FR2573324B1 - Procede d'elimination des composes halogenes acides gazeux - Google Patents

Procede d'elimination des composes halogenes acides gazeux

Info

Publication number
FR2573324B1
FR2573324B1 FR8417721A FR8417721A FR2573324B1 FR 2573324 B1 FR2573324 B1 FR 2573324B1 FR 8417721 A FR8417721 A FR 8417721A FR 8417721 A FR8417721 A FR 8417721A FR 2573324 B1 FR2573324 B1 FR 2573324B1
Authority
FR
France
Prior art keywords
removal
acid gas
gas compounds
halogenated acid
halogenated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8417721A
Other languages
English (en)
Other versions
FR2573324A1 (fr
Inventor
Denis Rufin
Ikuo Hirase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
Original Assignee
Air Liquide SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA filed Critical Air Liquide SA
Priority to FR8417721A priority Critical patent/FR2573324B1/fr
Priority to KR1019850008698A priority patent/KR920007856B1/ko
Priority to JP60259942A priority patent/JPH0716582B2/ja
Publication of FR2573324A1 publication Critical patent/FR2573324A1/fr
Priority to JP62021940A priority patent/JPS63194719A/ja
Application granted granted Critical
Publication of FR2573324B1 publication Critical patent/FR2573324B1/fr
Expired legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/46Removing components of defined structure
    • B01D53/68Halogens or halogen compounds
FR8417721A 1984-11-21 1984-11-21 Procede d'elimination des composes halogenes acides gazeux Expired FR2573324B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR8417721A FR2573324B1 (fr) 1984-11-21 1984-11-21 Procede d'elimination des composes halogenes acides gazeux
KR1019850008698A KR920007856B1 (ko) 1984-11-21 1985-11-21 기체상태의 산성 할로겐 화합물의 제거방법
JP60259942A JPH0716582B2 (ja) 1984-11-21 1985-11-21 ガス状酸性ハロゲン化合物の除去方法
JP62021940A JPS63194719A (ja) 1984-11-21 1987-02-03 気体洗浄器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8417721A FR2573324B1 (fr) 1984-11-21 1984-11-21 Procede d'elimination des composes halogenes acides gazeux

Publications (2)

Publication Number Publication Date
FR2573324A1 FR2573324A1 (fr) 1986-05-23
FR2573324B1 true FR2573324B1 (fr) 1989-08-04

Family

ID=9309799

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8417721A Expired FR2573324B1 (fr) 1984-11-21 1984-11-21 Procede d'elimination des composes halogenes acides gazeux

Country Status (3)

Country Link
JP (1) JPH0716582B2 (fr)
KR (1) KR920007856B1 (fr)
FR (1) FR2573324B1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0798648B2 (ja) * 1990-01-10 1995-10-25 セントラル硝子株式会社 Nf3ガスの精製方法
US5176889A (en) * 1990-07-09 1993-01-05 Daidousanso Co., Ltd. Method and apparatus for treatment of NF3 gas
US5401473A (en) * 1990-07-09 1995-03-28 Daidousanso Co., Ltd. Method and apparatus for treatment of NF3 gas
US20010001652A1 (en) * 1997-01-14 2001-05-24 Shuichi Kanno Process for treating flourine compound-containing gas
KR100786574B1 (ko) * 2006-05-03 2007-12-21 고등기술연구원연구조합 합성가스 정제시스템
JP7263933B2 (ja) * 2019-06-18 2023-04-25 株式会社アイシン ガスセンサ
CN115501726B (zh) * 2022-08-22 2023-05-12 福建省龙氟新材料有限公司 专用于氟化氢的尾气吸附塔

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA951251A (en) * 1968-09-05 1974-07-16 Wellman-Lord Pretreated alumina and hf removal therewith
BE729450A (fr) * 1969-03-06 1969-09-08
JPS49123989A (fr) * 1973-03-31 1974-11-27
US4111833A (en) * 1974-09-05 1978-09-05 The United States Of America As Represented By The United States Department Of Energy Activated carbon material
JPS5667524A (en) * 1979-11-09 1981-06-06 Sumitomo Metal Mining Co Ltd Dry type treatment of gas
DE3013397A1 (de) * 1980-04-05 1981-10-15 Heinz Ing.(grad.) 4390 Gladbeck Hölter Chemisorptions- und geruchsbeseitigungsfilter

Also Published As

Publication number Publication date
KR920007856B1 (ko) 1992-09-18
JPS61133127A (ja) 1986-06-20
KR860003845A (ko) 1986-06-13
JPH0716582B2 (ja) 1995-03-01
FR2573324A1 (fr) 1986-05-23

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Legal Events

Date Code Title Description
ST Notification of lapse
ST Notification of lapse