FR2672731B1 - - Google Patents

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Publication number
FR2672731B1
FR2672731B1 FR9101381A FR9101381A FR2672731B1 FR 2672731 B1 FR2672731 B1 FR 2672731B1 FR 9101381 A FR9101381 A FR 9101381A FR 9101381 A FR9101381 A FR 9101381A FR 2672731 B1 FR2672731 B1 FR 2672731B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9101381A
Other languages
French (fr)
Other versions
FR2672731A1 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to FR9101381A priority Critical patent/FR2672731A1/fr
Priority to JP4020246A priority patent/JPH0555367A/ja
Priority to EP92400287A priority patent/EP0498717A1/fr
Priority to US07/832,078 priority patent/US5229318A/en
Publication of FR2672731A1 publication Critical patent/FR2672731A1/fr
Application granted granted Critical
Publication of FR2672731B1 publication Critical patent/FR2672731B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
    • H01L21/76221—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO with a plurality of successive local oxidation steps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/314—Inorganic layers
    • H01L21/318—Inorganic layers composed of nitrides
    • H01L21/3185—Inorganic layers composed of nitrides of siliconnitrides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/32—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/0217—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
    • H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
    • H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
    • H01L21/02236—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor
    • H01L21/02238—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor silicon in uncombined form, i.e. pure silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
    • H01L21/02247—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by nitridation, e.g. nitridation of the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
    • H01L21/02252—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by plasma treatment, e.g. plasma oxidation of the substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/05—Etch and refill

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
  • Local Oxidation Of Silicon (AREA)
FR9101381A 1991-02-07 1991-02-07 Procede d'oxydation localisee enterree d'un substrat de silicium et circuit integre correspondant. Granted FR2672731A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR9101381A FR2672731A1 (fr) 1991-02-07 1991-02-07 Procede d'oxydation localisee enterree d'un substrat de silicium et circuit integre correspondant.
JP4020246A JPH0555367A (ja) 1991-02-07 1992-02-05 シリコン基板の埋め込み選択酸化方法およびこの方法による集積回路
EP92400287A EP0498717A1 (fr) 1991-02-07 1992-02-05 Procédé d'oxydation localisée enterrée d'un substrat de silicium et circuit intégré correspondant
US07/832,078 US5229318A (en) 1991-02-07 1992-02-06 Process for buried localized oxidation of a silicon substrate and corresponding integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9101381A FR2672731A1 (fr) 1991-02-07 1991-02-07 Procede d'oxydation localisee enterree d'un substrat de silicium et circuit integre correspondant.

Publications (2)

Publication Number Publication Date
FR2672731A1 FR2672731A1 (fr) 1992-08-14
FR2672731B1 true FR2672731B1 (US20080293856A1-20081127-C00150.png) 1997-03-07

Family

ID=9409445

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9101381A Granted FR2672731A1 (fr) 1991-02-07 1991-02-07 Procede d'oxydation localisee enterree d'un substrat de silicium et circuit integre correspondant.

Country Status (4)

Country Link
US (1) US5229318A (US20080293856A1-20081127-C00150.png)
EP (1) EP0498717A1 (US20080293856A1-20081127-C00150.png)
JP (1) JPH0555367A (US20080293856A1-20081127-C00150.png)
FR (1) FR2672731A1 (US20080293856A1-20081127-C00150.png)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR920022380A (ko) * 1991-05-18 1992-12-19 김광호 반도체장치의 소자분리방법
KR960005553B1 (ko) * 1993-03-31 1996-04-26 현대전자산업주식회사 필드산화막 형성 방법
US5494857A (en) * 1993-07-28 1996-02-27 Digital Equipment Corporation Chemical mechanical planarization of shallow trenches in semiconductor substrates
KR970003731B1 (ko) * 1993-10-14 1997-03-21 엘지반도체 주식회사 반도체 장치의 소자 격리막 제조방법
KR0136518B1 (en) * 1994-04-01 1998-04-24 Hyundai Electroncis Ind Co Ltd Method for forming a field oxide layer
US5470783A (en) * 1994-06-06 1995-11-28 At&T Ipm Corp. Method for integrated circuit device isolation
DE19525072C2 (de) * 1995-07-10 2002-06-27 Infineon Technologies Ag Integrierte Schaltungsanordnung, bei der ein erstes Bauelement an einer Hauptfläche eines Halbleitersubstrats und ein zweites Bauelement am Grabenboden angeordnet sind, und Verfahren zu deren Herstellung
US5661073A (en) * 1995-08-11 1997-08-26 Micron Technology, Inc. Method for forming field oxide having uniform thickness
TR199800717T2 (xx) * 1995-10-26 1998-09-21 Sanofi Amyotrofik lateral skleroz tedavisine y�nelik ila� haz�rlamak i�in
US5672538A (en) * 1995-12-04 1997-09-30 Taiwan Semiconductor Manufacturing Company, Ltd Modified locus isolation process in which surface topology of the locos oxide is smoothed
US5726093A (en) * 1995-12-06 1998-03-10 Taiwan Semiconductor Manufacturing Company Ltd. Two-step planer field oxidation method
US5789305A (en) * 1997-01-27 1998-08-04 Chartered Semiconductor Manufacturing Ltd. Locos with bird's beak suppression by a nitrogen implantation
US5721174A (en) * 1997-02-03 1998-02-24 Chartered Semiconductor Manufacturing Pte Ltd Narrow deep trench isolation process with trench filling by oxidation
US6080665A (en) * 1997-04-11 2000-06-27 Applied Materials, Inc. Integrated nitrogen-treated titanium layer to prevent interaction of titanium and aluminum
US6033997A (en) * 1997-12-29 2000-03-07 Siemens Aktiengesellschaft Reduction of black silicon in semiconductor fabrication
US5940718A (en) * 1998-07-20 1999-08-17 Advanced Micro Devices Nitridation assisted polysilicon sidewall protection in self-aligned shallow trench isolation
US6521959B2 (en) * 1999-10-25 2003-02-18 Samsung Electronics Co., Ltd. SOI semiconductor integrated circuit for eliminating floating body effects in SOI MOSFETs and method of fabricating the same
US6613651B1 (en) * 2000-09-05 2003-09-02 Lsi Logic Corporation Integrated circuit isolation system
JP2005183783A (ja) * 2003-12-22 2005-07-07 Seiko Epson Corp 半導体装置の製造方法
DE102004044222A1 (de) * 2004-09-14 2006-03-16 Robert Bosch Gmbh Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren
US8772902B2 (en) 2012-04-19 2014-07-08 International Business Machines Corporation Fabrication of a localized thick box with planar oxide/SOI interface on bulk silicon substrate for silicon photonics integration
US9105686B2 (en) 2012-11-02 2015-08-11 International Business Machines Corporation Fabrication of localized SOI on localized thick box using selective epitaxy on bulk semiconductor substrates for photonics device integration
JP2017535076A (ja) * 2014-10-17 2017-11-24 テクノロギアン トゥトキムスケスクス ヴェーテーテー オイ スーパーキャパシタの本体としての使用に適したブランク、スーパーキャパシタ、および、多孔質シリコンボリュームの製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1437112A (en) * 1973-09-07 1976-05-26 Mullard Ltd Semiconductor device manufacture
EP0052948A1 (en) * 1980-11-24 1982-06-02 Motorola, Inc. Oxide isolation process
US4563227A (en) * 1981-12-08 1986-01-07 Matsushita Electric Industrial Co., Ltd. Method for manufacturing a semiconductor device
JPS58169935A (ja) * 1982-03-30 1983-10-06 Matsushita Electronics Corp 半導体装置の製造方法
NL187373C (nl) * 1982-10-08 1991-09-02 Philips Nv Werkwijze voor vervaardiging van een halfgeleiderinrichting.
JPS59214237A (ja) * 1983-05-20 1984-12-04 Toshiba Corp 半導体装置の製造方法
US4986879A (en) * 1987-06-15 1991-01-22 Ncr Corporation Structure and process for forming semiconductor field oxide using a sealing sidewall of consumable nitride
JP2747563B2 (ja) * 1987-06-15 1998-05-06 ヒュンダイ エレクトロニクス アメリカ 半導体のフイールド酸化物形成方法
FR2648956A1 (fr) * 1989-06-23 1990-12-28 Commissariat Energie Atomique Procede de fabrication de l'oxyde de champ d'un circuit integre sur du silicium

Also Published As

Publication number Publication date
JPH0555367A (ja) 1993-03-05
US5229318A (en) 1993-07-20
FR2672731A1 (fr) 1992-08-14
EP0498717A1 (fr) 1992-08-12

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