FR2752490B1 - SEMICONDUCTOR MEMORY DEVICE AND CAPACITOR STRUCTURE FOR SUCH DEVICE - Google Patents
SEMICONDUCTOR MEMORY DEVICE AND CAPACITOR STRUCTURE FOR SUCH DEVICEInfo
- Publication number
- FR2752490B1 FR2752490B1 FR9705115A FR9705115A FR2752490B1 FR 2752490 B1 FR2752490 B1 FR 2752490B1 FR 9705115 A FR9705115 A FR 9705115A FR 9705115 A FR9705115 A FR 9705115A FR 2752490 B1 FR2752490 B1 FR 2752490B1
- Authority
- FR
- France
- Prior art keywords
- semiconductor memory
- capacitor structure
- memory device
- capacitor
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/31—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor
- H10B12/318—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor the storage electrode having multiple segments
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW085110010A TW308729B (en) | 1996-08-16 | 1996-08-16 | Semiconductor memory device with capacitor (3) |
GB9701923A GB2321771A (en) | 1996-08-16 | 1997-01-30 | Stacked capacitor |
NL1005628A NL1005628C2 (en) | 1996-08-16 | 1997-03-25 | A method of manufacturing a semiconductor memory device. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2752490A1 FR2752490A1 (en) | 1998-02-20 |
FR2752490B1 true FR2752490B1 (en) | 2001-05-25 |
Family
ID=27268699
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9705115A Expired - Fee Related FR2752490B1 (en) | 1996-08-16 | 1997-04-25 | SEMICONDUCTOR MEMORY DEVICE AND CAPACITOR STRUCTURE FOR SUCH DEVICE |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPH10135428A (en) |
DE (1) | DE19720227A1 (en) |
FR (1) | FR2752490B1 (en) |
GB (1) | GB2321771A (en) |
NL (1) | NL1005628C2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6025244A (en) * | 1997-12-04 | 2000-02-15 | Fujitsu Limited | Self-aligned patterns by chemical-mechanical polishing particularly suited to the formation of MCM capacitors |
KR100434506B1 (en) | 2002-06-27 | 2004-06-05 | 삼성전자주식회사 | Semiconductor memory device and method for manufacturing the same |
GB2410374B (en) * | 2002-06-27 | 2005-11-30 | Samsung Electronics Co Ltd | Methods for manufacturing semiconductor memory using sidewall spacers |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5164337A (en) * | 1989-11-01 | 1992-11-17 | Matsushita Electric Industrial Co., Ltd. | Method of fabricating a semiconductor device having a capacitor in a stacked memory cell |
JP2504606B2 (en) * | 1990-05-18 | 1996-06-05 | 株式会社東芝 | Semiconductor memory device and manufacturing method thereof |
US5240871A (en) * | 1991-09-06 | 1993-08-31 | Micron Technology, Inc. | Corrugated storage contact capacitor and method for forming a corrugated storage contact capacitor |
US5145801A (en) * | 1992-02-07 | 1992-09-08 | Micron Technology, Inc. | Method of increasing the surface area of a mini-stacked capacitor |
JPH05308131A (en) * | 1992-04-30 | 1993-11-19 | Sanyo Electric Co Ltd | Manufacture of semiconductor storage device |
US5330928A (en) * | 1992-09-28 | 1994-07-19 | Industrial Technology Research Institute | Method for fabricating stacked capacitors with increased capacitance in a DRAM cell |
JP2953220B2 (en) * | 1992-10-30 | 1999-09-27 | 日本電気株式会社 | Method for manufacturing semiconductor device |
JPH07249690A (en) * | 1994-03-14 | 1995-09-26 | Fujitsu Ltd | Manufacture of semiconductor device |
US5436188A (en) * | 1994-04-26 | 1995-07-25 | Industrial Technology Research Institute | Dram cell process having elk horn shaped capacitor |
KR0154161B1 (en) * | 1994-06-30 | 1998-10-15 | 김주용 | Capacitor fabrication method of semiconducor device |
-
1997
- 1997-01-30 GB GB9701923A patent/GB2321771A/en not_active Withdrawn
- 1997-03-25 NL NL1005628A patent/NL1005628C2/en not_active IP Right Cessation
- 1997-04-25 FR FR9705115A patent/FR2752490B1/en not_active Expired - Fee Related
- 1997-05-14 DE DE19720227A patent/DE19720227A1/en not_active Withdrawn
- 1997-05-29 JP JP9140458A patent/JPH10135428A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
GB2321771A (en) | 1998-08-05 |
NL1005628C2 (en) | 1998-09-28 |
GB9701923D0 (en) | 1997-03-19 |
JPH10135428A (en) | 1998-05-22 |
DE19720227A1 (en) | 1998-02-19 |
FR2752490A1 (en) | 1998-02-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |