FR2805904B1 - Debitmetre et procede d'utilisation d'un debitmetre - Google Patents

Debitmetre et procede d'utilisation d'un debitmetre

Info

Publication number
FR2805904B1
FR2805904B1 FR0102878A FR0102878A FR2805904B1 FR 2805904 B1 FR2805904 B1 FR 2805904B1 FR 0102878 A FR0102878 A FR 0102878A FR 0102878 A FR0102878 A FR 0102878A FR 2805904 B1 FR2805904 B1 FR 2805904B1
Authority
FR
France
Prior art keywords
flowmeter
flow meter
meter
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0102878A
Other languages
English (en)
Other versions
FR2805904A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/517,391 external-priority patent/US6314991B1/en
Application filed by Individual filed Critical Individual
Publication of FR2805904A1 publication Critical patent/FR2805904A1/fr
Application granted granted Critical
Publication of FR2805904B1 publication Critical patent/FR2805904B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0368—By speed of fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Magnetically Actuated Valves (AREA)
FR0102878A 2000-03-02 2001-03-02 Debitmetre et procede d'utilisation d'un debitmetre Expired - Fee Related FR2805904B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/517,391 US6314991B1 (en) 2000-03-02 2000-03-02 Mass flow controller
US09/741,552 US6543466B2 (en) 2000-03-02 2000-12-19 Mass flow controller and method of operation of mass flow controller

Publications (2)

Publication Number Publication Date
FR2805904A1 FR2805904A1 (fr) 2001-09-07
FR2805904B1 true FR2805904B1 (fr) 2007-02-23

Family

ID=27059131

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0102878A Expired - Fee Related FR2805904B1 (fr) 2000-03-02 2001-03-02 Debitmetre et procede d'utilisation d'un debitmetre

Country Status (4)

Country Link
US (4) US6543466B2 (fr)
AU (1) AU2001247252A1 (fr)
FR (1) FR2805904B1 (fr)
WO (1) WO2001065326A2 (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6543466B2 (en) 2000-03-02 2003-04-08 Rajinder S. Gill Mass flow controller and method of operation of mass flow controller
US6782906B2 (en) * 2000-12-28 2004-08-31 Young-Chul Chang Time based mass flow controller and method for controlling flow rate using it
US7232588B2 (en) * 2004-02-23 2007-06-19 Eastman Kodak Company Device and method for vaporizing temperature sensitive materials
US7394639B2 (en) * 2005-07-08 2008-07-01 Advanced Energy Industries, Inc. System and method for driving an industrial control device
GB0607851D0 (en) * 2006-04-24 2006-05-31 Johnson Matthey Plc Particulate matter generator
US7651263B2 (en) * 2007-03-01 2010-01-26 Advanced Energy Industries, Inc. Method and apparatus for measuring the temperature of a gas in a mass flow controller
US20100313960A1 (en) * 2007-03-30 2010-12-16 Askew Andy R High Performance Transducer
KR20170109081A (ko) * 2009-09-02 2017-09-27 지티에이티 코포레이션 조절된 압력하에서 헬륨을 사용하는 고온 처리 방법
JP5887188B2 (ja) * 2012-04-12 2016-03-16 株式会社堀場エステック 流体制御用機器
CN102840356B (zh) * 2012-08-23 2013-11-13 杭州云谷科技有限公司 电磁式流量测量和控制一体化装置
US9632516B2 (en) 2013-12-19 2017-04-25 Tawan Semiconductor Manufacturing Co., Ltd Gas-supply system and method
US10161060B2 (en) * 2013-12-19 2018-12-25 Taiwan Semiconductor Manufacturing Co., Ltd. Gas-supply system and method
ITUB20154584A1 (it) * 2015-10-12 2017-04-12 Elbi Int Spa Gruppo valvolare con dispositivo di misurazione associato.
US10310521B2 (en) * 2016-04-07 2019-06-04 Hitachi Metals, Ltd. Bypass unit, a base for a flow meter, a base for a flow controller, a flow meter, and a flow controller
US10648842B2 (en) * 2016-06-22 2020-05-12 Benoit & Cote Inc. Fluid flow measuring and control devices and method
US9785154B2 (en) * 2017-02-13 2017-10-10 Robert M. McMillan Reconfigurable modular fluid flow control system for liquids or gases

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3386472A (en) 1965-03-25 1968-06-04 Leeds & Northrup Co Valves for gas chromatography
US4690371A (en) 1985-10-22 1987-09-01 Innovus Electromagnetic valve with permanent magnet armature
US4794947A (en) * 1986-11-29 1989-01-03 Kabushiki Kaisha Nippon IC (also trading as Nippon IC, Inc.) Mass flow controller
US5080131A (en) 1989-09-26 1992-01-14 Lintec Co., Ltd. Mass flow controller
US6044701A (en) 1992-10-16 2000-04-04 Unit Instruments, Inc. Thermal mass flow controller having orthogonal thermal mass flow sensor
JPH0784650A (ja) 1993-07-23 1995-03-31 Hitachi Metals Ltd マスフローコントローラ、その運転方法及び電磁弁
FR2739968B1 (fr) 1995-10-12 1998-01-02 Aerospatiale Actionneur lineaire electromagnetique a plateaux mobiles et regulateur de fluides a vannes pilotees par un tel actionneur
US6543466B2 (en) * 2000-03-02 2003-04-08 Rajinder S. Gill Mass flow controller and method of operation of mass flow controller
US6314991B1 (en) * 2000-03-02 2001-11-13 Rajinder S. Gill Mass flow controller

Also Published As

Publication number Publication date
WO2001065326A3 (fr) 2002-02-07
WO2001065326A2 (fr) 2001-09-07
US20030127139A1 (en) 2003-07-10
WO2001065326A9 (fr) 2002-12-27
FR2805904A1 (fr) 2001-09-07
US6543466B2 (en) 2003-04-08
US6705341B2 (en) 2004-03-16
US6619315B2 (en) 2003-09-16
AU2001247252A1 (en) 2001-09-12
US20030127131A1 (en) 2003-07-10
US20010018927A1 (en) 2001-09-06
US20040163712A1 (en) 2004-08-26

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20081125