FR2724162B1 - Procede de preparation de trisilane a partir de monosilane, par decharge electrique et piegeage cryogenique - Google Patents

Procede de preparation de trisilane a partir de monosilane, par decharge electrique et piegeage cryogenique

Info

Publication number
FR2724162B1
FR2724162B1 FR9410529A FR9410529A FR2724162B1 FR 2724162 B1 FR2724162 B1 FR 2724162B1 FR 9410529 A FR9410529 A FR 9410529A FR 9410529 A FR9410529 A FR 9410529A FR 2724162 B1 FR2724162 B1 FR 2724162B1
Authority
FR
France
Prior art keywords
trisilane
monosilane
preparation
electric shock
cryogenic trap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9410529A
Other languages
English (en)
Other versions
FR2724162A1 (fr
Inventor
Alain Villermet
Pierre Didier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Priority to FR9410529A priority Critical patent/FR2724162B1/fr
Priority to PCT/FR1995/001093 priority patent/WO1996006802A1/fr
Publication of FR2724162A1 publication Critical patent/FR2724162A1/fr
Application granted granted Critical
Publication of FR2724162B1 publication Critical patent/FR2724162B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
FR9410529A 1994-09-01 1994-09-01 Procede de preparation de trisilane a partir de monosilane, par decharge electrique et piegeage cryogenique Expired - Fee Related FR2724162B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR9410529A FR2724162B1 (fr) 1994-09-01 1994-09-01 Procede de preparation de trisilane a partir de monosilane, par decharge electrique et piegeage cryogenique
PCT/FR1995/001093 WO1996006802A1 (fr) 1994-09-01 1995-08-17 Procede de preparation de trisilane a partir de monosilane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9410529A FR2724162B1 (fr) 1994-09-01 1994-09-01 Procede de preparation de trisilane a partir de monosilane, par decharge electrique et piegeage cryogenique

Publications (2)

Publication Number Publication Date
FR2724162A1 FR2724162A1 (fr) 1996-03-08
FR2724162B1 true FR2724162B1 (fr) 1997-01-10

Family

ID=9466635

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9410529A Expired - Fee Related FR2724162B1 (fr) 1994-09-01 1994-09-01 Procede de preparation de trisilane a partir de monosilane, par decharge electrique et piegeage cryogenique

Country Status (2)

Country Link
FR (1) FR2724162B1 (fr)
WO (1) WO1996006802A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013226033A1 (de) * 2013-12-16 2015-06-18 Evonik Industries Ag Verfahren zur Herstellung von hochreinen Halbmetallverbindungen
DE102020211833A1 (de) 2020-09-22 2022-03-24 Evonik Operations Gmbh Verfahren zur Herstellung oligomerer Hydridosilane aus SiH4
CN114105148B (zh) * 2021-12-01 2022-08-12 全椒亚格泰电子新材料科技有限公司 利用等离子球磨裂解合成高阶硅烷的方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61106411A (ja) * 1984-10-27 1986-05-24 Seitetsu Kagaku Co Ltd ジシランおよびトリシランの製造法
JPS62132721A (ja) * 1985-12-02 1987-06-16 Fuji Electric Co Ltd 高次シラン生成方法
JPS62132720A (ja) * 1985-12-02 1987-06-16 Fuji Electric Co Ltd 高次シラン生成方法

Also Published As

Publication number Publication date
FR2724162A1 (fr) 1996-03-08
WO1996006802A1 (fr) 1996-03-07

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Legal Events

Date Code Title Description
ST Notification of lapse