FR2635119B1 - GAS PHASE DEPOSITION OF TITANIUM COMPOUNDS - Google Patents

GAS PHASE DEPOSITION OF TITANIUM COMPOUNDS

Info

Publication number
FR2635119B1
FR2635119B1 FR8810552A FR8810552A FR2635119B1 FR 2635119 B1 FR2635119 B1 FR 2635119B1 FR 8810552 A FR8810552 A FR 8810552A FR 8810552 A FR8810552 A FR 8810552A FR 2635119 B1 FR2635119 B1 FR 2635119B1
Authority
FR
France
Prior art keywords
gas phase
phase deposition
titanium compounds
titanium
compounds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR8810552A
Other languages
French (fr)
Other versions
FR2635119A1 (en
Inventor
Alain Derre
Olivier Puig
Francis Teyssandier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Direction General pour lArmement DGA
Centre National de la Recherche Scientifique CNRS
Original Assignee
Direction General pour lArmement DGA
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Direction General pour lArmement DGA, Centre National de la Recherche Scientifique CNRS filed Critical Direction General pour lArmement DGA
Priority to FR8810552A priority Critical patent/FR2635119B1/en
Publication of FR2635119A1 publication Critical patent/FR2635119A1/en
Application granted granted Critical
Publication of FR2635119B1 publication Critical patent/FR2635119B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
FR8810552A 1988-08-04 1988-08-04 GAS PHASE DEPOSITION OF TITANIUM COMPOUNDS Expired - Fee Related FR2635119B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8810552A FR2635119B1 (en) 1988-08-04 1988-08-04 GAS PHASE DEPOSITION OF TITANIUM COMPOUNDS

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8810552A FR2635119B1 (en) 1988-08-04 1988-08-04 GAS PHASE DEPOSITION OF TITANIUM COMPOUNDS

Publications (2)

Publication Number Publication Date
FR2635119A1 FR2635119A1 (en) 1990-02-09
FR2635119B1 true FR2635119B1 (en) 1993-02-19

Family

ID=9369116

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8810552A Expired - Fee Related FR2635119B1 (en) 1988-08-04 1988-08-04 GAS PHASE DEPOSITION OF TITANIUM COMPOUNDS

Country Status (1)

Country Link
FR (1) FR2635119B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5373682A (en) * 1992-05-18 1994-12-20 National Starch And Chemical Investment Holding Corporation Method for tackless packaging of hot melt adhesives

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3061464A (en) * 1959-10-09 1962-10-30 Ethyl Corp Method of metal plating with a group iv-b organometallic compound
US3061465A (en) * 1959-10-09 1962-10-30 Ethyl Corp Method of metal plating with a group iv-b organometallic compound
US3437516A (en) * 1966-04-28 1969-04-08 Us Air Force Vapor deposition from perfluoroorganometallic compounds
US3846162A (en) * 1968-10-21 1974-11-05 Texas Instruments Inc Metal carbonitride coatings
EP0174743A3 (en) * 1984-09-05 1988-06-08 Morton Thiokol, Inc. Process for transition metal nitrides thin film deposition

Also Published As

Publication number Publication date
FR2635119A1 (en) 1990-02-09

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Legal Events

Date Code Title Description
ST Notification of lapse