 A FR 0905426A FR 0905426 A FR0905426 A FR 0905426A FR 2952427 B1 FR2952427 B1 FR 2952427B1
Authority
FR
France
Prior art keywords
resonator
manufacture
passivation layer
vibrating sensor
vibrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0905426A
Other languages
English (en)
Other versions
FR2952427A1 (fr
Inventor
Paul Vandebeuque
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Electronics and Defense SAS
Original Assignee
Sagem Defense Securite SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0905426A priority Critical patent/FR2952427B1/fr
Application filed by Sagem Defense Securite SA filed Critical Sagem Defense Securite SA
Priority to US13/504,918 priority patent/US8966985B2/en
Priority to KR1020147015563A priority patent/KR101608358B1/ko
Priority to KR1020127012139A priority patent/KR20120069760A/ko
Priority to CN201080051782.1A priority patent/CN102667402B/zh
Priority to PCT/EP2010/006833 priority patent/WO2011057766A1/fr
Priority to EP10784446.6A priority patent/EP2499457B1/fr
Priority to RU2012123987/28A priority patent/RU2527319C2/ru
Publication of FR2952427A1 publication Critical patent/FR2952427A1/fr
Application granted granted Critical
Publication of FR2952427B1 publication Critical patent/FR2952427B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
FR0905426A 2009-11-12 2009-11-12 Resonateur comportant une couche de passivation, capteur vibrant comportant un tel resonateur et procede de fabrication Expired - Fee Related FR2952427B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR0905426A FR2952427B1 (fr) 2009-11-12 2009-11-12 Resonateur comportant une couche de passivation, capteur vibrant comportant un tel resonateur et procede de fabrication
KR1020147015563A KR101608358B1 (ko) 2009-11-12 2010-11-10 패시베이션 층을 포함하는 공진기, 그러한 공진기를 포함하는 진동 센서 및 그것의 제조 방법
KR1020127012139A KR20120069760A (ko) 2009-11-12 2010-11-10 패시베이션 층을 포함하는 공진기, 그러한 공진기를 포함하는 진동 센서 및 그것의 제조 방법
CN201080051782.1A CN102667402B (zh) 2009-11-12 2010-11-10 包括钝化层的共振器、包括这种共振器的振动传感器以及制造方法
US13/504,918 US8966985B2 (en) 2009-11-12 2010-11-10 Resonator including a passivation layer, a vibrating sensor including such a resonator, and a method of manufacture
PCT/EP2010/006833 WO2011057766A1 (fr) 2009-11-12 2010-11-10 Résonateur comprenant une couche de passivation, capteur vibrant comprenant un tel résonateur, et procédé de fabrication
EP10784446.6A EP2499457B1 (fr) 2009-11-12 2010-11-10 Résonateur comprenant une couche de passivation, capteur vibrant comprenant un tel résonateur, et procédé de fabrication
RU2012123987/28A RU2527319C2 (ru) 2009-11-12 2010-11-10 Резонатор с защитным слоем, вибрационный датчик, включающий в себя такой резонатор, и способ изготовления резонатора

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0905426A FR2952427B1 (fr) 2009-11-12 2009-11-12 Resonateur comportant une couche de passivation, capteur vibrant comportant un tel resonateur et procede de fabrication

Publications (2)

Publication Number Publication Date
FR2952427A1 FR2952427A1 (fr) 2011-05-13
FR2952427B1 true FR2952427B1 (fr) 2012-02-24

Family

ID=42731984

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0905426A Expired - Fee Related FR2952427B1 (fr) 2009-11-12 2009-11-12 Resonateur comportant une couche de passivation, capteur vibrant comportant un tel resonateur et procede de fabrication

Country Status (7)

Country Link
US (1) US8966985B2 (fr)
EP (1) EP2499457B1 (fr)
KR (2) KR20120069760A (fr)
CN (1) CN102667402B (fr)
FR (1) FR2952427B1 (fr)
RU (1) RU2527319C2 (fr)
WO (1) WO2011057766A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11703331B2 (en) * 2020-03-18 2023-07-18 The Regents Of The University Of Michigan Three dimensional microstructures with selectively removed regions for use in gyroscopes and other devices
CN112414388B (zh) * 2020-11-20 2023-03-07 中国电子科技集团公司第二十六研究所 用于角参量检测的半球谐振陀螺电容结构及加工方法
US11874112B1 (en) * 2022-10-04 2024-01-16 Enertia Microsystems Inc. Vibratory gyroscopes with resonator attachments
CN116625344B (zh) * 2023-07-26 2023-10-13 中国船舶集团有限公司第七〇七研究所 一种基于低损耗半球谐振子图案化电极的谐振陀螺

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5450751A (en) * 1993-05-04 1995-09-19 General Motors Corporation Microstructure for vibratory gyroscope
US5438231A (en) * 1993-08-23 1995-08-01 Rockwell International Corporation Thin film micromechanical resonator gyro
US5760304A (en) * 1997-02-18 1998-06-02 Litton Systems, Inc. Vibratory rotation sensor with AC forcing voltages
RU2166734C1 (ru) * 2000-06-05 2001-05-10 Химический факультет МГУ им. М.В. Ломоносова Чувствительный элемент волнового твердотельного гироскопа
RU2196964C1 (ru) * 2001-07-19 2003-01-20 Федеральное государственное унитарное предприятие "Ижевский электромеханический завод "Купол" Твердотельный волновой гироскоп
US6647785B2 (en) * 2001-07-27 2003-11-18 Litton Systems, Inc. Nuclear radiation hard high accuracy rotation sensor system
US6629460B2 (en) * 2001-08-10 2003-10-07 The Boeing Company Isolated resonator gyroscope
FR2851041B1 (fr) * 2003-02-06 2005-03-18 Sagem Procede de mise en oeuvre d'un resonateur sous l'effet de forces electrostatiques
FR2857445B1 (fr) * 2003-07-10 2005-09-02 Sagem Resonateur, notamment pour gyroscope vibrant
US7786653B2 (en) * 2007-07-03 2010-08-31 Northrop Grumman Systems Corporation MEMS piezoelectric switch
FR2920224B1 (fr) * 2007-08-23 2009-10-02 Sagem Defense Securite Procede de determination d'une vitesse de rotation d'un capteur vibrant axisymetrique, et dispositif inertiel mettant en oeuvre le procede
US7987714B2 (en) * 2007-10-12 2011-08-02 The Boeing Company Disc resonator gyroscope with improved frequency coincidence and method of manufacture
RU2362975C1 (ru) * 2008-01-09 2009-07-27 Сергей Михайлович Бражнев Твердотельный волновой гироскоп
FR2936049B1 (fr) * 2008-09-16 2010-09-17 Sagem Defense Securite Resonateur a metallisation partielle pour detecteur de parametre angulaire.
US8393212B2 (en) * 2009-04-01 2013-03-12 The Boeing Company Environmentally robust disc resonator gyroscope
US8101458B2 (en) * 2009-07-02 2012-01-24 Advanced Microfab, LLC Method of forming monolithic CMOS-MEMS hybrid integrated, packaged structures
US8631702B2 (en) * 2010-05-30 2014-01-21 Honeywell International Inc. Hemitoroidal resonator gyroscope
US8610333B2 (en) * 2010-09-24 2013-12-17 Wei Pang Acoustic wave devices

Also Published As

Publication number Publication date
WO2011057766A1 (fr) 2011-05-19
US20120216620A1 (en) 2012-08-30
US8966985B2 (en) 2015-03-03
FR2952427A1 (fr) 2011-05-13
KR20120069760A (ko) 2012-06-28
CN102667402A (zh) 2012-09-12
KR20140081907A (ko) 2014-07-01
RU2012123987A (ru) 2013-12-20
EP2499457B1 (fr) 2019-08-21
KR101608358B1 (ko) 2016-04-01
RU2527319C2 (ru) 2014-08-27
CN102667402B (zh) 2015-09-09
EP2499457A1 (fr) 2012-09-19

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