FR2389998B1 - - Google Patents
Info
- Publication number
- FR2389998B1 FR2389998B1 FR7809182A FR7809182A FR2389998B1 FR 2389998 B1 FR2389998 B1 FR 2389998B1 FR 7809182 A FR7809182 A FR 7809182A FR 7809182 A FR7809182 A FR 7809182A FR 2389998 B1 FR2389998 B1 FR 2389998B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24405—Faraday cages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/794,275 US4118630A (en) | 1977-05-05 | 1977-05-05 | Ion implantation apparatus with a cooled structure controlling the surface potential of a target surface |
US05/794,276 US4135097A (en) | 1977-05-05 | 1977-05-05 | Ion implantation apparatus for controlling the surface potential of a target surface |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2389998A1 FR2389998A1 (en) | 1978-12-01 |
FR2389998B1 true FR2389998B1 (en) | 1981-11-20 |
Family
ID=27121491
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7809182A Expired FR2389998B1 (en) | 1977-05-05 | 1978-03-23 |
Country Status (5)
Country | Link |
---|---|
DE (1) | DE2819114C3 (en) |
FR (1) | FR2389998B1 (en) |
GB (1) | GB1584224A (en) |
IT (1) | IT1112625B (en) |
NL (1) | NL7804691A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2490873A1 (en) * | 1980-09-24 | 1982-03-26 | Varian Associates | METHOD AND DEVICE FOR PRODUCING IMPROVED NEUTRALIZATION OF POSITIVE ION BEAM |
FR2793951B1 (en) * | 1999-05-21 | 2001-08-17 | Centre Nat Etd Spatiales | PROCESS AND INSTALLATION FOR PROCESSING A SUBSTRATE SUCH AS AN INTEGRATED CIRCUIT WITH A FOCUSED BEAM OF ELECTRICALLY NEUTRAL PARTICLES |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2890342A (en) * | 1954-09-29 | 1959-06-09 | Gen Electric | System for charge neutralization |
US3313969A (en) * | 1966-03-25 | 1967-04-11 | Boeing Co | Charged particle deflecting apparatus having hemispherical electrodes |
US3507709A (en) * | 1967-09-15 | 1970-04-21 | Hughes Aircraft Co | Method of irradiating dielectriccoated semiconductor bodies with low energy electrons |
US3997846A (en) * | 1975-06-30 | 1976-12-14 | International Business Machines Corporation | Method and apparatus for electrostatic deflection of high current ion beams in scanning apparatus |
US4011449A (en) * | 1975-11-05 | 1977-03-08 | Ibm Corporation | Apparatus for measuring the beam current of charged particle beam |
US4013891A (en) * | 1975-12-15 | 1977-03-22 | Ibm Corporation | Method for varying the diameter of a beam of charged particles |
-
1978
- 1978-03-23 FR FR7809182A patent/FR2389998B1/fr not_active Expired
- 1978-04-07 GB GB13696/78A patent/GB1584224A/en not_active Expired
- 1978-04-28 IT IT22795/78A patent/IT1112625B/en active
- 1978-04-29 DE DE2819114A patent/DE2819114C3/en not_active Expired
- 1978-05-02 NL NL7804691A patent/NL7804691A/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
DE2819114A1 (en) | 1978-11-16 |
FR2389998A1 (en) | 1978-12-01 |
DE2819114C3 (en) | 1982-03-04 |
IT7822795A0 (en) | 1978-04-28 |
IT1112625B (en) | 1986-01-20 |
GB1584224A (en) | 1981-02-11 |
NL7804691A (en) | 1978-11-07 |
DE2819114B2 (en) | 1981-07-16 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |