FR2564203B1 - Capteur de vitesse angulaire - Google Patents

Capteur de vitesse angulaire

Info

Publication number
FR2564203B1
FR2564203B1 FR848407427A FR8407427A FR2564203B1 FR 2564203 B1 FR2564203 B1 FR 2564203B1 FR 848407427 A FR848407427 A FR 848407427A FR 8407427 A FR8407427 A FR 8407427A FR 2564203 B1 FR2564203 B1 FR 2564203B1
Authority
FR
France
Prior art keywords
speed sensor
angular speed
angular
sensor
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR848407427A
Other languages
English (en)
French (fr)
Other versions
FR2564203A1 (fr
Inventor
Evert C Alsenz
William F Juptner
David F Macy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PIEZOELECTRIC TECHNOLOGY INVES
Original Assignee
PIEZOELECTRIC TECHNOLOGY INVES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/572,782 external-priority patent/US4538461A/en
Priority to GB08411918A priority Critical patent/GB2158579B/en
Application filed by PIEZOELECTRIC TECHNOLOGY INVES filed Critical PIEZOELECTRIC TECHNOLOGY INVES
Priority to FR848407427A priority patent/FR2564203B1/fr
Priority to DE19843417858 priority patent/DE3417858A1/de
Publication of FR2564203A1 publication Critical patent/FR2564203A1/fr
Priority to US07/147,621 priority patent/USRE33479E/en
Application granted granted Critical
Publication of FR2564203B1 publication Critical patent/FR2564203B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
FR848407427A 1984-01-23 1984-05-14 Capteur de vitesse angulaire Expired FR2564203B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB08411918A GB2158579B (en) 1984-01-23 1984-05-10 Angular rate sensor system
FR848407427A FR2564203B1 (fr) 1984-01-23 1984-05-14 Capteur de vitesse angulaire
DE19843417858 DE3417858A1 (de) 1984-01-23 1984-05-14 Winkelgeschwindigkeits-fuehlsystem
US07/147,621 USRE33479E (en) 1984-01-23 1988-01-22 Vibratory angular rate sensing system

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US06/572,782 US4538461A (en) 1984-01-23 1984-01-23 Vibratory angular rate sensing system
GB08411918A GB2158579B (en) 1984-01-23 1984-05-10 Angular rate sensor system
FR848407427A FR2564203B1 (fr) 1984-01-23 1984-05-14 Capteur de vitesse angulaire
DE19843417858 DE3417858A1 (de) 1984-01-23 1984-05-14 Winkelgeschwindigkeits-fuehlsystem
US85947486A 1986-05-02 1986-05-02

Publications (2)

Publication Number Publication Date
FR2564203A1 FR2564203A1 (fr) 1985-11-15
FR2564203B1 true FR2564203B1 (fr) 1989-12-15

Family

ID=37808155

Family Applications (1)

Application Number Title Priority Date Filing Date
FR848407427A Expired FR2564203B1 (fr) 1984-01-23 1984-05-14 Capteur de vitesse angulaire

Country Status (4)

Country Link
US (1) USRE33479E (enrdf_load_stackoverflow)
DE (1) DE3417858A1 (enrdf_load_stackoverflow)
FR (1) FR2564203B1 (enrdf_load_stackoverflow)
GB (1) GB2158579B (enrdf_load_stackoverflow)

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DE3884481T2 (de) * 1987-07-10 1994-04-28 Nippon Denki Home Electronics Oszillierender Kreisel.
SE466817B (sv) * 1989-02-27 1992-04-06 Bofors Ab Foer gyro avsett sensorelement
US5473945A (en) * 1990-02-14 1995-12-12 The Charles Stark Draper Laboratory, Inc. Micromechanical angular accelerometer with auxiliary linear accelerometer
US5357817A (en) * 1990-04-19 1994-10-25 Charles Stark Draper Laboratory, Inc. Wide bandwidth stable member without angular accelerometers
EP0461761B1 (en) * 1990-05-18 1994-06-22 British Aerospace Public Limited Company Inertial sensors
DE4022495A1 (de) * 1990-07-14 1992-01-23 Bosch Gmbh Robert Mikromechanischer drehratensensor
DE4032559C2 (de) * 1990-10-13 2000-11-23 Bosch Gmbh Robert Drehratensensor und Verfahren zur Herstellung
US5408119A (en) 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5605598A (en) * 1990-10-17 1997-02-25 The Charles Stark Draper Laboratory Inc. Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency
US5635639A (en) * 1991-09-11 1997-06-03 The Charles Stark Draper Laboratory, Inc. Micromechanical tuning fork angular rate sensor
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
US5408877A (en) * 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5767405A (en) 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
JP3144600B2 (ja) 1992-10-19 2001-03-12 日本電信電話株式会社 光振動ジャイロ
US5388458A (en) * 1992-11-24 1995-02-14 The Charles Stark Draper Laboratory, Inc. Quartz resonant gyroscope or quartz resonant tuning fork gyroscope
US5650568A (en) 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
US5555765A (en) * 1993-02-10 1996-09-17 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope
US5426970A (en) * 1993-08-02 1995-06-27 New Sd, Inc. Rotation rate sensor with built in test circuit
DE4336004C2 (de) * 1993-10-21 1998-05-28 Siemens Ag Schwingungsgyroskop
DE4428405A1 (de) * 1994-08-11 1996-02-15 Karlsruhe Forschzent Drehratensensor
US5581035A (en) * 1994-08-29 1996-12-03 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode
US5646348A (en) 1994-08-29 1997-07-08 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode and fabrication technique therefor
JPH0894362A (ja) * 1994-09-20 1996-04-12 Yoshiro Tomikawa 振動型ジャイロスコープ
US5725729A (en) * 1994-09-26 1998-03-10 The Charles Stark Draper Laboratory, Inc. Process for micromechanical fabrication
DE19525217A1 (de) * 1995-07-11 1997-01-16 Teves Gmbh Alfred Erfassung und Auswertung von sicherheitskritischen Meßgrößen
DE19528961C2 (de) * 1995-08-08 1998-10-29 Daimler Benz Ag Mikromechanischer Drehratensensor (DRS) und Sensoranordnung
US5817942A (en) * 1996-02-28 1998-10-06 The Charles Stark Draper Laboratory, Inc. Capacitive in-plane accelerometer
DE19621320A1 (de) 1996-05-28 1997-12-11 Teves Gmbh Alfred Anordnung zur Erfassung und Auswertung von Gierbewegungen
JP3752737B2 (ja) * 1996-08-12 2006-03-08 トヨタ自動車株式会社 角速度検出装置
US5892153A (en) * 1996-11-21 1999-04-06 The Charles Stark Draper Laboratory, Inc. Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US5911156A (en) 1997-02-24 1999-06-08 The Charles Stark Draper Laboratory, Inc. Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
US5783973A (en) 1997-02-24 1998-07-21 The Charles Stark Draper Laboratory, Inc. Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
US5952574A (en) 1997-04-29 1999-09-14 The Charles Stark Draper Laboratory, Inc. Trenches to reduce charging effects and to control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
JPH11183176A (ja) 1997-12-18 1999-07-09 Fujitsu Ltd 音叉型振動子及び音叉型振動ジャイロ
US6230563B1 (en) 1998-06-09 2001-05-15 Integrated Micro Instruments, Inc. Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability
FR2789171B1 (fr) * 1999-02-01 2001-03-02 Onera (Off Nat Aerospatiale) Structure monolithique de gyrometre vibrant
US6189381B1 (en) 1999-04-26 2001-02-20 Sitek, Inc. Angular rate sensor made from a structural wafer of single crystal silicon
US7051590B1 (en) 1999-06-15 2006-05-30 Analog Devices Imi, Inc. Structure for attenuation or cancellation of quadrature error
US6823733B2 (en) * 2002-11-04 2004-11-30 Matsushita Electric Industrial Co., Ltd. Z-axis vibration gyroscope
US8187902B2 (en) 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same

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US2455939A (en) * 1948-12-14 Device for detecting turn or
GB611011A (en) * 1943-01-13 1948-10-25 Smith & Sons Ltd S Improvements in or relating to devices for detecting or measuring rate of turn
US2513340A (en) * 1945-10-17 1950-07-04 Sperry Corp Angular velocity responsive apparatus
GB618328A (en) * 1945-10-17 1949-02-21 Sperry Gyroscope Co Inc Improvements in or relating to turn responsive apparatus
US2544646A (en) * 1948-06-16 1951-03-13 Sperry Corp Angular velocity measuring instrument
GB730783A (en) * 1952-08-08 1955-06-01 Sperry Corp Improvements in or relating to rate-of-turn-responsive apparatus
US2753173A (en) * 1952-09-17 1956-07-03 Sperry Rand Corp Turn rate measuring instrument
GB742980A (en) * 1953-12-23 1956-01-04 Sperry Corp Turn responsive apparatus
GB827860A (en) * 1955-03-31 1960-02-10 Clarence Hunter Mcshan Improvements in or relating to electromechanical transducer systems
GB861436A (en) * 1956-02-27 1961-02-22 August Karolus Improvements in and relating to devices responsive to angular movements
US3307409A (en) * 1959-02-26 1967-03-07 Jr George C Newton Method of and apparatus for measuring angular motion
US3241377A (en) * 1960-01-13 1966-03-22 Jr George C Newton Method of and apparatus for detecting angular motion
GB947310A (en) * 1960-07-22 1964-01-22 August Karolus Improvements in or relating to rotation responsive devices
US3143889A (en) * 1960-08-23 1964-08-11 Westinghouse Electric Corp Angular velocity measuring device
US3127775A (en) * 1960-10-28 1964-04-07 Gyrex Corp Vibratory rate gyroscope
DE1269398B (de) * 1960-12-07 1968-05-30 Dr Phil August Karolus Vorrichtung zur Messung von Drehgeschwindigkeiten und Drehrichtungen
GB989101A (en) * 1961-07-11 1965-04-14 Mini Of Aviat London Improvements in gyroscope apparatus
US3141100A (en) * 1962-06-21 1964-07-14 Avco Corp Piezoelectric resonance device
US3269192A (en) * 1962-11-07 1966-08-30 Gen Precision Inc Tuning fork digital accelerometer
US3206986A (en) * 1963-01-04 1965-09-21 Western Electric Co Apparatus for sensing selected movements of a body
US3258617A (en) * 1963-02-07 1966-06-28 Avco Corp Piezoelectric device
FR1395116A (fr) * 1964-04-10 1965-04-09 Hawker Siddeley Dynamics Ltd Perfectionnements aux dispositifs gyroscopiques
US3319472A (en) * 1964-05-06 1967-05-16 Varo Combination time base accelerometer
US3465597A (en) * 1965-05-25 1969-09-09 Singer General Precision Vibrating-column accelerometer
US3520195A (en) * 1965-10-11 1970-07-14 Gen Electric Solid state angular velocity sensing device
GB1304496A (enrdf_load_stackoverflow) * 1971-11-11 1973-01-24
US3839915A (en) * 1973-03-19 1974-10-08 Northrop Corp Turn rate sensor
GB1455046A (en) * 1974-07-19 1976-11-10 Shell Int Research Arrangement and method for measuring the rate-of-turn of a ship
GB1540279A (en) * 1977-06-27 1979-02-07 Ferranti Ltd Turn sensitive devices
DE2845008A1 (de) * 1978-10-16 1980-04-30 Philips Patentverwaltung Beschleunigungsaufnehmer
US4381672A (en) * 1981-03-04 1983-05-03 The Bendix Corporation Vibrating beam rotation sensor
US4429248A (en) * 1981-05-27 1984-01-31 Statek Corporation Mounting apparatus and method for piezoelectric tuning fork
GB2111209B (en) * 1981-12-08 1986-03-19 Nat Res Dev Piezoelectric oscillatory gyroscopes
NO823684L (no) * 1982-01-21 1983-07-22 Watson Ind Inc Vinkelhastighetsensor.

Also Published As

Publication number Publication date
GB8411918D0 (en) 1984-06-13
DE3417858C2 (enrdf_load_stackoverflow) 1987-05-27
FR2564203A1 (fr) 1985-11-15
USRE33479E (en) 1990-12-11
GB2158579A (en) 1985-11-13
DE3417858A1 (de) 1985-11-21
GB2158579B (en) 1988-07-13

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