FR2921192B1 - Lentille a immersion solide et procede de realisation associe - Google Patents
Lentille a immersion solide et procede de realisation associeInfo
- Publication number
- FR2921192B1 FR2921192B1 FR0757641A FR0757641A FR2921192B1 FR 2921192 B1 FR2921192 B1 FR 2921192B1 FR 0757641 A FR0757641 A FR 0757641A FR 0757641 A FR0757641 A FR 0757641A FR 2921192 B1 FR2921192 B1 FR 2921192B1
- Authority
- FR
- France
- Prior art keywords
- solid immersion
- planar surface
- immersion lens
- making
- same
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00317—Production of lenses with markings or patterns
- B29D11/00346—Production of lenses with markings or patterns having nanosize structures or features, e.g. fillers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/08—Probe characteristics
- G01Q70/10—Shape or taper
- G01Q70/12—Nanotube tips
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1372—Lenses
- G11B7/1374—Objective lenses
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1387—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector using the near-field effect
Abstract
Le domaine général de l'invention est celui des lentilles à immersion solide pour applications optiques, en microscopie à très haute résolution. La lentille selon l'invention comporte un secteur sphérique (1) limité par une surface plane (11) et un objet (2) de dimensions nanométriques disposé sur la surface plane, au foyer de ladite lentille à immersion solide. Une couche opaque (3) à la lumière comportant une ouverture centrale (31) de dimensions nanométriques peut être disposée sur la surface plane, ladite ouverture étant centrée sur le foyer de la lentille à immersion solide. Ce nanoobjet peut être un tube ou un fil de forme cylindrique. La lentille selon l'invention peut être réalisée par des techniques de lithographie.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0757641A FR2921192B1 (fr) | 2007-09-17 | 2007-09-17 | Lentille a immersion solide et procede de realisation associe |
EP08804254A EP2210258A1 (fr) | 2007-09-17 | 2008-09-16 | Lentille a immersion solide et procede de realisation associe |
JP2010525326A JP2010539548A (ja) | 2007-09-17 | 2008-09-16 | 固浸レンズおよびその製造方法 |
PCT/EP2008/062296 WO2009037249A1 (fr) | 2007-09-17 | 2008-09-16 | Lentille a immersion solide et procede de realisation associe |
US12/678,730 US7940477B2 (en) | 2007-09-17 | 2008-09-16 | Solid immersion lens and related method for making same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0757641A FR2921192B1 (fr) | 2007-09-17 | 2007-09-17 | Lentille a immersion solide et procede de realisation associe |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2921192A1 FR2921192A1 (fr) | 2009-03-20 |
FR2921192B1 true FR2921192B1 (fr) | 2010-08-20 |
Family
ID=39110494
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0757641A Expired - Fee Related FR2921192B1 (fr) | 2007-09-17 | 2007-09-17 | Lentille a immersion solide et procede de realisation associe |
Country Status (5)
Country | Link |
---|---|
US (1) | US7940477B2 (fr) |
EP (1) | EP2210258A1 (fr) |
JP (1) | JP2010539548A (fr) |
FR (1) | FR2921192B1 (fr) |
WO (1) | WO2009037249A1 (fr) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2943450B1 (fr) * | 2009-03-17 | 2011-03-18 | Commissariat Energie Atomique | Tete de lecture haute resolution pour disque optique |
FR2968861B1 (fr) | 2010-12-10 | 2013-09-27 | Commissariat Energie Atomique | Procédé de fabrication d'un résonateur a ondes acoustiques comprenant une membrane suspendue |
US8618518B2 (en) | 2011-03-15 | 2013-12-31 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Apparatus and method for forming a solid immersion lens using a binary bitmap milling pattern |
KR101411428B1 (ko) * | 2012-07-12 | 2014-06-24 | 한국과학기술원 | 집광식 휴대용 형광 검출 시스템 |
US10041971B2 (en) * | 2012-08-22 | 2018-08-07 | President And Fellows Of Harvard College | Nanoscale scanning sensors |
US20140252313A1 (en) * | 2013-03-06 | 2014-09-11 | The Regents Of The University Of California | Nanolens arrays in nanopillar optoelectronic devices |
CN104049112B (zh) * | 2014-06-27 | 2016-05-11 | 中国科学院上海微系统与信息技术研究所 | 一种硅纳米线探针结构的制作方法 |
CN104237982B (zh) * | 2014-09-11 | 2015-12-30 | 南京理工大学 | 一种纳米尺度固体混合浸没透镜 |
FR3049358B1 (fr) * | 2016-03-24 | 2018-04-20 | Centre National De La Recherche Scientifique | Procede pour sonder ou modifier localement une zone de focalisation avec une lentille a immersion solide. |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11250460A (ja) * | 1998-03-04 | 1999-09-17 | Olympus Optical Co Ltd | 情報記録及び/又は再生方法、並びに、情報記録及び/又は再生装置 |
US6055220A (en) * | 1998-03-31 | 2000-04-25 | International Business Machines Corporation | Optical disk data storage system with improved solid immersion lens |
US6441359B1 (en) * | 1998-10-20 | 2002-08-27 | The Board Of Trustees Of The Leland Stanford Junior University | Near field optical scanning system employing microfabricated solid immersion lens |
US6614742B2 (en) * | 1999-12-14 | 2003-09-02 | Fuji Xerox, Ltd. | Optical head, magneto-optical head, disk apparatus and manufacturing method of optical head |
JP3882456B2 (ja) * | 2000-03-13 | 2007-02-14 | 株式会社日立製作所 | 近接場光プローブおよびそれを用いた近接場光学顕微鏡および光記録/再生装置 |
US7526158B2 (en) * | 2001-02-07 | 2009-04-28 | University Of Rochester | System and method for high resolution optical imaging, data storage, lithography, and inspection |
JP2003227788A (ja) * | 2002-02-05 | 2003-08-15 | Inst Of Physical & Chemical Res | 走査型プローブ顕微鏡及び試料の表面構造測定方法 |
AU2003284100A1 (en) * | 2003-10-10 | 2005-05-26 | Seagate Technology Llc | Near-field optical transducers for thermal assisted magnetic and optical data storage |
US20070186627A1 (en) * | 2006-02-10 | 2007-08-16 | Sungsoo Yi | High aspect ratio AFM probe and method of making |
US8274039B2 (en) * | 2008-11-13 | 2012-09-25 | Zena Technologies, Inc. | Vertical waveguides with various functionality on integrated circuits |
-
2007
- 2007-09-17 FR FR0757641A patent/FR2921192B1/fr not_active Expired - Fee Related
-
2008
- 2008-09-16 EP EP08804254A patent/EP2210258A1/fr not_active Withdrawn
- 2008-09-16 US US12/678,730 patent/US7940477B2/en not_active Expired - Fee Related
- 2008-09-16 WO PCT/EP2008/062296 patent/WO2009037249A1/fr active Application Filing
- 2008-09-16 JP JP2010525326A patent/JP2010539548A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2010539548A (ja) | 2010-12-16 |
FR2921192A1 (fr) | 2009-03-20 |
US20100200770A1 (en) | 2010-08-12 |
EP2210258A1 (fr) | 2010-07-28 |
WO2009037249A1 (fr) | 2009-03-26 |
US7940477B2 (en) | 2011-05-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20160531 |