USRE33479E - Vibratory angular rate sensing system - Google Patents

Vibratory angular rate sensing system Download PDF

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Publication number
USRE33479E
USRE33479E US07/147,621 US14762188A USRE33479E US RE33479 E USRE33479 E US RE33479E US 14762188 A US14762188 A US 14762188A US RE33479 E USRE33479 E US RE33479E
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United States
Prior art keywords
tines
iaddend
iadd
fork
pair
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Expired - Lifetime
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US07/147,621
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English (en)
Inventor
William F. Juptner
David F. Macy
Juergen H. Staudte
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Piezoelectric Technology Investors Inc
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Piezoelectric Technology Investors Inc
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Priority claimed from US06/572,782 external-priority patent/US4538461A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks

Definitions

  • the present application may be considered to be an improvement and an extension of the principles of some of the present applicants' prior application entitled, "Angular Rate Sensor System,” to Alsenz, et al., Ser. No. 06/321,964, filed Nov. 16, 1981.
  • the present application is assigned to the same assignee as is the prior copending application.
  • the present application is also related to a copending application entitled, "Vibratory Angular Rate Sensor System,” to Staudte, Ser. No. 06/572,783, which is also assigned to the same assignee as is the present application.
  • the Staudte application has been filed concurrently with the present application and may be considered to be a different embodiment for the same purposes; that is, for minimizing undesired vibrations which may cause undesired noise.
  • the angular rate of motion of a craft is an essential input for all navigational and inertial guidance systems. Such systems are used conventionally for aircraft, spacecraft, ships, or missiles.
  • the sensing of the angular rate of motion is presently accomplished by means of a gyroscope.
  • Gyroscopes however, have various disadvantages. They must be built to extremely high accuracies and may have drift rates of fractions of a degree per hour. Due to the expense of building them, they are very costly; they are physically large and heavy. They must be frequently and precisely maintained, for the reason that critical movable elements, such as bearings, may change with time. They may also be damaged by even low levels of shock and vibration. This, in turn, may cause an increase of unknown size in the drift rate, occurring at unknown times.
  • gyroscopes are sensitive to the effects of shock and vibration, they frequently have heavy mounting configurations to protect them, which also are expensive.
  • a balanced resonant sensor Such a sensor is represented, in accordance with the present invention, by a tuning fork.
  • the tuning fork should be substantially mechanically temperature-stable, have low internal friction, and follow Hook's Law. According to Hook's Law, the strain of an elastic body is proportional to the stress to which the body is subjected by the applied load (the strain, however, must be within the elastic limit of the body), and the body will return to its original shape when the stress is removed.
  • the tuning fork consists of quartz.
  • other piezoelectric materials may be used, such as synthetic crystals; for example, ethylene diamine tartrate (EDT), dipotassium tartrate (DKT) or ammonium dihydrogen phosphate (ADP).
  • Non-piezoelectric materials may be used within an electromagnetic drive.
  • the angular rate sensing system of the invention is carved from a plate of Z-cut quartz, quartz being the preferred material. Since the plate has to be chemically etched or otherwise cut, for example by a laser beam or similar techniques, the orientation of the wafer is important, because etching along the Z-axis (that is, along the thickness of the wafer) is considerably faster and easier. Since a Z-cut quartz wafer has trigonal symmetry, the angle between, for example, a plus X and the next adjacent minus X direction is 60 degrees, the tines are oriented at such an angle of 60 degrees. In other words, the crystalline orientation permits a three-fold redundant choice of axis.
  • the structure consists basically of a frame within which is suspended, by two suspension bridges, a pair of tines, preferably at a 60 degree angle to each other.
  • a pivot extends through the symmetry axis of the tines and is secured to what may be called a dummy reaction mass.
  • a separate mass is secured to the free end of each tine but is offset from the axes of the tines.
  • the tines are vibrated, for example, electrically through electrodes driven by a drive oscillator substantially at the resonant frequency of the system, which is determined by the reaction mass, the two masses, the times, and the base of the tines.
  • a drive oscillator substantially at the resonant frequency of the system, which is determined by the reaction mass, the two masses, the times, and the base of the tines.
  • a second structure which includes two groups of tines, each group consisting of two pairs of tines disposed substantially in the shape of an X. One group of tines is driven in phase opposite to the other.
  • FIG. 1 is an isometric view of one configuration of the vibratory sensing system of the invention, including one pair of tines, the wafer orientation being shown adjacent to the structure;
  • FIG. 2 is a schematic picture of the quartz crystalline orientation
  • FIG. 3 is a cross-sectional view taken on lines 3--3 of one of the tines to show the position of the drive electrodes and a drive oscillator with the wafer orientation shown with respect to the section;
  • FIG. 4 is a similar cross-sectional view taken on lines 4--4 of the pivot of the system, showing two pairs of output electrodes connected to an output circuit, the crystal orientation also being shown adjacent to FIG. 4;
  • FIG. 5 is a plan view of another preferred modification of the invention, comprising two groups of two pairs of tines each;
  • FIG. 6a is a cross-sectional view taken along lines 6a--6a of FIG. 5 through one of the tines of one pair of the first group of tines and showing two pairs of electrodes disposed thereon;
  • FIG. 6b is a cross-sectional view taken along lines 6b--6b of FIG. 5 of a tine of a pair of tines of the second group, to show the four drive electrodes for a pair of the second group of tines;
  • FIG. 6c is a schematic circuit diagram showing how the first set of four electrodes is driven in phase opposition to the second sets of drive electrodes of the second group of tines.
  • FIG. 7 is a cross-sectional view taken along lines 7--7 of FIG. 5 showing two pairs of electrodes for obtaining the output signal and an output circuit connected thereto.
  • the embodiment includes a mounting frame 10 which preferably consists of a Z-cut wafer of quartz.
  • the wafer orientation has been shown adjacent to the frame 10 with the +X, +Y, and +Z directions.
  • FIG. 2 illustrates the trigonal symmetry of the quartz crystal. It will be evident that the +X direction shown at 11 and the next adjacent -X direction 12 form an angle of 60 degrees with each other, etc. Accordingly, the two tines 14 and 15 of the system are disposed substantially at an angle of 60 degrees, starting from their base 16.
  • pivot 17 which extends along the symmetry axis between the two tines 14 and 15.
  • One end of the pivot 17 is secured to what may be called a dummy reaction mass 20.
  • a mass 21 is secured to the tine 14 at an offset angle with respect to the axis of the tine 14.
  • a like mass 22 is similarly connected to the other tine 15.
  • the entire system, including the tines 14, 15, the base 16, the masses 21, 22, the pivot 17, and the dummy mass 20 are disposed within an opening 25 of the frame 10. Furthermore, this system is secured to the frame 25 by a pair of suspension or support bridges 26 and 27. There are further provided pivot support or bridge extensions 28 and 30 which connect the system to the two suspension bridges 26 and 27.
  • the short side of the rectangular frame 10 may have a length of 0.400 inch, and the long side may have a length of 0.575 inch, the wafer having a thickness of 0.020 inch.
  • these dimensions may change according to practical requirements, or the properties of the materials used.
  • the resonant system is driven by a first set of two drive electrodes 31 and 32 and a second set of drive electrodes 34 and 35, as shown in FIG. 3.
  • the electrodes 31, 32 and 34, 35 are connected to each other and across a drive oscillator 36. It will be understood that both drive tines 14 and 15 are excited as illustrated in FIG. 3.
  • the electrodes 34, 35 are disposed along the Z-axis and the electrodes 31, 32 are arranged along the X-axis.
  • the frequency of the drive oscillator 36 should be approximately that of the resonant system including the reaction mass 20, the masses 22, the tines 14, 15 and the base 16.
  • the output signal is obtained from the pivot 17, again by means of two pairs of electrodes as shown in FIG. 4.
  • a first pair of electrodes 40, 41, and a second pair of electrodes 42, 43 Both pairs of electrodes are arranged along the Z-axis, as shown by the cross-section of FIG. 1. Electrodes 41 and 42 are connected together, while electrodes 40 and 43 are connected together and across an output circuit 45.
  • the output circuit may be entirely conventional, to derive a signal representative of the input force.
  • the system responds only to rotation in the input plane and not to other rotations or to linear acceleration such as caused by gravity. On the other hand, the system requires an extremely precise mass balance.
  • the voltage-strain relationship varies with the orientation of the surface relative to the geometric axis system, as shown in FIGS. 1 and 2.
  • a balance of the system is achieved by designing the structure in approximately the shape of a tuning fork.
  • a portion of the surface of the structure of FIG. 1 may be covered with a gold film which may be removed partially by a laser, or by etching, to obtain complete mass balance. This will provide an inherent geometric drive balance and a reaction inertia to the output torque which substantially avoids transferring energy to the mounting frame. This, of course, makes the system more efficient and also immune to environmental influence.
  • the system resonates at a frequency which is related to the inertia of the masses of tines and the stiffness of the tines. Because quartz inherently has a piezoelectric effect, electrical excitation of the system electrodes results in a strain of the tines.
  • the polarities of the electrodes are such that the tines resonate in mechanical opposition. In other words, the ends of the tines at one time approach each other and in some instant later move away from each other.
  • the structure since the stiffness of the tines in the perpendicular or Z direction is much higher than that in the X or Y direction, the structure resonates only within the plane of the tines; that is, in the X-Y plane.
  • the system operates as follows: A constant rotation rate in inertial space about the input axis produces a Coriolis torque couple, attempting to rotate the structure in phase with the mass-drive velocity.
  • the input axis may be defined by the intersection of the plane of the tines and the plane of symmetry of the tines. In other words, it may be considered to pass through the center of the pivot 17. The torque is transmitted to the pivot 17.
  • the torsional stiffness of the pivot and the rotational inertia of the mass and the tines about the input axis provide a rotational resonant system.
  • the drive frequency is established at or near the resonant frequency of the system.
  • the pivot strain resulting from the Coriolis torque is enhanced by a factor as much as the Q of the pivot system.
  • the output electrodes 40 to 43 disposed on the pivot 17 pick up a reciprocating charge of amplitude proportional to the torsional strain. This, in turn, is proportional to the Coriolis torque, which, finally, is proportional to the input inertial rotation rate.
  • the drive tines 14 and 15 are not disposed parallel to each other, but form an angle of approximately 60 degrees. This enhances the piezoelectric coupling of the drive electrodes.
  • the inherent axial thrust at the fundamental drive frequency can cause large fundamental and small harmonic thrust components, which can cause energy loss to the mounting frame 10.
  • the masses 21, 22 move in arcs controlled by an appropriate offset thereof from the time axes, the fundamental thrust component is substantially cancelled.
  • the vibrating system includes a first group of two pairs of tines 53 and a second group of vibrating tines 54.
  • the first group 53 has a first pair of tines 55, 56 and a second pair of tines 57, 58.
  • the two pairs of tines 55, 56 and 57, 58 each form, again, an angle of about 60 degrees, with the two pairs of tines having approximately the configuration of an X.
  • Offset masses 60, 61 are associated in an offset direction with the two tines 55, 56 similar to the masses 21, 22 of FIG. 1, and similarly offset masses 62, 63 are secured, respectively, to the tines 57, 58.
  • a pivot 65 extends through the axis of symmetry of the first group of tines 53.
  • the second group of tines 54 is identical to that of the first group of tines, and corresponding elements have been designated with the same reference numbers, primed, as the first group of tines.
  • the first group of tines 53 is made integral with the frame 50 by a suspension bridge 66, while 66' designates the respective suspension bridge for the second group of tines 54.
  • the two suspension bridges 66 and 66' pass through the center point 67 or 67' of each two pairs of tines.
  • the structure of FIG. 5 may have a width of 0.500 inch in the Y direction, a length of 1.080 inch in the X direction, and a thickness in the Z direction of 0.020 inch.
  • FIGS. 6a and 6b there are illustrated the drive electrodes for each group of tines 53 and 54 (shown in FIG. 5). In order not to confuse the drawings only one tine 55 and 55' of each group is illustrated in FIGS. 6a and 6b.
  • the tines 55, 56 and masses 60, 61 are driven in the same manner as the tines 57, 58 and masses 62, 63.
  • a pair of electrodes 70, 71 and 72, 73 is provided on each of the tines.
  • the electrodes 70, 71 are connected together, as are the other electrodes 72, 73, to form output leads 82.
  • a drive oscillator 80 has its terminals connected by leads 82 across the first two pairs of electrodes 70, 71 and 72, 73, and by leads 83 across the second two pairs of electrodes 74, 75 and 76, 77 opposite in phase to the first pairs.
  • the tines of the group 54 are driven in phase opposition to the tines of group 53.
  • the output signal is picked up from the pivot 65 by the electrodes illustrated in FIG. 7 in a manner similar to that shown in connection with FIG. 3.
  • the support bridges 26 and 27 of FIG. 1 and the bridges 66 and 66' of FIG. 5 have a flexural and torsional stiffness which is small compared to that of the respective pivot 17 and tines 14, 15, or the pivot 65 and tines 55, 56 and 57, 58 and the corresponding tines of group 54. Furthermore, the support masses are so small that the flexural resonant frequency is substantially the same as the drive and torsion frequency. As a result, the supports such as 26, 27 and 66, 66' present a resonant load on the rotational motions of the sensor which is even less than the static stiffness by a factor of the Q of the support resonance. This, of course, results in a high isolation of the sensor from the outside environment, which is very desirable.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
US07/147,621 1984-01-23 1988-01-22 Vibratory angular rate sensing system Expired - Lifetime USRE33479E (en)

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Application Number Priority Date Filing Date Title
US07/147,621 USRE33479E (en) 1984-01-23 1988-01-22 Vibratory angular rate sensing system

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US06/572,782 US4538461A (en) 1984-01-23 1984-01-23 Vibratory angular rate sensing system
GB08411918A GB2158579B (en) 1984-01-23 1984-05-10 Angular rate sensor system
DE19843417858 DE3417858A1 (de) 1984-01-23 1984-05-14 Winkelgeschwindigkeits-fuehlsystem
FR848407427A FR2564203B1 (fr) 1984-01-23 1984-05-14 Capteur de vitesse angulaire
US85947486A 1986-05-02 1986-05-02
US07/147,621 USRE33479E (en) 1984-01-23 1988-01-22 Vibratory angular rate sensing system

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US06/572,782 Reissue US4538461A (en) 1984-01-23 1984-01-23 Vibratory angular rate sensing system
US85947486A Continuation 1984-01-23 1986-05-02

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US (1) USRE33479E (enrdf_load_stackoverflow)
DE (1) DE3417858A1 (enrdf_load_stackoverflow)
FR (1) FR2564203B1 (enrdf_load_stackoverflow)
GB (1) GB2158579B (enrdf_load_stackoverflow)

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US5251483A (en) * 1989-02-27 1993-10-12 Swedish Ordnance-Ffv/Bofors Ab Piezoelectric sensor element intended for a gyro
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5357817A (en) * 1990-04-19 1994-10-25 Charles Stark Draper Laboratory, Inc. Wide bandwidth stable member without angular accelerometers
US5388458A (en) * 1992-11-24 1995-02-14 The Charles Stark Draper Laboratory, Inc. Quartz resonant gyroscope or quartz resonant tuning fork gyroscope
US5408119A (en) * 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5408877A (en) * 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5426970A (en) * 1993-08-02 1995-06-27 New Sd, Inc. Rotation rate sensor with built in test circuit
US5473945A (en) * 1990-02-14 1995-12-12 The Charles Stark Draper Laboratory, Inc. Micromechanical angular accelerometer with auxiliary linear accelerometer
US5535902A (en) * 1993-02-10 1996-07-16 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope
US5581035A (en) * 1994-08-29 1996-12-03 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode
US5605598A (en) * 1990-10-17 1997-02-25 The Charles Stark Draper Laboratory Inc. Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency
US5635639A (en) * 1991-09-11 1997-06-03 The Charles Stark Draper Laboratory, Inc. Micromechanical tuning fork angular rate sensor
US5646348A (en) 1994-08-29 1997-07-08 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode and fabrication technique therefor
US5650568A (en) 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
US5725729A (en) * 1994-09-26 1998-03-10 The Charles Stark Draper Laboratory, Inc. Process for micromechanical fabrication
US5767405A (en) 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
US5783973A (en) 1997-02-24 1998-07-21 The Charles Stark Draper Laboratory, Inc. Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
US5817942A (en) * 1996-02-28 1998-10-06 The Charles Stark Draper Laboratory, Inc. Capacitive in-plane accelerometer
US5892153A (en) * 1996-11-21 1999-04-06 The Charles Stark Draper Laboratory, Inc. Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US5911156A (en) 1997-02-24 1999-06-08 The Charles Stark Draper Laboratory, Inc. Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
US5952574A (en) 1997-04-29 1999-09-14 The Charles Stark Draper Laboratory, Inc. Trenches to reduce charging effects and to control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US6105426A (en) 1997-12-18 2000-08-22 Fujitsu Limited Tuning fork type vibration element and tuning fork type vibration gyro
US6189381B1 (en) 1999-04-26 2001-02-20 Sitek, Inc. Angular rate sensor made from a structural wafer of single crystal silicon
US6230563B1 (en) 1998-06-09 2001-05-15 Integrated Micro Instruments, Inc. Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability
US20040083812A1 (en) * 2002-11-04 2004-05-06 Toshihiko Ichinose Z-axis vibration gyroscope
US7051590B1 (en) 1999-06-15 2006-05-30 Analog Devices Imi, Inc. Structure for attenuation or cancellation of quadrature error
US8187902B2 (en) 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same

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DE3884481T2 (de) * 1987-07-10 1994-04-28 Nippon Denki Home Electronics Oszillierender Kreisel.
EP0461761B1 (en) * 1990-05-18 1994-06-22 British Aerospace Public Limited Company Inertial sensors
DE4022495A1 (de) * 1990-07-14 1992-01-23 Bosch Gmbh Robert Mikromechanischer drehratensensor
DE4032559C2 (de) * 1990-10-13 2000-11-23 Bosch Gmbh Robert Drehratensensor und Verfahren zur Herstellung
JP3144600B2 (ja) 1992-10-19 2001-03-12 日本電信電話株式会社 光振動ジャイロ
DE4336004C2 (de) * 1993-10-21 1998-05-28 Siemens Ag Schwingungsgyroskop
DE4428405A1 (de) * 1994-08-11 1996-02-15 Karlsruhe Forschzent Drehratensensor
JPH0894362A (ja) * 1994-09-20 1996-04-12 Yoshiro Tomikawa 振動型ジャイロスコープ
DE19525217A1 (de) * 1995-07-11 1997-01-16 Teves Gmbh Alfred Erfassung und Auswertung von sicherheitskritischen Meßgrößen
DE19528961C2 (de) * 1995-08-08 1998-10-29 Daimler Benz Ag Mikromechanischer Drehratensensor (DRS) und Sensoranordnung
DE19621320A1 (de) * 1996-05-28 1997-12-11 Teves Gmbh Alfred Anordnung zur Erfassung und Auswertung von Gierbewegungen
JP3752737B2 (ja) * 1996-08-12 2006-03-08 トヨタ自動車株式会社 角速度検出装置
FR2789171B1 (fr) 1999-02-01 2001-03-02 Onera (Off Nat Aerospatiale) Structure monolithique de gyrometre vibrant

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US5635739A (en) * 1990-02-14 1997-06-03 The Charles Stark Draper Laboratory, Inc. Micromechanical angular accelerometer with auxiliary linear accelerometer
US5473945A (en) * 1990-02-14 1995-12-12 The Charles Stark Draper Laboratory, Inc. Micromechanical angular accelerometer with auxiliary linear accelerometer
US5357817A (en) * 1990-04-19 1994-10-25 Charles Stark Draper Laboratory, Inc. Wide bandwidth stable member without angular accelerometers
US5760305A (en) 1990-10-17 1998-06-02 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency
US5408119A (en) * 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5605598A (en) * 1990-10-17 1997-02-25 The Charles Stark Draper Laboratory Inc. Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency
US5969250A (en) 1990-10-17 1999-10-19 The Charles Stark Draper Laboratory, Inc. Micromechanical accelerometer having a peripherally suspended proof mass
US5507911A (en) 1990-10-17 1996-04-16 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
US5505084A (en) * 1991-09-11 1996-04-09 The Charles Stark Draper Laboratory, Inc. Micromechanical tuning fork angular rate sensor
US5635639A (en) * 1991-09-11 1997-06-03 The Charles Stark Draper Laboratory, Inc. Micromechanical tuning fork angular rate sensor
US5408877A (en) * 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5515724A (en) * 1992-03-16 1996-05-14 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5496436A (en) * 1992-04-07 1996-03-05 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro fabrication method
US5767405A (en) 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5388458A (en) * 1992-11-24 1995-02-14 The Charles Stark Draper Laboratory, Inc. Quartz resonant gyroscope or quartz resonant tuning fork gyroscope
US5555765A (en) * 1993-02-10 1996-09-17 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope
US5535902A (en) * 1993-02-10 1996-07-16 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope
US5650568A (en) 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
US5426970A (en) * 1993-08-02 1995-06-27 New Sd, Inc. Rotation rate sensor with built in test circuit
US5581035A (en) * 1994-08-29 1996-12-03 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode
US5646348A (en) 1994-08-29 1997-07-08 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode and fabrication technique therefor
US5725729A (en) * 1994-09-26 1998-03-10 The Charles Stark Draper Laboratory, Inc. Process for micromechanical fabrication
US5817942A (en) * 1996-02-28 1998-10-06 The Charles Stark Draper Laboratory, Inc. Capacitive in-plane accelerometer
US5892153A (en) * 1996-11-21 1999-04-06 The Charles Stark Draper Laboratory, Inc. Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US5911156A (en) 1997-02-24 1999-06-08 The Charles Stark Draper Laboratory, Inc. Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
US5783973A (en) 1997-02-24 1998-07-21 The Charles Stark Draper Laboratory, Inc. Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
US5952574A (en) 1997-04-29 1999-09-14 The Charles Stark Draper Laboratory, Inc. Trenches to reduce charging effects and to control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US6105426A (en) 1997-12-18 2000-08-22 Fujitsu Limited Tuning fork type vibration element and tuning fork type vibration gyro
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US6189381B1 (en) 1999-04-26 2001-02-20 Sitek, Inc. Angular rate sensor made from a structural wafer of single crystal silicon
US7051590B1 (en) 1999-06-15 2006-05-30 Analog Devices Imi, Inc. Structure for attenuation or cancellation of quadrature error
US20040083812A1 (en) * 2002-11-04 2004-05-06 Toshihiko Ichinose Z-axis vibration gyroscope
US6823733B2 (en) 2002-11-04 2004-11-30 Matsushita Electric Industrial Co., Ltd. Z-axis vibration gyroscope
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Also Published As

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GB2158579A (en) 1985-11-13
GB8411918D0 (en) 1984-06-13
DE3417858C2 (enrdf_load_stackoverflow) 1987-05-27
FR2564203A1 (fr) 1985-11-15
GB2158579B (en) 1988-07-13
FR2564203B1 (fr) 1989-12-15
DE3417858A1 (de) 1985-11-21

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