FR2890067B1 - Procede de scellement ou de soudure de deux elements entre eux - Google Patents

Procede de scellement ou de soudure de deux elements entre eux

Info

Publication number
FR2890067B1
FR2890067B1 FR0552612A FR0552612A FR2890067B1 FR 2890067 B1 FR2890067 B1 FR 2890067B1 FR 0552612 A FR0552612 A FR 0552612A FR 0552612 A FR0552612 A FR 0552612A FR 2890067 B1 FR2890067 B1 FR 2890067B1
Authority
FR
France
Prior art keywords
solding
sealing
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0552612A
Other languages
English (en)
Other versions
FR2890067A1 (fr
Inventor
Francois Marion
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0552612A priority Critical patent/FR2890067B1/fr
Priority to JP2008528559A priority patent/JP2009506565A/ja
Priority to PCT/FR2006/050807 priority patent/WO2007026093A1/fr
Priority to EP06808248A priority patent/EP1919822A1/fr
Publication of FR2890067A1 publication Critical patent/FR2890067A1/fr
Application granted granted Critical
Publication of FR2890067B1 publication Critical patent/FR2890067B1/fr
Priority to US12/013,624 priority patent/US7772041B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00269—Bonding of solid lids or wafers to the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C3/00—Assembling of devices or systems from individually processed components
    • B81C3/002—Aligning microparts
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    • H01L24/02—Bonding areas ; Manufacturing methods related thereto
    • H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
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    • H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
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    • B81C2203/0172—Seals
    • B81C2203/019—Seals characterised by the material or arrangement of seals between parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
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    • B81C2203/03—Bonding two components
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FR0552612A 2005-08-30 2005-08-30 Procede de scellement ou de soudure de deux elements entre eux Expired - Fee Related FR2890067B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0552612A FR2890067B1 (fr) 2005-08-30 2005-08-30 Procede de scellement ou de soudure de deux elements entre eux
JP2008528559A JP2009506565A (ja) 2005-08-30 2006-08-21 ２つの要素を互いにシーリングまたは溶接する方法
PCT/FR2006/050807 WO2007026093A1 (fr) 2005-08-30 2006-08-21 Procède de scellement ou de soudure de deux éléments entre eux.
EP06808248A EP1919822A1 (fr) 2005-08-30 2006-08-21 Procède de scellement ou de soudure de deux éléments entre eux.
US12/013,624 US7772041B2 (en) 2005-08-30 2008-01-14 Method of sealing or welding two elements to one another

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0552612A FR2890067B1 (fr) 2005-08-30 2005-08-30 Procede de scellement ou de soudure de deux elements entre eux

Publications (2)

Publication Number Publication Date
FR2890067A1 FR2890067A1 (fr) 2007-03-02
FR2890067B1 true FR2890067B1 (fr) 2007-09-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
FR0552612A Expired - Fee Related FR2890067B1 (fr) 2005-08-30 2005-08-30 Procede de scellement ou de soudure de deux elements entre eux

Country Status (5)

Country Link
US (1) US7772041B2 (fr)
EP (1) EP1919822A1 (fr)
JP (1) JP2009506565A (fr)
FR (1) FR2890067B1 (fr)
WO (1) WO2007026093A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2473285A (en) * 2009-09-08 2011-03-09 Astron Advanced Materials Ltd Low temperature joining process
US8393526B2 (en) * 2010-10-21 2013-03-12 Raytheon Company System and method for packaging electronic devices
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EP1919822A1 (fr) 2008-05-14
FR2890067A1 (fr) 2007-03-02
US7772041B2 (en) 2010-08-10
US20080110013A1 (en) 2008-05-15
JP2009506565A (ja) 2009-02-12
WO2007026093A1 (fr) 2007-03-08

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