FR2552094B1 - Matiere polymere radiosensible, son procede de preparation et son utilisation pour la fabrication de supports pour l'execution de traces - Google Patents

Matiere polymere radiosensible, son procede de preparation et son utilisation pour la fabrication de supports pour l'execution de traces

Info

Publication number
FR2552094B1
FR2552094B1 FR8413733A FR8413733A FR2552094B1 FR 2552094 B1 FR2552094 B1 FR 2552094B1 FR 8413733 A FR8413733 A FR 8413733A FR 8413733 A FR8413733 A FR 8413733A FR 2552094 B1 FR2552094 B1 FR 2552094B1
Authority
FR
France
Prior art keywords
tracks
execution
supports
manufacture
preparation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8413733A
Other languages
English (en)
Other versions
FR2552094A1 (fr
Inventor
Frithjof Asmussen
Peter Quis
Winfried Wunderlich
Wolfram Schnabel
Hideto Sotobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Roehm GmbH Darmstadt
Original Assignee
Roehm GmbH Darmstadt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Roehm GmbH Darmstadt filed Critical Roehm GmbH Darmstadt
Publication of FR2552094A1 publication Critical patent/FR2552094A1/fr
Application granted granted Critical
Publication of FR2552094B1 publication Critical patent/FR2552094B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C71/00—After-treatment of articles without altering their shape; Apparatus therefor
    • B29C71/04—After-treatment of articles without altering their shape; Apparatus therefor by wave energy or particle radiation, e.g. for curing or vulcanising preformed articles
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10—Esters
    • C08F220/12—Esters of monohydric alcohols or phenols
    • C08F220/14—Methyl esters, e.g. methyl (meth)acrylate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2033/00—Use of polymers of unsaturated acids or derivatives thereof as moulding material
    • B29K2033/04—Polymers of esters
    • B29K2033/12—Polymers of methacrylic acid esters, e.g. PMMA, i.e. polymethylmethacrylate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Materials For Photolithography (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Polymerisation Methods In General (AREA)
  • Formation Of Insulating Films (AREA)
FR8413733A 1983-09-20 1984-09-06 Matiere polymere radiosensible, son procede de preparation et son utilisation pour la fabrication de supports pour l'execution de traces Expired FR2552094B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19833333861 DE3333861A1 (de) 1983-09-20 1983-09-20 Strahlungsempfindliches polymermaterial

Publications (2)

Publication Number Publication Date
FR2552094A1 FR2552094A1 (fr) 1985-03-22
FR2552094B1 true FR2552094B1 (fr) 1986-12-26

Family

ID=6209529

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8413733A Expired FR2552094B1 (fr) 1983-09-20 1984-09-06 Matiere polymere radiosensible, son procede de preparation et son utilisation pour la fabrication de supports pour l'execution de traces

Country Status (7)

Country Link
US (1) US4581401A (fr)
JP (1) JPS6088014A (fr)
BE (1) BE900505A (fr)
DE (1) DE3333861A1 (fr)
FR (1) FR2552094B1 (fr)
GB (1) GB2148309B (fr)
NL (1) NL8402860A (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61272206A (ja) * 1985-05-28 1986-12-02 Asahi Chem Ind Co Ltd 耐熱分解性に優れたメタクリル樹脂の製造法
JPS61272215A (ja) * 1985-05-29 1986-12-02 Asahi Chem Ind Co Ltd 耐熱耐溶剤性アクリル共重合体の製造方法
JPS624706A (ja) * 1985-06-29 1987-01-10 Sunstar Giken Kk アルコキシシリル基含有縮合性マクロモノマ−
JPS6366211A (ja) * 1986-09-05 1988-03-24 Sunstar Giken Kk ジヒドロキシル基含有縮合性マクロモノマ−
JPS6363706A (ja) * 1986-09-04 1988-03-22 Sunstar Giken Kk ジカルボキシル基含有縮合性マクロモノマ−
FR2672539B1 (fr) * 1991-02-12 1993-12-31 Commissariat A Energie Atomique Procede pour modifier les proprietes de conductivite electrique d'un polymere organique par irradiation au moyen d'un rayonnement synchrotron.
US6010826A (en) * 1994-10-13 2000-01-04 Nippon Zeon Co., Ltd. Resist composition
JP2016186028A (ja) * 2015-03-27 2016-10-27 日本合成化学工業株式会社 （メタ）アクリル系樹脂の製造方法
WO2021161993A1 (fr) * 2020-02-12 2021-08-19 株式会社クラレ Composition durcissable et objet durci l'utilisant

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE603339A (fr) * 1960-05-04 1900-01-01
NL278772A (fr) * 1961-06-06
DE1745323A1 (de) * 1967-02-24 1971-08-26 Roehm Gmbh Verfahren zur Herstellung vernetzter Formkoerper
US3772258A (en) * 1971-10-13 1973-11-13 Texaco Inc Process for the polymerization of acrylic acid esters
US3978022A (en) * 1974-07-08 1976-08-31 Rohm And Haas Company Thermal stabilization of acrylic polymers
US4246382A (en) * 1977-11-11 1981-01-20 Asahi Kasei Kogyo Kabushiki Kaisha Solvent resistent acrylic resin and process for producing the same
US4152506A (en) * 1978-04-26 1979-05-01 E. I. Du Pont De Nemours And Company Preparation of thermoformable methyl methacrylate sheets
JPS55133035A (en) * 1979-04-02 1980-10-16 Matsushita Electric Ind Co Ltd Electron sensitive resin material
US4289842A (en) * 1980-06-27 1981-09-15 Eastman Kodak Company Negative-working polymers useful as electron beam resists

Also Published As

Publication number Publication date
GB2148309B (en) 1986-12-17
DE3333861A1 (de) 1985-04-04
GB2148309A (en) 1985-05-30
NL8402860A (nl) 1985-04-16
FR2552094A1 (fr) 1985-03-22
US4581401A (en) 1986-04-08
BE900505A (fr) 1985-01-02
JPS6088014A (ja) 1985-05-17
GB8423864D0 (en) 1984-10-24

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Legal Events

Date Code Title Description
ST Notification of lapse