FR2777352B1 - Procede d'inspection de defaut sur une pellicule translucide - Google Patents

Procede d'inspection de defaut sur une pellicule translucide

Info

Publication number
FR2777352B1
FR2777352B1 FR9804567A FR9804567A FR2777352B1 FR 2777352 B1 FR2777352 B1 FR 2777352B1 FR 9804567 A FR9804567 A FR 9804567A FR 9804567 A FR9804567 A FR 9804567A FR 2777352 B1 FR2777352 B1 FR 2777352B1
Authority
FR
France
Prior art keywords
translucent film
inspecting defects
inspecting
defects
translucent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9804567A
Other languages
English (en)
Other versions
FR2777352A1 (fr
Inventor
Anchor Chen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
United Semiconductor Corp
Original Assignee
United Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US09/045,325 priority Critical patent/US5907397A/en
Priority to DE19813744A priority patent/DE19813744A1/de
Priority to GB9806638A priority patent/GB2335789B/en
Priority to NL1008801A priority patent/NL1008801C2/nl
Application filed by United Semiconductor Corp filed Critical United Semiconductor Corp
Priority to FR9804567A priority patent/FR2777352B1/fr
Publication of FR2777352A1 publication Critical patent/FR2777352A1/fr
Application granted granted Critical
Publication of FR2777352B1 publication Critical patent/FR2777352B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H01L22/24—Optical enhancement of defects or not directly visible states, e.g. selective electrolytic deposition, bubbles in liquids, light emission, colour change
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
FR9804567A 1998-03-20 1998-04-10 Procede d'inspection de defaut sur une pellicule translucide Expired - Fee Related FR2777352B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US09/045,325 US5907397A (en) 1998-03-20 1998-03-20 Method of inspecting a defect on a translucid film
DE19813744A DE19813744A1 (de) 1998-03-20 1998-03-27 Prüfung eines Defektes auf einem transparenten Film, insbesondere eines Halbleiterchips
GB9806638A GB2335789B (en) 1998-03-20 1998-03-27 Method of inspecting a defect on a translucid film
NL1008801A NL1008801C2 (nl) 1998-03-20 1998-04-03 Werkwijze voor het inspecteren van een defect op een doorschijnende dunne laag.
FR9804567A FR2777352B1 (fr) 1998-03-20 1998-04-10 Procede d'inspection de defaut sur une pellicule translucide

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US09/045,325 US5907397A (en) 1998-03-20 1998-03-20 Method of inspecting a defect on a translucid film
DE19813744A DE19813744A1 (de) 1998-03-20 1998-03-27 Prüfung eines Defektes auf einem transparenten Film, insbesondere eines Halbleiterchips
GB9806638A GB2335789B (en) 1998-03-20 1998-03-27 Method of inspecting a defect on a translucid film
NL1008801A NL1008801C2 (nl) 1998-03-20 1998-04-03 Werkwijze voor het inspecteren van een defect op een doorschijnende dunne laag.
FR9804567A FR2777352B1 (fr) 1998-03-20 1998-04-10 Procede d'inspection de defaut sur une pellicule translucide

Publications (2)

Publication Number Publication Date
FR2777352A1 FR2777352A1 (fr) 1999-10-15
FR2777352B1 true FR2777352B1 (fr) 2000-06-02

Family

ID=27512636

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9804567A Expired - Fee Related FR2777352B1 (fr) 1998-03-20 1998-04-10 Procede d'inspection de defaut sur une pellicule translucide

Country Status (5)

Country Link
US (1) US5907397A (fr)
DE (1) DE19813744A1 (fr)
FR (1) FR2777352B1 (fr)
GB (1) GB2335789B (fr)
NL (1) NL1008801C2 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102890094B (zh) * 2011-07-19 2014-10-01 中芯国际集成电路制造(上海)有限公司 一种非图案化表面缺陷的离线检测方法
ES2402506B1 (es) * 2011-09-28 2014-03-11 Construcciones Biovivienda, S.L. Metodo para determinar la falta de continuidad en la camara intersticial de depositos de doble pared.
CN103377960B (zh) * 2012-04-26 2016-08-24 无锡华润上华科技有限公司 晶圆缺陷检测方法
US11422084B2 (en) * 2017-12-06 2022-08-23 California Institute Of Technology System for analyzing a test sample and method therefor

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4225228A (en) * 1979-01-18 1980-09-30 Solid Photography Inc. Surface coating for optical inspection
US4664514A (en) * 1984-11-06 1987-05-12 General Electric Company Method of enhancing surface features and detecting same
CA2115676C (fr) * 1993-02-16 2000-05-02 Ronald W. Gould Appareil servant a la preparation ded surfaces solides en vue d'une inspection optique et methode connexe
EP0622627A1 (fr) * 1993-04-30 1994-11-02 Applied Materials, Inc. Procédé et dispositif pour détecter de particules sur un substrat
JPH0792096A (ja) * 1993-07-30 1995-04-07 Canon Inc 異物検査装置並びにこれを備えた露光装置及びデバイ スの製造方法
US5576831A (en) * 1994-06-20 1996-11-19 Tencor Instruments Wafer alignment sensor
KR100211535B1 (ko) * 1995-10-04 1999-08-02 김영환 공정결함 검사 방법을 이용한 반도체소자의 제조방법

Also Published As

Publication number Publication date
GB9806638D0 (en) 1998-05-27
GB2335789A (en) 1999-09-29
GB2335789B (en) 2000-09-06
NL1008801C2 (nl) 1999-10-05
DE19813744A1 (de) 1999-09-30
US5907397A (en) 1999-05-25
FR2777352A1 (fr) 1999-10-15

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse