FR2809190B1 - Procede de fabrication d'un modulateur de transmission pour microlithographie en ultraviolet profond et modulateur obtenu par ce procede - Google Patents

Procede de fabrication d'un modulateur de transmission pour microlithographie en ultraviolet profond et modulateur obtenu par ce procede

Info

Publication number
FR2809190B1
FR2809190B1 FR0006521A FR0006521A FR2809190B1 FR 2809190 B1 FR2809190 B1 FR 2809190B1 FR 0006521 A FR0006521 A FR 0006521A FR 0006521 A FR0006521 A FR 0006521A FR 2809190 B1 FR2809190 B1 FR 2809190B1
Authority
FR
France
Prior art keywords
modulator
manufacturing
deep ultraviolet
transmission
ultraviolet microlithography
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0006521A
Other languages
English (en)
Other versions
FR2809190A1 (fr
Inventor
Andre Golanski
Fabrice Piazza
Ana Lacoste
Yves A Arnal
Jacques Henri Lucien Pelletier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0006521A priority Critical patent/FR2809190B1/fr
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to CA002408959A priority patent/CA2408959A1/fr
Priority to EP01936569A priority patent/EP1287178A1/fr
Priority to US10/296,053 priority patent/US20040052971A1/en
Priority to AU2001262450A priority patent/AU2001262450A1/en
Priority to PCT/FR2001/001521 priority patent/WO2001090439A1/fr
Priority to JP2001586632A priority patent/JP2003534571A/ja
Publication of FR2809190A1 publication Critical patent/FR2809190A1/fr
Application granted granted Critical
Publication of FR2809190B1 publication Critical patent/FR2809190B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
FR0006521A 2000-05-22 2000-05-22 Procede de fabrication d'un modulateur de transmission pour microlithographie en ultraviolet profond et modulateur obtenu par ce procede Expired - Fee Related FR2809190B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR0006521A FR2809190B1 (fr) 2000-05-22 2000-05-22 Procede de fabrication d'un modulateur de transmission pour microlithographie en ultraviolet profond et modulateur obtenu par ce procede
EP01936569A EP1287178A1 (fr) 2000-05-22 2001-05-17 Procede de fabrication d'un modulateur de transmission pour microlithographie en ultraviolet profond et modulateur obtenu par ce procede
US10/296,053 US20040052971A1 (en) 2000-05-22 2001-05-17 Method for making an extreme ultraviolet microlithography tranmission modulator and resulting modulator
AU2001262450A AU2001262450A1 (en) 2000-05-22 2001-05-17 Method for making an extreme ultraviolet microlithography transmission modulator and resulting modulator
CA002408959A CA2408959A1 (fr) 2000-05-22 2001-05-17 Procede de fabrication d'un modulateur de transmission pour microlithographie en ultraviolet profond et modulateur obtenu par ce procede
PCT/FR2001/001521 WO2001090439A1 (fr) 2000-05-22 2001-05-17 Procede de fabrication d'un modulateur de transmission pour microlithographie en ultraviolet profond et modulateur obtenu par ce procede
JP2001586632A JP2003534571A (ja) 2000-05-22 2001-05-17 深紫外線ミクロリソグラフィー用透過モジュレータの製造方法及びこの方法から得られるモジュレータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0006521A FR2809190B1 (fr) 2000-05-22 2000-05-22 Procede de fabrication d'un modulateur de transmission pour microlithographie en ultraviolet profond et modulateur obtenu par ce procede

Publications (2)

Publication Number Publication Date
FR2809190A1 FR2809190A1 (fr) 2001-11-23
FR2809190B1 true FR2809190B1 (fr) 2002-08-09

Family

ID=8850480

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0006521A Expired - Fee Related FR2809190B1 (fr) 2000-05-22 2000-05-22 Procede de fabrication d'un modulateur de transmission pour microlithographie en ultraviolet profond et modulateur obtenu par ce procede

Country Status (7)

Country Link
US (1) US20040052971A1 (fr)
EP (1) EP1287178A1 (fr)
JP (1) JP2003534571A (fr)
AU (1) AU2001262450A1 (fr)
CA (1) CA2408959A1 (fr)
FR (1) FR2809190B1 (fr)
WO (1) WO2001090439A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH695892A8 (it) * 2002-10-14 2006-12-29 Argor Heraeus Sa Procedimento per la colorazione differenziata dl oggetti metallici mediante un getto dl plasma dl carbonio
JP2007503723A (ja) 2003-08-22 2007-02-22 プレックス・エルエルシー 光学アドレス式極紫外線モジュレータ及びこのモジュレータを含むリソグラフィー装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4777090A (en) * 1986-11-03 1988-10-11 Ovonic Synthetic Materials Company Coated article and method of manufacturing the article
US5470661A (en) * 1993-01-07 1995-11-28 International Business Machines Corporation Diamond-like carbon films from a hydrocarbon helium plasma

Also Published As

Publication number Publication date
JP2003534571A (ja) 2003-11-18
AU2001262450A1 (en) 2001-12-03
EP1287178A1 (fr) 2003-03-05
CA2408959A1 (fr) 2001-11-29
US20040052971A1 (en) 2004-03-18
FR2809190A1 (fr) 2001-11-23
WO2001090439A1 (fr) 2001-11-29

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20080131