FR2906077B1 - Procede et appareillages associes, destine a la fabrication de substrats semiconducteurs poly ou monocristallins minces - Google Patents

Procede et appareillages associes, destine a la fabrication de substrats semiconducteurs poly ou monocristallins minces

Info

Publication number
FR2906077B1
FR2906077B1 FR0608210A FR0608210A FR2906077B1 FR 2906077 B1 FR2906077 B1 FR 2906077B1 FR 0608210 A FR0608210 A FR 0608210A FR 0608210 A FR0608210 A FR 0608210A FR 2906077 B1 FR2906077 B1 FR 2906077B1
Authority
FR
France
Prior art keywords
manufacture
semiconductor substrates
monocrystalline semiconductor
thin poly
poly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0608210A
Other languages
English (en)
Other versions
FR2906077A1 (fr
Inventor
Michel Roche
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR0608210A priority Critical patent/FR2906077B1/fr
Publication of FR2906077A1 publication Critical patent/FR2906077A1/fr
Application granted granted Critical
Publication of FR2906077B1 publication Critical patent/FR2906077B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Photovoltaic Devices (AREA)
FR0608210A 2006-09-18 2006-09-18 Procede et appareillages associes, destine a la fabrication de substrats semiconducteurs poly ou monocristallins minces Expired - Fee Related FR2906077B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0608210A FR2906077B1 (fr) 2006-09-18 2006-09-18 Procede et appareillages associes, destine a la fabrication de substrats semiconducteurs poly ou monocristallins minces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0608210A FR2906077B1 (fr) 2006-09-18 2006-09-18 Procede et appareillages associes, destine a la fabrication de substrats semiconducteurs poly ou monocristallins minces

Publications (2)

Publication Number Publication Date
FR2906077A1 FR2906077A1 (fr) 2008-03-21
FR2906077B1 true FR2906077B1 (fr) 2009-03-06

Family

ID=39111414

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0608210A Expired - Fee Related FR2906077B1 (fr) 2006-09-18 2006-09-18 Procede et appareillages associes, destine a la fabrication de substrats semiconducteurs poly ou monocristallins minces

Country Status (1)

Country Link
FR (1) FR2906077B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009092926A1 (fr) * 2008-01-21 2009-07-30 Michel Roche Procédé et appareillages associés, destiné à la fabrication de substrats semiconducteurs, poly ou monocristallins minces

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2752768B1 (fr) * 1996-08-27 2003-04-11 Commissariat Energie Atomique Procede d'obtention d'une plaquette de materiau semiconducteur de grandes dimensions et utilisation de la plaquette obtenue pour realiser des substrats du type semiconducteur sur isolant
US5877070A (en) * 1997-05-31 1999-03-02 Max-Planck Society Method for the transfer of thin layers of monocrystalline material to a desirable substrate
FR2807074B1 (fr) * 2000-04-03 2002-12-06 Soitec Silicon On Insulator Procede et dispositif de fabrication de substrats
FR2828428B1 (fr) * 2001-08-07 2003-10-17 Soitec Silicon On Insulator Dispositif de decollement de substrats et procede associe
JP4455804B2 (ja) * 2002-05-08 2010-04-21 株式会社ワイ・ワイ・エル インゴットの切断方法と切断装置及びウェーハ並びに太陽電池の製造方法
JP4708185B2 (ja) * 2002-07-17 2011-06-22 エス．オー．アイ．テック、シリコン、オン、インシュレター、テクノロジーズ 特に光学、電子工学、または光電子工学における基板を製造する方法

Also Published As

Publication number Publication date
FR2906077A1 (fr) 2008-03-21

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20120531