FR2793951B1 - PROCESS AND INSTALLATION FOR PROCESSING A SUBSTRATE SUCH AS AN INTEGRATED CIRCUIT WITH A FOCUSED BEAM OF ELECTRICALLY NEUTRAL PARTICLES - Google Patents
PROCESS AND INSTALLATION FOR PROCESSING A SUBSTRATE SUCH AS AN INTEGRATED CIRCUIT WITH A FOCUSED BEAM OF ELECTRICALLY NEUTRAL PARTICLESInfo
- Publication number
- FR2793951B1 FR2793951B1 FR9906501A FR9906501A FR2793951B1 FR 2793951 B1 FR2793951 B1 FR 2793951B1 FR 9906501 A FR9906501 A FR 9906501A FR 9906501 A FR9906501 A FR 9906501A FR 2793951 B1 FR2793951 B1 FR 2793951B1
- Authority
- FR
- France
- Prior art keywords
- installation
- substrate
- processing
- integrated circuit
- focused beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
- H01J37/3056—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching for microworking, e.g. etching of gratings, trimming of electrical components
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9906501A FR2793951B1 (en) | 1999-05-21 | 1999-05-21 | PROCESS AND INSTALLATION FOR PROCESSING A SUBSTRATE SUCH AS AN INTEGRATED CIRCUIT WITH A FOCUSED BEAM OF ELECTRICALLY NEUTRAL PARTICLES |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9906501A FR2793951B1 (en) | 1999-05-21 | 1999-05-21 | PROCESS AND INSTALLATION FOR PROCESSING A SUBSTRATE SUCH AS AN INTEGRATED CIRCUIT WITH A FOCUSED BEAM OF ELECTRICALLY NEUTRAL PARTICLES |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2793951A1 FR2793951A1 (en) | 2000-11-24 |
FR2793951B1 true FR2793951B1 (en) | 2001-08-17 |
Family
ID=9545889
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9906501A Expired - Fee Related FR2793951B1 (en) | 1999-05-21 | 1999-05-21 | PROCESS AND INSTALLATION FOR PROCESSING A SUBSTRATE SUCH AS AN INTEGRATED CIRCUIT WITH A FOCUSED BEAM OF ELECTRICALLY NEUTRAL PARTICLES |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2793951B1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102181456B1 (en) * | 2019-08-16 | 2020-11-23 | 참엔지니어링(주) | Inspecting apparatus, repairing apparatus and particle beam apparatus |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2389998B1 (en) * | 1977-05-05 | 1981-11-20 | Ibm | |
US4804837A (en) * | 1988-01-11 | 1989-02-14 | Eaton Corporation | Ion implantation surface charge control method and apparatus |
US4874947A (en) * | 1988-02-26 | 1989-10-17 | Micrion Corporation | Focused ion beam imaging and process control |
US5683547A (en) * | 1990-11-21 | 1997-11-04 | Hitachi, Ltd. | Processing method and apparatus using focused energy beam |
-
1999
- 1999-05-21 FR FR9906501A patent/FR2793951B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2793951A1 (en) | 2000-11-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
FR2785088B1 (en) | A METHOD OF MANUFACTURING A SUBSTRATE FOR AN ELECTRONIC DEVICE USING AN ATTACKING AGENT AS WELL AS AN ELECTRONIC DEVICE HAVING SUCH A SUBSTRATE | |
EP0757373A3 (en) | In situ removal of contaminants from the interior surfaces of an ion beam implanter | |
WO1997039416A3 (en) | Image formation apparatus for viewing indicia on a planar specular substrate | |
FR2756663B1 (en) | PROCESS FOR TREATING A SEMICONDUCTOR SUBSTRATE COMPRISING A SURFACE TREATMENT STEP | |
ATE224584T1 (en) | METHOD AND DEVICE FOR CLEANING A PLASMA REACTOR | |
FR2760566B1 (en) | SEMICONDUCTOR DEVICE HAVING MULTIPLE TYPES OF TRANSISTORS FORMED IN A CHIP AND METHOD FOR THE PRODUCTION THEREOF | |
DE69614170D1 (en) | Inexpensive integrable device for processing electrical signals according to the ARINC 429 standard | |
FR2793951B1 (en) | PROCESS AND INSTALLATION FOR PROCESSING A SUBSTRATE SUCH AS AN INTEGRATED CIRCUIT WITH A FOCUSED BEAM OF ELECTRICALLY NEUTRAL PARTICLES | |
NO983299L (en) | Fuel filter and process for making one | |
FR2704930B1 (en) | PROCESS FOR MANUFACTURING INSULATION ELEMENTS FOR DORME ROOMS OF AN INSTALLATION AND ELEMENTS MANUFACTURED ACCORDING TO THIS PROCESS. | |
FR2747398B1 (en) | METHOD FOR THE SURFACE TREATMENT OF A METAL PART | |
FR2733385B1 (en) | METHOD FOR MANUFACTURING PACKAGES, PARTICULARLY FOR ELECTRONIC COMPONENTS, AND PACKAGES FOR RECEIVING ELECTRONIC COMPONENTS | |
FR2817283B1 (en) | HYDRAULIC COMPONENT AND METHOD FOR MANUFACTURING SUCH COMPONENT | |
FR2798036B1 (en) | ELECTRONIC MODULE AND METHOD FOR MANUFACTURING SUCH A MODULE | |
DE69627931D1 (en) | Circuit board for semiconductor chip assembly and preparation process therefor | |
FR2777385B1 (en) | VERTICAL SPLITTER FOR MICROELECTRONIC CIRCUITS AND ITS MANUFACTURING METHOD | |
FR2653448B1 (en) | PROCESS FOR THE DEVELOPMENT OF A METAL PROCESSING ATMOSPHERE. | |
FR2749198B1 (en) | PROCESS FOR MANUFACTURING SHAPED PARTS WITH FINE STRUCTURE AND DEVICE FOR IMPLEMENTING SAME | |
FR2789343B1 (en) | METHOD FOR MANUFACTURING AN ARTICLE SUCH AS A BIN FOR THE COLLECTION OF WASTE AND ARTICLE THUS PRODUCED | |
FR2775986B1 (en) | PROCESS AND INSTALLATION FOR SURFACE TREATMENT OF A METAL PART | |
FR2617638B1 (en) | METHOD FOR LASER CONNECTION OF A CONDUCTOR TO A DOPED REGION OF THE SUBSTRATE OF AN INTEGRATED CIRCUIT, AND INTEGRATED CIRCUIT IMPLEMENTING THE METHOD | |
AU7783294A (en) | Compositions comprising 1,1,1,3,3-pentafluorobutane and method for the removal of water from a solid surface | |
FR2737486B1 (en) | PROCESS AND PLANT FOR THE TREATMENT OF SLUDGE | |
FR2829883B1 (en) | SEMICONDUCTOR OPTICAL COMPONENT AND METHOD FOR MANUFACTURING SUCH COMPONENT | |
FR2668646B1 (en) | METHOD FOR MANUFACTURING AN ELECTROMAGNETIC ACTUATOR AND ACTUATOR THUS CARRIED OUT. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20120131 |