FR2866955B1 - Detecteur d'humidite de type capacitif - Google Patents

Detecteur d'humidite de type capacitif

Info

Publication number
FR2866955B1
FR2866955B1 FR0501900A FR0501900A FR2866955B1 FR 2866955 B1 FR2866955 B1 FR 2866955B1 FR 0501900 A FR0501900 A FR 0501900A FR 0501900 A FR0501900 A FR 0501900A FR 2866955 B1 FR2866955 B1 FR 2866955B1
Authority
FR
France
Prior art keywords
capacitive type
humidity detector
type humidity
detector
capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0501900A
Other languages
English (en)
Other versions
FR2866955A1 (fr
Inventor
Toshikazu Itakura
Hisanori Yokura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of FR2866955A1 publication Critical patent/FR2866955A1/fr
Application granted granted Critical
Publication of FR2866955B1 publication Critical patent/FR2866955B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
FR0501900A 2004-02-27 2005-02-24 Detecteur d'humidite de type capacitif Expired - Fee Related FR2866955B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004054664A JP3994975B2 (ja) 2004-02-27 2004-02-27 容量式湿度センサ

Publications (2)

Publication Number Publication Date
FR2866955A1 FR2866955A1 (fr) 2005-09-02
FR2866955B1 true FR2866955B1 (fr) 2007-05-11

Family

ID=34836465

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0501900A Expired - Fee Related FR2866955B1 (fr) 2004-02-27 2005-02-24 Detecteur d'humidite de type capacitif

Country Status (3)

Country Link
US (1) US7387024B2 (fr)
JP (1) JP3994975B2 (fr)
FR (1) FR2866955B1 (fr)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8357958B2 (en) * 2004-04-02 2013-01-22 Silicon Laboratories Inc. Integrated CMOS porous sensor
WO2007036922A1 (fr) 2005-09-30 2007-04-05 Timothy Cummins Capteur electronique integre
WO2005095936A1 (fr) * 2004-04-02 2005-10-13 Timothy Cummins Capteur electronique integre
JP4566784B2 (ja) * 2005-02-24 2010-10-20 株式会社デンソー 湿度センサ装置
US20070107500A1 (en) * 2005-11-16 2007-05-17 Neha Patel Sensing moisture uptake of package polymers
JP4732902B2 (ja) * 2006-01-18 2011-07-27 セイコーインスツル株式会社 湿度センサおよびそれを有する半導体装置
JP5112639B2 (ja) * 2006-03-06 2013-01-09 トウプラスエンジニアリング株式会社 湿度センサ
JP4770530B2 (ja) * 2006-03-13 2011-09-14 株式会社デンソー 容量式湿度センサ
MY164505A (en) * 2007-11-23 2017-12-29 Mimos Berhad Capacitive sensor
DE102008040187A1 (de) 2008-07-04 2010-01-07 Robert Bosch Gmbh Sensorelement, Verfahren zu seiner Herstellung sowie Verwendung
JP4915421B2 (ja) * 2009-01-07 2012-04-11 株式会社デンソー 容量式湿度検出装置
WO2011138985A1 (fr) * 2010-05-06 2011-11-10 서울대학교산학협력단 Détecteur d'élément capacitif et procédé de fabrication associé
JP5516505B2 (ja) 2011-05-25 2014-06-11 株式会社デンソー 容量式湿度センサ及びその製造方法
US9164052B1 (en) 2011-09-30 2015-10-20 Silicon Laboratories Inc. Integrated gas sensor
US8691609B1 (en) 2011-09-30 2014-04-08 Silicon Laboratories Inc. Gas sensor materials and methods for preparation thereof
US8669131B1 (en) 2011-09-30 2014-03-11 Silicon Laboratories Inc. Methods and materials for forming gas sensor structures
US8852513B1 (en) 2011-09-30 2014-10-07 Silicon Laboratories Inc. Systems and methods for packaging integrated circuit gas sensor systems
JP5900211B2 (ja) * 2012-07-16 2016-04-06 株式会社デンソー 湿度センサユニット
US9080928B2 (en) * 2013-01-11 2015-07-14 Nokia Technologies Oy Apparatus and associated methods
JP2017067445A (ja) * 2014-02-17 2017-04-06 アルプス電気株式会社 湿度センサ
JP6235415B2 (ja) * 2014-06-10 2017-11-22 アルプス電気株式会社 湿度検知装置
JP6486740B2 (ja) * 2015-03-23 2019-03-20 シャープ株式会社 センサｉｃ
US10336606B2 (en) * 2016-02-25 2019-07-02 Nxp Usa, Inc. Integrated capacitive humidity sensor
US10996183B2 (en) * 2016-07-22 2021-05-04 Sharp Kabushiki Kaisha Detection device and method of controlling detection device
JP2021042956A (ja) * 2017-12-28 2021-03-18 アルプスアルパイン株式会社 湿度検知装置
KR102035089B1 (ko) * 2018-10-17 2019-10-23 (주)멤스칩 히터 내장형 습도센서 및 그 제조방법
JP7173661B2 (ja) * 2018-11-16 2022-11-16 ミネベアミツミ株式会社 湿度検出装置
US11313824B2 (en) * 2018-11-16 2022-04-26 Minebea Mitsumi Inc. Detecting device
JP7193203B2 (ja) * 2018-11-16 2022-12-20 ミネベアミツミ株式会社 検出装置
DE102019205896B4 (de) * 2019-04-25 2023-09-28 Robert Bosch Gmbh Sensorvorrichtung zur Messung von Transpiration einer Pflanzenprobe

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5194281A (fr) 1975-02-17 1976-08-18
GB2138952B (en) * 1983-04-30 1986-07-30 Sharp Kk Producing electrical moisture sensors
JPH0599877A (ja) * 1991-06-25 1993-04-23 Yamatake Honeywell Co Ltd 感湿装置
US5402075A (en) * 1992-09-29 1995-03-28 Prospects Corporation Capacitive moisture sensor
JP2592782Y2 (ja) 1993-06-30 1999-03-24 大和製衡株式会社 計量機内の湿気検出装置
FI96640C (fi) 1993-08-23 1996-07-25 Vaisala Oy Menetelmä suhteellisen kosteuden mittaamiseksi, etenkin radiosondeissa
JP3369677B2 (ja) 1993-11-25 2003-01-20 グローリー工業株式会社 温湿度センサ
JPH0823542A (ja) 1994-07-11 1996-01-23 Canon Inc 撮像装置
AT1469U1 (de) * 1996-04-10 1997-05-26 E & E Elektronik Gmbh Verfahren zum ermitteln der absoluten luftfeuchtigkeit
AT3295U1 (de) * 1998-11-06 1999-12-27 E & E Elektronik Gmbh Anordnung zur feuchtemessung
KR100351810B1 (ko) * 1999-12-13 2002-09-11 엘지전자 주식회사 절대습도센서
US6580600B2 (en) * 2001-02-20 2003-06-17 Nippon Soken, Inc. Capacitance type humidity sensor and manufacturing method of the same
JP2003004683A (ja) * 2001-06-15 2003-01-08 Denso Corp 容量式湿度センサ
JP4501320B2 (ja) * 2001-07-16 2010-07-14 株式会社デンソー 容量式湿度センサ
US6997043B2 (en) * 2002-08-15 2006-02-14 The Boeing Company Integration of atmospheric intrusion sensors in electronic component packages
US7112443B2 (en) * 2002-10-18 2006-09-26 Symyx Technologies, Inc. High throughput permeability testing of materials libraries

Also Published As

Publication number Publication date
US20050188764A1 (en) 2005-09-01
JP3994975B2 (ja) 2007-10-24
FR2866955A1 (fr) 2005-09-02
US7387024B2 (en) 2008-06-17
JP2005241576A (ja) 2005-09-08

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Year of fee payment: 11

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Effective date: 20161028