FR2743631B1 - Detecteur de pression ou de force s'exercant de l'exterieur - Google Patents

Detecteur de pression ou de force s'exercant de l'exterieur

Info

Publication number
FR2743631B1
FR2743631B1 FR9700025A FR9700025A FR2743631B1 FR 2743631 B1 FR2743631 B1 FR 2743631B1 FR 9700025 A FR9700025 A FR 9700025A FR 9700025 A FR9700025 A FR 9700025A FR 2743631 B1 FR2743631 B1 FR 2743631B1
Authority
FR
France
Prior art keywords
force sensor
exterior pressure
exterior
pressure
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9700025A
Other languages
English (en)
Other versions
FR2743631A1 (fr
Inventor
Wolfgang Golderer
Andreas Reppich
Manfred Moser
Annette Seibold
Reiner Schuetz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2743631A1 publication Critical patent/FR2743631A1/fr
Application granted granted Critical
Publication of FR2743631B1 publication Critical patent/FR2743631B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measuring Fluid Pressure (AREA)
FR9700025A 1996-01-13 1997-01-03 Detecteur de pression ou de force s'exercant de l'exterieur Expired - Fee Related FR2743631B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19601078A DE19601078C2 (de) 1996-01-13 1996-01-13 Druckkraftsensor

Publications (2)

Publication Number Publication Date
FR2743631A1 FR2743631A1 (fr) 1997-07-18
FR2743631B1 true FR2743631B1 (fr) 2000-03-03

Family

ID=7782697

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9700025A Expired - Fee Related FR2743631B1 (fr) 1996-01-13 1997-01-03 Detecteur de pression ou de force s'exercant de l'exterieur

Country Status (4)

Country Link
US (1) US5974898A (fr)
JP (1) JPH09196787A (fr)
DE (1) DE19601078C2 (fr)
FR (1) FR2743631B1 (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6290143B1 (en) 1996-05-02 2001-09-18 Century Group, L.L.C. Apparatus and method for collecting liquid spillage at rail facilities
DE10234773A1 (de) * 2002-07-30 2004-02-12 Daimlerchrysler Ag Einspritzsystem und Drucksensor für ein solches
DE102007016792B4 (de) * 2007-04-05 2013-05-29 Ifm Electronic Gmbh Sensor
DE102007056409A1 (de) * 2007-11-23 2009-05-28 Technische Universität Chemnitz Sensormodul, Verfahren zum Herstellen eines Sensormoduls sowie Signalerfassungs- und Verarbeitungsverfahren
DE102009060002A1 (de) * 2009-12-21 2011-06-22 Micro-Epsilon Messtechnik GmbH & Co. KG, 94496 Sensor
US10238166B2 (en) 2011-06-28 2019-03-26 Robert Rosenbaum Instrumented article of fitness and method of determining caloric requirements
US9241851B2 (en) * 2011-10-03 2016-01-26 University Of South Florida Hands-free user interface devices
DE102014200060A1 (de) * 2013-08-28 2015-03-19 Micro-Epsilon Messtechnik Gmbh & Co. Kg Sensorelement und Sensor mit einem entsprechenden Sensorelement
DE102015205211A1 (de) * 2015-03-23 2016-09-29 Continental Automotive Gmbh Verfahren zum Betrieb eines kapazitiven Belastungssensors
JP6882100B2 (ja) * 2017-06-30 2021-06-02 キヤノン株式会社 音響波プローブ及び音響波装置
CN107478359B (zh) * 2017-07-28 2019-07-19 佛山市川东磁电股份有限公司 一种双膜电容式压力传感器及制作方法
DE102018133053A1 (de) 2018-12-20 2020-06-25 Endress+Hauser SE+Co. KG Druckmessaufnehmer
US10935565B2 (en) * 2019-03-04 2021-03-02 Infineon Technologies Ag Detecting contamination of a pressure sensor based on cross-sensitivity to acceleration
US10810857B1 (en) 2019-09-05 2020-10-20 Paul Vegliante System and method for automatically detecting unauthorized entry into a pool
US11531136B2 (en) 2019-09-05 2022-12-20 Cutting Edge Packaging Solutions System and method for automatically detecting unauthorized entry into a pool
FR3110284B1 (fr) * 2020-05-14 2023-01-13 Commissariat Energie Atomique Dispositif de détection utilisant une transduction piézorésistive

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4426673A (en) * 1976-03-12 1984-01-17 Kavlico Corporation Capacitive pressure transducer and method of making same
CA1157142A (fr) * 1981-01-09 1983-11-15 Robert G. Dunn Diaphragme pour senseur acoustique du type a flexion
JPS61245036A (ja) * 1985-04-24 1986-10-31 Nippon Denso Co Ltd 半導体圧力検出装置
IT1187900B (it) * 1986-02-10 1987-12-23 Marelli Autronica Dispositivo sensore di pressione
JPS63315927A (ja) * 1987-06-19 1988-12-23 Nissan Motor Co Ltd 圧力変換装置
US5060504A (en) * 1988-09-23 1991-10-29 Automotive Systems Laboratory, Inc. Self-calibrating accelerometer
US5253510A (en) * 1989-06-22 1993-10-19 I C Sensors Self-testable micro-accelerometer
JPH03134552A (ja) * 1989-10-20 1991-06-07 Hitachi Ltd 自己較正機能付検出装置
US5492020A (en) * 1991-03-30 1996-02-20 Okada; Kazuhiro Detector for a physical quantity having a self-testing function
JP2776142B2 (ja) * 1992-05-15 1998-07-16 株式会社日立製作所 加速度センサ
US5377524A (en) * 1992-06-22 1995-01-03 The Regents Of The University Of Michigan Self-testing capacitive pressure transducer and method
DE4309206C1 (de) * 1993-03-22 1994-09-15 Texas Instruments Deutschland Halbleitervorrichtung mit einem Kraft- und/oder Beschleunigungssensor
DE4439297A1 (de) * 1994-11-07 1996-05-09 Pi Ceramic Gmbh Piezoelektrischer Sensor
DE4441487C1 (de) * 1994-11-22 1996-05-23 Bosch Gmbh Robert Verfahren zum Herstellen einer Schichtstruktur auf einem wenigstens einlagigen Substrat

Also Published As

Publication number Publication date
US5974898A (en) 1999-11-02
FR2743631A1 (fr) 1997-07-18
JPH09196787A (ja) 1997-07-31
DE19601078A1 (de) 1997-07-24
DE19601078C2 (de) 2000-01-05

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20070930