FR2839060A3 - Variable optical attenuator (VOA), comprises a shutter with inclined faces which can be translated in a space between input and output channels by an actuator - Google Patents

Variable optical attenuator (VOA), comprises a shutter with inclined faces which can be translated in a space between input and output channels by an actuator Download PDF

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Publication number
FR2839060A3
FR2839060A3 FR0205455A FR0205455A FR2839060A3 FR 2839060 A3 FR2839060 A3 FR 2839060A3 FR 0205455 A FR0205455 A FR 0205455A FR 0205455 A FR0205455 A FR 0205455A FR 2839060 A3 FR2839060 A3 FR 2839060A3
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Prior art keywords
shutter
input
axis
channels
optical attenuator
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FR0205455A
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French (fr)
Inventor
Pekka Katila
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Memscap SA
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Memscap SA
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Priority to FR0205455A priority Critical patent/FR2839060A3/en
Publication of FR2839060A3 publication Critical patent/FR2839060A3/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
    • G02B6/266—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting the optical element being an attenuator
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/3552—1x1 switch, e.g. on/off switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3594—Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

The variable optical attenuator (1) comprises the micro-electro-mechanical (MEM) structures implemented on a substrate (9) including the input and output channels (2,3) aligned along an axis (7) and designed to receive the input and output optical fibres (4,5), respectively, and a shutter (10) which can be translated in a controlled manner in a space between the input and output channels (2,3) perpendicular to the axis (7) by an actuator (6) constituted of two matching combs (13,14). The face (20) of the shutter (10) on the side of the input channel has an inclination of about 45 degrees with respect to the direction of displacement of the shutter along its beam (11) axis (15). The two faces (20,21) of the shutter (10) situated on the sides of the input and output channels (2,3), respectively, have non-null inclinations with respect to the direction of displacement of the shutter, the two faces are symmetric with respect to the axis of displacement, and the inclination is preferentially about 45 degrees. The input light beam (30) from the core (8) of the input fibre (4) reaches the shutter (10), but only a light beam fraction (31) reaches the output fibre (5). The other light beam fraction (32) is reflected from the face (20) of the shutter and is propagated outside the space between the channels (2,3).

Description

de la recharge de gaz contenue dans le vehicule (2).of the gas refill contained in the vehicle (2).

-1-.-1.

ATTENUATEUR OPTIQUE VARIABLEVARIABLE OPTICAL ATTENUATOR

Domaine technique L'invention se rattache au domaine de la microelectronique, et plus particulierement au secteur des composants optiques realises a partir de structures microelectromecaniques, egalement appelees MEMS. L'invention vise plus particulierement des attenuateurs optiques variables, composants egalement connus sous l'abreviation VOA pour Variable Optical Attenuator. L'invention concerne plus specifiquement une nouvelle geometric utilisee pour realiser  Technical field The invention relates to the field of microelectronics, and more particularly to the sector of optical components produced from microelectromechanical structures, also called MEMS. The invention relates more particularly to variable optical attenuators, components also known under the abbreviation VOA for Variable Optical Attenuator. The invention relates more specifically to a new geometric used to realize

l'obturateur d'un attenuateur optique vanable.  the shutter of a vanable optical attenuator.

Technioues anterieures De fagon generale, un attenuateur optique variable est un composant optique utilise dans les reseaux de communications par fibres optiques, dans le but d'adapter la puissance optique transmise entre une fibre optique d'entree et une  BACKGROUND TECHNIQUES Generally speaking, a variable optical attenuator is an optical component used in optical fiber communications networks, with the aim of adapting the optical power transmitted between an input optical fiber and a

fibre optique de sortie.output optical fiber.

De multiples architectures ont deja ete proposees pour realiser des  Multiple architectures have already been proposed to achieve

attenuateurs optiques variables, et notamment en utilisant des technologies MEMS.  variable optical attenuators, and in particular by using MEMS technologies.

Un exemple d'attenuateur variable est decrit dans le document US 6 275 320. De facon classique, un attenuateur optique comprend deux canaux, destines a recevoir chacun une fibre optique, a savoir une fibre optique d'entree et une fbre optique de sortie. L'attenuateur comprend egalement une structure mobile, formant un obturateur, qui est deplacee par l'intermediaire d'un actionneur. En fonction de son deplacement, cet obturateur permet la transmission d'une partie variable de l'energie lumineuse issue de la fibre optique d'entree en destination de la fibre  An example of a variable attenuator is described in document US 6,275,320. Conventionally, an optical attenuator comprises two channels, each intended to receive an optical fiber, namely an input optical fiber and an output optical fiber. The attenuator also comprises a mobile structure, forming a shutter, which is moved by means of an actuator. Depending on its displacement, this shutter allows the transmission of a variable part of the light energy from the input optical fiber to the fiber.

optique de sortie.output optics.

Plus precisement, lorsque la paroi de l'obturateur penetre le faisceau issu de la fibre optique d'entree, une partie est reflechie, voire absorbee par cette paroi, le reste du faisceau se propageant a destination de la fibre optique de sortie. Un probleme se pose avec la partie du faisceau d'entree qui est reflechi sur -2 l'obturateur, puisque cette fraction reflechie peut interferer avec le faisceau d'entree, et perturber le reseau connecte a la fbre optique d'entree. Pour resoudre ce probleme, il a ete propose, dans le document US 6 246 826 d'incliner les canaux des fibres d'entree et de sortie par rapport a l'obturateur. Grace a cette disposition, la partie du faisceau d'entree qui se reflechit sur l'obturateur n'est pas colineaire avec le fais c e au d' entree, et les ris ques de perturb ations de la fbre optique d'entree vent diminues. Toutefois, une telle solution presente ['inconvenient d'augmenter tres fortement la surface de substrat occupee par l'attenuateur variable. Cette contrainte est d'autant plus importante que pour diminuer les phenomenes de reflexion, on sonhaite generalement que ['angle d'incidence du faisceau issu de la fbre optique stecarte le plus possible de la normale a la face de ltobturateur correspondent. En outre, cette disposition allonge la course de l'obturateur, ce qui a  More precisely, when the shutter wall penetrates the beam from the input optical fiber, a part is reflected, or even absorbed by this wall, the rest of the beam propagating towards the output optical fiber. A problem arises with the part of the input beam which is reflected on the shutter, since this reflected fraction can interfere with the input beam, and disturb the network connected to the optical input fbre. To solve this problem, it has been proposed, in document US Pat. No. 6,246,826 to incline the channels of the input and output fibers relative to the obturator. Thanks to this arrangement, the part of the input beam which is reflected on the shutter is not collinear with the entry beam, and the risks of disturbances of the optical input fbre are reduced. However, such a solution has the drawback of greatly increasing the surface area of the substrate occupied by the variable attenuator. This constraint is all the more important since, in order to reduce the reflection phenomena, it is generally said that the angle of incidence of the beam coming from the optical fbre is separated as much as possible from normal to the face of the shutter. In addition, this arrangement lengthens the travel of the shutter, which has

des consequences sur la geometric de l'actionneur, et sur la puissance consommee.  consequences on the actuator geometry, and on the power consumed.

Un probleme que se propose done de resoudre ['invention est celui de pouvoir concilier a la fois les exigences relatives a ['elimination ou tout au moins la diminution des problemes de reflexion du faisceau d'entree, avec la limitation de la  A problem which the invention therefore intends to solve is that of being able to reconcile both the requirements relating to the elimination or at least the reduction of the problems of reflection of the input beam, with the limitation of the

surface de substrat occupee par l'attenuateur variable.  substrate surface occupied by the variable attenuator.

Expose de ['invention L'invention concerne done un attenuateur optique variable qui comporte des structures micro - electromecaniques (MEMS) realis ee s sur un sub strat. Le sub strat peut par exemple etre a base de materiau semi conducteur tel que du silicium, mais egalement a base de materiaux dielectriques. Parmi ces structures MEMS, on compte notamment des canaux d'entree et de sortie, alignes dans l'axe l'un de l'autre, et destines a recevoir des fibres optiques respectivement d'entree et de sortie. L'attenuateur comporte egalement de facon connue un obturateur mobile apte a se translater de facon controlee dans l'espace entre les canaux d'entree et de sortie  Disclosure of the Invention The invention therefore relates to a variable optical attenuator which comprises microelectromechanical structures (MEMS) produced on a sub stratum. The sub strat can for example be based on semiconductor material such as silicon, but also based on dielectric materials. Among these MEMS structures, there are in particular input and output channels, aligned in the axis of one another, and intended to receive respectively input and output optical fibers. The attenuator also comprises in a known manner a movable shutter capable of translating in a controlled manner in the space between the inlet and outlet channels

et ce, perpendiculairement a l'axe desdits canaux d'entree et de sortie.  and this, perpendicular to the axis of said inlet and outlet channels.

-3 Conformement a ['invention, la face de l'obturateur en regard du canal d'entree presente une inclinaison non nulle par rapport a la direction de  -3 In accordance with the invention, the face of the shutter facing the inlet channel has a non-zero inclination relative to the direction of

deplacement de l'obturateur.displacement of the shutter.

Autrement dit, la face de l'obturateur sur laquelle vient se reflechir le faisceau issu de la fbre d'entree n'est pas perpendiculaire a cette derriere, mais presente une certaine inclinaison. De la sorte, le faisceau reflechi sur l'obturateur ne vient pas perturb er le faisceau d'entree et c e, bien que l'obturateur s e depl ace perpendiculairement au faisceau d'enkee. Grace a cette disposition, on beneficie des avantages en terme de surface occupee sur le substrat que l'on observe avec les  In other words, the face of the shutter on which the beam coming from the input fbre is reflected is not perpendicular to this behind, but presents a certain inclination. In this way, the beam reflected on the shutter does not disturb the input beam and this, although the shutter is displaced perpendicular to the beam of interest. Thanks to this arrangement, we benefit from the advantages in terms of surface occupied on the substrate which we observe with

attenuateurs dont l'obturateur se deplace perpendiculairement au faisceau d'entree.  Attenuators whose shutter moves perpendicular to the input beam.

On elimine par la meme disposition les perturbations relatives aux phenomenes de  By the same arrangement, the disturbances relating to the phenomena of

reflexion du faisceau d'entree.reflection of the input beam.

Avantageusement en pratique, l'inclinaison de la face de l'obturateur en regard du canal d'entree par rapport a la direction de deplacement de l'obturateur est choisie au voisinage de 45 degree. De cette maniere, le faisceau reflechi sur l'obturateur se retrouve sensiblement parallele a la direction de deplacement de l'obturateur, c'est-a-dire dans une direction particulierement eloignee du faisceau 2 0 d' entree. Les p erturb ations de ce fai sceau d' entree vent done tres fortement attenuees, et voire totalement annulees. L'invention couvre egalement des variantes dans lesquelles l'inclinaison de la face de l'obturateur est inferieure. Toutefois, il convient que cette inclinaison soit superieure a l'inclinaison minimale pour laquelle  Advantageously in practice, the inclination of the face of the shutter opposite the inlet channel relative to the direction of movement of the shutter is chosen in the vicinity of 45 degrees. In this way, the beam reflected on the shutter is found substantially parallel to the direction of displacement of the shutter, that is to say in a direction particularly distant from the input beam 20. The disturbances of this weak seal of entry are therefore very much attenuated, and even completely canceled. The invention also covers variants in which the inclination of the face of the shutter is less. However, this inclination should be greater than the minimum inclination for which

la partie reflechie du faisceau d'entree ne peut repenetrer dans la fbre d'entree.  the reflected part of the entry beam cannot re-enter the entry fbre.

Dans une variante de realisation, les deux faces de l'obturateur, situees en regard des canaux d'entree et de sortie peuvent presenter chacune une inclinaison  In an alternative embodiment, the two faces of the shutter, located opposite the inlet and outlet channels may each have an inclination

non nulle par rapport a la direction de deplacement de l'obturateur.  not zero compared to the direction of displacement of the shutter.

Avantageusement, ces deux faces peuvent 8tre symetriques par rapport a l'axe de deplacement de l'obturateur. Grace a cette disposition, il est possible d'utiliser l' attenuateur optique s ans se soucier du canal dans lequel sera mi se en p lace la -4 fibre optique d'entree, puisque les proprietes d'annulation des phenomenes de  Advantageously, these two faces can be symmetrical with respect to the axis of displacement of the shutter. Thanks to this arrangement, it is possible to use the optical attenuator without worrying about the channel in which the input optical fiber will be mixed, since the properties of cancellation of the phenomena of

reflexion arriere vent identiques de chaque cote de l'obturateur.  Identical rear wind reflection on each side of the shutter.

Dans d'autres variantes, l'attenuateur peut comporter plusieurs obturateurs venant se chevaucher sur le trajet du faisceau d'entree pour obtenir une attenuation totale.  In other variants, the attenuator may include several shutters overlapping on the path of the input beam to obtain total attenuation.

Description sommaire des fiauresBrief description of the unbelievers

La maniere de realiser ['invention ainsi que les avantages qui en decoulent  The way of carrying out the invention as well as the advantages which flow from it

ressortiront bien de la description du mode de realisation qui suit, a l'appui de  will emerge clearly from the description of the embodiment which follows, in support of

['unique figure annexee correspondent a une vue de dessus de la partie centrale  ['single attached figure correspond to a top view of the central part

d'un attenuateur variable conformement a ['invention.  of a variable attenuator in accordance with the invention.

Maniere de realiser ['invention L'attenuateur optique (1) illustre a la fgure comporte deux canaux (2, 3)  Method of carrying out the invention The optical attenuator (1) illustrated in the figure has two channels (2, 3)

destines a recevoir les fibres optiques respectivement d'entree (4) et de sortie (5).  intended to receive the optical fibers of input (4) and output (5) respectively.

L'attenuateur comporte egalement un obturateur (10) qui est monte a l'extremite d'une poutre (11), elle-meme mobile par l'intermediaire d'un actionneur (6) constitue de deux peignes interdigites (13, 14). Lorsqu'une tension est appliquee entre les peignes (13, 14), le peigne mobile (14) est attire par le peigne fxe (13) de sorte que la poutre (11) se deplace parallelement a son axe de symetrie (15). Bien entendu, d'autres actionneurs que ceux illustres a la fgure peuvent etre employee pour provoquer le deplacement de l'obturateur (10), sans sortir du cadre de ['invention. Conformement a ['invention, ltobturateur (10) presente une forme telle que ses faces (20, 21) ne vent pas paralleles a l'axe (15) de deplacement de l'obturateur, mais presentent au contraire une inc linais on qui e st preferentiellement de l' ordre de degree par rapport a ce meme axe. Compte-tenu du fait que ltobturateur (10) se deplace perpendiculairement a l'axe (7) des fbres, les faces (20, 21) de ltobturateur (10) presentent egalement une inclinaison de 45 degree par rapport a la direction de propagation des faisceaux. Dans la forme illustree, l'obturateur (10) constitue un -5 element situe en extremite de la poutre (11), et ce pour limiter la masse de la partie  The attenuator also comprises a shutter (10) which is mounted at the end of a beam (11), itself movable by means of an actuator (6) consisting of two interdigitated combs (13, 14) . When tension is applied between the combs (13, 14), the movable comb (14) is attracted by the fixed comb (13) so that the beam (11) moves parallel to its axis of symmetry (15). Of course, other actuators than those illustrated in the figure can be used to cause the displacement of the shutter (10), without departing from the scope of the invention. In accordance with the invention, the shutter (10) has a shape such that its faces (20, 21) do not wind parallel to the axis (15) of displacement of the shutter, but on the contrary have a linear inclination which st is preferentially of the order of degree with respect to this same axis. Taking into account that the shutter (10) moves perpendicular to the axis (7) of the shades, the faces (20, 21) of the shutter (10) also have an inclination of 45 degree relative to the direction of propagation of the beams. In the illustrated form, the shutter (10) constitutes a -5 element located at the end of the beam (11), and this to limit the mass of the part

mobile, pour des questions de consommation d'energie.  mobile, for questions of energy consumption.

De la sorte, lorsque le faisceau d'entree (30), issu du cceur (8) de la fibre d'enkee (4) parvient sur l'obturateur (10), une fraction seulement (31) parvient a destination de la fibre optique de sortie (5). L'autre portion (32) est reflechie sur la face (20) de l'attenuateur. Cette portion (32) se propage en dehors de liespace situe  In this way, when the input beam (30), coming from the core (8) of the entrained fiber (4) reaches the shutter (10), only a fraction (31) reaches the fiber. output optics (5). The other portion (32) is reflected on the face (20) of the attenuator. This portion (32) spreads outside the liespace located

entre les deux canaux (2, 3).between the two channels (2, 3).

Il ressort de ce qui precede que l'attenuateur optique conforrne a ['invention presente l'avantage essentiel de limiter les phenomenes de reflexion dans la fibre d'entree, tout en permettant de profiler des avantages d'une kanslation de l'attenuateur perpendiculairement au faisceau d'entree. La surface de subskat occupee est done limitee, et certaines proprietes d'auto-alignement, consequences des proprietes cristallographiques de certains subskats peuvent etre  It follows from the above that the optical attenuator conforms to the invention has the essential advantage of limiting the phenomena of reflection in the input fiber, while allowing to profile the advantages of a kanslation of the attenuator perpendicularly to the entry beam. The surface of occupied subskat is thus limited, and certain properties of self-alignment, consequences of the crystallographic properties of certain subskats can be

avantageus ement mi s es a pro fit.advantageously mi s es a pro fit.

-6-6

Claims (2)

RE'VENDICATIONSRE'VENDICATIONS 1/ Attenuateur optique variable (1) comportant des structures micro eleckomecaniques realisees sur un substrat (9), et notamrnent: s - des canaux d'entree (2) et de sortie (3), alignes dans l'axe (7) l'un de l'autre, et destines a recevoir des fibres optiques respectivement d'entree (4) et de sortie (5), - au moins un obturateur mobile (10) apte a se translater de fa,con controlee dans l'espace entre les canaux d'entree (2) et de sortie (3), et ce perpendiculairement a l'axe (7) des canaux d'entree et de sortie, caracterise en ce que la face (20) de liobturateur en regard du canal d'entree (2) presente une inclinaison non nulle par rapport a la direction de deplacement (15) de ltobturateur (10) 2/ Attenuateur optique variable selon la revendication 1, caracterise en ce que la face (20) de ltobturateur en regard du canal d'entree presente une inclinaison voisine de 45 degree par rapport a la direction de deplacement (15) de l'obturateur (10). 3/ Attenuateur optique variable selon la revendication 1, caracterise en ce que les deux faces (20, 21) de l'obturateur (10), situees en regard des canaux d'entree (2) et de sortie (3) presentent une inclinaison non nulle par rapport a la  1 / Variable optical attenuator (1) comprising microeleckomechanical structures produced on a substrate (9), and in particular: s - input (2) and output (3) channels, aligned in the axis (7) l 'from each other, and intended to receive optical fibers respectively of input (4) and output (5), - at least one movable shutter (10) able to translate fa, con controlled in space between the inlet (2) and outlet (3) channels, and this perpendicular to the axis (7) of the inlet and outlet channels, characterized in that the face (20) of the shutter opposite the channel input (2) has a non-zero inclination relative to the direction of movement (15) of the shutter (10) 2 / variable optical attenuator according to claim 1, characterized in that the face (20) of the shutter facing the inlet channel has an inclination close to 45 degrees relative to the direction of movement (15) of the shutter (10). 3 / variable optical attenuator according to claim 1, characterized in that the two faces (20, 21) of the shutter (10), located opposite the inlet (2) and outlet (3) channels have an inclination not zero compared to the direction de deplacement (15) de l'obturateur (10).  displacement direction (15) of the shutter (10). 4/ Attenuateur optique variable selon la revendication 1, caracterise en ce que les deux faces (20, 21) de l'obturateur situees en regard des canaux d'entree et de sortie vent symetriques par rapport a l'axe de deplacement (15) de l'obturateur (10).  4 / variable optical attenuator according to claim 1, characterized in that the two faces (20, 21) of the shutter located opposite the wind inlet and outlet channels symmetrical with respect to the displacement axis (15) the shutter (10).
FR0205455A 2002-04-30 2002-04-30 Variable optical attenuator (VOA), comprises a shutter with inclined faces which can be translated in a space between input and output channels by an actuator Pending FR2839060A3 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012143408A2 (en) 2011-04-18 2012-10-26 Österreichische Akademie der Wissenschaften Method for optomechanically detecting and converting a mechanical, electrostatic, magnetostatic or electrodynamic input signal into amplitude-modulated electromagnetic radiation output signals, electric output signals formed therefrom by means of radiation sensors using an optomechanically formed transmission function, and device for carrying out said method
CN111897084A (en) * 2014-10-29 2020-11-06 新思考电机有限公司 Lens driving device, camera device and electronic equipment

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WO1998012589A1 (en) * 1996-09-20 1998-03-26 Ascom Tech Ag A fiber optic circuit switch and a process for its production
US6167185A (en) * 1998-11-24 2000-12-26 Jds Fitel Inc. Adjustable optical attenuator
US6246826B1 (en) * 1999-09-02 2001-06-12 Nortel Networks Limited Variable optical attenuator with profiled blade
EP1139141A2 (en) * 2000-03-27 2001-10-04 Cronos Integrated Microsystems, Inc. Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998012589A1 (en) * 1996-09-20 1998-03-26 Ascom Tech Ag A fiber optic circuit switch and a process for its production
US6167185A (en) * 1998-11-24 2000-12-26 Jds Fitel Inc. Adjustable optical attenuator
US6246826B1 (en) * 1999-09-02 2001-06-12 Nortel Networks Limited Variable optical attenuator with profiled blade
EP1139141A2 (en) * 2000-03-27 2001-10-04 Cronos Integrated Microsystems, Inc. Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012143408A2 (en) 2011-04-18 2012-10-26 Österreichische Akademie der Wissenschaften Method for optomechanically detecting and converting a mechanical, electrostatic, magnetostatic or electrodynamic input signal into amplitude-modulated electromagnetic radiation output signals, electric output signals formed therefrom by means of radiation sensors using an optomechanically formed transmission function, and device for carrying out said method
EP2966451A2 (en) 2011-04-18 2016-01-13 Donau-Universität Krems Method for sensing and sensor
CN111897084A (en) * 2014-10-29 2020-11-06 新思考电机有限公司 Lens driving device, camera device and electronic equipment

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