FR2670201B1 - Procede de microstructuration de ceramiques oxydees supraconductrices. - Google Patents

Procede de microstructuration de ceramiques oxydees supraconductrices.

Info

Publication number
FR2670201B1
FR2670201B1 FR9114644A FR9114644A FR2670201B1 FR 2670201 B1 FR2670201 B1 FR 2670201B1 FR 9114644 A FR9114644 A FR 9114644A FR 9114644 A FR9114644 A FR 9114644A FR 2670201 B1 FR2670201 B1 FR 2670201B1
Authority
FR
France
Prior art keywords
microstructuring
oxidized
superconductive ceramics
superconductive
ceramics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9114644A
Other languages
English (en)
French (fr)
Other versions
FR2670201A1 (fr
Inventor
Dr Kaufmann
Dr Braun
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dornier GmbH
Original Assignee
Dornier GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dornier GmbH filed Critical Dornier GmbH
Publication of FR2670201A1 publication Critical patent/FR2670201A1/fr
Application granted granted Critical
Publication of FR2670201B1 publication Critical patent/FR2670201B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0884—Treatment of superconductor layers by irradiation, e.g. ion-beam, electron-beam, laser beam or X-rays

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
FR9114644A 1990-12-06 1991-11-27 Procede de microstructuration de ceramiques oxydees supraconductrices. Expired - Fee Related FR2670201B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4038894A DE4038894C1 (enrdf_load_stackoverflow) 1990-12-06 1990-12-06

Publications (2)

Publication Number Publication Date
FR2670201A1 FR2670201A1 (fr) 1992-06-12
FR2670201B1 true FR2670201B1 (fr) 1995-07-13

Family

ID=6419703

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9114644A Expired - Fee Related FR2670201B1 (fr) 1990-12-06 1991-11-27 Procede de microstructuration de ceramiques oxydees supraconductrices.

Country Status (3)

Country Link
DE (1) DE4038894C1 (enrdf_load_stackoverflow)
FR (1) FR2670201B1 (enrdf_load_stackoverflow)
GB (1) GB2250517B (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5262392A (en) * 1991-07-15 1993-11-16 Eastman Kodak Company Method for patterning metallo-organic percursor film and method for producing a patterned ceramic film and film products
US10158061B2 (en) 2013-11-12 2018-12-18 Varian Semiconductor Equipment Associates, Inc Integrated superconductor device and method of fabrication
US9947441B2 (en) 2013-11-12 2018-04-17 Varian Semiconductor Equipment Associates, Inc. Integrated superconductor device and method of fabrication

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1050409A (enrdf_load_stackoverflow) * 1964-09-04
DE3854238T2 (de) * 1987-04-08 1996-03-21 Hitachi Ltd Verfahren zur Herstellung eines supraleitenden Elements.
JPH079905B2 (ja) * 1987-07-15 1995-02-01 シャープ株式会社 半導体装置の配線方法
JPS6451685A (en) * 1987-08-22 1989-02-27 Sumitomo Electric Industries Formation of superconducting circuit
US4913769A (en) * 1987-08-24 1990-04-03 Hitachi, Ltd. Process for preparing superconductive wiring board
JPS6489574A (en) * 1987-09-30 1989-04-04 Nec Corp Pattern formation of superconductor circuit
GB8723516D0 (en) * 1987-10-07 1987-11-11 Atomic Energy Authority Uk Superconducting ceramic circuit elements
NL8703039A (nl) * 1987-12-16 1989-07-17 Philips Nv Werkwijze voor het patroonmatig vervaardigen van een dunne laag uit een oxidisch supergeleidend materiaal.
US5053383A (en) * 1988-03-29 1991-10-01 At&T Bell Laboratories Method of reducing critical current density of oxide superconductors by radiation damage
DE3814277A1 (de) * 1988-04-27 1989-11-09 Baeuerle Dieter Verfahren zur aenderung der elektrischen leitungseigenschaften eines hochtemperatur-supraleiter-materials
NL8801945A (nl) * 1988-08-04 1990-03-01 Philips Nv Werkwijze voor het vervaardigen van een inrichting met een laag uit een oxidisch supergeleidend materiaal.

Also Published As

Publication number Publication date
GB2250517B (en) 1994-09-21
DE4038894C1 (enrdf_load_stackoverflow) 1992-06-25
FR2670201A1 (fr) 1992-06-12
GB2250517A (en) 1992-06-10
GB9125264D0 (en) 1992-01-29

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Legal Events

Date Code Title Description
ST Notification of lapse