FR2635118B1 - Procede de revetement en phase gazeuse d'un substrat metallique contenant du carbone ou a base de carbures metalliques par des composes des metaux de transition du groupe iv ou v - Google Patents

Procede de revetement en phase gazeuse d'un substrat metallique contenant du carbone ou a base de carbures metalliques par des composes des metaux de transition du groupe iv ou v

Info

Publication number
FR2635118B1
FR2635118B1 FR8810553A FR8810553A FR2635118B1 FR 2635118 B1 FR2635118 B1 FR 2635118B1 FR 8810553 A FR8810553 A FR 8810553A FR 8810553 A FR8810553 A FR 8810553A FR 2635118 B1 FR2635118 B1 FR 2635118B1
Authority
FR
France
Prior art keywords
metal
coating
carbon
group
gaseous phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR8810553A
Other languages
English (en)
Other versions
FR2635118A1 (fr
Inventor
Alain Derre
Francis Teyssandier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Direction General pour lArmement DGA
Centre National de la Recherche Scientifique CNRS
Original Assignee
Direction General pour lArmement DGA
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Direction General pour lArmement DGA, Centre National de la Recherche Scientifique CNRS filed Critical Direction General pour lArmement DGA
Priority to FR8810553A priority Critical patent/FR2635118B1/fr
Publication of FR2635118A1 publication Critical patent/FR2635118A1/fr
Application granted granted Critical
Publication of FR2635118B1 publication Critical patent/FR2635118B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
FR8810553A 1988-08-04 1988-08-04 Procede de revetement en phase gazeuse d'un substrat metallique contenant du carbone ou a base de carbures metalliques par des composes des metaux de transition du groupe iv ou v Expired - Fee Related FR2635118B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8810553A FR2635118B1 (fr) 1988-08-04 1988-08-04 Procede de revetement en phase gazeuse d'un substrat metallique contenant du carbone ou a base de carbures metalliques par des composes des metaux de transition du groupe iv ou v

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8810553A FR2635118B1 (fr) 1988-08-04 1988-08-04 Procede de revetement en phase gazeuse d'un substrat metallique contenant du carbone ou a base de carbures metalliques par des composes des metaux de transition du groupe iv ou v

Publications (2)

Publication Number Publication Date
FR2635118A1 FR2635118A1 (fr) 1990-02-09
FR2635118B1 true FR2635118B1 (fr) 1993-02-19

Family

ID=9369117

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8810553A Expired - Fee Related FR2635118B1 (fr) 1988-08-04 1988-08-04 Procede de revetement en phase gazeuse d'un substrat metallique contenant du carbone ou a base de carbures metalliques par des composes des metaux de transition du groupe iv ou v

Country Status (1)

Country Link
FR (1) FR2635118B1 (fr)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL32818A0 (en) * 1968-08-26 1969-11-12 Teeg Research Inc Process for the deposition of refractory metal and metalloid carbides on a base material

Also Published As

Publication number Publication date
FR2635118A1 (fr) 1990-02-09

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Legal Events

Date Code Title Description
ST Notification of lapse