EP4139657A1

EP4139657A1 - Device for distributing light based on diffraction gratings

Info

Publication number: EP4139657A1
Application number: EP21734407.6A
Authority: EP
Inventors: Cyrielle MONPEURT; Salim Boutami
Original assignee: Commissariat a lEnergie Atomique CEA; Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Current assignee: Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date: 2020-05-28
Filing date: 2021-05-27
Publication date: 2023-03-01
Also published as: FR3110979A1; WO2021240115A1; US20230221245A1

Abstract

Disclosed is a device for distributing light (100) configured such that, during use, it distributes light rays originating from an ancillary light source onto a scene (S) to be illuminated, and which comprises: - a planar waveguide (110), with a core layer (120) arranged between the two cladding layers; and - an extraction assembly, situated in the planar waveguide, and consisting of a plurality of diffraction gratings (151) distributed according to the two dimensions of a plane parallel to the plane of the planar waveguide.

Description

Title: LIGHT DISTRIBUTION DEVICE BASED ON NETWORKS OF

DIFFRACTION

Technical area

The invention relates to a light distribution device suitable for, in use, receiving light rays coming from a light source and distributing these rays on a scene to be illuminated.

State of the prior art

Lensless optical imaging systems are known in the prior art, in which a detection module acquires a wide-field image of a sample. The sample and the detection module are placed in close proximity to each other, with no magnification optics in between. A light source provides light to illuminate the sample. A light distribution device can be placed at the output of the light source, to recover the light of a narrow light beam emitted by the light source, and to distribute this light over an extended surface belonging to the sample. The light distribution device advantageously has a reduced thickness, allowing it to be housed in a space of thickness less than or equal to the distance which separates, in use, the sample from the detection module.

Patent application FR1914926 describes an example of such an optical system, for implementing an analysis by infrared spectrometry on a sample. In this example, the light distribution device is constituted by a series of passive extraction structures, each coupled to a respective secondary waveguide, and integrated with the secondary waveguides on the same substrate. The secondary waveguides are themselves coupled to a main waveguide by evanescent coupling. The passive extraction structures are each formed by a reflecting surface, located at the output of the corresponding secondary waveguide and inclined relatively obliquely. in the plane of the substrate. Each reflective surface is formed by a reflective coating deposited on an etched interface of the substrate.

Such a light distribution device has several drawbacks, in particular a complex fabrication requiring the production of a multitude of secondary waveguides and of oblique facets in the substrate, and a not very homogeneous distribution of the light on the surface to be illuminated. of the sample.

An objective of the present invention is to provide a light distribution device capable of being integrated into an optical imaging system without a lens for, in use, distributing on a scene to be illuminated light rays coming from an ancillary light source, and which does not have the drawbacks of the prior art mentioned above.

Presentation of the invention

This objective is achieved with a light distribution device configured to, in use, distribute over a scene to be illuminated light rays coming from an auxiliary light source, and which comprises:

- a planar waveguide which comprises two cladding layers and a core layer, with two faces of greater extent of the core layer which extend parallel to a plane called the plane of the planar waveguide, and with the two cladding layers and the core layer which are superimposed together along an axis orthogonal to the plane of the planar waveguide with the core layer disposed between the two cladding layers; and

- an extraction assembly, located in the planar waveguide, and consisting of a plurality of diffraction gratings distributed along the two dimensions of a plane parallel to the plane of the planar waveguide, an average value of a fill factor varying monotonically, from one diffraction grating to another of the extraction assembly, and along an axis parallel to the plane of the planar waveguide. Diffraction gratings are grids of the coupling grating type, known in the field of integrated optics for providing optical coupling between an optical fiber and a waveguide integrated on a photonic chip. In the invention, the diffraction gratings are numerous, and distributed over a large area within the extraction assembly.

The extraction assembly is housed within the planar waveguide, without increasing the thickness of the latter. The thickness of the light distribution device therefore corresponds to the thickness of the planar waveguide. The light distribution device can therefore have a reduced thickness, compatible in particular with its integration into an optical imaging system without a lens such as that described in the introduction. In particular, the light distribution device according to the invention can easily have a thickness less than or equal to the distance which separates, in use, the sample and the detection module in the optical imaging system without lens described in the introduction. . This thickness is advantageously less than or equal to 1.5 μm. The manufacture of a light distribution device according to the invention requires the production of a simple planar waveguide, within which diffraction gratings are etched. Manufacturing does not require the implementation of complex processes, and presents reduced constraints, particularly in terms of alignment. The light distribution device according to the invention can therefore be manufactured in a simple, rapid and inexpensive manner.

In operation, the light is injected into the light distribution device at the level of a transverse face of the latter, at the level of the core layer. The light then circulates in the planar waveguide, by successive reflections at the interfaces between the core layer and each of the cladding layers. During its propagation in the planar waveguide, the light is confined only along the axis of the thickness of the planar waveguide, that is to say along an axis orthogonal to the plane of the guide planar wave. In the other two dimensions of space, the propagation in the planar waveguide results in a spatial spreading of the light (unless the injected beam already has a width substantially equal to that of the planar waveguide ). The light circulating in the planar waveguide is extracted out of the latter by each of the diffraction gratings of the extraction assembly. Preferably, each diffraction grating is configured to extract light in the form of a light beam oriented along an axis orthogonal to the plane of the planar waveguide. In practice, the light is extracted in the direction of the scene to be illuminated as well as in the opposite direction, but one can favor one of the directions by suitable choices of optical index in the media in contact with the planar waveguide.

The light propagating in the planar waveguide does not simultaneously reach all the diffraction gratings. Each diffraction grating extracts only part of the light arriving at its level in the planar waveguide, the non-extracted light continuing to propagate in the planar waveguide to the next diffraction grating. This allows light extraction over a large area, especially since this effect is added to the free propagation of light in the plane of the planar waveguide. The light distribution device according to the invention can thus recover the light of a narrow light beam, and distribute this light over at least one large area located outside the planar waveguide. One of the at least one surface preferably belongs to a sample to be analyzed, and preferably has a width greater than or equal to 1 mm (the width designating the greatest distance separating two points on the surface considered, for example a diameter or a major ellipse axis). The light distribution is relatively homogeneous, since each network participates in the extraction of light.

The invention thus makes it possible to distribute the light over a large surface, in a homogeneous manner, and with the aid of a thin device that is easy to manufacture.

The extraction of light by diffraction gratings also makes it possible to control an angle of extraction of the light.

Advantageously, the extraction assembly is located in one of the two sheath layers.

The device may further include a support substrate, transparent over a range of wavelengths of use of the planar waveguide, and superimposed on the planar waveguide along an axis orthogonal to the plane of the waveguide. planar wave. The substrate support may include a cavity, located on the side opposite the planar waveguide, and an extent in a plane parallel to the plane of the planar waveguide is greater than or equal to an extent of the extraction assembly in a plane parallel to the plane of the planar waveguide.

The diffraction gratings of the extraction assembly can extend in a series of parallel bands between them, which each extend from one edge to the other of the extraction assembly. As a variant, they can be distributed along the two dimensions of a plane parallel to the plane of the planar waveguide.

Preferably, the device according to the invention is configured for, in use, distributing on the scene to be illuminated light rays, a wavelength spectrum of which is centered on a wavelength called the central wavelength, and them. diffraction gratings of the extraction assembly all have the same mean value of the pitch, with said mean value of the pitch adapted to extract outside the planar waveguide, and along an axis orthogonal to the plane of the planar waveguide, a light beam at the central wavelength propagating in the planar waveguide.

Advantageously, the extraction assembly is located in one of the two cladding layers, and in that the patterns of the diffraction gratings of the extraction assembly each consist of at least one solid zone and at the at least one hollow zone, where the at least one solid zone consists of the material of the sheath layer receiving the extraction assembly, and where the at least one hollow zone is able to be occupied by a surrounding medium.

The diffraction gratings of the extraction assembly may each consist of a plurality of patterns, with the patterns of said diffraction gratings extending along straight lines parallel to each other. Alternatively, the diffraction gratings of the extraction assembly may each be made up of a plurality of patterns, with the patterns of said diffraction gratings extending along convex curved lines each extending from one to the other. edge to the opposite edge of the planar waveguide.

Advantageously, the device according to the invention is configured to, in use, distribute on the scene to be illuminated light rays, a wavelength spectrum of which extends from a minimum wavelength to a length d. 'wave maximum, and the planar waveguide is single-mode along an axis orthogonal to the plane of the planar waveguide and to said minimum wavelength.

The invention also covers an infrared imaging system which comprises:

- A light distribution device according to the invention, configured to, in use, distribute over a scene to be illuminated light rays coming from an ancillary light source; and

a detection module, comprising an infrared matrix detector configured to receive light rays returned by the scene to be lit; with the matrix infrared detector located opposite the extraction assembly, and on the side of the planar waveguide receiving the extraction assembly, and with a degree of superposition between the infrared detectors making up the matrix infrared detector, and the diffraction gratings of the extraction assembly, which is less than or equal to 50%.

The system may further include an infrared light source forming the auxiliary light source, and the light distribution device is configured to, in use, receive as input light rays coming from said infrared light source and distribute these rays on the scene to illuminate, with the input of the light distribution device formed by a transverse face of the planar waveguide.

The system may further include an imaging assembly comprising at least one refractive lens, disposed between the input of the light distribution device and the infrared light source, and configured to receive as input the light emitted by the infrared light source and to output a beam of light rays parallel to each other.

The system may further include a spacer element, mounted integral with the detection module and provided with a bearing surface intended to come into contact with a sample to be analyzed and located on one side of the element to be analyzed. spacing opposite to the detection module, and the light distribution device forms all or part of the spacer element. Brief description of the figures

The present invention will be better understood on reading the description of embodiments given purely as an indication and in no way limiting, with reference to the appended drawings in which:

[Fig. IA] schematically illustrates, and in a sectional view, a first embodiment of a light distribution device according to the invention;

[Fig. IB],

[Fig. IC],

[Fig. 1D], and

[Fig. 1E] schematically illustrate, in a top view, various examples of distribution of the diffraction gratings of the extraction assembly, in a device according to the invention such as that of FIG. 1A;

[Fig. 2] schematically illustrates the embodiment of FIG. 1A, in use; [Fig. 3] schematically illustrates, and in a sectional view, a second embodiment of a light distribution device according to the invention;

[Fig. 4] illustrates schematically, and in a sectional view, a third embodiment of a light distribution device according to the invention;

[Fig. 5] schematically illustrates a fourth embodiment of a light distribution device according to the invention;

[Fig. 6] schematically illustrates, and in a sectional view, a first embodiment of an infrared imaging system according to the invention;

[Fig. 7 A] and

[Fig. 7B] schematically illustrate a second embodiment of an infrared imaging system according to the invention;

[Fig. 8A] and

[Fig. 8B] schematically illustrate a third embodiment of an infrared imaging system according to the invention; and

[Fig. 9] schematically illustrates an infrared imaging system according to the invention, in use. Description of the embodiments

To facilitate reading, the axes of an orthonormal coordinate system (Oxyz) have been shown in the figures.

Throughout the text, the term “infrared” refers to a part of the light spectrum belonging to a spectral band ranging from 0.78 μm to 50 μm, more preferably from 2 μm to 12 μm.

Throughout the text, a planar waveguide designates an optical guiding element capable of guiding the propagation of light by successive reflections on flat faces parallel to each other. In a planar waveguide, light is confined along one of the axes of three-dimensional space, and free to propagate along the other two axes of three-dimensional space. A waveguide consists of a core, in which light circulates, and a cladding, providing a desired optical index difference between the heart and a medium surrounding the heart. In the case of a planar waveguide, a core layer is interposed between two cladding layers, and light is guided into the core layer by successive reflections at the interfaces between the core layer and each respective one of the core layers. sheath (here, it is more particularly a refractive guide). The core layer consists in practice of an optical part having a reduced dimension along one of the axes of three-dimensional space (here the axis (Oz) of the thickness), and of large dimensions according to each the other two axes of three-dimensional space (here the axes (Ox) and (Oy) of length and width). Thus, the light is confined along the (Oz) axis, and propagates freely along the (Oy) and (Ox) axes. In the core layer, the ratio between the thickness and the length, respectively the thickness and the width, is preferably greater than or equal to 5, or even greater than or equal to 10. The core layer consists of a material optically transparent at the wavelengths to be propagated, for example with a transmission coefficient greater than or equal to 98% at said wavelengths. It advantageously has the same optical index and the same chemical composition over its entire volume.

A first embodiment of a light distribution device 100 according to the invention is shown in FIG. 1A, in a sectional view in a plane (xOz). The device 100 includes a first cladding layer 130i, a core layer 120, and a second cladding layer 130 ₂ , superimposed in this order along the axis (Oz) to form a planar waveguide 110. Each of these three layers is optically transparent to the wavelengths to be propagated, for example with a transmission coefficient greater than or equal to 98% at said wavelengths. The wavelengths to be propagated designate a range of wavelengths that the device is suitable for receiving and then for distributing over a scene to be illuminated.

The optical index of the first clad layer 130i and the optical index of the second clad layer 130 ₂ are each lower than the optical index of the core layer 120. The differences between the optical index of the core layer core and the optical index of the first, respectively second cladding layer, are adapted to allow optical guidance of the light in the core layer. Here, but in a nonlimiting manner, the first sheath layer 130i and the second sheath layer 130 ₂ are made of the same material. The core layer 120 is for example made of germanium (Ge), or a germanium-silicon alloy (SiGe). The cladding layers 130i, 130 ₂ are for example made of a germanium-silicon alloy (SiGe), with a higher silicon content than in the core layer. For example, the core layer is germanium and the cladding layers of germanium-silicon alloy with 40 atom% germanium.

The core layer 120 is delimited, along the axis (Oz), by two faces 121, 122 parallel to the plane (xOy). These faces 121, 122 are the faces of greatest extent, or area, of the core layer 120. A plane of the planar waveguide 110 is defined as being a plane parallel to said faces 121, 122. Preferably, the larger external faces of the planar waveguide 110 extend in planes parallel to the faces 121, 122. The core layer 120 and the first, respectively second, cladding layer 130i, 130 ₂ , are in direct physical contact. 'with each other. The core layer 120 and the two cladding layers 130i, 130 ₂ are superimposed on each other, along an axis (Oz) orthogonal to the plane (xOy) of the planar waveguide, and with the layer of core interposed between the two layers of sheath 130i, 130 ₂ .

The planar waveguide 110 here has the shape of a rectangular parallelepiped with a square base. Preferably, the length and the width (along the axis (Ox), respectively (Oy)) of the planar waveguide 110 are each between 5 mm and 20 mm, for example equal to 10 mm. The planar waveguide 110 may also include lateral claddings, in direct physical contact with the core layer 120 at the level of two opposite transverse faces of the latter. The side sheaths are made of a material having an optical index lower than that of the core layer, preferably the same material as that of the first and second layers of sheaths 130i, 130 ₂ .

The device 100 further comprises an extraction assembly 150, located in the planar waveguide 110, and consisting of a plurality of diffraction gratings 151. The diffraction gratings are distributed along the two dimensions of a plane ( xOy). Preferably, they are distributed regularly in the plane (xOy).

In the example illustrated here, the extraction assembly 150 extends more particularly in one of the two sheath layers, here the second sheath layer 130 ₂ . In variants not shown, the extraction assembly extends into the core layer 120.

A diffraction grating designates a succession of patterns, distributed periodically or quasi-periodically (variation of the pitch less than or equal to 10% between two consecutive patterns). In the invention, each diffraction grating 151 is adapted to deflect, towards the outside of the planar waveguide 110, the light circulating in the core layer 120.

The diffraction gratings 151 are preferably all arranged coplanar. Here, but in a nonlimiting manner, each of the diffraction gratings 151 extends along the entire thickness of the second cladding layer 130 ₂ . As a variant, each of the diffraction gratings 151 extends only over a part only of the thickness of the second cladding layer 130 ₂ . In any event, the patterns forming the diffraction grating 151 are preferably invariant along the (Oz) axis. Each pattern comprises a first portion consisting of the material of the second sheath layer 130 ₂ , and a second portion consisting of another material. The second portion may be solid, consisting for example of ZnS, or hollow, capable of being occupied by a surrounding gaseous medium such as air.

The diffraction gratings are advantageously distributed in a regular arrangement in a plane (xOy). Various examples of distribution are described below. FIG. 1B schematically illustrates a first example of distribution of the diffraction gratings 151 in the planar waveguide. FIG. IB schematically represents an extraction assembly in a device according to the invention, in a top view in transparency. The diffraction gratings 151 here extend along lines parallel to each other, each going from one edge to the opposite edge of the planar waveguide. Here, the diffraction gratings 151 extend more particularly along lines parallel to the axis (Oy), and are distributed regularly along the axis (Ox).

FIG. 1C represents a detailed view of one of the diffraction gratings 151 illustrated in FIG. IB. It is more particularly a detail view of the network portion 151i circled in FIG. 1B. Each diffraction grating is a one-dimensional grating, made up of patterns 1510 which here extend along lines parallel to the axis (Oy). In each diffraction grating 151, a pattern distribution step along the axis (Ox) is denoted P _x .

FIG. 1D schematically illustrates another example of the distribution of the diffraction gratings 151 ′ in the planar waveguide. In this variant, the diffraction gratings 15 are distributed along the two dimensions (Ox) and (Oy) of the plane of the planar waveguide. Here, the diffraction gratings are arranged in rows and columns. The rows and columns extend respectively along the axis (Ox) and along the axis (Oy), here with the same distribution pitch along the axes (Ox) and (Oy). Each diffraction grating 15 here has a square section in a plane (xOy). As in the previous example, each diffraction grating 151 'is a one-dimensional grating, here made up of patterns which extend along lines parallel to the (Oy) axis (like the grating portion illustrated in Figure 1C) .

FIG. 1E schematically illustrates yet another example of the distribution of the diffraction gratings 151 "in the planar waveguide. Here again, the diffraction gratings 15 are distributed according to the two dimensions (Ox) and (Oy) of the plane. of the planar waveguide. Here, the diffraction gratings 151 "are distributed in staggered rows, and in a regular arrangement. Each diffraction grating 151 "here has a square section in a plane (xOy). As in the previous examples, each diffraction grating 151 "is a one-dimensional lattice, made up here of patterns which extend along lines parallel to the (Oy) axis (like the portion of the lattice illustrated in FIG. 1C).

As illustrated below, with reference to FIG. 8A, the invention is not limited to a device with diffraction gratings whose patterns extend along straight lines parallel to each other.

In operation, the device 100 is immersed in a surrounding gaseous or liquid medium, preferably air. The light arrives on the device 100, at the level of a transverse face of the latter called the inlet face 113, and at the height of the core layer 120. The inlet face 113 extends here in a plane parallel to the plan (yOz). Inside the planar waveguide 110, the light propagates in the core layer 120 by successive reflections at the interfaces between the core layer 120 and each of the cladding layers 130i and 130 ₂ . Here, the light propagates in the planar waveguide along the (Ox) axis. If the light beam injected into the planar waveguide 110 is narrower than the latter, the light propagates in the planar waveguide 110 by spreading along the axis (Oy). The light is extracted outside the planar waveguide 110, at the level of the extraction assembly 150. Preferably, each of the diffraction gratings of the extraction assembly participates in this light extraction. With the exception of a series of gratings located on the side opposite to the input face 113, each of the diffraction gratings extracts only part of the light arriving at its level. Thus, the unextracted light continues to propagate in the planar waveguide to a neighboring diffraction grating, which in turn will extract at least part of the light arriving at its level. One thus achieves an extraction of light towards the outside of the planar waveguide 110, and a distribution of this light over a surface area greater than or equal to that of the extraction assembly 150.

FIG. 2 schematically illustrates the device 100, in use. The arrow 20 represents the light beam injected at the input of the planar waveguide 110. The beams 21 represent the light beams extracted at the level of each of the diffraction gratings 151, in the direction of a scene to be illuminated S. The scene to be illuminated S extends here with regard to the extraction assembly, in a plane (xOy). The scene to be lit S is shown here spaced from the device 100 according to the invention. In practice, it is rather contiguous against an external face of the device 100 according to the invention. The scene to be lit S has for example a width of between 1 mm and 15 mm The scene to be lit 20 has for example a width of between 1 mm and 15 mm (greatest distance between two points). It is for example a square of 3 mm side. In any event, the dimensions of the scene to be lit are substantially equal to the dimensions of the extraction assembly.

Each of the diffraction gratings of the extraction assembly extracts light out of the plane of the planar waveguide as a diverging beam. It is thus possible to distribute the light on the scene to be illuminated, without a shadow zone, and with the aid of diffraction gratings spaced from one another. The higher the angle (solid) of divergence of the extracted light beams, the more the diffraction gratings can be spaced from each other.

In the planar waveguide, an angle between an external face of the planar waveguide at which the light emerges, and a light ray deflected by a diffraction grating, must remain below a critical threshold beyond which the deflected light is reflected inside the device according to the invention. Here, the light is extracted in light beams each oriented according to the normal to the plane of the planar waveguide, with a half-angle of divergence Oi (where the half-angle of divergence denotes half of the total angle of divergence ). Oi must therefore remain below said critical threshold. It is assumed that the outer face of the planar waveguide at which the light emerges is parallel to the plane of the planar waveguide, which is generally the case. Preferably, the diffraction gratings are configured so that the half-angle of divergence is equal to, or only slightly less than, the critical threshold. The divergence of the networks is thus maximized, which makes it possible to space them out as far as possible, and thus to limit a number of blinded infrared detectors in the system described below.

Each diffraction grating of the extraction assembly deflects the light in two opposite directions: in the direction of the scene to be illuminated S and in the opposite direction. Here, the scene to be illuminated is on the side of the planar waveguide opposite to the extraction assembly. As detailed below (see description of FIG. 6), it is possible to favor one of these two directions, to ensure that the major part of the extracted light arrives on the scene to be illuminated. In addition or as a variant, it is possible to block the rays emitted in the opposite direction, for example by means of an absorbing or reflecting structured layer contiguous against the extraction assembly. Said structured layer comprises solid zones and open zones, so that each diffraction grating is covered by a solid absorbing or reflecting zone on the side opposite to the scene to be illuminated. Between the diffraction gratings, the open areas allow light to pass, in particular light backscattered by the scene to be illuminated.

Each diffraction grating can have a constant pattern distribution pitch value over the entire extent of the diffraction grating. As a variant, at least one of the diffraction gratings may have a variable value of the pattern distribution pitch, in order to increase an angle of divergence of the extracted light. Advantageously, all the networks of the extraction assembly are configured to extract the light with the same angle of divergence. In all cases, an average value of the pattern distribution pitch can be defined. When the pitch is constant, this average value is equal to the pattern distribution pitch. When the pitch is variable, this mean value is equal to the arithmetic mean of the values taken by the pattern distribution pitch.

Preferably, the diffraction gratings of the extraction assembly all have the same average value of the pattern distribution pitch. This average value of the pattern distribution step, or average value of the step, is adapted so that the light extracted by the corresponding network forms a light beam centered on an axis orthogonal to the plane of the planar waveguide. For this, the mean value of the pitch is adapted so that the light at a central wavelength is deflected along an axis orthogonal to the plane of the planar waveguide. The central wavelength designates the central value of a range of wavelengths that the device according to the invention is adapted to receive circulating in the planar waveguide and then to extract towards a scene to be illuminated via the extraction set. This range of wavelengths is called the working wavelength range. The mean value of the step making it possible to verify that the above condition is determined, in a known manner, with the aid of the network formula and by considering the orders of refraction 1 and -1. Preferably, the planar waveguide 110 is single-mode along the (Oz) axis, and over the entire range of wavelengths of use. For this condition to be satisfied over the entire range of wavelengths, it suffices that it be satisfied for the smallest value of this range. This condition sets a maximum value for the thickness of the core layer, for example 1.6 µm. To limit the losses at the longest wavelengths, the thickness of the core layer is preferably chosen as close as possible to this maximum value.

FIG. 3 schematically illustrates, and in a sectional view, a second embodiment of a light distribution device 300 according to the invention. The device 300 differs from the first embodiment only in that it further comprises a support substrate 360, superimposed on the planar waveguide along the axis (Oz), on the side opposite to the assembly. extraction 350. The support substrate 360 extends in a plane (xOy). Here, the support substrate 360 is attached against the planar waveguide 310, in direct physical contact with the latter at the level of the first cladding layer 330i.

In an orthogonal projection of the device 300 in a plane parallel to the plane (xOy), the projection of the extraction assembly 350 is located inside the projection of the support substrate 360. In other words, the support substrate 360 covers the entire extraction set 350.

Support substrate 360 is transparent over the wavelength range of use. It preferably has an optical index lower than that of the first cladding layer 330i. The support substrate 360 is preferably made of silicon. It makes it possible in particular to ensure the good mechanical strength of the planar waveguide 310. With this support substrate 360, the thickness e (along the axis (Oz)) of the device 300 is preferably between 100 μm and 1. , 5 mm, preferably between 100 µm and 1.0 mm, for example equal to 725 µm. The thickness of the support substrate is preferably greater than or equal to 200 μm.

Here, the highest index jump is at the interface between the support substrate 360 and the surrounding medium. The critical threshold as described above, beyond which the light deflected by a diffraction grating is reflected inside the device according to the invention, therefore depends on the optical indices in the support substrate 360 and in the surrounding environment. For a silicon support substrate 360, in a surrounding medium consisting of air, the critical threshold is approximately 17 ° in absolute value.

One face of the support substrate 360, located on the side of said substrate opposite the planar waveguide, forms a bearing surface 361 for a sample to be observed. In use, the bearing surface 361 is positioned against the sample. The scene to be observed is formed by a surface of the sample in contact with the bearing face 361, located opposite the extraction assembly 350.

FIG. 4 schematically illustrates, and in a sectional view, a third embodiment of a light distribution device 400 according to the invention. The device 400 differs from the device of FIG. 3 only in that the support substrate 460 comprises a cavity 462, open on the side opposite the planar waveguide 410. The cavity 462 has a bottom 463, which extends here in a plane (xOy), and side faces 464. The depth of the open cavity 462, measured along the axis (Oz), is for example between 100 μm and 400 μm.

In an orthogonal projection of the device 400 in a plane parallel to the plane (xOy), the projection of the extraction assembly 450 is located inside the projection of the cavity 462. In other words, the cavity 462 covers the whole. of the extraction assembly 450.

The support substrate 460 projects laterally relative to the cavity 462, and in all directions of a plane (xOy). One face of the support substrate 460, located on the side of said substrate opposite the planar waveguide and around the cavity 462, forms the bearing surface 461 for a sample to be observed. In use, the bearing surface 461 is positioned against the sample and the scene to be observed S is formed by a surface of the sample located opposite the extraction assembly 450 and the cavity 462.

This embodiment makes it possible to introduce an intermediate layer between the scene to be observed and the support substrate 460, formed by the material of the surrounding environment in the cavity 462 (preferably air). Since the optical index of the surrounding medium is much lower than the optical index of the support substrate 460, the divergence of the extracted light beams increases sharply when the light enters the cavity 462 (see beams 21 '). This increase in the divergence makes it possible in particular to reduce the thickness of the device according to the invention while keeping its other components unchanged. characteristics. In addition or as a variant, it makes it possible to reduce the number of diffraction gratings in the extraction assembly, which reduces the number of blinded infrared detectors in the system illustrated below.

An advantageous characteristic of the extraction assembly of the device according to the invention is then described. As explained above, in operation, each of the diffraction gratings of the extraction assembly extracts only part of the light arriving at its level, and the light not extracted by said grating continues to propagate in the planar waveguide to a neighboring grating. Therefore, if all the diffraction gratings of the extraction set have the same rate of light extraction, they will extract an increasingly reduced amount of light as the propagation of the light increases. light along the extraction assembly. Indeed, the networks reached first by the light circulating in the planar waveguide will extract a percentage Pc from a large quantity of light, while the networks reached last will extract the same percentage Pc but on a residual quantity. from light. It is therefore advantageous for the extraction assembly to have a variable extraction rate, from one diffraction grating to another, so as to ensure good homogeneity of the distribution of light on the scene to be illuminated. The rate of extraction of the diffraction gratings advantageously varies in a monotonically increasing manner, along lines parallel to an axis of propagation of the light in the planar waveguide, and from a face of entry of the light in the guide. planar wave. The variation can include stages, or be strictly increasing.

The extraction rate of a diffraction grating is a function of the average value of its fill factor, here a ratio between the total volume occupied by the material with the lowest index and the total volume of the diffraction grating. All the diffraction gratings advantageously have the same depth (dimension along the axis (Oz)). The fill factor defined above is therefore reduced to a ratio of areas. When the pitch is constant, the average value of the fill factor can be calculated on a single mesh, or pattern of the network. The extraction is all the higher as the filling factor is close to 50% (strongest index modulation). Preferably, the mean value of the fill factor does not exceed 0.5 (50%) in any of the diffraction of the extraction assembly. In this case, the higher the fill factor, the higher the extraction rate, and vice versa.

FIG. 5 schematically illustrates, and in a top view, a distribution of the filling factors in the diffraction gratings of an extraction assembly 550 of a device according to a fourth embodiment of the invention. The value of the fill factor in a diffraction grating is represented by a value of the gray level (scale on the right).

All the diffraction gratings of the extraction assembly have the same depth (dimension along the axis (Oz)). The distribution of the fill factors varies monotonically along lines parallel to the (Ox) axis, here increasing from an input face to an output face of the planar waveguide. Here, the distribution of the fill factors is adapted to a case where the light propagates in the planar waveguide in the form of a plane wave. The corresponding optical power follows a Gaussian law as a function of the position along the axis (Oy). The fill factor of the diffraction gratings therefore follows this Gaussian distribution. We therefore have diffraction gratings with a fill factor which increases along lines parallel to the axis (Ox), and with a constant fill factor along convex curved lines. Throughout the text, the term “convex” here designates lines curved in a direction opposite to the inlet face of the device according to the invention.

The rate of extraction of a diffraction grating is also a function of the depth of this grating, here along the axis (Oz). Thus, according to a variant not shown, the diffraction gratings of the extraction assembly have a depth which varies monotonically along lines parallel to the axis of propagation of the light in the planar waveguide.

The rate of extraction of a diffraction grating is also a function of the size of this grating along an axis of propagation of light in the planar waveguide. Thus, according to a variant not shown, the diffraction gratings of the extraction assembly each have an extent which varies along lines parallel to an axis of propagation of light in the planar waveguide. At least two of the three parameters mentioned above can be combined to vary an extraction rate in the diffraction gratings of the extraction assembly.

In each of the embodiments and variants of the invention, the fill factor may be slightly variable within the same diffraction grating, in order to symmetrize the radiation in the far field. In this case, a variation of the mean value of the filling factor is considered, from one network to another of the extraction assembly.

The invention offers a solution for distributing the light on a scene to be lit, preferably with normal or near-normal lighting. Advantageously, the scene to be illuminated is parallel to the planar waveguide, and the light emerges from the latter according to a plurality of elementary beams each oriented along an axis normal to the planar waveguide, each with a divergence angle of About 17 °. The device according to the invention exhibits few losses, as well as good resistance to flow (in particular in comparison with a light distribution device based on optical fibers). It is also very compact, and in particular a reduced thickness allowing it to act as a spacer between the sample and the detection module in the optical imaging system without lens described in the introduction.

FIG. 6 illustrates, schematically, and in a sectional view, a first embodiment of an infrared imaging system 1000 according to the invention. The system 1000 here comprises a light distribution device 600, and a detection module 10 (or imaging module). The device 600 is here identical to that of FIG. 4.

The detection module 10 comprises a matrix infrared detector, composed of infrared detectors 11 sensitive in the infrared, and more particularly over the range of wavelengths of use. It is for example a matrix of semiconductor photodiodes or a matrix of bolometers. The matrix infrared detector extends along a square or rectangular surface, with a side preferably between 1 mm and 10 mm. It extends here in a plane (xOy). The detection module 10 can further include an electronic circuit, not shown, for reading electrical signals supplied by the infrared matrix detector. The infrared matrix detector extends to the manhole of the extraction assembly 650 of the light distribution device 600, on the side of the planar waveguide receiving the extraction assembly (and therefore here on the side opposite to the cavity 662 formed in the support substrate 660) .

In use, the light is distributed over the scene to be illuminated by the light distribution device 600. The scene to be lit returns part of the light received, by backscattering. The backscattered light passes through the light distribution device 600 until it reaches the detection module 10, in which the matrix infrared detector acquires an image of the light backscattered by the scene to be illuminated.

The light distribution device 600 and the detection module 10 are not in direct physical contact with one another, but separated from each other by a low index interlayer 13, in particular a layer of air. The low index interlayer 13 has an optical index strictly lower than that of the support substrate 660, making it possible to favor the extraction in the direction of the scene to be lit rather than in the opposite direction. As detailed above, an absorbent or reflective structured layer, as described above, can also be placed against the extraction assembly.

Despite this, the infrared detectors 11 located directly opposite a diffraction grating of the extraction assembly can be dazzled by the light extracted directly towards the detection module, and consequently be blinded and inoperative. It is therefore advantageous to maximize the divergence of the light beams returned by each of the diffraction gratings, to maximize a spacing between the diffraction gratings, and therefore to minimize a number of blinded infrared detectors. As detailed above, this divergence can be increased using a variable grating pitch within the same diffraction grating, and / or using a cavity as described with reference to figure 4. The half-angle of divergence must nevertheless remain less than or equal to a critical threshold as mentioned above. In addition, the distribution of the diffraction gratings according to the two dimensions of the plane (xOy) is more advantageous than the distribution according to parallel bands, because it makes it possible to mask fewer infrared detectors. Preferably, a degree of superposition between the infrared detectors 11 of the detection module and the diffraction gratings of the extraction assembly 650 is less than or equal to 50%. More preferably, at least half of the infrared detectors 11 is not covered, even partially, by at least part of a diffraction grating of the extraction assembly. When the diffraction gratings are distributed along the two dimensions of the plane (xOy), there are preferably at least twice as many infrared detectors as there are diffraction gratings.

FIG. 7A illustrates a second embodiment of an infrared imaging system 2000 according to the invention. This system differs from that of FIG. 6 only in that it further comprises an infrared light source 14, as well as a refractive optic 15.

The infrared light source 14 is configured to emit at least one light beam at an infrared wavelength. The light emitted by the infrared light source 14 exhibits a wavelength spectrum which extends over the range of wavelengths of use as mentioned above. The light source 14 can comprise one or more elementary sources, among at least one laser source (such as a quantum cascade laser (Q.CL), an interband cascade laser (ICL), an external or internal cavity laser) , at least one LED, at least one blackbody source, etc. The infrared light source 14 may include a widening element such as an annex planar waveguide, to transform a narrow light beam into a light beam of the same width as the light distribution device.

The refractive optic 15 is interposed between the light source 14 and the input face 713 of the light distribution device 700. It is configured to receive at input a light beam coming from the light source 14, and to provide at the output a collimated light beam which then propagates to the input face 713 of the device 700, at the height of the layer of heart. The light wave propagating in the planar waveguide of device 700 therefore has a planar wavefront. The diffraction gratings 751 forming the extraction assembly each consist of a plurality of patterns, which extend along lines parallel to the wavefront, here lines parallel to the (Oy) axis (see figure 7B). FIG. 8A illustrates a third embodiment of an infrared imaging system 3000 according to the invention. This system differs from that of FIG. 7A only in that the infrared light source 14 is placed directly at the input of the light distribution device 800, without refractive optics between the two. The light beam propagating in the planar waveguide of the device 800 is therefore a divergent beam, with a curved wavefront of convex shape. Each diffraction grating 851 then consists of a plurality of patterns which then extend along lines parallel to the wave front arriving on said grating. These lines are convex lines, each extending from one edge to the opposite edge of the extraction assembly (see Figure 8B).

In any event, in each diffraction grating, the patterns of the grating preferably extend along lines which are perpendicular at all points to a light ray propagating in the planar waveguide at a central zone. of said network.

Figure 9 illustrates, schematically, an infrared imaging system 4000 according to the invention, in use. The infrared imaging system 4000 is of the type of that of FIG. 7A, with a light distribution device 900 according to the invention, receiving light from an infrared light source 14 with a refractive optic 15 in between. The light is distributed over a scene to be lit belonging here to a sample 96.

In FIG. 9, there is expressly shown the infrared matrix detector 10A and the reading circuit 10B together forming the detection module 10.

The infrared imaging system 4000 here comprises a spacer element 95, or spacer, mounted integral with the detection module 10 on the side of the matrix infrared detector 10A.

The spacer element 95 comprises a bearing surface 97, on the side opposite to the detection module 10. The bearing surface 97 here extends in a plane parallel to the plane (xOy), parallel to the plane of the infrared detector. matrix 10A. The spacer element 95 has a thickness W, measured along the axis (Oz). In operation, the bearing surface 97 is pressed against the sample 96. A region of the sample 96 situated opposite the matrix infrared detector 10A forms the scene to be illuminated. The spacer 95 guarantees a predetermined fixed distance between the scene to be illuminated and the infrared detector matrix 10A, called the working distance. The working distance is preferably between 100 µm and 1.5 mm. The infrared light source 14 is located here on the spacer element 95, on the side opposite to the bearing surface 97. The light distribution device 900 is merged here with the spacer element 95.

In variants not shown, the light distribution device 900 forms only a part of the spacer element 95. For example, the spacer element 95 can be formed by the superposition of the light distribution device. light 900 and an additional wedge. In any event, the small thickness of the light distribution device according to the invention, advantageously between 100 μm and 1.5 mm, allows it to form all or part of the spacer element 95.

It can be considered that the detection module 10 and the light distribution device 900 together form a lensless imaging system, capable of acquiring an image of the scene to be illuminated, without refractive image formation optics (except possibly a array of microlenses upstream of the infrared matrix detector 10A). The images obtained are wide field images, in reflection.

The infrared imaging system 4000 is advantageously formed in a photonic chip. For example, an infrared imaging system according to the invention has been produced, with the following characteristics:

- range of wavelengths of light to be distributed over the scene to be illuminated: from 5.9 pm to 8.1 pm;

- Ge core layer, of thickness suitable so that the planar waveguide is single-mode along the (Oz) axis over the entire range of wavelengths considered, ie a thickness of 1.6 μm;

- extraction assembly which extends over an area of 2.72 mm * 2.72 mm;

- SiGe sheath layers, 3 μm thick;

- matrix infrared detector formed by a matrix of bolometers with 80 * 80 micro-sensors, each of square shape with a side of 25 μm, and distributed according to a distribution step of 34 μm, i.e. an active area of 3.28 mm * 3.28 mm (slightly larger than the extraction assembly);

- the diffraction gratings of the extraction assembly have a length of 34 mih, extend in parallel bands as in Figure 1B, and are aligned with some of the infrared detectors of the matrix infrared detector;

the pitch of the diffraction gratings is adapted to obtain an extraction angle of zero at the median value of the wavelength range considered (7 pm), here equal to 1.81 pm;

- the depth of the networks is 2.5 μm.

It can then be shown that a support substrate with a thickness of 300 μm and an open cavity with a depth of 250 μm offer a good compromise between the number of blinded micro-sensors and compactness.

In a second configuration which differs only in that the diffraction gratings are distributed along the axes (Ox) and (Oy), only ^1/8 of the micro-sensors are blinded.

The light distribution device according to the invention is advantageously produced from a crystalline silicon substrate, which can be thinned to obtain the desired working distance. The planar waveguide is obtained by successive epitaxies, to successively form the first cladding layer, the core layer and the second cladding layer. The assembly is polished, on the side opposite the silicon substrate, then the diffraction gratings are etched in the second cladding layer by partial anisotropic etching. The assembly obtained can be turned over and partially anisotropically etched on the rear face, to produce a cavity in the silicon substrate.

The invention therefore relates to a device forming a passive extraction structure, advantageously coupled to one or more quantum cascade lasers, and for use at very short working distance. The device according to the invention preferably has an entrance pupil that is smaller than the exit pupil. The invention makes it possible to distribute the light of an infrared light beam, preferably belonging to the spectral range going from 2 μm to 12 μm. It finds application in particular in the field of active multispectral imaging and active hyperspectral imaging, to obtain biochemical information easily and quickly. The chemical composition of a sample can in particular be determined from its infrared light absorption signature. The invention is not limited to the examples detailed above, and many other examples can be implemented without departing from the scope of the invention. For example, the extraction assembly can be located in the first cladding layer, on the side of the scene to be illuminated, or in the core layer of the planar waveguide. The networks of the extraction assembly can extend along all or part of the thickness of the core layer, respectively the first cladding layer. If they are formed in the core layer, they advantageously consist of material portions of the core layer and of material portions of the first respectively second cladding layer. The invention is also not limited to one-dimensional diffraction gratings, and also covers devices in which the extraction assembly comprises or consists of two-dimensional diffraction grating (s). A two-dimensional diffraction grating is preferably in the form of a matrix of pads. Likewise, the invention is not limited to the examples of materials cited. For example, the support substrate can be made of any material having at least one window of transparency in the infrared and an optical index lower than that of the cladding layers. Likewise, the examples of systems detailed above can be combined with each of the embodiments and variants of the light distribution device according to the invention. According to other variants, the planar waveguide may include a spatial spreading region, upstream of an extraction region, with the spatial spreading region intended to achieve spatial spreading of the light and with the extraction region which receives the extraction assembly. A gray-level diaphragm can be placed upstream of the light distribution device according to the invention, in order to homogenize the illumination on the scene to be lit.

Claims

1. Light distribution device (100; 300; 400; 600; 700; 800; 900) configured to, in use, distribute on a scene to be illuminated (S) light rays coming from an auxiliary light source (14) , characterized in that it comprises:

- a planar waveguide (110; 310; 410) which comprises two cladding layers (130i, 130 ₂ ) and a core layer (120), with two faces of greater extent (121, 122) of the layer core that run parallel to a plane called the planar waveguide plane, and with the two cladding layers (130i, I3O2) and the core layer (120) superimposed together along an orthogonal axis in the plane of the planar waveguide with the core layer disposed between the two cladding layers; and

- an extraction assembly (150; 350; 450; 550; 650), located in the planar waveguide, and consisting of a plurality of diffraction gratings (151; 15; 151 "; 751; 851) distributed according to the two dimensions of a plane parallel to the plane of the planar waveguide, and

- in that an average value of a fill factor varies monotonically, from one diffraction grating to another of the extraction assembly (550), and along an axis parallel to the plane of the planar waveguide.

2. Device (300; 400; 600; 700; 800) according to claim 1, characterized in that it further comprises a support substrate (360; 460; 660), transparent over a range of wavelengths d. using the planar waveguide, and superimposed on the planar waveguide (310; 410) along an axis orthogonal to the plane of the planar waveguide.

3. Device (400; 600; 700; 800) according to claim 2, characterized in that the support substrate (460; 660) comprises a cavity (462; 662), located on the side opposite to the planar waveguide ( 410), and an extent of which in a plane parallel to the plane of the planar waveguide is greater than or equal to an extent of the extraction assembly (450; 650) in a plane parallel to the plane of the planar waveguide .

4. Device (100; 300; 400; 600; 700; 800; 900) according to any one of claims 1 to 3, characterized in that the diffraction gratings (151) of the extraction assembly extend according to a series of strips parallel to each other, which each extend from one edge to the other of the extraction assembly.

5. Device (100; 300; 400; 600; 700; 800; 900) according to any one of claims 1 to 3, characterized in that the diffraction gratings (151 '; 15'; 751; 851) of the 'extraction assembly are distributed in two dimensions of a plane parallel to the plane of the planar waveguide.

6. Device (100; 300; 400; 600; 700; 800; 900) according to any one of claims 1 to 5, characterized in that it is configured to, in use, distribute over the scene to be lit (S ) light rays whose wavelength spectrum is centered on a wavelength called the central wavelength, and in that the diffraction gratings (151; 151 '; 151' '; 751; 851) of the extraction assembly (150; 350; 450; 550; 650) all have the same average value of one step, with said average value of the step adapted to extract outside the planar waveguide, and along an orthogonal axis at the plane of the planar waveguide, a light beam at the center wavelength propagating in the planar waveguide (110; 310; 410).

7. Device (100; 300; 400; 600; 700; 800; 900) according to any one of claims 1 to 6, characterized in that the extraction assembly (150; 350; 450; 550; 650) is located in one of the two cladding layers (130i, 130 ₂ ), and in that the patterns of the diffraction gratings (151; 15; 151 ";751; 851) of the extraction assembly (150 ; 350; 450; 550; 650) each consist of at least one solid zone and at least one hollow zone, where the at least one solid zone consists of the material of the cladding layer (I3O2) receiving the assembly extraction, and where the at least one hollow zone is suitable for being occupied by a surrounding medium.

8. Device (100; 300; 400; 600; 700; 900) according to any one of claims 1 to 7, characterized in that the diffraction gratings (151; 15; 151 "; 751; 851) of the extraction assemblies each consist of a plurality of patterns (1510), and in that the patterns of said diffraction gratings extend along straight lines parallel to each other.

9. Device (800) according to any one of claims 1 to 7, characterized in that the diffraction gratings (851) of the extraction assembly each consist of a plurality of patterns, and in that the Patterns of said diffraction gratings extend along convex curved lines which each extend from one edge to the opposite edge of the planar waveguide.

10. Device (100; 300; 400; 600; 700; 800; 900) according to any one of claims 1 to 9, characterized in that it is configured to, in use, distribute over the scene to be lit (S ) light rays having a wavelength spectrum extending from a minimum wavelength to a maximum wavelength, and in that the planar waveguide (110; 310; 410) is single-mode along an axis orthogonal to the plane of the planar waveguide and to said minimum wavelength.

11. Infrared imaging system (1000; 2000; 3000; 4000) which includes:

- a light distribution device (600; 700; 800; 900) according to any one of claims 1 to 10, configured to, in use, distribute on a scene to be illuminated light rays coming from an auxiliary light source; and

- a detection module (10), comprising an infrared matrix detector (10A) configured to receive light rays returned by the scene to be illuminated; with the matrix infrared detector (10A) located opposite the extraction assembly (650), and on the side of the planar waveguide receiving the extraction assembly, and with a superposition rate between the infrared detectors ( 11) of the infrared matrix detector (10A), and the diffraction gratings of the extraction assembly, which is less than or equal to 50%.

12. System (2000; 3000; 4000) according to claim 11, which further comprises an infrared light source (14) forming the auxiliary light source, and in which the light distribution device (700; 800; 900) is configured. for, in use, receiving as input light rays coming from said infrared light source and distributing these rays on the scene to be illuminated, with the input of the light distribution device formed by a transverse face (713) of the waveguide planar.

13. System (700; 900) according to claim 11 or 12, which further comprises an imaging assembly (15) comprising at least one refractive lens, disposed between the inlet (713) of the light distribution device and the. infrared light source (14), and configured to receive as input the light emitted by the infrared light source and to output a beam of light rays parallel to each other.

14. System (4000) according to any one of claims 11 to 13, characterized in that it comprises a spacer element (95) mounted integral with the detection module (10) and provided with a surface of support (97) intended to come into contact with a sample to be analyzed (96) and located on one side of the spacer element (95) opposite to the detection module (10), and in that the device for light distribution (900) forms all or part of the spacer element.