GB2250517B - Process for the microstructuring of superconductive oxide ceramics - Google Patents

Process for the microstructuring of superconductive oxide ceramics

Info

Publication number
GB2250517B
GB2250517B GB9125264A GB9125264A GB2250517B GB 2250517 B GB2250517 B GB 2250517B GB 9125264 A GB9125264 A GB 9125264A GB 9125264 A GB9125264 A GB 9125264A GB 2250517 B GB2250517 B GB 2250517B
Authority
GB
United Kingdom
Prior art keywords
microstructuring
oxide ceramics
superconductive oxide
superconductive
ceramics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9125264A
Other languages
English (en)
Other versions
GB2250517A (en
GB9125264D0 (en
Inventor
Ursula Kaufmann
Rudiger Braun
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dornier GmbH
Original Assignee
Dornier GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dornier GmbH filed Critical Dornier GmbH
Publication of GB9125264D0 publication Critical patent/GB9125264D0/en
Publication of GB2250517A publication Critical patent/GB2250517A/en
Application granted granted Critical
Publication of GB2250517B publication Critical patent/GB2250517B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0884—Treatment of superconductor layers by irradiation, e.g. ion-beam, electron-beam, laser beam or X-rays

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
GB9125264A 1990-12-06 1991-11-27 Process for the microstructuring of superconductive oxide ceramics Expired - Fee Related GB2250517B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4038894A DE4038894C1 (enrdf_load_stackoverflow) 1990-12-06 1990-12-06

Publications (3)

Publication Number Publication Date
GB9125264D0 GB9125264D0 (en) 1992-01-29
GB2250517A GB2250517A (en) 1992-06-10
GB2250517B true GB2250517B (en) 1994-09-21

Family

ID=6419703

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9125264A Expired - Fee Related GB2250517B (en) 1990-12-06 1991-11-27 Process for the microstructuring of superconductive oxide ceramics

Country Status (3)

Country Link
DE (1) DE4038894C1 (enrdf_load_stackoverflow)
FR (1) FR2670201B1 (enrdf_load_stackoverflow)
GB (1) GB2250517B (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5262392A (en) * 1991-07-15 1993-11-16 Eastman Kodak Company Method for patterning metallo-organic percursor film and method for producing a patterned ceramic film and film products
US10158061B2 (en) 2013-11-12 2018-12-18 Varian Semiconductor Equipment Associates, Inc Integrated superconductor device and method of fabrication
US9947441B2 (en) 2013-11-12 2018-04-17 Varian Semiconductor Equipment Associates, Inc. Integrated superconductor device and method of fabrication

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1050409A (enrdf_load_stackoverflow) * 1964-09-04
EP0299163A2 (en) * 1987-07-15 1989-01-18 Sharp Kabushiki Kaisha Interconnection method for semiconductor device
EP0304807A2 (en) * 1987-08-22 1989-03-01 Sumitomo Electric Industries Limited Method for producing superconducting circuit
EP0311331A2 (en) * 1987-10-07 1989-04-12 United Kingdom Atomic Energy Authority Superconducting ceramic circuit elements
EP0324996A1 (en) * 1987-12-16 1989-07-26 Koninklijke Philips Electronics N.V. Method of manufacturing a thin film of an oxidic superconducting material in accordance with a pattern
EP0335556A2 (en) * 1988-03-29 1989-10-04 AT&T Corp. Apparatus comprising a superconductive element , and method of making the element
EP0355888A1 (en) * 1988-08-04 1990-02-28 Koninklijke Philips Electronics N.V. Method of manufacturing a device comprising a film of an oxidic superconducting material
US4913769A (en) * 1987-08-24 1990-04-03 Hitachi, Ltd. Process for preparing superconductive wiring board

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3854238T2 (de) * 1987-04-08 1996-03-21 Hitachi Ltd Verfahren zur Herstellung eines supraleitenden Elements.
JPS6489574A (en) * 1987-09-30 1989-04-04 Nec Corp Pattern formation of superconductor circuit
DE3814277A1 (de) * 1988-04-27 1989-11-09 Baeuerle Dieter Verfahren zur aenderung der elektrischen leitungseigenschaften eines hochtemperatur-supraleiter-materials

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1050409A (enrdf_load_stackoverflow) * 1964-09-04
EP0299163A2 (en) * 1987-07-15 1989-01-18 Sharp Kabushiki Kaisha Interconnection method for semiconductor device
EP0304807A2 (en) * 1987-08-22 1989-03-01 Sumitomo Electric Industries Limited Method for producing superconducting circuit
US4913769A (en) * 1987-08-24 1990-04-03 Hitachi, Ltd. Process for preparing superconductive wiring board
EP0311331A2 (en) * 1987-10-07 1989-04-12 United Kingdom Atomic Energy Authority Superconducting ceramic circuit elements
EP0324996A1 (en) * 1987-12-16 1989-07-26 Koninklijke Philips Electronics N.V. Method of manufacturing a thin film of an oxidic superconducting material in accordance with a pattern
EP0335556A2 (en) * 1988-03-29 1989-10-04 AT&T Corp. Apparatus comprising a superconductive element , and method of making the element
EP0355888A1 (en) * 1988-08-04 1990-02-28 Koninklijke Philips Electronics N.V. Method of manufacturing a device comprising a film of an oxidic superconducting material

Also Published As

Publication number Publication date
DE4038894C1 (enrdf_load_stackoverflow) 1992-06-25
FR2670201A1 (fr) 1992-06-12
FR2670201B1 (fr) 1995-07-13
GB2250517A (en) 1992-06-10
GB9125264D0 (en) 1992-01-29

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19971127