FR2834977B1 - Composants miniaturises a element mobile et procede de realisation d'un tel composant - Google Patents

Composants miniaturises a element mobile et procede de realisation d'un tel composant

Info

Publication number
FR2834977B1
FR2834977B1 FR0200597A FR0200597A FR2834977B1 FR 2834977 B1 FR2834977 B1 FR 2834977B1 FR 0200597 A FR0200597 A FR 0200597A FR 0200597 A FR0200597 A FR 0200597A FR 2834977 B1 FR2834977 B1 FR 2834977B1
Authority
FR
France
Prior art keywords
producing
component
mobile element
miniaturized components
miniaturized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0200597A
Other languages
English (en)
Other versions
FR2834977A1 (fr
Inventor
Christian Pisella
Joel Collet
Bruno Estibal
Stephane Renard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tronics Microsystems SA
Original Assignee
Tronics Microsystems SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tronics Microsystems SA filed Critical Tronics Microsystems SA
Priority to FR0200597A priority Critical patent/FR2834977B1/fr
Publication of FR2834977A1 publication Critical patent/FR2834977A1/fr
Application granted granted Critical
Publication of FR2834977B1 publication Critical patent/FR2834977B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/0015—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0292—Sensors not provided for in B81B2201/0207 - B81B2201/0285

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
FR0200597A 2002-01-18 2002-01-18 Composants miniaturises a element mobile et procede de realisation d'un tel composant Expired - Fee Related FR2834977B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0200597A FR2834977B1 (fr) 2002-01-18 2002-01-18 Composants miniaturises a element mobile et procede de realisation d'un tel composant

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0200597A FR2834977B1 (fr) 2002-01-18 2002-01-18 Composants miniaturises a element mobile et procede de realisation d'un tel composant

Publications (2)

Publication Number Publication Date
FR2834977A1 FR2834977A1 (fr) 2003-07-25
FR2834977B1 true FR2834977B1 (fr) 2004-06-25

Family

ID=27619530

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0200597A Expired - Fee Related FR2834977B1 (fr) 2002-01-18 2002-01-18 Composants miniaturises a element mobile et procede de realisation d'un tel composant

Country Status (1)

Country Link
FR (1) FR2834977B1 (fr)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2811768B2 (ja) * 1989-07-17 1998-10-15 株式会社デンソー 半導体式加速度センサおよびその製造方法
JPH075192A (ja) * 1993-06-16 1995-01-10 Nissan Motor Co Ltd 半導体加速度センサ及びその製造方法
DE19800574B4 (de) * 1998-01-09 2013-11-14 Robert Bosch Gmbh Mikromechanisches Bauelement
DE19939318A1 (de) * 1999-08-19 2001-02-22 Bosch Gmbh Robert Verfahren zur Herstellung eines mikromechanischen Bauelements
KR100343211B1 (ko) * 1999-11-04 2002-07-10 윤종용 웨이퍼 레벨 진공 패키징이 가능한 ｍｅｍｓ의 구조물의제작방법
US6271052B1 (en) * 2000-10-19 2001-08-07 Axsun Technologies, Inc. Process for integrating dielectric optical coatings into micro-electromechanical devices

Also Published As

Publication number Publication date
FR2834977A1 (fr) 2003-07-25

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20150930