FR2797715B1 - Procede de gravure plasma d'une couche de polysilicium au traver d'une couche de si02 gravee - Google Patents
Procede de gravure plasma d'une couche de polysilicium au traver d'une couche de si02 graveeInfo
- Publication number
- FR2797715B1 FR2797715B1 FR0006683A FR0006683A FR2797715B1 FR 2797715 B1 FR2797715 B1 FR 2797715B1 FR 0006683 A FR0006683 A FR 0006683A FR 0006683 A FR0006683 A FR 0006683A FR 2797715 B1 FR2797715 B1 FR 2797715B1
- Authority
- FR
- France
- Prior art keywords
- layer
- severe
- plasma etching
- polysilicon layer
- polysilicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title 1
- 238000001020 plasma etching Methods 0.000 title 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title 1
- 229920005591 polysilicon Polymers 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
- H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
- H01L21/32137—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas of silicon-containing layers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Semiconductor Memories (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP99480061 | 1999-07-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2797715A1 FR2797715A1 (fr) | 2001-02-23 |
FR2797715B1 true FR2797715B1 (fr) | 2006-08-25 |
Family
ID=8242451
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0006683A Expired - Fee Related FR2797715B1 (fr) | 1999-07-13 | 2000-05-25 | Procede de gravure plasma d'une couche de polysilicium au traver d'une couche de si02 gravee |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP3358179B2 (fr) |
FR (1) | FR2797715B1 (fr) |
TW (1) | TW478064B (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8202783B2 (en) * | 2009-09-29 | 2012-06-19 | International Business Machines Corporation | Patternable low-k dielectric interconnect structure with a graded cap layer and method of fabrication |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5835221A (en) * | 1995-10-16 | 1998-11-10 | Lucent Technologies Inc. | Process for fabricating a device using polarized light to determine film thickness |
US6379575B1 (en) * | 1997-10-21 | 2002-04-30 | Applied Materials, Inc. | Treatment of etching chambers using activated cleaning gas |
US6136211A (en) * | 1997-11-12 | 2000-10-24 | Applied Materials, Inc. | Self-cleaning etch process |
-
2000
- 2000-05-25 FR FR0006683A patent/FR2797715B1/fr not_active Expired - Fee Related
- 2000-06-07 TW TW89111050A patent/TW478064B/zh not_active IP Right Cessation
- 2000-07-11 JP JP2000209480A patent/JP3358179B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2797715A1 (fr) | 2001-02-23 |
JP2001044182A (ja) | 2001-02-16 |
TW478064B (en) | 2002-03-01 |
JP3358179B2 (ja) | 2002-12-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20130131 |