FR2891280B1 - Formation de silicium poreux dans une plaquette de silicium - Google Patents
Formation de silicium poreux dans une plaquette de siliciumInfo
- Publication number
- FR2891280B1 FR2891280B1 FR0552943A FR0552943A FR2891280B1 FR 2891280 B1 FR2891280 B1 FR 2891280B1 FR 0552943 A FR0552943 A FR 0552943A FR 0552943 A FR0552943 A FR 0552943A FR 2891280 B1 FR2891280 B1 FR 2891280B1
- Authority
- FR
- France
- Prior art keywords
- silicon
- platelet
- formation
- porous
- porous silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/02—Etching
- C25F3/12—Etching of semiconducting materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/02—Etching
- C25F3/14—Etching locally
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/02—Details
- H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
- H01M8/023—Porous and characterised by the material
- H01M8/0232—Metals or alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/10—Fuel cells with solid electrolytes
- H01M8/1097—Fuel cells applied on a support, e.g. miniature fuel cells deposited on silica supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/10—Fuel cells with solid electrolytes
- H01M2008/1095—Fuel cells with polymeric electrolytes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- General Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Weting (AREA)
- Fuel Cell (AREA)
- Inert Electrodes (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0552943A FR2891280B1 (fr) | 2005-09-29 | 2005-09-29 | Formation de silicium poreux dans une plaquette de silicium |
US11/529,637 US7704630B2 (en) | 2005-09-29 | 2006-09-28 | Fuel cell with a large exchange surface area |
US12/706,002 US8216739B2 (en) | 2005-09-29 | 2010-02-16 | Fuel cell with large exchange surface area |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0552943A FR2891280B1 (fr) | 2005-09-29 | 2005-09-29 | Formation de silicium poreux dans une plaquette de silicium |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2891280A1 FR2891280A1 (fr) | 2007-03-30 |
FR2891280B1 true FR2891280B1 (fr) | 2008-01-18 |
Family
ID=36241067
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0552943A Expired - Fee Related FR2891280B1 (fr) | 2005-09-29 | 2005-09-29 | Formation de silicium poreux dans une plaquette de silicium |
Country Status (2)
Country | Link |
---|---|
US (2) | US7704630B2 (fr) |
FR (1) | FR2891280B1 (fr) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5175928B2 (ja) * | 2007-06-29 | 2013-04-03 | ユニヴェルシテ ジョセフ フーリエ−グレノーブル アン | 人工生体模倣膜を組み込んだデバイス |
WO2009047453A1 (fr) * | 2007-09-20 | 2009-04-16 | Stmicroelectronics Sa | Support de cellules de pile a combustible |
US9401247B2 (en) * | 2011-09-21 | 2016-07-26 | Semiconductor Energy Laboratory Co., Ltd. | Negative electrode for power storage device and power storage device |
RU2572128C1 (ru) * | 2014-07-29 | 2015-12-27 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Воронежский государственный университет" (ФГБОУ ВПО ВГУ) | Способ получения порошков пористого кремния |
CN104532337A (zh) * | 2015-01-09 | 2015-04-22 | 中国矿业大学 | 一种电腐蚀法快速大面积制备铁基超疏水表面的方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4180146A (en) * | 1978-03-13 | 1979-12-25 | Hurst Performance, Inc. | Brake assembly with dual compensation adjustment |
US4180416A (en) * | 1978-09-27 | 1979-12-25 | International Business Machines Corporation | Thermal migration-porous silicon technique for forming deep dielectric isolation |
US5759712A (en) * | 1997-01-06 | 1998-06-02 | Hockaday; Robert G. | Surface replica fuel cell for micro fuel cell electrical power pack |
US6103077A (en) * | 1998-01-02 | 2000-08-15 | De Nora S.P.A. | Structures and methods of manufacture for gas diffusion electrodes and electrode components |
US6664169B1 (en) * | 1999-06-08 | 2003-12-16 | Canon Kabushiki Kaisha | Process for producing semiconductor member, process for producing solar cell, and anodizing apparatus |
DE19941048A1 (de) * | 1999-08-28 | 2001-03-01 | Bosch Gmbh Robert | Vorrichtung und Verfahren zur Erzeugung strukturierter Oberflächen mit erhöhter Resistenz gegen Verschmutzung und Benetzung |
CA2392115A1 (fr) * | 1999-11-17 | 2001-05-25 | Neah Power Systems, Inc. | Piles a combustible ayant des substrats de silicium et/ou des structures de soutien derivees de sol-gel |
US7427526B2 (en) * | 1999-12-20 | 2008-09-23 | The Penn State Research Foundation | Deposited thin films and their use in separation and sacrificial layer applications |
US20030096146A1 (en) * | 2001-03-30 | 2003-05-22 | Foster Ronald B. | Planar substrate-based fuel cell Membrane Electrode Assembly and integrated circuitry |
EP1258937A1 (fr) * | 2001-05-17 | 2002-11-20 | STMicroelectronics S.r.l. | Micropile à combustible à silicium, méthode de fabrication et dispositif semiconducteur autonome comportant une micropile à combustible |
EP1570539A2 (fr) * | 2002-10-31 | 2005-09-07 | Carbon Nanotechnologies, Inc. | Electrode de pile a combustible comprenant des nanotubes de carbone |
FR2846797A1 (fr) * | 2002-12-20 | 2004-05-07 | Commissariat Energie Atomique | Module de base monobloc et a relief de pile a combustible miniature et son procede de fabrication |
WO2004091026A2 (fr) | 2003-04-04 | 2004-10-21 | Sagem Sa | Micropiles a combustible destinees particulierement aux dispositif electroniques portables et aux dispositifs de telecommunications |
TWI242232B (en) * | 2003-06-09 | 2005-10-21 | Canon Kk | Semiconductor substrate, semiconductor device, and method of manufacturing the same |
-
2005
- 2005-09-29 FR FR0552943A patent/FR2891280B1/fr not_active Expired - Fee Related
-
2006
- 2006-09-28 US US11/529,637 patent/US7704630B2/en not_active Expired - Fee Related
-
2010
- 2010-02-16 US US12/706,002 patent/US8216739B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20100216054A1 (en) | 2010-08-26 |
FR2891280A1 (fr) | 2007-03-30 |
US20070072032A1 (en) | 2007-03-29 |
US8216739B2 (en) | 2012-07-10 |
US7704630B2 (en) | 2010-04-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20130531 |