FR2879627B1 - Procede de croissance de nanofils de beta-sic ou de alpha-si3n4, eventuellement enrobes - Google Patents

Procede de croissance de nanofils de beta-sic ou de alpha-si3n4, eventuellement enrobes

Info

Publication number
FR2879627B1
FR2879627B1 FR0413630A FR0413630A FR2879627B1 FR 2879627 B1 FR2879627 B1 FR 2879627B1 FR 0413630 A FR0413630 A FR 0413630A FR 0413630 A FR0413630 A FR 0413630A FR 2879627 B1 FR2879627 B1 FR 2879627B1
Authority
FR
France
Prior art keywords
nanowils
si3n4
sic
alpha
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0413630A
Other languages
English (en)
Other versions
FR2879627A1 (fr
Inventor
Mikhael Bechelany
David Cornu
Philippe Miele
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Universite Claude Bernard Lyon 1 UCBL
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite Claude Bernard Lyon 1 UCBL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Universite Claude Bernard Lyon 1 UCBL filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR0413630A priority Critical patent/FR2879627B1/fr
Priority to PCT/FR2005/003145 priority patent/WO2006067308A1/fr
Priority to EP05850533A priority patent/EP1831438A1/fr
Publication of FR2879627A1 publication Critical patent/FR2879627A1/fr
Application granted granted Critical
Publication of FR2879627B1 publication Critical patent/FR2879627B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
    • C30B29/36Carbides
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/005Growth of whiskers or needles
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
    • C30B29/38Nitrides
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/60Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
    • C30B29/605Products containing multiple oriented crystallites, e.g. columnar crystallites

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Inorganic Fibers (AREA)
FR0413630A 2004-12-21 2004-12-21 Procede de croissance de nanofils de beta-sic ou de alpha-si3n4, eventuellement enrobes Expired - Fee Related FR2879627B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR0413630A FR2879627B1 (fr) 2004-12-21 2004-12-21 Procede de croissance de nanofils de beta-sic ou de alpha-si3n4, eventuellement enrobes
PCT/FR2005/003145 WO2006067308A1 (fr) 2004-12-21 2005-12-15 Procede de croissance de nanofils de beta-sic ou de alpha-si3n4, eventuellement enrobes
EP05850533A EP1831438A1 (fr) 2004-12-21 2005-12-15 Procede de croissance de nanofils de beta-sic ou de alpha-si3n4, eventuellement enrobes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0413630A FR2879627B1 (fr) 2004-12-21 2004-12-21 Procede de croissance de nanofils de beta-sic ou de alpha-si3n4, eventuellement enrobes

Publications (2)

Publication Number Publication Date
FR2879627A1 FR2879627A1 (fr) 2006-06-23
FR2879627B1 true FR2879627B1 (fr) 2007-09-21

Family

ID=34953153

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0413630A Expired - Fee Related FR2879627B1 (fr) 2004-12-21 2004-12-21 Procede de croissance de nanofils de beta-sic ou de alpha-si3n4, eventuellement enrobes

Country Status (3)

Country Link
EP (1) EP1831438A1 (fr)
FR (1) FR2879627B1 (fr)
WO (1) WO2006067308A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100802182B1 (ko) * 2006-09-27 2008-02-12 한국전자통신연구원 나노선 필터, 그 제조방법 및 흡착물 제거방법, 이를구비한 필터링 장치

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5404836A (en) * 1989-02-03 1995-04-11 Milewski; John V. Method and apparatus for continuous controlled production of single crystal whiskers
CA2043679A1 (fr) * 1990-07-24 1992-01-25 Lanxide Technology Company, Lp Preparation de fibres whiskers a base de carbure de silicium

Also Published As

Publication number Publication date
EP1831438A1 (fr) 2007-09-12
WO2006067308A1 (fr) 2006-06-29
FR2879627A1 (fr) 2006-06-23

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FR2879627B1 (fr) Procede de croissance de nanofils de beta-sic ou de alpha-si3n4, eventuellement enrobes

Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20130830